CN218026309U

CN218026309U - Vacuum coating device

Info

Publication number: CN218026309U
Application number: CN202221719645.7U
Authority: CN
Inventors: 臧世伟
Original assignee: Chongqing Jinmei New Material Technology Co Ltd
Current assignee: Chongqing Jinmei New Material Technology Co Ltd
Priority date: 2022-07-04
Filing date: 2022-07-04
Publication date: 2022-12-13
Anticipated expiration: 2032-07-04

Abstract

The utility model discloses a vacuum coating device, including the vacuum chamber, still including setting up evaporation coating mechanism, actuating mechanism and two film conveying mechanism in the vacuum chamber, two film conveying mechanism are located respectively left side and right side in the vacuum chamber, actuating mechanism is used for with evaporation coating mechanism drives to film conveying mechanism's below, and when evaporation coating mechanism is located left film conveying mechanism's in the vacuum chamber below, evaporation coating mechanism is used for right film on the left film conveying mechanism carries out the coating film, and when evaporation coating mechanism is located the film conveying mechanism's on the right side in the vacuum chamber below, evaporation coating mechanism is used for right film on the film conveying mechanism on right side carries out the coating film. The utility model discloses a set up actuating mechanism drive coating by vaporization mechanism reciprocating motion between two film conveying mechanism to can realize carrying out the coating film to the film that two film conveying mechanism carried through a coating by vaporization mechanism, reduced manufacturing cost.

Description

Vacuum coating device

Technical Field

The utility model relates to a vacuum evaporation field, concretely relates to vacuum coating device.

Background

The vacuum coating device generally includes a film conveying mechanism and an evaporation mechanism located below the film conveying mechanism, wherein the evaporation mechanism is used for generating an evaporation coating material so that the evaporation coating material is deposited on the lower surface of the film to form a metal layer, thereby coating the film. The existing evaporation mechanism is usually fixed below the film conveying mechanism, and when the number of the film conveying mechanisms is two, two evaporation mechanisms need to be configured, so that the production cost is higher.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model provides a vacuum coating device which can reduce the production cost.

The utility model provides a technical scheme that its technical problem adopted is:

the utility model provides a vacuum coating device, includes the vacuum chamber, still includes to set up evaporation plating mechanism, actuating mechanism and two film conveying mechanism in the vacuum chamber, two film conveying mechanism are located respectively left side and right side in the vacuum chamber, actuating mechanism is used for with evaporation plating mechanism drives to film conveying mechanism's below, and when evaporation plating mechanism is located left film conveying mechanism's in the vacuum chamber below, evaporation plating mechanism is used for right film on the left film conveying mechanism carries out the coating film, and when evaporation plating mechanism is located the film conveying mechanism's on the vacuum chamber right side below, evaporation plating mechanism is used for right film on the film conveying mechanism on right side carries out the coating film.

Preferably, the evaporation source surface of the evaporation mechanism is rectangular, and the size of the evaporation source surface is matched with the size of the film coating area.

According to the preferable technical scheme, a vertical partition plate is arranged between the two film conveying mechanisms, and when the evaporation mechanism is used for coating a film on one film conveying mechanism, the partition plate can prevent an evaporation coating material generated by the evaporation mechanism from diffusing to the other film conveying mechanism.

According to a preferable technical scheme, the evaporation mechanism comprises a supporting seat, a feeding unit, a heating unit and an evaporation boat, wherein the supporting seat is used for supporting the heating unit and the evaporation boat, the feeding unit is used for supplying plating materials to the evaporation boat, and the heating unit is used for heating the plating materials in the evaporation boat.

As a preferable technical solution, the driving mechanism includes a speed reduction motor disposed in the vacuum chamber, and the speed reduction motor is located between the two film conveying mechanisms; an output shaft of the speed reducing motor is vertically arranged upwards, one end of the supporting seat is connected with a platform, the feeding unit is arranged on the platform, a connecting hole is formed in the bottom of the platform, the upper end of the output shaft extends into the connecting hole, an annular outer tooth section is arranged on the periphery of the upper end of the output shaft, an annular inner tooth section is arranged on the inner wall of the connecting hole, and the annular inner tooth section is meshed with the annular outer tooth section; the feeding unit or the platform is provided with a limiting part for limiting the upper end of the output shaft so as to prevent the output shaft from penetrating out of the connecting hole; and the bottom of the supporting seat is provided with a roller.

As a preferred technical solution, the supporting seat is further used for supporting the feeding unit.

As a preferred technical solution, the supporting seat is further used for supporting the feeding unit; actuating mechanism is including setting up driving motor, gear and the gyro wheel of supporting seat bottom, driving motor's output shaft is the level setting, the gear housing is established the periphery of output shaft, the bottom is equipped with the bar spacing groove in the vacuum chamber, the spacing groove is used for right the both sides of gear are spacing, the length direction of spacing groove is unanimous with the width direction of film, is equipped with the rack that extends along its length direction in the spacing groove, the gear with rack toothing, the gyro wheel with bottom contact is in order to right in the vacuum chamber the supporting seat provides the support.

As a preferable technical scheme, two sides of the partition plate are respectively provided with a cylindrical protective cover, the protective covers are used for gathering the evaporated coating material generated by the evaporation mechanism to the film, and the inlet profile of the protective covers is matched with the profile of an evaporation source surface of the evaporation mechanism.

Preferably, the two sides of the shield are the partition plate and the inner wall of the vacuum chamber.

As a preferred technical scheme, the film conveying mechanism comprises an unwinding roller, a guide roller and a winding roller which are arranged in sequence.

The utility model has the advantages that: the utility model discloses a set up actuating mechanism drive coating by vaporization mechanism reciprocating motion between two film conveying mechanism to can realize carrying out the coating film to the film that two film conveying mechanism carried through a coating by vaporization mechanism, reduced manufacturing cost.

Drawings

The present invention will be further explained with reference to the drawings and examples.

Fig. 1 is a schematic front view of a vacuum coating apparatus according to a first embodiment of the present invention;

FIG. 2 is a right-side view of the film transfer mechanism, the partition plate, the second protection plate, and the evaporation boat of the vacuum deposition apparatus shown in FIG. 1;

FIG. 3 is a schematic structural view of the film feeding mechanism shown in FIG. 2;

FIG. 4 is a schematic top view of the evaporation boat of FIG. 1;

fig. 5 is a schematic front view of a vacuum deposition apparatus according to a second embodiment of the present invention;

fig. 6 is a schematic view of the structure of the vacuum coating apparatus shown in fig. 5 in which a gear is engaged with a rack.

The reference signs are:

10. a vacuum chamber; 12. a limiting groove; 122. a rack;

20. a film conveying mechanism; 22. unwinding rollers; 23. a first guide roller; 24. a second guide roller; 25. a third guide roller; 26. a wind-up roll; 27. a fourth guide roller; 28. a fifth guide roller;

30. an evaporation mechanism; 32. a supporting seat; 321. a platform; 322. a roller; 34. a supply unit; 36. a heating unit; 38. evaporating the boat; 384. a geometric figure;

42. a reduction motor; 44. an output shaft;

50. a partition plate;

60. a second guard plate;

72. a drive motor; 73. a gear; 74. a roller;

100. a film.

Detailed Description

The conception, the specific structure, and the resulting technical effects of the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and other embodiments obtained by those skilled in the art without inventive labor based on the embodiments of the present invention all belong to the protection scope of the present invention. In addition, all the connection/connection relations referred to in the patent do not mean that the components are directly connected, but mean that a better connection structure can be formed by adding or reducing connection auxiliary components according to specific implementation conditions. The utility model discloses each technical feature in the creation can the interactive combination under the prerequisite that does not contradict conflict each other.

First embodiment

Referring to fig. 1 to 3, a vacuum coating apparatus according to a first embodiment of the present invention includes a vacuum chamber 10, and two film conveying mechanisms 20, an evaporation mechanism 30, and a driving mechanism disposed in the vacuum chamber 10. Two film feeding mechanisms 20 are respectively located at the left and right sides within the vacuum chamber 10. The evaporation mechanism 30 is used to generate an evaporation material and to coat a metal layer on the lower surface of the film 100 conveyed by the film conveying mechanism 20, thereby coating the film 100. The plating material used for evaporation is, for example, aluminum wire or the like. The driving mechanism is used for driving the vapor deposition mechanism 30 to the lower side of the film conveying mechanism 20. When the deposition mechanism 30 is located below the left film transfer mechanism 20 in the vacuum chamber 10, the deposition mechanism 30 is used to deposit a film 100 on the left film transfer mechanism 20, and when the deposition mechanism 30 is located below the right film transfer mechanism 20 in the vacuum chamber 10, the deposition mechanism 30 is used to deposit a film 100 on the right film transfer mechanism 20, so that the films 100 transferred by the two film transfer mechanisms 20 can be deposited by one deposition mechanism 30.

In this embodiment, both of the film feeding mechanisms 20 have a film coating region, and the evaporation mechanism 30 is used to supply an evaporation material to the film coating region. The sectional shape of the film deposition region is rectangular, and when the vapor deposition mechanism 30 is positioned below the left film transport mechanism 20 in the vacuum chamber 10, the vapor deposition mechanism 30 is used to deposit a film 100 in the film deposition region on the left film transport mechanism 20, and when the vapor deposition mechanism 30 is positioned below the right film transport mechanism 20 in the vacuum chamber 10, the vapor deposition mechanism 30 is used to deposit a film 100 in the film deposition region on the right film transport mechanism 20.

In the actual coating operation, for convenience of description, the film feeding mechanism 20 located on the left side in the vacuum chamber 10 and the film feeding mechanism 20 located on the right side in the vacuum chamber 10 are respectively defined as a left film feeding mechanism 20 and a right film feeding mechanism 20, the coating area of the left film feeding mechanism 20 is defined as a left coating area, the coating area of the right film feeding mechanism 20 is defined as a right coating area, the film 100 fed by the left film feeding mechanism 20 is defined as a left film 100, the film 100 fed by the right film feeding mechanism 20 is defined as a right film 100, and it is assumed that the length of the left film 100 located in the left coating area and the length of the right film 100 located in the right coating area are both a. When the driving mechanism drives the evaporation mechanism 30 to be located below the left film conveying mechanism 20, the left film conveying mechanism 20 stops working, and the evaporation mechanism 30 can perform film coating on the left film 100 located in the left film coating area, wherein the film coating length is a. After the left film 100 in the left film coating area is coated, the evaporation mechanism 30 is driven to be located below the right film conveying mechanism 20 by the driving mechanism, and the right film conveying mechanism 20 stops working. In the process of coating the left film 100 in the left coating area and in the process of driving the evaporation mechanism 30 to be located below the right film conveying mechanism 20 through the driving mechanism, the right film 100 travels by a length a under the conveying action of the right film conveying mechanism 20, so that the uncoated right film 100 can be moved into the right coating area, and thus the right film 100 located in the right coating area can be coated through the evaporation mechanism 30, and the coating length is a. After the right film 100 in the right film coating region is coated, the driving mechanism drives the evaporation mechanism 30 to be located below the left film conveying mechanism 20 again, and the left film conveying mechanism 20 stops operating again. In the process of coating the right film 100 in the right film coating area and in the process of driving the evaporation mechanism 30 to be positioned below the left film conveying mechanism 20 through the driving mechanism, the left film 100 travels by the length a under the conveying action of the left film conveying mechanism 20, so that the left film 100 which is not coated can be moved to the left film coating area, and thus, the left film 100 in the left film coating area can be coated again through the evaporation mechanism 30, and the coating length is a. After the left film 100 in the left film coating area is coated, the evaporation mechanism 30 is driven again to be positioned below the right film 100 conveying mechanism through the driving mechanism, so that the right film 100 in the right film coating area can be coated again. By alternately performing the left and right coating in this manner, the film 100 conveyed by the two film conveying mechanisms 20 can be coated by one deposition mechanism 30.

The utility model discloses a set up actuating mechanism drive coating by vaporization mechanism 30 and carry out reciprocating motion between two film conveying mechanism 20 to can realize carrying out the coating film to film 100 that two film conveying mechanism 20 carried through a coating by vaporization mechanism 30, reduced manufacturing cost.

The film conveying mechanism 10 includes an unwinding roller 22, a guide roller assembly, and a winding roller 26, which are disposed in this order from front to back. The guide roller assembly includes a first guide roller 23, a second guide roller 24, and a third guide roller 25, which are disposed in this order from front to rear. The second guide roller 24 is located below the first guide roller 23 and the third guide roller 25. The unwinding roller 22 is used for unwinding the film 100, and the film 100 unwound from the unwinding roller 22 may sequentially pass through the upper surface of the first guide roller 23, the lower surface of the second guide roller 24, and the upper surface of the third guide roller 25 and be wound around the winding roller 26 to be wound by the winding roller 26. The area between the first guide roller 23 and the third guide roller 25 is a plating area.

In other embodiments, the second guide roller 24 may be omitted, the first guide roller 23 and the third guide roller 25 have the same height, and the film is horizontally arranged, and the region between the first guide roller 23 and the third guide roller 25 is a coating region.

With the structure of the film conveying mechanism 20, in the process of coating the film 100 with the evaporation coating material generated by the evaporation mechanism 30, the first guide roller 23 and the third guide roller 25 can prevent all or most of the evaporation coating material from diffusing out of the first guide roller 23 and the third guide roller 25, so that loss of all or most of the evaporation coating material can be avoided, and the production cost is further reduced. The reason that all the evaporation plating materials can be blocked, namely, the loss of all the evaporation plating materials is avoided is as follows: the evaporation coating material is less and forms a coating film quickly after reaching the film 100, or the evaporation source surface is smaller than the coating area and forms a coating film in the process of diffusion of the evaporation coating material on the evaporation source surface. When the first guide roll 23 and the third guide roll 25 block all the evaporated coating materials, the film 100 in the area where the film is not coated by the evaporated coating materials can be prevented from being coated.

The evaporation source surface of the evaporation mechanism 30 is rectangular, and the size of the evaporation source surface is adapted to the size of the film coating area. The geometric figure 384 formed by the projection of the plating material in the evaporation boat 38 of the evaporation mechanism 30 on the horizontal plane is the evaporation source surface, as shown in fig. 4. When the length direction of the evaporation source surface of the evaporation mechanism 30 is the same as the length direction of the film 100, the distance between the first guide roller 23 and the third guide roller 25 is matched with the length dimension of the evaporation source surface of the evaporation mechanism 30, and the width dimension of the evaporation source surface is matched with the width dimension of the film, and this arrangement can realize uniform film coating. It can be understood that when the width direction of the evaporation source surface of the evaporation mechanism 30 is the same as the length direction of the film 100, the distance between the first guide roller 23 and the third guide roller 25 is matched with the width dimension of the evaporation source surface of the evaporation mechanism 30, and the length dimension of the evaporation source surface is matched with the width dimension of the film 100, this arrangement can also achieve uniform coating.

In another embodiment, the evaporation source surface is larger in size than the coating region, and covers the coating region.

In this embodiment, the guide roller assembly of the film conveying mechanism 20 further includes a fourth guide roller 27 and a fifth guide roller 28, the fourth guide roller 27 is located between the unwinding roller 22 and the first guide roller 23, the fifth guide roller 28 is located between the third guide roller 25 and the winding roller 26, and the film 100 unwound from the unwinding roller 22 can sequentially pass through the lower surface of the fourth guide roller 27, the upper surface of the first guide roller 23, the lower surface of the second guide roller 24, the upper surface of the third guide roller 25, and the lower surface of the fifth guide roller 28 to bypass and be wound around the winding roller 26. Tensioning of the film 100 is achieved by the provision of a fourth guide roll 27 and a fifth guide roll 28.

The unwinding roller 22 is flush with the winding roller 26, the first guide roller 23 is flush with the third guide roller 25, and the fourth guide roller 27 is flush with the fifth guide roller 28. The distance from the fourth guide roller 27 to the inner bottom of the vacuum chamber 10 is shorter than the distance from the first guide roller 23 to the inner bottom of the vacuum chamber 10, and the distance from the first guide roller 23 to the inner bottom of the vacuum chamber 10 is shorter than the distance from the unwinding roller 22 to the inner bottom of the vacuum chamber 10. The distance between the first guide roller 23 and the second guide roller 24 is equal to the distance between the second guide roller 24 and the third guide roller 25, and uniform coating can be achieved.

In other embodiments, the guide roller assembly may include only the first guide roller 23 and the third guide roller 25, both of which are located at the same horizontal plane, and the film 100 is also horizontal.

Further, a vertical partition 50 is provided between the two film feeding mechanisms 20. When the evaporation mechanism 30 is used to coat the film 100 on one of the film conveying mechanisms 20, the partition plate 50 is arranged to prevent the evaporation coating material generated by the evaporation mechanism 30 from diffusing to the other film conveying mechanism 20, so as to prevent the evaporation coating material from coating the film 100 on the other film conveying mechanism 20.

In this embodiment, the evaporation mechanism 30 includes a support base 32, a feeding unit 34, a heating unit 36, and an evaporation boat 38. A heating unit 36 is disposed on top of the support base 32, and an evaporation boat 38 is disposed on top of the heating unit 36. The support base 32 supports the heating unit 36 and the evaporation boat 38. The supply unit 34 is used to supply the plating material to the evaporation boat 38, and the heating unit 36 is used to heat the plating material inside the evaporation boat 38. The supply unit 34 may be a general-purpose supply, and the heating unit 36 may be a general-purpose heater.

The driving mechanism includes a reduction motor 42 provided at the bottom in the vacuum chamber 10, and the reduction motor 42 is located between the two film feeding mechanisms 20. Output shaft 44 of gear motor 42 sets up vertically upwards, the bottom is parallel arrangement in supporting seat 32 and the vacuum chamber 10, and the one end of supporting seat 32 is connected with platform 321, the preferred top that sets up at platform 321 of feed unit 34, the bottom of platform 321 is equipped with the connecting hole, in the upper end of output shaft 44 stretches into the connecting hole from up down, the upper end periphery of output shaft 44 is equipped with annular outer tooth section, the inner wall of connecting hole is equipped with annular interior tooth section, tooth section and the meshing of annular outer tooth section in the annular. The supply unit 34 or the platform 321 is provided with a limiting portion for limiting the upper end of the output shaft 44 to prevent the output shaft 44 from passing through the connecting hole. The bottom of the support base 32 is provided with a roller 322, and the roller 322 contacts the bottom of the vacuum chamber 10 to support the support base 32. When the reduction motor 42 rotates, the platform 321 can be driven to rotate horizontally by the output shaft 44, the annular outer tooth section and the annular inner tooth section, so that the supporting base 32 can be driven to rotate horizontally by the platform 321, and the evaporation mechanism 30 can be driven to be located below the film conveying mechanism 20 on the left side in the vacuum chamber 10 and below the film conveying mechanism 20 on the right side in the vacuum chamber 10.

Specifically, for example, when the reduction motor 42 rotates forward, the output shaft 44, the annular outer tooth section and the annular inner tooth section can drive the platform 321 to rotate horizontally in the clockwise direction, so that the platform 321 can drive the support seat 32 to rotate horizontally in the clockwise direction, and the evaporation mechanism 30 can be driven to a position below the film conveying mechanism 20 located on the left side in the vacuum chamber 10; when the speed reducing motor 42 rotates reversely, the platform 321 can be driven to horizontally rotate along the counterclockwise direction under the action of the output shaft 44, the annular outer tooth section and the annular inner tooth section, so that the supporting seat 32 can be driven to horizontally rotate along the counterclockwise direction through the platform 321, the evaporation mechanism 30 can be driven to the position below the right film conveying mechanism 20 in the vacuum chamber 10, and the position of the evaporation mechanism 30 below the left film conveying mechanism 20 and the position of the evaporation mechanism 30 below the right film conveying mechanism 20 are symmetrical about the axis of the output shaft 44.

The number of rollers 322 at the bottom of the support base 32 can be set according to practical conditions.

In other embodiments, the connecting hole may be a blind hole, so that the position-limiting portion may not be disposed on the feeding unit 34 or the platform 321.

In other embodiments, the feeding unit 34 may also be disposed on the top of the supporting base 32, so that the feeding unit 34 may also be supported by the supporting base 32, such that the connecting hole is disposed on the bottom of the supporting base, and the feeding unit 34 is provided with a limiting portion for limiting the upper end of the output shaft 44 to prevent the output shaft 44 from passing through the connecting hole.

Further, cylindrical shields are provided on the left and right sides of the partition 50, respectively. The two protective covers correspond to the coating areas of the two film conveying mechanisms 20 respectively. The protective cover is used for gathering the evaporation coating materials generated by the evaporation mechanism 30 to the film 100, so that uniform coating is realized, and waste of the evaporation coating materials can be avoided. The inlet profile of the shield is adapted to the profile of the evaporation source surface of the evaporation mechanism 30, and the evaporated coating material can enter from the inlet of the shield.

Wherein, the protection cover located at the left side of the partition plate 50, wherein two sides of the protection cover are the partition plate 50 and the left inner wall of the vacuum chamber 10, the other two sides are respectively two first protection plates, one end of each of the two first protection plates is connected with the left side surface of the partition plate 50, and the other end is connected with the left inner wall of the vacuum chamber 10. And a shield positioned at the right side of the partition plate 50, wherein two sides of the shield are the partition plate 50 and the right inner wall of the vacuum chamber 10, and the other two sides are two second protection plates 60, respectively, as shown in fig. 2, one end of the two second protection plates 60 is connected to the right side surface of the partition plate 50, and the other end is connected to the right inner wall of the vacuum chamber 10. The top ends of the two first shielding plates are respectively adjacent to the first guide roller 23 and the third guide roller 25 of the film feeding mechanism 20 located on the left side in the vacuum chamber 10. The top ends of the two second shielding plates 60 are respectively adjacent to the first guide roller 23 and the third guide roller 25 of the film feeding mechanism 20 located at the right side in the vacuum chamber 10. The inlets of the corresponding hoods are formed between the bottom ends of the two first guard plates and between the bottom ends of the two second guard plates 60, respectively.

Two first guard plates are parallel arrangement, and two second guard plates 60 are parallel arrangement, therefore the cross sectional shape of protection casing is the rectangle, can understand, forms an contained angle between two first guard plates, forms an contained angle between two second guard plates 60, therefore the cross sectional shape of protection casing is trapezoidal.

Second embodiment

Referring to fig. 5, the difference between the present embodiment and the first embodiment is that the feeding unit 34 of the present embodiment is disposed on the top of the supporting base 32 to support the supporting base 32. The driving mechanism comprises a driving motor 72 arranged at the bottom of the supporting seat 32, a gear 73 and four rollers 74 arranged at four corners of the bottom of the supporting seat 32, an output shaft of the driving motor 72 is arranged horizontally, the gear 73 is sleeved on the periphery of the output shaft, a strip-shaped limiting groove 12 is arranged at the bottom in the vacuum chamber 10, the length direction of the limiting groove 12 is consistent with the width direction of the film 100, a rack 122 extending along the length direction is arranged in the limiting groove 12, the gear 73 is meshed with the rack 122, and as shown in fig. 6, the two sides of the gear 73 are limited by the limiting groove 12. Four rollers 74 contact the bottom of the vacuum chamber 10 to provide support for the support pedestal 32. The driving motor 72 can drive the gear 73 to rotate through the output shaft, and the rotation of the gear 73 can drive the supporting base 32 to move left and right along the rack 122, so that the evaporation mechanism 30 can be driven to be positioned below the film conveying mechanism 20 positioned on the left side in the vacuum chamber 10 and below the film conveying mechanism 20 positioned on the right side in the vacuum chamber 10.

Specifically, for example, when the driving motor 72 rotates forward, the gear 73 can be driven by the output shaft to rotate counterclockwise, so that the gear 73 can drive the supporting base 32 to move leftward along the rack 122, and the evaporation mechanism 30 can be driven to a position below the film conveying mechanism 20 located on the left side in the vacuum chamber 10; when the driving motor 72 rotates reversely, the gear 73 can be driven by the output shaft to rotate clockwise, so that the gear 73 can drive the supporting base 32 to move rightwards along the rack 122, and the evaporation coating mechanism 30 can be driven to the lower part of the film conveying mechanism 20 positioned at the right side in the vacuum chamber 10.

While the preferred embodiments of the present invention have been described, the present invention is not limited to the above embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and such equivalent modifications or substitutions are intended to be included within the scope of the present invention as defined by the appended claims.

Claims

1. The utility model provides a vacuum coating device, includes the vacuum chamber, its characterized in that still includes and sets up evaporation plating mechanism, actuating mechanism and two film conveying mechanism in the vacuum chamber, two film conveying mechanism are located respectively left side and right side in the vacuum chamber, actuating mechanism is used for with evaporation plating mechanism drives to film conveying mechanism's below, and when evaporation plating mechanism is located the indoor left film conveying mechanism's of vacuum chamber below, evaporation plating mechanism is used for right film on the left film conveying mechanism carries out the coating film, and when evaporation plating mechanism is located the indoor right side of vacuum chamber below of right film conveying mechanism, evaporation plating mechanism is used for right film on the film conveying mechanism on right side carries out the coating film.

2. The vacuum coating apparatus according to claim 1, wherein the evaporation source surface of the evaporation mechanism has a rectangular shape, and the size of the evaporation source surface is adapted to the size of the thin film coating region.

3. The vacuum coating apparatus according to claim 1, wherein a vertical partition plate is provided between the two film feeding mechanisms, and when the coating mechanism coats the film on one of the film feeding mechanisms, the partition plate blocks the evaporated coating material generated by the coating mechanism from diffusing toward the other film feeding mechanism.

4. The vacuum coating apparatus according to any one of claims 1 to 3, wherein the evaporation mechanism comprises a support base for supporting the heating unit and the evaporation boat, a supply unit for supplying the evaporation boat with the coating material, a heating unit for heating the coating material in the evaporation boat, and an evaporation boat.

5. The vacuum plating device according to claim 4, wherein the drive mechanism includes a reduction motor disposed in the vacuum chamber, the reduction motor being located between the two film feeding mechanisms; an output shaft of the speed reducing motor is vertically arranged upwards, one end of the supporting seat is connected with a platform, the feeding unit is arranged on the platform, the platform is provided with a connecting hole, the upper end of the output shaft extends into the connecting hole from bottom to top, an annular outer tooth section is arranged on the periphery of the upper end of the output shaft, an annular inner tooth section is arranged on the inner wall of the connecting hole, and the annular inner tooth section is meshed with the annular outer tooth section; the feeding unit or the platform is provided with a limiting part for limiting the upper end of the output shaft so as to prevent the output shaft from penetrating out of the connecting hole; and the bottom of the supporting seat is provided with a roller.

6. The vacuum plating apparatus according to claim 4, wherein the support base is further configured to support the supply unit.

7. The vacuum plating device according to claim 4, wherein the support base is further configured to support the supply unit; actuating mechanism is including setting up driving motor, gear and the gyro wheel of supporting seat bottom, driving motor's output shaft is the level setting, the gear housing is established the periphery of output shaft, the bottom is equipped with the bar spacing groove in the vacuum chamber, the spacing groove is used for right the both sides of gear are spacing, the length direction of spacing groove is unanimous with the width direction of film, is equipped with the rack that extends along its length direction in the spacing groove, the gear with rack toothing, the gyro wheel with bottom contact is in order to right in the vacuum chamber the supporting seat provides the support.

8. The vacuum coating apparatus according to claim 3, wherein a cylindrical shield is provided on both sides of the partition plate, the shield being adapted to collect the evaporated coating material generated by the evaporation mechanism to the film, and an inlet profile of the shield is adapted to a profile of an evaporation source surface of the evaporation mechanism.

9. The vacuum coating apparatus according to claim 8, wherein the shield is provided on two sides thereof with the partition plate and the inner wall of the vacuum chamber.

10. The vacuum coating apparatus according to claim 1, wherein the film feeding mechanism comprises an unwinding roller, a guide roller assembly and a winding roller, which are arranged in sequence.