CN218067783U - Ion concentration detection device - Google Patents
Ion concentration detection device Download PDFInfo
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- CN218067783U CN218067783U CN202221917381.6U CN202221917381U CN218067783U CN 218067783 U CN218067783 U CN 218067783U CN 202221917381 U CN202221917381 U CN 202221917381U CN 218067783 U CN218067783 U CN 218067783U
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Abstract
An ion concentration detection device comprises an ion acquisition unit, a detection unit and a control unit, wherein the ion acquisition unit is used for acquiring a solution to be detected with residual ions on the surface of a piece to be detected; the detection unit is communicated with the ion acquisition unit and is used for detecting the solution to be detected so as to acquire the concentration of residual ions on the surface of the piece to be detected; on one hand, the ion acquisition unit is communicated with the detection unit, and after the solution to be detected is acquired by the ion acquisition unit, the solution is directly circulated into the detection unit for detection, so that the problem of pollution of the solution to be detected caused by an intermediate exchange container is reduced, and the accuracy of a detection result is ensured; on the other hand, the solution to be detected directly flows into the detection unit for detection, so that the time required by detection is saved, and the detection efficiency is greatly improved.
Description
Technical Field
The utility model relates to the field of semiconductor technology, especially, relate to an ion concentration detection device.
Background
As the area of a semiconductor chip becomes smaller and smaller with the development of a semiconductor manufacturing process, the precision of the semiconductor process becomes more important. In a semiconductor manufacturing process, one important process is photolithography, which is a process of transferring a pattern on a reticle to a photolithographic pattern on a semiconductor.
The mask plate is also called a light shield (mask), and is usually made of glass, and when the glass is manufactured, some negative ions may be mixed in the glass, and the negative ions are mainly mixed in the glassBeing acid ions, e.g. sulfate ions (SO) 4 2- ) Furthermore, since an acidic solution is used for cleaning the mask, a small amount of negative ions, which are mainly acid radical ions such as sulfate radical ions (SO), remain on the surface of the mask during the process of cleaning the mask 4 2- ). In the air, there may be positive ions, usually amine ions (NH) 4 + ). When the mask is exposed to short-wavelength light for a long time, under the action of the short-wavelength light, the negative ions left on the surface of the mask are combined with the positive ions in the air to generate crystals, and the crystals are separated out on the surface of the mask. Common crystals are, for example, according to the kind of positive and negative ions: ammonium sulfate, ammonium phosphate, ammonium oxalate, and the like. The crystals are precipitated and then attached to the surface of the mask, so that the accuracy of the pattern of the mask is influenced, and the accuracy of the photoetching pattern is also influenced.
However, the prior art still has a great problem in detecting the concentration of ions remaining on the surface of the mask.
SUMMERY OF THE UTILITY MODEL
The utility model provides a problem provide an ion concentration detection device to promote mask version surface residual ion concentration's accuracy and test speed.
In order to solve the above problem, the utility model provides an ion concentration detection device, include: the ion acquisition unit is used for acquiring a solution to be detected with residual ions on the surface of a piece to be detected; and the detection unit is communicated with the ion acquisition unit and is used for detecting the solution to be detected so as to acquire the concentration of the residual ions on the surface of the piece to be detected.
Optionally, the ion acquiring unit includes: the detection device comprises a first accommodating cavity, a second accommodating cavity and a detection piece, wherein the first accommodating cavity is used for accommodating a first solution, and the detection piece is immersed in the first solution.
Optionally, the method further includes: a conduit communicating the first cavity and the detection unit.
Optionally, the ion acquiring unit further includes: and the bearing table is positioned in the first containing cavity and used for fixing the piece to be detected.
Optionally, the bearing table includes a bearing frame and a driving member for driving the bearing frame to rotate, and the bearing frame is used for fixing the to-be-detected member.
Optionally, the ion obtaining unit further includes a second cavity, the first cavity is located in the second cavity, and a second solution is filled between the first cavity and the second cavity.
Optionally, the ion obtaining unit further includes a supporting pillar connected to the second cavity, and the supporting pillar fixes the first cavity in the second cavity.
Optionally, the supporting column is a metal supporting column.
Optionally, the heating device further comprises a heating block located in the second cavity, and the heating block is located on the side wall of the second cavity.
Optionally, the second cavity is a metal cavity.
Optionally, the to-be-detected piece comprises a mask.
Optionally, the conduit is a telescopic tube.
Optionally, the device further comprises a control valve located between the conduit and the first cavity, and the control valve is used for controlling on-off between the conduit and the first cavity.
Optionally, the detection unit is a liquid chromatograph.
Compared with the prior art, the technical scheme of the utility model have following advantage:
the utility model discloses an ion concentration detection device, wherein the ion acquisition unit is used for acquiring the solution to be detected with the residual ions on the surface of the piece to be detected; the detection unit is communicated with the ion acquisition unit and is used for detecting the solution to be detected so as to acquire the concentration of residual ions on the surface of the piece to be detected; on one hand, the ion acquisition unit is communicated with the detection unit, and after the solution to be detected is acquired by the ion acquisition unit, the solution is directly circulated into the detection unit for detection, so that the problem of pollution of the solution to be detected caused by an intermediate exchange container is reduced, and the accuracy of a detection result is ensured; on the other hand, the solution to be detected directly flows into the detection unit for detection, so that the time required by detection is saved, and the detection efficiency is greatly improved.
Drawings
Fig. 1 is a schematic structural diagram of an ion concentration detection apparatus according to an embodiment of the present invention;
fig. 2 is a schematic diagram of an internal structure of an ion harvesting unit according to an embodiment of the present invention.
Detailed Description
As described in the background, the prior art ion concentration detection device still has many problems in use.
The current method for testing the ion concentration on the surface of the mask plate is a water bath heating method. Firstly, determining a cleaning process to be tested, and testing the cleaning process once by using a tested mask plate. Adding a proper amount of deionized water into the kit, adding a mask plate for testing, putting the kit into a water-bath heating box, heating for two hours, filling liquid in the kit into a volumetric flask, and sending the volumetric flask to a chemical analysis laboratory for testing.
The inventor finds that ion concentration detection needs to be carried out through multiple container conversion in a test process, pollution is easily introduced to cause inaccurate test, meanwhile, the detection timeliness is low, and the accuracy of pattern transmission is influenced, so that the performance of a formed semiconductor device is reduced, and the use of the semiconductor device is limited to a certain extent.
On the basis, the utility model provides an ion concentration detection device, utilize the ion acquisition unit with the detection unit design of being linked together, on the one hand after the solution that awaits measuring has been obtained to the ion acquisition unit, direct circulation detects in the detection unit, has reduced the problem that middle exchange container leads to the solution pollution that awaits measuring, has ensured the accuracy of testing result; on the other hand, the solution to be detected directly flows into the detection unit for detection, so that the time required by detection is saved, and the detection efficiency is greatly improved.
In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, embodiments accompanied with figures are described in detail below.
Fig. 1 is a schematic structural diagram of an ion concentration detection apparatus according to an embodiment of the present invention; fig. 2 is a schematic diagram of an internal structure of an ion harvesting unit according to an embodiment of the present invention.
Referring to fig. 1 and 2, the ion concentration detecting apparatus 100 includes an ion acquiring unit 101 and a detecting unit 102.
The ion obtaining unit 101 is configured to obtain a solution to be detected, which has residual ions on the surface of the object to be detected 104;
the detection unit 102 is communicated with the ion acquisition unit 101, and the detection unit 102 is used for detecting the solution to be detected so as to acquire the residual ion concentration on the surface of the piece to be detected.
In this embodiment, the detection unit 102 is communicated with the ion acquisition unit 101, so that after the ion acquisition unit 101 acquires a solution to be detected having residual ions on the surface of a member to be detected, the solution to be detected is directly transferred into the detection unit 102, thereby eliminating the transfer process of the intermediate solution to be detected, on one hand, reducing the problem of pollution of the intermediate exchange container to the solution to be detected, and ensuring the accuracy of the detection result; on the other hand, the solution to be detected directly flows into the detection unit for detection, so that the time required by detection is saved, and the detection efficiency is greatly improved.
In this embodiment, the object 104 to be detected includes a mask.
In other embodiments, the object 104 to be detected may be any object to be detected, which needs to detect surface residual ions, and is not limited to a mask.
In this embodiment, the detecting unit 102 is a liquid chromatograph.
Referring to fig. 2, the ion acquiring unit 101 includes: a first cavity 103, wherein the first cavity 103 is used for containing a first solution 108, and the element to be detected 104 is immersed in the first solution 108.
In this embodiment, the first solution 108 is deionized water.
In other embodiments, the first solution 108 may also be an acidic liquid or a basic liquid, and the like, and may be selected according to the actual ability to dissolve the surface residual ions.
Please refer to fig. 1 and 2 in combination, which further includes a catheter 105.
In this embodiment, the conduit 105 connects the first cavity 103 and the detection unit 102.
In this embodiment, the conduit 105 is a telescopic tube.
In this embodiment, since the conduit 105 is a telescopic tube, the liquid level difference between the ion acquiring unit 101 and the detecting unit 102 can be conveniently adjusted by utilizing the flexibility of the conduit 105, so that the solution to be detected in the ion acquiring unit 101 can directly flow into the detecting unit 102, thereby reducing the requirement of extra power and contributing to saving cost.
In this embodiment, the conduit 105 is a polyethylene material conduit.
In other embodiments, the catheter 105 may also be a catheter of polypropylene (PP) material.
In this embodiment, the conduit 105 is generally selected to have a certain corrosion resistance and wear resistance, and to have a certain degradability, which is beneficial to the environmental protection.
In this embodiment, the first cavity 103 is a non-metal cavity, and specifically, the first cavity 103 is a cavity made of a polyethylene material.
In other embodiments, the first cavity 103 may also be a cavity made of polypropylene (PP) material, or may also be a cavity made of metal material, and may be selected according to the actual need in the detection process.
With continued reference to fig. 2, the ion acquiring unit 101 further includes: the bearing table 106 is located in the first cavity 103 and is used for fixing the to-be-detected piece 104, so that the to-be-detected piece 104 can be fixed and taken conveniently.
In this embodiment, the object 104 to be detected is clamped on the bearing table 106, and the object 104 to be detected is immersed in the first solution 108.
In other embodiments, the object 104 to be detected can also be placed directly in the first cavity 103.
With continued reference to fig. 2, the carrier 106 includes a carrier 107 and a driving member (not shown) for driving the carrier 107 to rotate, wherein the carrier 107 is used for fixing the object 104 to be detected.
In this embodiment, the driving member drives the bearing frame 107 to rotate, and the bearing frame 107 drives the to-be-detected member 104 to rotate, so that the to-be-detected member 104 can be in sufficient contact with the first solution 108, and diffusion of residual ions on the surface of the to-be-detected member 104 into the first solution 108 is accelerated, thereby saving detection time and greatly improving detection efficiency and detection accuracy of the residual ion concentration on the to-be-detected member 104.
In this embodiment, the carrier 106 is made of polyethylene.
In other embodiments, the carrier 106 may also be a polypropylene material.
In this embodiment, after the to-be-detected piece 104 is fixed on the bearing frame 107, a certain gap is formed between the surface of the to-be-detected piece 104 and the bearing table 106, so as to reduce damage to the surface of the to-be-detected piece 104, play a certain role in protecting the to-be-detected piece 104, and improve the quality of the to-be-detected piece 104.
With reference to fig. 2, the ion obtaining unit 101 further includes a second cavity 109, the first cavity 103 is located in the second cavity 109, and a second solution 110 is filled between the first cavity 103 and the second cavity 109.
In this embodiment, the second solution 110 is deionized water.
In other embodiments, the second solution 110 may be non-deionized water, a liquid capable of transferring heat without damaging the outer wall of the first cavity 103, or a solid heat conducting material.
In this embodiment, the second solution 110 functions to transfer heat.
In this embodiment, the residual ions on the surface of the to-be-detected piece 104 are mainly obtained by a water bath heating method, specifically, the second cavity 109 heats the second solution 110, the second solution 110 transfers heat to the first solution 108 through the first cavity 103, and after a certain time, the residual ions on the surface of the to-be-detected piece 104 are sufficiently dissolved.
With continued reference to fig. 2, the ion obtaining unit 101 further includes a supporting column 111 connected to the second cavity 109, and the supporting column 111 fixes the first cavity 103 in the second cavity 109.
Specifically, one end of the supporting column 111 is fixed to the inner wall of the second containing cavity 109, the outer wall of the first containing cavity 103 is fixed to the supporting column 111, and after the second solution 110 is filled in the second containing cavity 109, the second solution 110 is heated to transfer heat, so that the first solution 108 in the first containing cavity 103 is heated, the solution of ions remaining on the surface of the to-be-detected piece 104 is accelerated, and the improvement of the detection rate and the detection accuracy are facilitated.
In this embodiment, the supporting column 111 is a metal supporting column.
With continued reference to fig. 2, a heating block 112 is further included in the second cavity 109, and the heating block 112 is located on a sidewall of the second cavity 109.
In this embodiment, the heating block 112 and the supporting column 111 are located on the same inner wall of the second cavity 109.
In other embodiments, the heating block 112 and the supporting column 111 may be respectively located on different inner walls of the second cavity 109.
In this embodiment, the heating block 112 effects heating of the second solution 110.
In this embodiment, the second cavity 109 is a metal cavity.
With continued reference to fig. 2, a control valve 113 is further included between the conduit 105 and the first cavity 103, and the control valve 113 is configured to control on/off between the conduit 105 and the first cavity 103.
In this embodiment, the control valve 113 is a two-way valve.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected by one skilled in the art without departing from the spirit and scope of the invention, as defined in the appended claims.
Claims (14)
1. An ion concentration detection apparatus, characterized by comprising:
the ion acquisition unit is used for acquiring a solution to be detected with residual ions on the surface of a piece to be detected;
and the detection unit is communicated with the ion acquisition unit and is used for detecting the solution to be detected so as to acquire the concentration of the residual ions on the surface of the piece to be detected.
2. The ion concentration detection apparatus according to claim 1, wherein the ion obtaining unit includes: the detection device comprises a first cavity and a second cavity, wherein the first cavity is used for containing a first solution, and the to-be-detected piece is immersed in the first solution.
3. The ion concentration detection apparatus according to claim 2, further comprising: a conduit communicating the first cavity and the detection unit.
4. The ion concentration detection apparatus according to claim 2, wherein the ion obtaining unit further includes: and the bearing table is positioned in the first containing cavity and used for fixing the piece to be detected.
5. The ion concentration detection apparatus according to claim 4, wherein the carrier stage includes a carrier for holding the object to be detected and a driving member for driving the carrier to rotate.
6. The ion concentration detection apparatus according to claim 2, wherein the ion obtaining unit further includes a second cavity, the first cavity is located in the second cavity, and a second solution is filled between the first cavity and the second cavity.
7. The ion concentration detecting device according to claim 6, wherein the ion obtaining unit further includes a support pillar connected to the second cavity, and the support pillar fixes the first cavity to the second cavity.
8. The ion concentration detection apparatus according to claim 7, wherein the support column is a metal support column.
9. The ion concentration detection apparatus of claim 6, further comprising a heater block located within the second cavity, the heater block being located on a sidewall of the second cavity.
10. The ion concentration detection apparatus according to claim 6, wherein the second cavity is a metal cavity.
11. The ion concentration detecting apparatus according to claim 1, wherein the member to be detected includes a mask.
12. The ion concentration detecting apparatus according to claim 3, wherein the guide tube is a bellows.
13. The ion concentration detecting device according to claim 3, further comprising a control valve between the conduit and the first chamber, wherein the control valve is configured to control on/off between the conduit and the first chamber.
14. The ion concentration detection apparatus according to claim 3, wherein the detection unit is a liquid chromatograph.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221917381.6U CN218067783U (en) | 2022-07-22 | 2022-07-22 | Ion concentration detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221917381.6U CN218067783U (en) | 2022-07-22 | 2022-07-22 | Ion concentration detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218067783U true CN218067783U (en) | 2022-12-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221917381.6U Active CN218067783U (en) | 2022-07-22 | 2022-07-22 | Ion concentration detection device |
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| CN (1) | CN218067783U (en) |
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2022
- 2022-07-22 CN CN202221917381.6U patent/CN218067783U/en active Active
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