CN218079464U - Cleaning device, connecting tube assembly and crystal growth equipment - Google Patents

Abstract

The utility model discloses a cleaning device, a connecting tube component and crystal growth equipment, wherein the cleaning device comprises a fixing part, a cleaning part and a first driving part, and the fixing part is suitable for being fixedly arranged at one end of a second branch far away from the first branch; the cleaning component comprises a connecting rod, a bearing table and a scraper, the connecting rod penetrates through the fixing piece, the bearing table and the scraper are arranged at intervals along the axial direction of the connecting rod, the scraper is provided with a hollow part, the scraper is positioned on one side of the bearing table, which is far away from the fixing piece, and is used for cleaning at least the inner wall surface of the first branch, and the bearing table is used for bearing at least part of attachments removed by the scraper; the first driving part is arranged on the fixing part and is used for driving the connecting rod to move along the axial direction of the connecting rod. According to the utility model discloses a cleaning device can improve the cleaning ability to the pipeline, practices thrift the cleaning time, and the extension cleans the cycle to the pipeline, has avoided the production loss that the pipeline blockked up to cause simultaneously.

Description

Cleaning device, connecting tube assembly and crystal growth equipment

Technical Field

The utility model belongs to the technical field of the pipeline technique and specifically relates to a cleaning device, connecting tube subassembly and crystal growth equipment are related to.

Background

In the related art, in the crystal growth process, the crystal growth equipment generally works in a vacuum state, and in a high-temperature environment, process gas is required to protect or react in a furnace body, so that continuous evacuation operation needs to be performed on the crystal growth equipment by using a vacuum pump; however, during the evacuation operation, a large amount of reaction volatile matters enter the discharge pipeline, and the discharge pipeline is located outside the furnace body and is in contact with the external environment, so that the temperature in the discharge pipeline is low, and the temperature of the high-temperature reaction volatile matters is sharply reduced when the reaction volatile matters are discharged or enter the discharge pipeline, so that the condensation and solidification of the reaction volatile matters can be caused at the inlet of the discharge pipeline; when the evacuation operation is continued for a long time, the solidified deposits can thin or block the pipeline, resulting in pressure variation and process gas flow variation in the furnace, which affects the quality yield of the crystals.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a cleaning device, cleaning device can improve the cleaning power to the pipeline, practices thrift the cleaning time, and the extension cleans the cycle to the pipeline, has avoided the production loss that the pipeline blockked up to cause simultaneously.

The utility model discloses still provide a connecting pipe subassembly that has above-mentioned cleaning device.

The utility model also provides a crystal growth equipment of having above-mentioned connecting tube subassembly.

According to the utility model discloses cleaning device of first aspect embodiment, cleaning device is used for cleaning the internal face of pipeline, the pipeline includes first branch road, second branch road and third branch road, first branch road with the coaxial setting of second branch road, the third branch road with first branch road with the second branch road all communicates, cleaning device includes: the fixing piece is suitable for being fixedly arranged at one end of the second branch far away from the first branch; the cleaning component comprises a connecting rod, a bearing table and a scraper, the connecting rod penetrates through the fixing piece, the bearing table and the scraper are arranged at intervals along the axial direction of the connecting rod, the scraper is provided with a hollow part, the scraper is positioned on one side of the bearing table, which is far away from the fixing piece, and is used for at least cleaning the inner wall surface of the first branch, and the bearing table is used for bearing at least part of attachments removed by the scraper; the first driving part is arranged on the fixing part and is used for driving the connecting rod to move along the axial direction of the connecting rod.

According to the utility model discloses cleaning device, clean the part and include the connecting rod through the setting, plummer and shovel except that the ware, shovel except that the ware is used for shoveling the attachment of pipeline internal face, the plummer is used for bearing the at least part of the attachment that the ware got rid of, be convenient for make the attachment on the plummer arrange to the pipeline smoothly through above-mentioned branch road outside, make things convenient for the concentrated clearance of attachment, discharge, the efficiency of cleaning of pipeline has been improved, practice thrift the single time and clean the time, the production loss that the pipeline jam caused has been avoided, the time of cleaning to the pipeline has been delayed simultaneously, thereby the cycle of cleaning of extension pipeline, the big cycle of board has been prolonged, the operating time of single unit has been increased.

In some embodiments, the bearing platform is arranged at one end of the connecting rod adjacent to the shovel, a plurality of connecting pieces are arranged between the bearing platform and the shovel, and the connecting pieces are arranged at intervals along the circumferential direction of the connecting rod.

In some embodiments, the cross-sectional area of the connector is less than the cross-sectional area of the link.

In some embodiments, the shovels are formed in a ring shape.

In some embodiments, the first drive component comprises: a first driver; the telescopic mechanism is connected with the first driver and the cleaning component, and the telescopic mechanism can be telescopically deformed in the axial direction of the second branch.

In some embodiments, the sweeping device further comprises an adaptor and a second driving part, the second driving part is used for driving the sweeping part to rotate around the axial direction of the connecting rod, the adaptor is in pivot fit with the connecting rod, the second driving part is connected with the adaptor through a sealing magnetic fluid, the sealing magnetic fluid is used for sealing a gap between the adaptor and the second driving part, the second driving part directly drives the sweeping part to rotate, and the first driving part indirectly drives the sweeping part to move through the adaptor.

In some embodiments, the sweeping device further comprises: the telescopic sealing piece is sleeved on the connecting rod and located at the part, deviating from one side of the bearing platform, of the fixing piece, and the two ends of the telescopic sealing piece are respectively in sealing connection with the end, far away from the bearing platform, of the connecting rod and the fixing piece.

According to the utility model discloses connecting pipe subassembly of second aspect embodiment includes: the pipeline comprises a first branch, a second branch and a third branch, the first branch and the second branch are coaxially arranged, and the third branch is communicated with the first branch and the second branch; cleaning device, cleaning device is according to the utility model discloses above-mentioned first aspect embodiment cleaning device, cleaning device set firmly in the second branch road just is used for cleaning at least the internal face of first branch road.

According to the utility model discloses connecting tube subassembly through adopting foretell cleaning device, can avoid the safety risk that the pipeline blockked up and cause effectively.

In some embodiments, the first branch and the second branch are vertically disposed, the first branch is disposed on an upper side of the second branch, the pipeline further includes a fourth branch, the fourth branch is communicated with the second branch and extends downward, and the attachments carried by the carrier platform are suitable for being discharged through the fourth branch.

According to the utility model discloses crystal growth equipment of third aspect embodiment includes: a furnace body formed with an exhaust port; a connecting pipe assembly, the connecting pipe assembly is according to the utility model discloses the connecting pipe assembly of above-mentioned second aspect embodiment, keeping away from of first branch road the one end of second branch road communicate in the gas vent, the third branch road with the evacuating device of crystal growth equipment links to each other.

According to the utility model discloses crystal growth equipment through adopting foretell connecting tube subassembly, has improved crystal growth equipment's security.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

fig. 1 is a schematic view of a connector tube assembly according to an embodiment of the present invention;

figure 2 is another schematic view of the junction block assembly shown in figure 1.

Reference numerals:

a connecting tube assembly 200, a first branch 101, a second branch 102, a limiting member 1021, a third branch 103, a fourth branch 104, a,

A cleaning device 100,

A fixing piece 1,

Cleaning member 2, link 21, platform 22, scraper 23, hollow 231,

A first driving member 3, a first driver 31, a telescopic mechanism 32,

The device comprises a connecting piece 4, an adapter piece 5, a second driving part 6, a telescopic sealing piece 7 and a sealing magnetic fluid 8.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

The following disclosure provides many different embodiments, or examples, for implementing different features of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present disclosure provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize the applicability of other processes and/or the use of other materials.

Next, referring to the drawings, a cleaning device 100 according to an embodiment of the present invention is described, in which the cleaning device 100 is used for cleaning an inner wall surface of a pipeline, the pipeline includes a first branch 101, a second branch 102 and a third branch 103, the first branch 101 and the second branch 102 are coaxially disposed, and the third branch 103 is communicated with the first branch 101 and the second branch 102.

As shown in fig. 1, the cleaning device 100 comprises a fixing member 1 and a cleaning component 2, wherein the fixing member 1 is adapted to be fixedly arranged at an end of the second branch 102 far away from the first branch 101, so as to realize the installation and fixation of the cleaning device 100; cleaning component 2 includes connecting rod 21, plummer 22 and scraper 23, fixing piece 1 is worn to locate by connecting rod 21, plummer 22 and scraper 23 set up along connecting rod 21's axial interval, scraper 23 has fretwork portion 231, scraper 23 is located one side that deviates from fixing piece 1 of plummer 22, and scraper 23 is used for cleaning the internal face of first branch way 101 at least, make scraper 23 can effectively scrape the attachment of first branch way 101 internal face, improve cleaning device 100's the ability of cleaning, practice thrift the single time and clean the time, avoid production loss or safety risk etc. that first branch way 101 blockked up and cause simultaneously.

It can be seen that, the cleaning device 100 effectively removes the attachments on the inner wall surface of the first branch 101, and the cleaning time of the first branch 101 is prolonged, so that the cleaning period of the first branch 101 is prolonged, the maintenance of the pipeline is facilitated, and when the pipeline needs to be cleaned, the pipeline does not need to be detached, and the cleaning device 100 is directly used for cleaning. It is understood that the cleaning device 100 can be always mounted to the first branch 101, which facilitates the cleaning device 100 not to be detached from the first branch 101 regardless of whether the cleaning device 100 is operated; of course, the cleaning device 100 may also be mounted to the first branch 101 when the pipeline needs cleaning.

For example, the cleaning member 2 may be used only for cleaning the first branch 101; alternatively, the cleaning member 2 is used to clean the first branch 101 and the second branch 102.

As shown in fig. 1 and fig. 2, the scraped attachments may fall to the bearing platform 22 through the hollow 231, and the bearing platform 22 is configured to bear at least a portion of the attachments removed by the scraper 23, so that the attachments on the bearing platform 22 are opposite to corresponding branches of the pipeline, such as the third branch 103 and/or a later-described fourth branch 104, during the movement of the bearing platform 22, and the attachments on the bearing platform 22 are smoothly discharged to the outside of the pipeline through the branches, so as to avoid the scraped attachments from blocking the pipeline again, facilitate the concentrated cleaning and discharging of the attachments, and improve the cleaning efficiency of the pipeline. For example, taking the cleaning apparatus 100 as an example for a crystal growth device, the first branch 101 may be communicated with an exhaust port of the crystal growth device, and gas in the crystal growth device may flow to the first branch 101 and flow to the third branch 103 through the exhaust port; when crystal growth equipment continues to find time the operation with the vacuum pump, the gas in the furnace body is discharged from the pipeline, and the attachment that is shoveled away can be along with the gas flow from third branch 103 outflow pipeline, makes things convenient for the clearance, the emission of attachment, has saved the step that needs clearance the attachment that is shoveled away on the plummer 22 simultaneously, can make to clean part 2 and continue to clean the pipeline, improves cleaning device 100's cleaning efficiency.

As shown in fig. 1, the cleaning device 100 further includes a first driving member 3, the first driving member 3 is disposed on the fixing member 1, and the first driving member 3 is used for driving the connecting rod 21 to move along the axial direction of the connecting rod 21, so that the connecting rod 21 drives the shoveling device 23 and the bearing table 22 to move along the axial direction of the connecting rod 21 in the first branch 101 and the second branch 102, the shoveling device 23 can shovel off the attachments on the inner wall surface of the pipeline in the moving process, thereby facilitating the squeezing and shoveling of the attachments, so as to at least shovel off the accumulated volatiles with a softer surface, and thus ensuring the cleaning of the inner wall surface of the pipeline.

It is to be understood that the first driving part 3 may include at least one of a manual driving part, an electric driving part, and the like.

In addition, under the driving of the first driving component 3, the shoveling device 23 and the carrying platform 22 move in the pipeline along the axial direction of the connecting rod 21 to shovel off the attachments on the inner wall surface of the pipeline, so that the outer contour shape of the shoveling device 23 can be adapted to the shape of the inner peripheral wall of the pipeline, and the distance between the outer contour of the shoveling device 23 and the inner peripheral wall of the pipeline can be specifically set according to actual requirements, for example, the distance between the outer contour of the shoveling device 23 and the inner peripheral wall of the pipeline is greater than 0 or equal to 0; similarly, the distance between the outer contour of the plummer 22 and the inner peripheral wall of the pipeline can be set according to actual requirements.

According to the utility model discloses cleaning device 100, it includes connecting rod 21 to clean part 2 through the setting, plummer 22 and shovel except that ware 23, shovel except that ware 23 is used for shoveling the attachment of pipeline internal face, plummer 22 is used for bearing the at least part of the attachment that shovel ware 23 got rid of, be convenient for make the attachment on the plummer 22 arrange to the pipeline smoothly through above-mentioned branch road outside, make things convenient for the concentrated clearance of attachment, discharge, the efficiency of cleaning of pipeline has been improved, practice thrift the single time and clean the time, the production loss of having avoided the pipeline to block up the cause, the time that cleans to the pipeline has been postponed simultaneously, thereby the cycle of cleaning of extension pipeline, the big clear cycle of board has been prolonged, the operating time of single platform has been increased.

In some embodiments, as shown in fig. 2, the carrying platform 22 is disposed at one end of the connecting rod 21 adjacent to the shoveling device 23, and the carrying platform 22 is disposed at one side of the shoveling device 23 close to the fixing member 1, and the connecting member 4 is disposed between the carrying platform 22 and the shoveling device 23, so that the carrying platform 22 and the shoveling device 23 are connected into a whole, and at the same time, the carrying platform 22 and the shoveling device 23 are conveniently spaced at a proper distance, so that the carrying platform 22 and the shoveling device 23 are conveniently spaced at a proper distance for accommodating removed attachments.

Wherein, connecting piece 4 is a plurality of, a plurality of connecting pieces 4 set up along connecting rod 21's circumference interval, can improve the structural stability who shovels except that 23, avoid shoveling except that 23 takes place to deflect in pipeline (for example first branch 101), thereby be convenient for guarantee to shovel except that 23 edge laminating pipeline's internal face, and then guarantee to shovel except that 23 shovels except that the attachment of pipeline internal face better, be convenient for further guarantee to have sufficient space between plummer 22 and the shovel 23 simultaneously and be used for holding the attachment that is shoveled, and be convenient for by the attachment of shoveling through the space discharge between two adjacent connecting pieces 4, in time discharge of the attachment that is shoveled in order to guarantee.

For example, in the example of fig. 1 and 2, the plurality of connecting pieces 4 are arranged at equal intervals along the circumferential direction of the connecting rod 21, so that on one hand, the cleaning stability of the cleaning assembly 2 can be improved, and the attachments can be conveniently and smoothly discharged, and on the other hand, it is further ensured that the arrangement of the connecting pieces 4 does not affect the normal use of the pipeline, that is, the cleaning device 100 can still clean the pipeline during the use of the pipeline, and does not affect the functions of exhausting and the like of the pipeline.

In some embodiments, as shown in fig. 1, the cross-sectional area of the connecting member 4 is smaller than the cross-sectional area of the connecting rod 21, so as to ensure that a plurality of connecting members 4 are reliably disposed between the carrying platform 22 and the shoveling device 23, and at the same time, while ensuring sufficient structural strength of the connecting members 4, the cross-sectional area of the connecting members 4 is reduced, and the area of the carrying platform 22 for carrying shoveled attachments is increased, so that the carrying platform 22 can carry more attachments, so as to prolong the one-way sweeping stroke of the connecting rod 21 and improve sweeping efficiency.

For example, in the example of fig. 1 and 2, the connecting member 4 connects the edge of the carrier table 22 and the edge of the scraper 23, and a plurality of connecting members 4 are provided at intervals around one turn of the scraper 23.

In some embodiments, as shown in fig. 1, the shoveling device 23 is formed in an annular shape, so that the shoveling device 23 can better fit the inner wall surface of the pipeline, the shoveling device 23 can shovel the inner wall surface of the pipeline for one circle in the circumferential direction, the efficiency of the shoveling device 23 in shoveling attachments is improved, and the cleaning time of the cleaning device 100 is saved.

It will be appreciated that the corresponding annular configuration of the scooper 23 may be adapted to the cross-sectional shape of the conduit. For example, if the cross-sectional shape of the pipe is circular, the scraper 23 is formed in a circular shape; for another example, if the cross-sectional shape of the pipe is a polygonal ring, the scraper 23 is formed as a polygonal ring.

Optionally, the distance between the outer contour of the bearing platform 22 and the inner peripheral wall of the pipeline is larger than the distance between the outer contour of the shovel 23 and the inner peripheral wall of the pipeline, so as to facilitate smooth discharge of gas flowing through the pipeline in the cleaning process; if the pipeline is connected with an air suction device such as a vacuum device, the smooth air suction is ensured.

In some embodiments, as shown in fig. 1, the first driving member 3 includes a first driver 31 and a telescopic mechanism 32, for example, the first driver 31 may be a power device such as a motor, but is not limited thereto, and may also be manually operated; the telescopic mechanism 32 is connected to the first driver 31 and the cleaning component 2, and the telescopic mechanism 32 can be telescopically deformed in the axial direction of the second branch 102, for example, the telescopic mechanism 32 may include a lead screw-nut mechanism, a rack and pinion mechanism, or a hydraulic mechanism, etc., and the telescopic mechanism 32 is telescopically deformed in the axial direction of the second branch 102 under the action of the first driver 31, so that the telescopic mechanism 32 drives the cleaning component 2 to move in the axial direction of the first branch 101 to clean the inner wall surface of the first branch 101.

In some embodiments, as shown in fig. 1 and fig. 2, the cleaning device 100 further includes an adaptor 5 and a second driving member 6, the second driving member 6 is configured to drive the cleaning member 2 to rotate along a circumferential direction of the connecting rod 21, so that the scraper 23 rotates around an axial direction of the connecting rod 21, and thus the scraper 23 having the hollow portion 231 rotates to at least scrape off the adhering substance on the inner wall surface of the first branch 101, so as to achieve rotary scraping of the adhering substance, particularly to a volatile substance which adheres to the inner wall surface of the pipeline more firmly, and further improve the cleaning capability of the cleaning device 100.

The adaptor 5 is in pivot fit with the connecting rod 21, the second driving part 6 is connected with the adaptor 5 through a sealing magnetic fluid, the sealing magnetic fluid 8 is used for sealing a gap between the adaptor 5 and the second driving part 6, the second driving part 6 directly drives the cleaning part 2 to rotate, and the first driving part 3 indirectly drives the cleaning part 2 to move through the adaptor 5. From this, sealed magnetic current body 8 can be in order to realize the sealed of rotating part to guarantee the sealed between cleaning device 100 and the pipeline, be convenient for make cleaning device 100 still can clean the pipeline when the pipeline is in operating condition, in order to break the restriction to cleaning the process, make cleaning device 100 use more nimble.

For example, in the example of fig. 1, the sealing magnetic fluid 8 is fixed on the connecting member 5, the second driving member 6 is fixed on the sealing magnetic fluid 8, and the second driving member 6 is located on a side (e.g., a lower side in fig. 1) of the adaptor 5 away from the connecting rod 21, the adaptor 5 is pivotally engaged with the connecting rod 21, and the second driving member 6 is connected with the connecting rod 21 to drive the connecting rod 21 to rotate, so that the connecting rod 21 rotates the sweeping member 2; adaptor 5 links to each other with first driver part 3, and first driver part 3 drives adaptor 5 along connecting rod 21 axial displacement to drive connecting rod 21 through adaptor 5 and remove in order to realize cleaning the axial displacement of part 2 in first branch 101 and second branch 102, and then realize cleaning the axial displacement of part 2 along first branch 101 and around the axial rotation of first branch 101, in order to guarantee to clean the effect.

In other embodiments, the adaptor 5 is fixedly connected with the connecting rod 21, the first driving member 3 is arranged on the adaptor 5, the first driving member 3 directly drives the cleaning member 2 to move, and the second driving member 6 indirectly drives the cleaning member 2 to rotate through the adaptor 5.

In some embodiments, as shown in fig. 1, the sweeping device 100 further includes a telescopic sealing member 7, where the telescopic sealing member 7 is sleeved on a portion of the connecting rod 21 on a side of the fixing member 1 away from the plummer 22, that is, the telescopic sealing member 7 is sleeved on a portion of the connecting rod 21 outside the pipeline; the both ends of flexible sealing member 7 are sealing connection respectively in connecting rod 21 keep away from the one end of plummer 22 and mounting 1 to guarantee the sealed of pipeline, flexible sealing member 7 is scalable warp simultaneously, in order to adapt to the axial displacement of connecting rod 21, and flexible sealing member 7 can absorb the vibrational force that comes from cleaning component 2 and transmit connecting rod 21, in order to avoid the vibrational force damage first drive unit 3 etc..

For example, the telescopic seal 7 may be a bellows or the like.

The connecting pipe assembly 200 according to the embodiment of the second aspect of the present invention comprises a pipeline and a cleaning device 100, wherein the pipeline comprises a first branch 101, a second branch 102 and a third branch 103, the first branch 101 and the second branch 102 are coaxially arranged, and the third branch 103 is communicated with both the first branch 101 and the second branch 102; the cleaning device 100 is the cleaning device 100 according to the embodiment of the first aspect of the present invention, the cleaning device 100 is fixedly disposed on the second branch 102, and the cleaning device 100 is used for cleaning at least the inner wall surface of the first branch 101.

According to the utility model discloses connecting tube subassembly 200 through adopting foretell cleaning device 100, can effectively realize cleaning of pipeline to avoid the safety risk that the pipeline blockked up and cause.

In some embodiments, as shown in fig. 1, the first branch 101 and the second branch 102 are vertically disposed, the first branch 101 is disposed on the upper side of the second branch 102, the pipeline further includes a fourth branch 104, the fourth branch 104 is communicated with the second branch 102, the fourth branch 103 extends downward, the third branch 103 is communicated with both the first branch 101 and the second branch 102, the attachments carried by the carrier 22 are suitable for being discharged through the fourth branch 104, for example, the carrier 22 moves to a position communicated with the second branch 102 and the fourth branch 104, the attachments can be discharged along the fourth branch 103 at least under the action of gravity, thereby facilitating the timely discharge of the scooped attachments.

For example, in the example of fig. 1 and 2, the upper end of the fourth branch 104 is located below the upper end of the third branch 103 in the up-down direction, so that the level of the fourth branch 104 at the location of communication with the second branch 102 is lower, in order to ensure that at least most of the scooped attachment is discharged through the fourth branch 104; at this time, the third branch 103 and the first branch 101 may be used to discharge the gas in the apparatus.

In some embodiments, as shown in fig. 1, a limiting member 1021 is disposed in the second branch 102, the limiting member 1021 is formed in a cylindrical shape, the limiting member 1021 limits the cleaning component 2 to move towards the fixing member 1 along the axial direction of the second branch 102, the limiting member 1021 has a through hole, the link 21 passes through the through hole, and the link 21 is in pivot fit with the limiting member 1021, in the up-down direction, the limiting member 1021 is lower than the third branch 103, and a space of the second branch 102 between the limiting member 1021 and the third branch 103 is an accommodating space for accommodating the plummer 22 and the scraper 23; when the cleaning device 100 is in the non-operating state, the cleaning component 2 may be located in the accommodating space, so that the upper surface of the scraper 23 is flush with the lower side edge of the third branch 103 in the position where the scraper communicates with the second branch 102, or the upper surface of the scraper 23 is lower than the position where the third branch 103 communicates with the second branch 102, at this time, the upper surface of the carrier 22 may be flush with the lower side edge of the fourth branch 104 in the position where the scraper communicates with the second branch 102, or the upper surface of the scraper 23 is slightly lower than the position where the fourth branch 1034 communicates with the second branch 102, so as to facilitate cleaning or discharging the attachments carried by the carrier 22 to the fourth branch 104.

The limiting member 1021 and the second branch 102 may be an integral component or a separate component.

According to the third aspect of the present invention, the crystal growth apparatus comprises a furnace body and a connecting pipe assembly 200, wherein the furnace body is formed with an exhaust port; the connecting tube assembly 200 is the connecting tube assembly 200 according to the above-mentioned second aspect of the present invention, the end of the first branch 101 away from the second branch 102 is connected to the gas outlet, the third branch 103 is connected to the vacuum extractor of the crystal growth apparatus, and the third branch 103 can be used to exhaust the gas from the gas outlet.

According to the utility model discloses crystal growth equipment, through adopting foretell connecting tube subassembly 200, improved crystal growth equipment's security.

Alternatively, the exhaust ports are formed in the top wall, or bottom wall, or side wall, etc. of the furnace body, and the connecting tube assembly 100 in the present application may be matched to exhaust ports in different positions.

For example, when the crystal growth apparatus is continuously evacuated by using a vacuum pump, the gas in the furnace body sequentially passes through the first branch 101 and the third branch 103 and is discharged to the filtering device, and a part of the removed attachments can flow out of the pipeline from the third branch 103 along with the gas flow, so that the attachments can be conveniently cleaned and discharged, meanwhile, the step of cleaning the removed attachments on the bearing table 22 is omitted, the cleaning component 2 can continuously clean the pipeline, and the cleaning efficiency of the cleaning device 100 is improved; of course, when the pipeline further comprises a fourth branch 104, a part of the scooped attachment can be discharged through the fourth branch 104.

It is understood that, when a plurality of exhaust ports are provided, the junction block assembly 200 of the present application may be provided at least two of the plurality of exhaust ports according to actual needs. For example, there are a plurality of exhaust ports, and each exhaust port is provided with a connecting pipe assembly 200, at this time, the cleaning devices 100 of the plurality of connecting pipe assemblies 200 can be controlled to work synchronously to clean the corresponding pipeline; of course, the cleaning apparatuses 100 may individually control the timing and the cleaning time for cleaning the pipes.

In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "vertical", "horizontal", "inner", "outer", "axial", "radial", "circumferential", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

In the present application, unless expressly stated or limited otherwise, a first feature "on" or "under" a second feature may be directly contacting the second feature or the first and second features may be indirectly contacting the second feature through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. A cleaning device (100), characterized in that the cleaning device (100) is used for cleaning the inner wall surface of a pipeline, the pipeline comprises a first branch (101), a second branch (102) and a third branch (103), the first branch (101) and the second branch (102) are coaxially arranged, the third branch (103) is communicated with the first branch (101) and the second branch (102),

the cleaning device (100) comprises:

the fixing piece (1) is suitable for being fixedly arranged at one end, far away from the first branch (101), of the second branch (102);

the cleaning component (2) comprises a connecting rod (21), a bearing table (22) and a shovel (23), the connecting rod (21) penetrates through the fixing component (1), the bearing table (22) and the shovel (23) are arranged at intervals along the axial direction of the connecting rod (21), the shovel (23) is provided with a hollow part (231), the shovel (23) is located on one side, away from the fixing component (1), of the bearing table (22) and used for cleaning at least the inner wall surface of the first branch (101), and the bearing table (22) is used for bearing at least part of attachments removed by the shovel (23);

the first driving part (3) is arranged on the fixing part (1) and is used for driving the connecting rod (21) to move along the axial direction of the connecting rod (21).

2. The sweeping device (100) according to claim 1, wherein the bearing platform (22) is provided at an end of the connecting rod (21) adjacent to the shovel (23), a plurality of connecting members (4) are provided between the bearing platform (22) and the shovel (23), and the plurality of connecting members (4) are arranged at intervals along a circumferential direction of the connecting rod (21).

3. The sweeping device (100) according to claim 2, characterized in that the cross-sectional area of the connecting piece (4) is smaller than the cross-sectional area of the connecting rod (21).

4. The sweeping device (100) according to claim 2, wherein the scraper (23) is formed in a ring shape.

5. The sweeping device (100) according to claim 1, characterized in that the first driving member (3) comprises:

a first driver (31);

a telescopic mechanism (32), wherein the telescopic mechanism (32) is connected with the first driver (31) and the cleaning component (2), and the telescopic mechanism (32) can be telescopically deformed in the axial direction of the second branch (102).

6. The sweeping device (100) according to any one of claims 1-5, further comprising an adaptor (5) and a second driving member (6), said second driving member (6) being adapted to drive the sweeping member (2) in rotation about the axial direction of the connecting rod (21), wherein,

adaptor (5) with connecting rod (21) pivot cooperation, second drive part (6) through sealed magnetic fluid with adaptor (5) link to each other, sealed magnetic fluid is used for sealing the adaptor with the clearance between second drive part (6), second drive part (6) direct drive cleans part (2) and rotates, first drive part (3) through adaptor (5) indirect drive cleans part (2) and removes.

7. The sweeping device (100) according to any one of claims 1 to 5, further comprising:

flexible sealing member (7), flexible sealing member (7) cover is located being located of connecting rod (21) deviating from of mounting (1) the part of one side of plummer (22), just the both ends of flexible sealing member (7) respectively sealing connection in keeping away from of connecting rod (21) the one end of plummer (22) with mounting (1).

8. A connecting tube assembly (200), comprising:

the pipeline comprises a first branch (101), a second branch (102) and a third branch (103), the first branch (101) and the second branch (102) are coaxially arranged, and the third branch (103) is communicated with the first branch (101) and the second branch (102);

sweeping device (100), the sweeping device (100) being a sweeping device (100) according to any one of claims 1-7, the sweeping device (100) being secured to the second branch (102) and being adapted to sweep at least an inner wall surface of the first branch (101).

9. Connecting tube assembly (200) according to claim 8, characterized in that the first branch (101) and the second branch (102) are arranged vertically, and the first branch (101) is arranged on the upper side of the second branch (102), and the tube further comprises a fourth branch (104), the fourth branch (104) is communicated with the second branch (102) and extends downwards, and the attachments carried by the carrying table (22) are suitable for being discharged through the fourth branch (104).

10. A crystal growth apparatus, comprising:

a furnace body formed with an exhaust port;

a connecting pipe assembly (200), wherein the connecting pipe assembly (200) is the connecting pipe assembly (200) according to claim 8 or 9, one end of the first branch (101) far away from the second branch (102) is communicated with the exhaust port, and the third branch (103) is connected with a vacuum pumping device of the crystal growth apparatus.

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