CN112697680B - Online detection device and method for chemical etching rate of glass - Google Patents
Online detection device and method for chemical etching rate of glass Download PDFInfo
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- CN112697680B CN112697680B CN201911011961.1A CN201911011961A CN112697680B CN 112697680 B CN112697680 B CN 112697680B CN 201911011961 A CN201911011961 A CN 201911011961A CN 112697680 B CN112697680 B CN 112697680B
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
Abstract
The invention provides a glass chemical etching rate on-line detection device and a method, wherein glass to be etched and an etching test piece with the same thickness as that of the pre-thinning are placed into a chemical etching solution through a clamping tool holder; the laser generator and the sensor emit laser to the etching test piece, and a reflected sensing signal of the laser is transmitted to the signal processing unit; when the signal processing unit can not receive the laser reflected signals of the laser generator and the sensor, the glass to be etched clamped on the glass clamping tool is immediately taken out of the chemical etching liquid, put into clear water for cleaning, the chemical etching operation is completed, and the etching time T ' and the etching rate V ' =D/T ' are recorded. The device and the method have the advantages of simple structure, high flexibility and high precision, and can dynamically measure the chemical etching rate of the glass on line in real time.
Description
Technical Field
The invention relates to the technical field of micromachining, in particular to an on-line detection device and method for chemical etching rate of glass.
Background
The chemical etching process is to utilize chemical reaction between substances to realize the function of structural processing, and to realize the purpose of forming specific patterns on the surface of the material or thinning the material by carrying out partial or whole-surface directional chemical etching on the material, and is applied to precision optical devices, IC chip manufacturing, display flat glass processing, instruments and meters and the like.
In order to accurately control the processing size of glass chemical etching, accurate and rapid detection of the chemical etching rate is important to control the processing process, in the prior art, the measurement of the chemical etching rate is generally carried out in a contact type and a non-contact type, for the contact type measurement, the strong corrosiveness of corrosive liquid has high requirement on the corrosion resistance of a contact measurement sensor, the glass is usually required to be taken out and cleaned and then detected, real-time online detection cannot be realized, and for fragile and thinner glass, the contact type measurement is easy to cause glass breakage; for non-contact measurement, common methods include optical measurement, capacitance measurement and the like, and have high requirements on the stability of the chemical etching solution such as refractive index, dielectric constant and the like, and the stability of the chemical etching solution is difficult to maintain and the measurement accuracy of the chemical etching rate is difficult to ensure due to the consumption and volatilization of chemical components in the etching process.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides the device and the method for detecting the chemical etching rate of the glass on line.
The invention relates to an on-line detection device for the chemical etching rate of glass, which is characterized by comprising a chemical etching unit and a sensing detection unit;
the chemical etching unit comprises a chemical etching tank body, a chemical etching solution, glass to be etched, a glass clamping tool, an etching test piece and a test piece clamping tool, wherein the thickness of the etching test piece is the same as the pre-thinning thickness D on the glass to be etched; the chemical etching solution is placed in the chemical etching tank body; the glass clamping tool clamps the glass to be etched and the test piece clamping tool clamps the etching test piece to be placed in the chemical etching solution;
the sensing detection unit comprises a group of laser generators, a sensor, a movable guide rail and a signal processing unit;
the laser generators and the sensors can transversely move on the movable guide rail, the first group of laser generators and the sensors emit laser to the etching test piece, and reflected sensing signals of the laser are transmitted to the signal processing unit; when the signal processing unit can not receive the laser reflection signals of the first group of laser generators and the sensors, the glass to be etched clamped on the glass clamping tool is immediately taken out from the chemical etching liquid, put into clear water for cleaning, the chemical etching operation is completed, and the etching time T ' and the etching rate V ' =D/T ' are recorded.
Further, the glass etching device also comprises another group of laser generators and sensors which can transversely move on the movable guide rail, the laser generators and the sensors vertically emit laser to the glass to be etched, and the reflected sensing signals of the laser are transmitted to the signal processing unit.
Further, the signal processing unit calculates the etching depth of the glass to be etched by reflecting the laser path difference through the second group of laser generators and the sensor, calculates the chemical etching rate predicted value V according to the etching time, and calculates the average value V of the chemical etching rate a The method comprises the steps of carrying out a first treatment on the surface of the Calculating an estimated chemical etching time t=d/V a 。
Further, the glass clamping tool comprises a transverse bracket, a longitudinal bracket and a clamping clamp, wherein the clamping clamp can be adjusted according to the thickness of glass to be etched; the transverse brackets and the clamping clips are respectively connected to the longitudinal brackets.
Further, the glass clamping tool comprises a transverse bracket, a longitudinal bracket and a clamping clamp, wherein the clamping clamp can be adjusted according to the thickness of the etching test piece; the transverse brackets and the clamping clips are respectively connected to the longitudinal brackets.
The invention discloses an online detection method for the chemical etching rate of glass, which is characterized by comprising the following steps:
step one, adding a chemical etching solution into a chemical etching tank body, and heating to a certain temperature or keeping the normal temperature according to the process requirements;
step two, clamping glass to be etched on a glass clamping tool, selecting an etching test piece with the same thickness according to the etching thickness D of the glass to be etched, clamping the glass to be etched and the etching test piece on the test piece clamping tool, and simultaneously placing the glass to be etched and the etching test piece into chemical etching liquid to start chemical etching operation;
and thirdly, in the etching process, the first group of laser generators and the sensors emit laser to the etching test piece, the signal processing unit receives laser reflection sensing signals, when the signal processing unit cannot receive the first group of laser generators and the sensor laser reflection signals, glass to be etched clamped on the glass clamping tool is immediately taken out from chemical etching liquid, is put into clean water for cleaning, chemical etching operation is completed, etching time T ' is recorded, and etching rate V ' =D/T '.
In the second step, the second group of laser generators and the sensors are transversely moved on the moving guide rail to be above the glass to be etched; the second group of laser generators and sensors emit laser to the glass to be etched, and the reflected sensing signals of the laser are transmitted to the signal processing unit.
Further, the third step further comprises a step of calculating the etching depth of the glass to be etched by the signal processing unit through the second group of laser generators and the reflected laser path difference of the sensor, and calculating a chemical etching rate estimated value V according to the etching time; dynamic calculation of the average value V of the measured chemical etching rate a The method comprises the steps of carrying out a first treatment on the surface of the Calculating an estimated chemical etching time t=d/V a 。
And step three, according to the estimated chemical etching time, the signal processing unit starts to measure the laser reflection signals of the first group of laser generators and the sensors in a period of time.
Compared with the prior art, the invention has at least the following beneficial effects:
1. the on-line detection device for the chemical etching rate of the glass has simple structure and high flexibility, and can detect the chemical etching dynamic rates of different thicknesses of the glass to be etched and different thicknesses to be thinned;
2. the method of the invention uses the etching test piece with the same thickness as the thickness of the thinned etching test piece to correct the etching time, and the etching thickness of the thinned etching test piece is controlled more accurately for the etching process with dynamic change of chemical etching rate;
3. the invention is a non-contact measurement mode, can avoid damage to the glass surface in the measurement process, and has low requirement on the stability of chemical etching liquid.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. It is evident that the drawings in the following description are only some embodiments of the present invention and that other drawings may be obtained from these drawings without inventive effort for a person of ordinary skill in the art.
FIG. 1 is a schematic diagram of an on-line detection device for the chemical etching rate of glass.
Fig. 2 is a schematic diagram of a glass holding tool to be etched.
FIG. 3 is a schematic diagram of an etching strip clamping tool.
Wherein the above figures include the following reference numerals:
1. a chemical etching tank body; 2. a chemical etching solution; 3. glass to be etched; 4. etching the test piece; 5. a glass clamping tool; 6. a test piece clamping tool; 7. a laser generator and a sensor; 8. a laser generator and a sensor; 9. a moving guide rail; 10. a signal processing unit; 51. a glass clamping tool transverse bracket; 52. a glass clamping tool longitudinal support; 53. a glass clamping tool clamping clamp; 61. a transverse bracket of an etching test piece clamping tool; 62. a longitudinal support for the etching test piece clamping tool; 63. the etching test piece clamping tool clamps.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
1. Online detection device for chemical etching rate of glass
The device comprises a chemical etching unit and a sensing detection unit;
the chemical etching unit comprises a chemical etching tank body 1, a chemical etching solution 2, glass to be etched 3, a glass clamping tool 5, an etching test piece 4 and a test piece clamping tool 6, wherein the thickness of the etching test piece 4 is the same as the pre-thinning thickness of the glass to be etched 3;
the sensing detection unit comprises two groups of laser generators, sensors 7 and 8, a movable guide rail 9 and a signal processing unit 10;
the glass clamping tool 5 comprises a transverse bracket 51, a longitudinal bracket 52 and a clamping clamp 53, wherein the clamping clamp 53 can be adjusted according to the thickness of glass 3 to be etched; the transverse brackets 51 and the clamping clips 53 are respectively connected perpendicularly to the longitudinal brackets 52.
The glass clamping tool 6 comprises a transverse bracket 61, a longitudinal bracket 62 and a clamping clamp 63, wherein the clamping clamp 63 can be adjusted according to the thickness of the etching test piece 4; the transverse brackets 61 and the clamping clips 63 are respectively connected perpendicularly to the longitudinal brackets 62.
The two groups of laser generators and sensors 7 and 8 can transversely move on the movable guide rail 9, the positions of the two groups of laser generators and sensors are adjusted according to the positions of the etching test piece 4 and the glass 3 to be etched, the first group of laser generators and sensors 7 emit laser to the etching test piece 4, reflected sensing signals of the laser are transmitted to the signal processing unit 10, and the signal processing unit 10 receives the reflected signals of the laser; when the signal processing unit 10 cannot receive the laser reflection signals of the first group of laser generators and the sensor 7, the glass 3 to be etched clamped on the glass clamping tool 5 is immediately taken out of the chemical etching liquid 2, and is put into clear water for cleaning, so that the chemical etching operation is completed.
The other group of laser generators and sensors 8 emit laser to the glass 3 to be etched, the reflection sensing signals of the laser are transmitted to the signal processing unit 10, the etching depth of the glass 3 to be etched is calculated, and the chemical etching rate V is roughly calculated according to the etching time; due to factors such as consumption and volatilization of chemical components, the stability of the chemical etching solution is difficult to maintain, and the chemical etching rate V is an estimated value.
2. Online detection method for chemical etching rate of glass
Step one, adding a chemical etching solution 2 into a chemical etching tank body 1, and heating to a certain temperature or keeping the normal temperature according to the process requirements;
step two, clamping the glass 3 to be etched on a glass clamping tool 5, selecting an etching test piece 4 with the same thickness according to the etching thickness reduction of the glass to be etched, clamping the glass to be etched and the etching test piece 4 on a test piece clamping tool 6, and simultaneously placing the glass 3 to be etched and the etching test piece 4 into a chemical etching solution 2 to start chemical etching operation; simultaneously, the first group of laser generators and sensors 7 are transversely moved above the etching test piece 4 on the movable guide rail 9, and the second group of laser generators and sensors 8 are transversely moved above the glass 3 to be etched on the movable guide rail 9;
in the chemical etching process, the second group of laser generators and sensors 8 emit laser to the glass 3 to be etched, reflected sensing signals of the laser are transmitted to the signal processing unit 10, the signal processing unit 10 calculates the etching depth of the glass 3 to be etched through the reflected laser path difference, and calculates a chemical etching rate estimated value V according to the etching time;
in the etching process, the chemical etching rate detected by the second group of laser generators and the sensor 8 is a real-time online detection value, usually a variation value, and the average value V of the chemical etching rates is dynamically calculated a ；
Step six, through chemical etching rate average value V a And the requirement of the reduced thickness D of the glass to be etched, calculating the estimated chemical etching time T=D/V a ；
Step seven, the signal processing unit 10 measures the reflected signals of the first group of laser generators and the sensor 7 in the etching process, the signal processing unit 10 can receive the reflected signals of the laser in the initial time period, when the signal processing unit 10 can not receive the reflected signals of the first group of laser generators and the sensor 7, the etching test piece 4 is completely corroded, namely, the thickness reduction of the glass 3 to be etched is completely corroded, the glass 3 to be etched clamped on the glass clamping tool 5 is immediately taken out from the chemical etching liquid 2, and is put into clear water for cleaning, so that the chemical etching operation is completed.
Since the etching time may sometimes last for several hours, the measurement efficiency may be improved when the signal processing unit 10 starts receiving the laser reflection signals of the first set of laser generators and the sensor 7 within a period of about T.
The many features and advantages of the embodiments are apparent from the detailed specification, and thus, it is intended by the appended claims to cover all such features and advantages of the embodiments which fall within the true spirit and scope thereof. Further, since numerous modifications and changes will readily occur to those skilled in the art, it is not desired to limit the embodiments of the invention to the exact construction and operation illustrated and described, and accordingly, all suitable modifications and equivalents may be resorted to, falling within the scope thereof.
The invention is not described in detail in a manner known to those skilled in the art.
Claims (5)
1. The on-line detection device for the chemical etching rate of the glass is characterized by comprising a chemical etching unit and a sensing detection unit;
the chemical etching unit comprises a chemical etching tank body (1), a chemical etching solution (2), glass (3) to be etched, a glass clamping tool (5), an etching test piece (4) and a test piece clamping tool (6), wherein the thickness of the etching test piece (4) is the same as the pre-thinning thickness D on the glass (3) to be etched; the chemical etching solution (2) is arranged in the chemical etching tank body (1); the glass clamping tool (5) clamps the glass (3) to be etched, and the test piece clamping tool (6) clamps the etching test piece (4) and puts the etching test piece into the chemical etching solution (2);
the sensing detection unit comprises a first group of laser generators and sensors (7), a movable guide rail (9) and a signal processing unit (10);
the first group of laser generators and sensors (7) can transversely move on the movable guide rail (9), the first group of laser generators and sensors (7) emit laser to the etching test piece (4), and reflected sensing signals of the laser are transmitted to the signal processing unit (10); when the signal processing unit (10) cannot receive the laser reflection signals of the first group of laser generators and the sensor (7), immediately taking out the glass (3) to be etched clamped on the glass clamping tool (5) from the chemical etching liquid (2), putting the glass into clear water for cleaning, completing the chemical etching operation, and recording the etching time T ' and the etching rate V ' =D/T ';
the glass etching device also comprises a second group of laser generators and sensors (8) which can transversely move on the movable guide rail (9), wherein the second group of laser generators and sensors (8) vertically emit laser to the glass (3) to be etched, and reflected sensing signals of the laser are transmitted to a signal processing unit (10);
the signal processing unit (10) calculates the etching depth of the glass (3) to be etched through the laser path difference reflected by the second group of laser generators and the sensor (8), calculates the chemical etching rate predicted value V according to the etching time, and calculates the average value V of the chemical etching rate a The method comprises the steps of carrying out a first treatment on the surface of the Calculating an estimated chemical etching time t=d/V a 。
2. The glass chemical etching rate online detection device according to claim 1, wherein the glass clamping tool (5) comprises a glass clamping tool transverse bracket (51), a glass clamping tool longitudinal bracket (52) and a glass clamping tool clamping clamp (53), and the glass clamping tool clamping clamp (53) can be adjusted according to the thickness of the glass (3) to be etched; the glass clamping tool transverse bracket (51) and the glass clamping tool clamping clamp (53) are respectively connected to the glass clamping tool longitudinal bracket (52).
3. The glass chemical etching rate on-line measuring device according to claim 1, wherein the etching specimen holding tool (6) comprises an etching specimen holding tool transverse bracket (61), an etching specimen holding tool longitudinal bracket (62), and an etching specimen holding tool holding clamp (63), the etching specimen holding tool holding clamp (63) being adjustable according to the thickness of the etching specimen (4); the etching specimen holding tool transverse bracket (61) and the etching specimen holding tool holding clamp (63) are respectively connected to the etching specimen holding tool longitudinal bracket (62).
4. A method for on-line detection of chemical etching rate of glass using the apparatus of claim 1, comprising the steps of:
step one, adding a chemical etching solution (2) into a chemical etching tank body (1), and heating to a certain temperature or keeping the normal temperature according to the process requirements;
step two, clamping the glass (3) to be etched on a glass clamping tool (5), selecting an etching test piece (4) with the same thickness according to the etching thickness D of the glass to be etched, clamping the glass to be etched on a test piece clamping tool (6), and simultaneously placing the glass (3) to be etched and the etching test piece (4) into a chemical etching solution (2) to start chemical etching operation;
step three, in the etching process, the first group of laser generators and sensors (7) emit laser to the etching test piece (4), the signal processing unit (10) receives reflection sensing signals of the laser, when the signal processing unit (10) cannot receive the reflection signals of the first group of laser generators and the sensors (7), the glass (3) to be etched clamped on the glass clamping tool (5) is immediately taken out from the chemical etching liquid (2), and is put into clear water for cleaning, chemical etching operation is completed, etching time T ' is recorded, and etching rate V ' =D/T ';
in the second step, the second group of laser generators and the sensors (8) are transversely moved on the movable guide rail (9) to the position above the glass (3) to be etched; the second group of laser generators and the sensor (8) emit laser to the glass (3) to be etched, and the reflected sensing signals of the laser are transmitted to the signal processing unit (10);
the third step further comprises a signal processing unit (10) for calculating the etching depth of the glass (3) to be etched through the second group of laser generators and the reflected laser path difference of the sensor (8), and calculating a chemical etching rate estimated value V according to the etching time; dynamic calculation of the average value V of the measured chemical etching rate a The method comprises the steps of carrying out a first treatment on the surface of the Calculating an estimated chemical etching time t=d/V a 。
5. The method according to claim 4, wherein the step three is based on the estimated chemical etching time, and the signal processing unit (10) starts to measure the laser reflection signals of the first set of laser generators and sensors (7) within a period of time.
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