CN218059292U - Device for automatically measuring distance between liquid ports - Google Patents
Device for automatically measuring distance between liquid ports Download PDFInfo
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- CN218059292U CN218059292U CN202121405536.3U CN202121405536U CN218059292U CN 218059292 U CN218059292 U CN 218059292U CN 202121405536 U CN202121405536 U CN 202121405536U CN 218059292 U CN218059292 U CN 218059292U
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Abstract
The utility model discloses a device and method for automatic measurement liquid mouth is apart from, include: the furnace comprises a furnace barrel, wherein a furnace top cover is arranged above the furnace barrel; the isolation valve is connected above the furnace top cover; the crucible is arranged below the furnace cylinder; the water cooling screen is arranged above the crucible; sensing mechanism, including location sensing part, correlation sensor, range finding sensing part, the adjustable connection of location sensor is in the isolating valve top, the location sensor electricity is connected with capacitive sensor, the correlation sensor sets up in the isolating valve below, range finding sensing part sets up on the furnace roof lid. The beneficial effects of the utility model are that: the liquid outlet distance measuring device has the advantages of simple structure, simple and convenient measuring mode, no need of installing auxiliary devices such as reflectors and the like, no complex adjusting action, capability of directly and accurately measuring liquid outlet distance parameters through the sensor, measurement error reaching +/-0.1 mm, and capability of effectively solving the production problem caused by inaccurate liquid outlet distance.
Description
Technical Field
The utility model belongs to the technical field of monocrystalline silicon production, concretely relates to automatic measure liquid mouth apart from device.
Background
Single crystal silicon is also a basic raw material in photovoltaic power generation and semiconductor industries. Monocrystalline silicon is one of the most important monocrystalline materials in the world as a key supporting material of the modern information society, and not only is the main functional material for developing computers and integrated circuits, but also the main functional material for photovoltaic power generation and solar energy utilization.
The liquid gap refers to the distance between the liquid level of the raw material and the water screen port in the process of producing the monocrystalline silicon by using the monocrystalline furnace. The method is an important technical parameter in the production process of monocrystalline silicon, and the monocrystalline silicon is a basic raw material in photovoltaic power generation and semiconductor industries.
The accuracy of the liquid gap directly influences the generation of seed crystals during the production of monocrystalline silicon, so that whether the crystal pulling is successful or not is directly influenced, the liquid gap determining method in the prior art emits light beams through an emitter, the light beams are enabled to coincide with a positioning hole after being reflected by a reflector, then the positions of a seed crystal head and a crucible are adjusted to position the liquid gap, the measuring structure is complex, the measuring process is very complicated, and meanwhile, large measuring errors are generated in the processes of judging the coincidence of the light beams and the positioning hole and adjusting the positions of the seed crystal head and the crucible.
To sum up, for solving current technical problem, the utility model designs a can solve effectively by the device of the automatic measure liquid mouth apart from inaccurate problem apart from the liquid mouth apart from.
Disclosure of Invention
The utility model discloses a solve current technical problem, designed one kind can solve effectively by the liquid mouth apart from the device of the automatic measure liquid mouth apart from inaccurate problem apart from.
The purpose of the utility model can be realized by the following technical proposal:
an apparatus for automatically measuring a liquid gap, comprising:
the furnace comprises a furnace barrel, wherein a furnace top cover is arranged above the furnace barrel;
the isolation valve is connected above the furnace top cover;
the crucible is arranged below the furnace cylinder;
the water-cooling screen is arranged above the crucible;
the sensing mechanism comprises a positioning sensing part, an opposite sensor and a distance measuring sensing part, wherein the positioning sensing part is adjustably connected above the isolation valve, the opposite sensor is arranged on the side surface of the isolation valve, and the distance measuring sensing part is arranged on the furnace top cover.
Furthermore, the isolation valve comprises a valve body, a valve cover and a valve core, wherein an inlet is formed in the upper portion of the valve body, the valve cover is arranged on the side face of the valve body, the correlation sensors are symmetrically arranged on two sides below the inlet, the valve core is arranged in the valve body, and a valve core opening cylinder and a valve core pressing cylinder which are in transmission connection with the valve core through a valve arm are arranged on the side face of the valve body.
Further, the positioning sensing component is electrically connected with a capacitive sensor.
Furthermore, the positioning sensing component comprises a seed crystal head and a traction rope, and the seed crystal head is connected with the isolation valve in an adjustable mode through the traction rope.
Furthermore, the distance measuring sensing part is a laser distance measuring sensor, and laser emitted by the laser distance measuring sensor is downwards matched with the upper surface of the water-cooling screen.
Furthermore, the distance measuring sensing component comprises an air cylinder and a displacement sensor, the air cylinder is connected to the furnace top cover, the output end of the air cylinder extends downwards into the furnace top cover, and the displacement sensor is arranged at the output end of the air cylinder.
Drawings
FIG. 1 is a schematic structural diagram of the device, wherein the distance measuring sensing part is a laser distance measuring sensor;
FIG. 2 is a schematic view of the measuring device of the present invention, wherein the distance measuring sensing part is a laser distance measuring sensor for measuring the L0 state;
FIG. 3 is a schematic structural diagram of the device, wherein the distance measuring sensing part is a cylinder and a displacement sensor;
FIG. 4 is a schematic view of the measuring device for measuring L0 state, wherein the distance measuring sensing part is a cylinder and a displacement sensor;
FIG. 5 is a schematic top view of the isolation valve;
FIG. 6 is a schematic view of the isolation valve in cooperation with the seed head;
referring to fig. 1 to 4, wherein: 1. a furnace barrel; 11. a furnace roof; 2. an isolation valve; 21. a valve body; 211. an inlet; 22. a valve cover; 23. a valve core; 24. a valve arm; 25. the valve core opens the cylinder; 26. the valve core compresses the cylinder; 3. a crucible; 4. a water-cooled screen; 51. positioning a sensing component; 511. a capacitive sensor; 512. a seed crystal head; 513. a hauling rope; 52. a correlation sensor; 53. a distance measurement sensing part; 531. a laser ranging sensor; 532. a cylinder; 533. and moving the sensor.
Detailed Description
The technical solution of the present invention is further explained below with reference to the following examples. In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The first embodiment is as follows:
an apparatus for automatically measuring a liquid gap, comprising:
the furnace comprises a furnace barrel 1, wherein a furnace top cover 11 is arranged above the furnace barrel 1;
the isolation valve 2 is connected above the furnace top cover 11;
the crucible 3 is arranged below the furnace barrel 1;
the water screen 4 is arranged above the crucible 3;
the sensing mechanism comprises a positioning sensing part 51, an opposite-direction sensor 52 and a distance measuring sensing part 53, wherein the positioning sensing part 51 is adjustably connected above the isolating valve 2, the opposite-direction sensor 52 is arranged on the side surface of the isolating valve 2, and the distance measuring sensing part 53 is arranged on the furnace top cover 11.
The isolation valve 2 comprises a valve body 21, a valve cover 22 and a valve core 23, wherein an inlet 211 is formed in the upper portion of the valve body 21, the valve cover 22 is arranged on the side face of the valve body 21, the correlation sensors 52 are symmetrically arranged on two sides of the valve body 21 below the inlet 211, the valve core 23 is arranged in the valve body 21, and a valve core opening cylinder 25 and a valve core pressing cylinder 26 which are in transmission connection with the valve core 23 through a valve arm 24 are arranged on the side face of the valve body 21.
The position sensing part 51 is electrically connected with a capacitance sensor 511.
The positioning sensing component 51 comprises a seed head 512 and a pull rope 513, wherein the seed head 512 is adjustably connected with the isolation valve 2 through the pull rope 513.
The distance measuring sensing component 53 is a laser distance measuring sensor 531, and laser emitted by the laser distance measuring sensor 531 is downwards matched with the upper surface of the water-cooling screen 4.
The accuracy of the liquid gap directly influences the generation of seed crystals during the production of monocrystalline silicon, so that whether the crystal pulling is successful or not is directly influenced, the liquid gap determining method in the prior art emits light beams through the emitter, the light beams are enabled to coincide with the positioning holes after being reflected by the reflector, then the positions of the seed crystal head and the crucible are adjusted to position the liquid gap, the measuring structure is complex, the measuring process is very complicated, and meanwhile, large measuring errors are generated in the processes of judging the coincidence of the light beams and the positioning holes and adjusting the positions of the seed crystal head and the crucible.
The method for measuring the liquid port distance is specifically that the liquid port distance L needs to be determined by a formula L = L0-L1-L2-L3, wherein L1 is a fixed distance from a correlation sensor to a distance measurement sensing part, L3 is a fixed distance from the upper surface to the lower surface of a water screen, L2 is measured by the distance measurement sensing part, and L0 is measured by the correlation sensor and a positioning sensing part together;
the measuring steps are as follows:
s1, a positioning sensing component moves downwards and towards the interior of a furnace barrel, when the positioning sensing component moves to the position of an opposite sensor, the opposite sensor generates a signal, the signal is fed back to a control system, the signal is recorded as a position A by the control system, then the positioning sensing component continues to move to the position of a liquid level, as the positioning sensing component is in contact with the liquid level, a capacitance change signal is generated by a capacitance sensor and fed back to the control system, the signal is recorded as a position B by the control system, and the difference between the position A and the position B is the value of L0;
s2, the distance between the distance measurement sensing part and the upper surface of the water-cooled screen is measured downwards to obtain a feedback signal, and therefore a corresponding L2 numerical value is read through a control system;
and S3, obtaining the liquid outlet distance L = L0-L1-L2-L3 by the measurement value.
The crucible 3 is filled with a raw material liquid, the upper surface of the raw material liquid is a liquid level, when L0 is measured, the positioning sensor 51 moves from the upper part of the isolation valve 2 to the inside of the furnace barrel 1, so that when the positioning sensor 52 passes through the position, the correlation sensor 52 generates a signal, and then when the positioning sensor 51 contacts the liquid level, the capacitance sensor 511 generates a capacitance change signal, so that the value of L0 is measured; when measuring L2, the laser distance measuring sensor 531 emits laser to the upper surface of the water screen 4 and then feeds back a signal, thereby reading a corresponding value through the control system.
The seed crystal head 512 is pulled by a traction rope to move downwards, the valve core is opened by the valve core through the valve arm, the cylinder is driven to open, the seed crystal head 512 enters the valve body downwards from the opening, so that the seed crystal head enters the furnace barrel 1 through the valve body, the seed crystal head can shield the correlation light of the correlation sensor when passing through the correlation sensor, the correlation sensor generates a sensing signal, and the position A of the seed crystal head is measured.
The utility model has the advantages that the original method for indirectly measuring the distance between the liquid ports by the auxiliary devices such as the reflector is advanced into the method for directly determining the distance between the liquid ports by the data of the sensor; compared with the prior art, the liquid port distance determining method has the advantages that the device is simple in structure for measuring the liquid port distance, the measuring mode is simple and convenient, auxiliary devices such as reflectors are not needed to be installed, no complex adjusting action is needed, the liquid outlet distance parameters can be automatically and accurately measured directly through the sensor, the measuring error can reach +/-0.1 mm, and the production problem caused by inaccurate liquid port distance can be effectively solved.
Example two:
the difference between the second embodiment and the first embodiment is that the distance measuring and sensing part 53 comprises an air cylinder 532 and a displacement sensor 533, the air cylinder 532 is connected to the furnace top cover 11, the output end of the air cylinder 532 extends downwards into the furnace top cover 11, and the displacement sensor 533 is arranged at the output end of the air cylinder 532.
Specifically, during L2 determination, the output end of the cylinder 532 moves downward to the upper surface of the water screen, and the movement distance is measured 533 by the displacement sensor, so that the value of L2 is determined.
The description herein is of the preferred embodiment of the present invention only, and the scope of the present invention is not limited thereto. Modifications or additions to the described embodiments or replacements in a similar manner, which the skilled person in the art can implement, are all covered by the present invention within the scope of protection.
Claims (6)
1. An apparatus for automatically measuring a distance between liquid ports, comprising:
the furnace comprises a furnace barrel, wherein a furnace top cover is arranged above the furnace barrel;
the isolation valve is connected above the furnace top cover;
the crucible is arranged below the furnace cylinder;
the water cooling screen is arranged above the crucible;
the sensing mechanism comprises a positioning sensing part, an opposite sensor and a distance measuring sensing part, wherein the positioning sensing part is adjustably connected above the isolation valve, the opposite sensor is arranged on the side surface of the isolation valve, and the distance measuring sensing part is arranged on the furnace top cover.
2. The device for automatically measuring the distance between the liquid ports according to claim 1, wherein the isolation valve comprises a valve body, a valve cover and a valve core, an inlet is arranged above the valve body, the valve cover is arranged on the side surface of the valve body, the correlation sensors are symmetrically arranged on two sides below the inlet, the valve core is arranged in the valve body, and a valve core opening cylinder and a valve core pressing cylinder which are in transmission connection with the valve core through a valve arm are arranged on the side surface of the valve body.
3. The apparatus of claim 1, wherein the position sensing component is electrically connected to a capacitive sensor.
4. The apparatus of claim 1, wherein the positioning sensor comprises a seed head and a pull rope, and the seed head is adjustably disposed above the isolation valve via the pull rope.
5. The device for automatically measuring the distance between the liquid ports as claimed in claim 1, wherein the distance measuring and sensing component is a laser distance measuring sensor, and laser emitted by the laser distance measuring sensor is downwards matched with the upper surface of the water screen.
6. The device for automatically measuring the distance between the liquid ports according to claim 1, wherein the distance measuring and sensing component comprises an air cylinder and a displacement sensor, the air cylinder is connected to the furnace top cover, the output end of the air cylinder extends downwards into the furnace top cover, and the displacement sensor is arranged at the output end of the air cylinder.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121405536.3U CN218059292U (en) | 2021-06-23 | 2021-06-23 | Device for automatically measuring distance between liquid ports |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202121405536.3U CN218059292U (en) | 2021-06-23 | 2021-06-23 | Device for automatically measuring distance between liquid ports |
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| CN218059292U true CN218059292U (en) | 2022-12-16 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113566722A (en) * | 2021-06-23 | 2021-10-29 | 浙江晶阳机电股份有限公司 | Device and method for automatically measuring distance between liquid ports |
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- 2021-06-23 CN CN202121405536.3U patent/CN218059292U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113566722A (en) * | 2021-06-23 | 2021-10-29 | 浙江晶阳机电股份有限公司 | Device and method for automatically measuring distance between liquid ports |
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