CN219363790U - Energy-saving vacuum coating equipment - Google Patents

Abstract

The utility model discloses an energy-saving vacuum coating device, which comprises: the motor is arranged at the top of the rear shell and the front shell, and an output shaft of the motor penetrates through the top of the rear shell and the front shell and extends to the inside of the rear shell and the front shell and is coaxially connected with a connecting rod; the device is provided with the motor, the connecting rod, the electric push rod, the scraping plate and other devices, and the scraping plate is driven by the motor to rotate in the device, so that the scraping plate can timely clean target residues attached to the inner wall of the device, and adverse effects of reduced operation efficiency, poor coating quality, slow pumping speed in a machine and the like caused by untimely cleaning of the target after long-term use are avoided; the device is provided with the square frame, the filter screen plate and the like under the vacuum air pump, so that in the operation process of the device, the target material can be filtered by the filter assembly such as the filter screen plate, and the phenomenon that the target material is damaged in the vacuum air pump is generated when the device is used and the target material in the device enters the vacuum air pump is avoided.

Description

Energy-saving vacuum coating equipment

Technical Field

The application belongs to the technical field of film plating, and particularly relates to energy-saving vacuum film plating equipment.

Background

The vacuum coating machine mainly refers to a type of coating film which needs to be carried out under a higher vacuum degree, and particularly comprises various types including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like. The main idea is to divide into two types, evaporation and sputtering. The material to be coated is called a target. The substrate and the target are in the vacuum cavity.

For example, chinese patent with publication number CN210529030U discloses an energy-saving safe vacuum coating machine, which comprises a vacuum coating machine body, a hinge, a placement seat, an observation window, an air cooler, a transmission pipe, a U-shaped pipe, a refrigerating plate, a heat radiation grille, a butterfly valve and a one-way valve, wherein the vacuum coating machine body is installed on the upper end face of the placement seat, the hinge is connected with the right end face of the vacuum coating machine body, the observation window is arranged on the front end face of the vacuum coating machine body, the air cooler is installed on the left side inside the placement seat, the transmission pipe is connected with the right end face of the air cooler, the U-shaped pipe is connected with the U-shaped pipe, the refrigerating plate is installed on the inner side of the U-shaped pipe, the one-way valve is arranged on the right side of the circular side face of the U-shaped pipe, and the heat radiation grille is installed on the right end face of the placement seat.

The above patent has the following problems:

this patent suffers from several drawbacks in use, such as: the target attached to the inner wall of the vacuum coating machine is not easy to clean, if the target cannot be cleaned in time, the vacuum coating machine can be reduced in operation efficiency, poor in coating quality, slow in pumping speed in a machine and other adverse effects after long-term use, and during coating, the target in the vacuum coating machine body can enter the vacuum pump, so that the vacuum pump is damaged, a vacuum system is polluted and other adverse effects. In view of this, we propose an energy-efficient vacuum coating apparatus.

Disclosure of Invention

The purpose of this application is, ensures that the target that adheres to on the vacuum coating machine inner wall is cleared up in time, and then can not take place to deposit the phenomenon, guarantees the high efficiency of vacuum coating machine operating efficiency, in addition, ensures that the during operation of vacuum coating machine, in its inside target can not get into the vacuum aspiration pump, avoids the phenomenon production that the target damaged the vacuum aspiration pump.

In order to achieve the above purpose, the present application adopts the following technical scheme: an energy-efficient vacuum coating apparatus comprising:

the top of the back shell and the top of the front shell are provided with motors, output shafts of the motors penetrate through the top of the back shell and the top of the front shell and extend to the inside of the back shell and are coaxially connected with connecting rods, a plurality of uniformly distributed hanging rods are fixed on the connecting rods, the top end of the back shell is fixedly provided with a vacuum pump, the output end of the vacuum pump penetrates through the top of the back shell and extends to the inside of the back shell, the bottoms of the back shell and the front shell are provided with funnels, and the bottom ends of the funnels are provided with valves;

the scraping assembly is arranged on the connecting rod and is used for scraping target materials on the inner walls of the rear shell and the front shell;

the recovery component is positioned at the bottom end of the funnel and is used for collecting the target scraped by the scraping component from the inner walls of the rear shell and the front shell;

and the filtering component is positioned in the rear shell and is used for filtering the target.

Preferably, the scraping assembly comprises:

four electric putter, four electric putter's one end is equal fixed connection in the upper end of connecting rod, four electric putter's the equal fixed mounting of the other end has the scraper blade, and four electric putter all are located the top of a plurality of hanging bars.

Preferably, the recycling assembly includes:

the collecting box, the week side of collecting box is equipped with four couples, and the collecting box sets up between four couples, four the top of couple is all fixed with the lower table wall of funnel.

Preferably, the four hooks are made of plastic.

Preferably, the filter assembly comprises:

the square frame is positioned under the output shaft of the vacuum air pump and is fixed with the inner wall of the rear shell, and the filter screen plate is fixedly arranged in the square frame.

Preferably, the exterior wall fixed mounting of backshell has the target case, install the liquid pump machine in the target case, target case external fixation has the spray tube, the one end of spray tube runs through the backshell and extends to the inside of backshell, the other end of spray tube runs through one side of target case and extends to the inside of target case and liquid pump machine fixed connection.

Preferably, a sealing gasket is arranged between the rear shell and the front shell, and the sealing gasket is tightly adhered to one side of the front shell.

Preferably, a plurality of supporting legs are fixedly arranged on the lower surface wall of the funnel, and self-locking universal wheels are fixedly arranged at the bottom ends of the supporting legs.

The beneficial effects are that: the device has the advantages that the motor drives the scraping plate to rotate in the device by arranging the motor, the connecting rod, the electric push rod, the scraping plate and the like, so that the scraping plate can timely clean target residues attached to the inner wall of the device, and adverse effects of reduced operation efficiency, poor coating quality, slow pumping speed in a machine and the like caused by untimely cleaning of the target after long-term use are avoided; the device is provided with the square frame, the filter screen plate and the like under the vacuum air pump, so that in the operation process of the device, the target material can be filtered by the filter assembly such as the filter screen plate, and the phenomenon that the target material is damaged in the vacuum air pump is generated when the device is used and the target material in the device enters the vacuum air pump is avoided.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this application, are included to provide a further understanding of the application and to provide a further understanding of the application with regard to the other features, objects and advantages of the application. The drawings of the illustrative embodiments of the present application and their descriptions are for the purpose of illustrating the present application and are not to be construed as unduly limiting the present application. In the drawings:

FIG. 1 is a schematic view of the whole structure of the present utility model (in a front view state);

FIG. 2 is a schematic view of the whole structure of the present utility model (in a rear view state);

FIG. 3 is a schematic view of the overall structure of the present utility model (with the front housing open);

FIG. 4 is a schematic diagram of the structure of the frame and the screen plate of the present utility model;

FIG. 5 is a schematic view of the structure of the connecting rod, scraper and hanger bar of the present utility model;

FIG. 6 is a schematic view of the structure of the target box and the spray tube of the present utility model;

FIG. 7 is a schematic view of a recycling assembly according to the present utility model.

In the figure: 1. a rear case; 2. a front shell; 3. support legs; 4. self-locking universal wheels; 5. a sealing gasket; 6. a motor; 7. a connecting rod; 8. a hanging rod; 9. an electric push rod; 10. a scraper; 11. a target box; 12. a spray tube; 13. a vacuum pump; 14. a block; 15. a filter screen plate; 16. a funnel; 17. a hook; 18. a collection box; 19. and (3) a valve.

Description of the embodiments

The present application is described in further detail below in conjunction with fig. 1-7.

In the present application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", and the like indicate an azimuth or a positional relationship based on that shown in the drawings. These terms are used primarily to better describe the present application and its embodiments and are not intended to limit the indicated device, element or component to a particular orientation or to be constructed and operated in a particular orientation.

The embodiment of the application discloses energy-saving vacuum coating equipment, includes:

the top of the back shell 1 and the front shell 2 are provided with a motor 6, an output shaft of the motor 6 penetrates through the top of the back shell 1 and the front shell 2 and extends to the inside of the back shell and the front shell 2 and is coaxially connected with a connecting rod 7, a plurality of uniformly distributed hanging rods 8 are fixed on the connecting rod 7, the top end of the back shell 1 is fixedly provided with a vacuum pump 13, the output end of the vacuum pump 13 penetrates through the top of the back shell 1 and extends to the inside of the back shell 1, the bottoms of the back shell 1 and the front shell 2 are provided with a funnel 16, and the bottom end of the funnel 16 is provided with a valve 19;

the scraping component is arranged on the connecting rod 7 and is used for scraping target materials on the inner walls of the rear shell 1 and the front shell 2;

the recovery component is positioned at the bottom end of the funnel 16 and is used for collecting the target scraped by the scraping component from the inner walls of the rear shell 1 and the front shell 2;

the filtering component is positioned in the rear shell 1 and is used for filtering the target.

In one embodiment, a scraping assembly includes:

the four electric putter 9, the equal fixed connection of one end of four electric putter 9 is in the upper end of connecting rod 7, and the equal fixed mounting of the other end of four electric putter 9 has scraper blade 10, and four electric putter 9 all are located the top of a plurality of hanging bars 8.

Specifically, when the telescopic rods of the four electric push rods 9 extend outwards, the four scraping plates 10 are respectively driven to displace outwards, the outer walls of the four scraping plates 10 are propped against the inner walls of the rear shell 1 and the front shell 2, the motor 6 works, the output shaft of the motor 6 drives the connecting rod 7 to rotate, the four electric push rods 9 on the motor 6 are driven to rotate, the four scraping plates 10 rotate along with the rotation, and scraping is carried out on the inner walls of the rear shell 1 and the front shell 2.

In this embodiment, the telescopic rods of the four electric push rods 9 drive the corresponding scrapers 10 to displace, when coating, the telescopic rods of the electric push rods 9 are contracted, so that the four scrapers 10 cannot affect the coating, after coating is completed, the telescopic rods of the electric push rods 9 are extended, and the four scrapers 10 are utilized to scrape the residual targets on the inner walls of the rear shell 1 and the front shell 2.

In one embodiment, the recovery assembly includes:

the collecting box 18, the week side of collecting box 18 is equipped with four couples 17, and collecting box 18 sets up between four couples 17, and the top of four couples 17 is all fixed with the lower surface wall of funnel 16.

Specifically, the target scraped by the scraping assembly slides down from the inner walls of the rear case 1 and the front case 2 into the funnel 16 under the action of gravity, and then, the valve 19 is opened to allow the target to continue to fall into the collecting box 18 below.

In this embodiment, the residual target is conveniently collected.

In one embodiment, the four hooks 17 are made of plastic.

Specifically, the four hooks 17 have elasticity, and when the target material in the collection box 18 is collected, an operator pulls the four hooks 17 outwards to take down the collection box 18.

In this embodiment, the collection box 18 is easily installed or removed.

In one embodiment, a filter assembly includes:

and the frame 14 is positioned right below the output shaft of the vacuum pump 13 and is fixed with the inner wall of the rear shell 1, and a filter screen plate 15 is fixedly arranged in the frame 14.

Specifically, during film coating, the vacuum air pump 13 can pump away the air in the space of the rear shell 1 and the front shell 2, and the filter screen plate 15 is internally provided with an active carbon layer to strengthen filterability.

In this embodiment, the negative pressure generated when the target is operated by the vacuum pump 13 is prevented from being pumped into the vacuum pump 13, which causes damage to the vacuum pump 13 and further affects the vacuum environment.

In one embodiment, the outer surface wall of the rear shell 1 is fixedly provided with a target box 11, a liquid pump is arranged in the target box 11, a spray pipe 12 is fixedly arranged outside the target box 11, one end of the spray pipe 12 penetrates through the rear shell 1 and extends to the inside of the rear shell 1, and the other end of the spray pipe 12 penetrates through one side of the target box 11 and extends to the inside of the target box 11 to be fixedly connected with the liquid pump.

Specifically, the targets in the target box 11 are drawn out by a liquid pump and sprayed out from a plurality of spray nozzles on the spray pipe 12, so that the targets are attached to the coated member and coating work is performed.

In one embodiment, a gasket 5 is provided between the rear case 1 and the front case 2, and the gasket 5 is tightly adhered to one side of the front case 2.

Specifically, an airtight protection layer is arranged on the upper surface of the funnel 16, which is in contact with the front shell 2, so that the sealing gasket 5 is in a sealing state between the front shell 2 and the funnel 16 while sealing, and the air tightness of the inner spaces of the rear shell 1 and the front shell 2 is ensured.

In one embodiment, the lower surface wall of the funnel 16 is fixedly provided with a plurality of support legs 3, and the bottom end of each support leg 3 is fixedly provided with a self-locking universal wheel 4.

Specifically, the device main body can be pushed to the working position, and after the device main body reaches the working position, an operator steps on the self-locking plate of the self-locking universal wheel 4, so that the fixation can be realized.

In this embodiment, a plurality of supporting legs 3 have played the support fixed effect to main part device, through installation auto-lock universal wheel 4 for this device is convenient for remove, has improved the defect that traditional device is heavy difficult to remove.

When the energy-saving vacuum coating equipment of the embodiment is used,

before use, an operator pushes the device main body to a working position, and after the device main body reaches the working position, the operator steps on the self-locking plate of the self-locking universal wheel 4, so that the fixation can be realized;

before coating, the bolt on the right side of the device is opened, the front shell 2 is opened by pulling the handle outside the front shell 2, the piece to be coated is respectively hung on each hanging rod 8, after the front shell 2 is closed and the bolt is closed, then, a vacuum air pump 13, a motor 6 and a liquid pump in a target box 11 are started, firstly, the vacuum air pump 13 works, the internal air of the rear shell 1 and the front shell 2 is pumped outwards to enable the internal part to reach a vacuum environment, then the liquid pump pumps out the target in the target box 11, and the target is sprayed out from a plurality of nozzles on a spraying pipe 12 and is attached to the piece to be coated, in addition, an output shaft of the motor 6 drives a connecting rod 7 to rotate, the connecting rod 7 drives the hanging rod 8 to rotate, and the piece to be coated on the hanging rod 8 is sprayed with the target in sequence;

after film coating, the liquid pump machine and the vacuum air pump 13 are closed, the valve 19 is opened, four electric push rods 9 are started simultaneously, the telescopic rods of the four electric push rods 9 extend outwards, the four scraping plates 10 can displace outwards along with the telescopic rods until the outer walls of the four scraping plates 10 prop against the inner walls of the rear shell 1 and the front shell 2, in the process, the four scraping plates 10 can rotate in the same direction along with the rotation of the connecting rod 7, scraping is carried out on the inner walls of the rear shell 1 and the front shell 2, scraped target materials flow into a hopper 16 below under the action of gravity and then flow into the collecting box 18 downwards, when no target materials flow downwards, the motor 6 is closed, the front shell 2 is opened, and the coated film pieces are sequentially taken down and the collecting box 18 is taken down.

Finally, it should be noted that: the foregoing is merely a preferred embodiment of the present application and is not intended to limit the scope of the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims (8)

1. An energy-saving vacuum coating apparatus, comprising:

the top of backshell (1) and preceding shell (2) is equipped with motor (6), the output shaft of motor (6) runs through the top of backshell (1) and preceding shell (2) and extends to its inside and coaxial coupling has connecting rod (7), be fixed with a plurality of evenly distributed's suspension rod (8) on connecting rod (7), the top fixed mounting of backshell (1) has vacuum pump (13), the output of vacuum pump (13) runs through the top of backshell (1) and extends to the inside of backshell (1), the bottom of backshell (1) and preceding shell (2) is equipped with funnel (16), valve (19) are installed to the bottom of funnel (16);

the scraping assembly is arranged on the connecting rod (7) and is used for scraping target materials on the inner walls of the rear shell (1) and the front shell (2);

the recovery component is positioned at the bottom end of the funnel (16) and is used for collecting target materials scraped by the scraping component from the inner walls of the rear shell (1) and the front shell (2);

and the filtering component is positioned in the rear shell (1) and is used for filtering the target.

2. The energy-saving vacuum coating apparatus according to claim 1, wherein: the scraping assembly comprises:

four electric putter (9), four the equal fixed connection of one end of electric putter (9) is in the upper end of connecting rod (7), four the equal fixed mounting of the other end of electric putter (9) has scraper blade (10), and four electric putter (9) all are located the top of a plurality of suspension bars (8).

3. The energy-saving vacuum coating apparatus according to claim 1, wherein: the recovery assembly includes:

the collecting box (18), the week side of collecting box (18) is equipped with four couples (17), and collecting box (18) set up between four couples (17), four the top of couple (17) all is fixed with the lower surface wall of funnel (16).

4. An energy efficient vacuum coating apparatus according to claim 3, wherein: the four hooks (17) are made of plastic materials.

5. The energy-saving vacuum coating apparatus according to claim 1, wherein: the filter assembly includes:

the square frame (14), square frame (14) are located under the output shaft of the vacuum pump (13) and fixed with the inner wall of the rear shell (1), and a filter screen plate (15) is fixedly arranged in the square frame (14).

6. The energy-saving vacuum coating apparatus according to claim 1, wherein: the novel liquid pump is characterized in that a target box (11) is fixedly arranged on the outer surface wall of the rear shell (1), a liquid pump machine is arranged in the target box (11), a spraying pipe (12) is fixedly arranged outside the target box (11), one end of the spraying pipe (12) penetrates through the rear shell (1) and extends to the inside of the rear shell (1), and the other end of the spraying pipe (12) penetrates through one side of the target box (11) and extends to the inside of the target box (11) to be fixedly connected with the liquid pump machine.

7. The energy-saving vacuum coating apparatus according to claim 1, wherein: a sealing gasket (5) is arranged between the rear shell (1) and the front shell (2), and the sealing gasket (5) is tightly adhered to one side of the front shell (2).

8. The energy-saving vacuum coating apparatus according to claim 1, wherein: the lower surface wall of the funnel (16) is fixedly provided with a plurality of supporting legs (3), and the bottom end of each supporting leg (3) is fixedly provided with a self-locking universal wheel (4).