CN218014630U - Laser cleaning device for quartz inner tube - Google Patents
Laser cleaning device for quartz inner tube Download PDFInfo
- Publication number
- CN218014630U CN218014630U CN202221196385.XU CN202221196385U CN218014630U CN 218014630 U CN218014630 U CN 218014630U CN 202221196385 U CN202221196385 U CN 202221196385U CN 218014630 U CN218014630 U CN 218014630U
- Authority
- CN
- China
- Prior art keywords
- inner tube
- laser
- quartz inner
- fixed end
- laser irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Cleaning In General (AREA)
Abstract
The utility model discloses a laser belt cleaning device of quartz inner tube belongs to cleaning equipment technical field, and it includes: the lifting driving component is provided with a first fixed end and a first movable end, and the first movable end can move up and down relative to the first fixed end; the translation driving assembly is provided with a second fixed end and a second movable end, the second movable end can move left and right relative to the second fixed end, and the second fixed end is connected with the first movable end; the rotary driving component is provided with a third fixed end and a third movable end, the third movable end can rotate around a left-right extending axis relative to the third fixed end, and the third fixed end is connected with the second movable end; and the laser irradiation assembly is connected with the third fixed end, and the laser irradiation direction of the laser irradiation assembly is perpendicular to the rotation axial direction of the laser irradiation assembly. The utility model discloses can effectively clear away the organic small molecule material on the quartz inner tube.
Description
Technical Field
The utility model relates to a cleaning equipment technical field, in particular to laser belt cleaning device of quartz inner tube.
Background
The performance of the organic small molecule material used for manufacturing the organic electroluminescent (OLED) display has high requirements on the cleanliness of the manufacturing environment and the stability of the production process. In the prior art, the purification of organic electroluminescent small molecule materials is generally performed by putting organic small molecule raw materials into a tube and heating and purifying the organic small molecule raw materials under high vacuum, and meanwhile, the purification process and related equipment are performed in a clean workshop.
The equipment adopted by the high vacuum heating purification mode generally adopts a structure with at least two layers of pipes. The outer layer pipe is the fixed pipe of equipment, and its effect appears obvious gas leakage phenomenon in order to provide relative inclosed space, when avoiding high vacuum, therefore outer layer pipe generally adopts integrated into one piece's structure, reduces the junction as far as possible, avoids repeatedly dismantling the installation simultaneously and leads to the circumstances such as leaking to take place, generally reduces the dismantlement as far as possible after the equipment fixing. The inner tube has the functions of serving as a carrier for purifying materials, distinguishing materials with different purity contents and the like, and is generally formed by multi-section combination and placed into the outer tube for use.
In the production process, an operator needs to put raw materials into the inner-layer pipe, then put the inner-layer pipe into the outer-layer pipe for purification, take the inner-layer pipe out of the outer-layer pipe after production is finished, and carry out operations such as blanking, cleaning and loading. The outer layer pipe is generally baked, wiped by solvent and the like because of fixed installation, and the inner layer pipe is taken out and cleaned independently.
The inner layer pipe is generally cleaned by solvent soaking, brush scrubbing, high-temperature baking and the like. However, organic electroluminescent small-molecule materials are generally not easily soluble in organic solvents and water, so that only a small part of materials can be relatively dissolved out by solvent soaking, the efficiency is low, and meanwhile, waste solvents need to be treated after cleaning, so that the organic electroluminescent small-molecule materials are not environment-friendly and the cost is increased.
The inner layer tube is generally made of quartz glass, a substrate adopted in the process of manufacturing the display is glass, and the organic electroluminescent micromolecule material needs to be tightly attached to the substrate, so that the micromolecule material can be tightly attached to the inner layer tube and is not easy to be washed clean; moreover, the inner tube, which is required to distinguish between materials of different purity levels, is generally designed with a profiled structure (e.g., a quartz inner tube structure as disclosed in the patent with publication number CN 215841704U), and therefore, dead space still exists during the brushing process.
The conventional method for baking and cleaning the quartz inner tube at high temperature only can change organic small molecular materials attached to the surface of the tube wall into steam and then move the steam from one space position to another space position, so that the oven still has the requirement of cleaning, and the inner tube filled with different materials can generate certain cross contamination when being baked in the oven, so that the quality of products produced subsequently is obviously fluctuated without reasons.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a laser belt cleaning device of quartz inner tube to solve one or more technical problem that exist among the prior art.
The technical scheme adopted for solving the technical problems is as follows:
the utility model discloses a laser cleaning device of quartz inner tube, it includes:
the lifting driving component is provided with a first fixed end and a first movable end, and the first movable end can move up and down relative to the first fixed end;
the translation driving assembly is provided with a second fixed end and a second movable end, the second movable end can move left and right relative to the second fixed end, and the second fixed end is connected with the first movable end;
the rotary driving component is provided with a third fixed end and a third movable end, the third movable end can rotate around a left-right extending axis relative to the third fixed end, and the third fixed end is connected with the second movable end;
the laser irradiation assembly is connected with the third fixed end, and the laser irradiation direction of the laser irradiation assembly is perpendicular to the rotating axial direction of the laser irradiation assembly.
The utility model discloses following beneficial effect has at least: after the quartz inner tube is horizontally placed, the height position of the laser irradiation component is adjusted by the lifting driving component, the laser irradiation component is driven by the translation driving component to move to the inner cavity of the quartz inner tube by the translation driving component, the laser irradiation component is started, a laser beam emitted by the laser irradiation component irradiates the tube wall of the quartz inner tube, then the laser irradiation component is driven by the rotation driving component to rotate around the axis extending from left to right, so that laser irradiation is carried out on the inner peripheral wall surface of the quartz inner tube, organic small molecular materials attached to the tube wall of the quartz inner tube are made to absorb energy under the concentrated irradiation effect of the laser to generate physical reaction and chemical reaction, the organic small molecular materials can generate carbon dioxide by chemical reaction with oxygen in the air, the carbon dioxide can be rapidly extracted by the tail gas treatment device, the effect of removing the organic small molecular materials on the quartz inner tube is achieved, and the cleaning problem of the quartz inner tube of the purification equipment is effectively solved.
As a further improvement of the above technical scheme, the laser cleaning device for the quartz inner tube further comprises a laser receiver, a box body and a controller; the box body is provided with a cavity for containing a quartz inner tube, an opening of the cavity is arranged towards the left or the right, the inner peripheral wall surface of the cavity is a reflecting surface, the laser receiver is arranged on one side of the laser irradiation assembly and used for receiving reflected laser beams, and the laser receiver and the rotary driving assembly are respectively and electrically connected with the controller.
The quartz inner tube is arranged in the cavity of the box body, the laser receiver is arranged on one side of the laser irradiation assembly, when laser beams emitted by the laser irradiation assembly irradiate the wall of the quartz inner tube which is cleaned, the laser can penetrate through the wall of the quartz inner tube and be reflected by the reflecting surface of the box body, the laser beams are received by the laser receiver, the laser receiver is triggered, the laser receiver sends signals to the controller, the controller generates control instructions and sends the control instructions to the rotary driving assembly, the rotary driving assembly drives the laser irradiation assembly to rotate by a certain angle, laser irradiation is carried out on the uncleaned wall of the quartz inner tube, and the aim of automatically detecting the cleaned quartz inner tube is achieved.
As a further improvement of the technical scheme, the box body comprises a bottom plate, side plates and a top plate, the number of the side plates is three, the side plates are arranged above the bottom plate, the top plate is arranged above the side plates, the three side plates, the bottom plate and the top plate are enclosed to form the box body, the top plate is detachably connected to the side plates, and the side plates, the bottom plate and the top plate are all provided with reflecting films.
The three side plates, the bottom plate and the top plate jointly form a box body, a quartz inner tube to be cleaned is placed in a cavity of the box body through an opening of the box body, when a laser irradiation assembly is adopted to irradiate the tube wall of the quartz inner tube, if the tube wall of the quartz inner tube is cleaned, a laser beam can penetrate through the tube wall of the quartz inner tube and is reflected to a laser receiver by a reflecting film in the box body, so that the laser receiver is prompted to generate a detection signal and send the detection signal to a controller, and the automatic detection cleaning effect is achieved; and the top can be dismantled and connect in the curb plate, can dismantle the roof, conveniently places the quartz inner tube in or takes out in the cavity of box.
As a further improvement of the above technical solution, the rotation driving assembly includes a first servo motor and a rotation platform, the first servo motor has a first output shaft, the first output shaft is in transmission connection with the rotation platform to drive the rotation platform to rotate around an axis extending from left to right, and the laser irradiation assembly is disposed on the rotation platform. In the rotation driving assembly structure, a first servo motor drives a rotation platform to rotate around a left-right extending axis through a first output shaft, so that the rotation platform drives a laser irradiation assembly to rotate, the laser irradiation assembly is enabled to irradiate the inner peripheral wall surface of a quartz inner tube, and organic small molecular materials attached to the quartz inner tube are sufficiently removed.
As a further improvement of the above technical solution, the translation driving assembly includes a second servo motor and a translation rod, the second servo motor has a second output shaft, and the second output shaft is in transmission connection with the translation rod to drive the translation rod to move in the left-right direction. In the structure of the translation driving assembly, the second servo motor can drive the translation rod to move back and forth along the left and right directions when in work, so that the position of the laser irradiation assembly in the left and right directions can be adjusted, and the laser irradiation assembly can complete the cleaning work on different areas of the quartz inner tube.
As a further improvement of the above technical solution, the lifting driving assembly includes a third servo motor and a lifting rod, the third servo motor has a third output shaft, and the third output shaft is in transmission connection with the lifting rod to drive the lifting rod to move in the up-and-down direction.
In the lifting driving assembly structure, the third servo motor can drive the lifting rod to move upwards or downwards to adjust the height position of the laser irradiation assembly relative to the wall of the quartz inner tube, so that laser beams emitted by the laser irradiation assembly effectively irradiate organic small molecular materials attached to the wall of the quartz inner tube, the organic small molecular materials can absorb energy to generate physical reaction and chemical reaction, and the organic small molecular materials leave the wall of the quartz inner tube, so that the purpose of removing the residual organic small molecular materials in the quartz inner tube is achieved.
Drawings
The invention will be further described with reference to the accompanying drawings and examples;
fig. 1 is a perspective view of a laser cleaning apparatus for a quartz inner tube according to an embodiment of the present invention in a state of cleaning the quartz inner tube;
fig. 2 is a perspective view of a laser cleaning device for a quartz inner tube according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a laser cleaning apparatus for cleaning a quartz inner tube according to an embodiment of the present invention.
The drawings are numbered as follows: 100. a quartz inner tube; 200. a lift drive assembly; 210. a third servo motor; 220. a screw rod; 230. a slider; 300. a translation drive assembly; 310. a second servo motor; 320. a translation rod; 330. a slide base; 400. a rotary drive assembly; 410. a first servo motor; 420. rotating the platform; 500. a laser irradiation assembly; 600. a box body; 700. mounting a plate; 800. a reflective film.
Detailed Description
This section will describe in detail the embodiments of the present invention, the preferred embodiments of which are shown in the attached drawings, which are used to supplement the description of the text part of the specification with figures, so that one can visually and vividly understand each technical feature and the whole technical solution of the present invention, but it cannot be understood as a limitation to the scope of the present invention.
In the description of the present invention, it should be understood that the orientation or positional relationship indicated with respect to the orientation description, such as up, down, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, if words such as "a plurality" are used, the meaning is one or more, the meaning of a plurality of words is two or more, the meaning of more than, less than, more than, etc. is understood as not including the number, and the meaning of more than, less than, more than, etc. is understood as including the number. If any description to first, second and third is only for the purpose of distinguishing technical features, it is not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
It should be noted that, in the figure, the X direction is from the back side of the laser cleaning device of the quartz inner tube to the front side; the Y direction is from the left side of the laser cleaning device of the quartz inner tube to the right side; the Z direction is directed from the lower side of the laser cleaning device of the quartz inner tube to the upper side.
In the description of the present invention, unless there is an explicit limitation, the words such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in combination with the specific contents of the technical solution.
Referring to fig. 1 to 3, several examples of the laser cleaning apparatus for the quartz inner tube according to the present invention will be described.
As shown in fig. 1 to fig. 3, an embodiment of the present invention provides a laser cleaning device for a quartz inner tube, which is used for cleaning the quartz inner tube 100 in a purification apparatus, and can well clean organic electroluminescent small molecule materials attached to the quartz inner tube 100.
The laser cleaning device of the quartz inner tube comprises: a lift drive assembly 200, a translation drive assembly 300, a rotation drive assembly 400, and a laser irradiation assembly 500.
Wherein, lift drive assembly 200 has first stiff end and first expansion end, and first expansion end can be followed the upper direction or the lower direction removes relatively first stiff end. Specifically, the elevation driving assembly 200 may be an electric cylinder including the third servo motor 210 and the elevation bar. The third servo motor 210 has a third output shaft, and the third output shaft is in transmission connection with the lifting rod to drive the lifting rod to move along the up-down direction, at this time, the third servo motor 210 is a first fixed end, and the lifting rod is a first movable end. The elevation driving assembly 200 can precisely control the up-and-down movement distance of the elevation rod by the arrangement of the third servo motor 210.
In other embodiments, the lifting driving assembly 200 may be an existing screw driving mechanism, and may drive the screw 220 to rotate through the third servo motor 210, the third servo motor 210 is installed on the fixing base, the screw 220 is installed on the fixing base through a bearing, the sliding block 230 is connected to a sliding rail on the fixing base in a sliding manner, the screw 220 may drive the sliding block 230 in threaded connection with the screw 220 to move linearly when rotating, at this time, the third servo motor 210 is a first fixed end, and the sliding block 230 is a first movable end.
The second fixed end of the translation driving component 300 is connected and fixed with the first movable end of the lifting driving component 200, so that the translation driving component 300 can move back and forth along the up-down direction under the driving action of the lifting driving component 200, and the height position of the translation driving component 300 can be adjusted. In some embodiments, in order to reduce the load of the translation rod 320 and prevent the translation rod 320 from being bent due to an excessive force, the translation driving assembly 300 further includes a sliding base 330, the sliding base 330 is slidably connected to the first movable end (i.e., the sliding block 230) of the lifting driving assembly 200, so that the sliding base 330 can move in the left-right direction relative to the lifting driving assembly 200, and the translation rod 320 of the translation driving assembly 300 is connected to the sliding base 330, and the translation rod 320 can drive the sliding base 330 to move together.
The rotational drive assembly 400 has a third fixed end and a third movable end, the third movable end being capable of rotating clockwise or counterclockwise about a left-right extending axis with respect to the third fixed end. Specifically, the rotary drive assembly 400 includes a first servo motor 410 and a rotary platform 420. The first servo motor 410 has a first output shaft, and the first output shaft may be in transmission connection with the rotary platform 420 through a shaft coupling, a gear transmission structure, and the like, so as to drive the rotary platform 420 to rotate around an axis extending left and right. The rotation driving assembly 400 can precisely control the rotation angle of the rotation platform 420 by the arrangement of the first servo motor 410.
In this embodiment, the rotating platform 420 is installed on the installation base through a rotating shaft extending along the left-right direction, and the rotating platform 420 can rotate relative to the installation base, at this time, the installation base is a third fixed end, and the rotating platform 420 is a third movable end. First servo motor 410 passes through the bolt to be established on the mount pad, is equipped with driven gear in the pivot, and the output shaft of first servo motor 410 is equipped with the driving gear, and the driving gear is connected in order to form gear drive structure with driven gear meshing, and first servo motor 410 is at the during operation, orders about rotary platform 420 through gear drive structure and rotates around the pivot.
The third fixed end of the rotation driving component 400 is connected and fixed to the second movable end of the translation driving component 300, so that the rotation driving component 400 can move left or right during the operation of the translation driving component 300, and the position of the rotation driving component 400 in the left-right direction can be adjusted.
The laser irradiation assembly 500 is fixedly connected to the third fixed end of the rotation driving assembly 400, and specifically, the laser irradiation assembly 500 may be disposed on the rotation platform 420 of the rotation driving assembly 400 by a bolt, so that the laser irradiation assembly 500 can rotate around an axis extending left and right along with the rotation platform 420. Further, the laser irradiation direction of the laser irradiation assembly 500 is perpendicular to the rotational axis direction of the laser irradiation assembly 500.
Since the laser irradiation assembly 500 of the prior art includes a laser head and a lens assembly with adjustable focal length, the detailed structure and operation of the laser irradiation assembly 500 will be understood by those skilled in the art and will not be described herein. Laser irradiation assembly 500 is used in conjunction with a laser generator, which is connected to the laser head via a transmission fiber to enable the laser head to emit a laser beam.
Because laser generator places outside quartz inner tube 100, can directly place at the workstation, the laser head moves under the drive effect of lift drive assembly 200 and translation drive assembly 300, consequently, can set up the tank tow chain, establishes transmission fiber on the tank tow chain. In order to avoid the problem of serious winding of the transmission optical fiber at the laser head, the laser head can be controlled to rotate for a certain number of turns such as 1 turn and 2 turns along with the rotary driving assembly 400, and then the rotary driving assembly 400 drives the laser head to rotate reversely.
In the present embodiment, since it is necessary to break the carbon chains of the organic small molecule material adhered to the quartz inner tube 100 while the laser beam is inevitably irradiated to the tube wall of the quartz inner tube 100 in the process of cleaning the quartz inner tube 100, the energy density is selected to be 10 3 To 10 4 W/cm 2 The laser beam is a laser source, so that the organic small molecule material can be heated by laser irradiation, and then can be removed by physical reaction and chemical reaction, and the integrity of the quartz inner tube 100 is protected. In order to enable the organic small molecule material to absorb energy more quickly, a laser source with the wavelength less than 400nm is selected.
When the quartz inner tube 100 is cleaned under normal pressure and normal temperature, the quartz inner tube 100 can be horizontally placed on a workbench, and the opening of the quartz inner tube 100 faces to the left; then, starting the lifting driving assembly 200 and the translation driving assembly 300 to drive the laser head of the laser irradiation assembly 500 to extend into the tube cavity of the quartz inner tube 100; then, the laser irradiation assembly 500 is started, the laser head emits a laser beam, the laser beam directly irradiates the tube wall of the quartz inner tube 100, the organic small molecular material attached to the tube wall of the quartz inner tube 100 absorbs energy when irradiated by the laser beam, a part of the organic small molecular material undergoes sublimation physical reaction, a part of the organic small molecular material undergoes chemical reaction with oxygen in the air, carbon chains of the organic small molecular material are broken by heating and react with the oxygen to generate carbon dioxide, and at the moment, carbon dioxide adsorption can be performed through a tail gas treatment device, so that the removal of the organic small molecular material on the quartz inner tube 100 is completed.
Since the organic small molecule material may be attached to the inner peripheral wall surface of the quartz inner tube 100, the rotation driving assembly 400 is provided, the rotation driving assembly 400 drives the laser irradiation assembly 500 to rotate around the axis extending from left to right, and the laser irradiation direction of the laser irradiation assembly 500 is perpendicular to the rotation axial direction of the laser irradiation assembly 500, so that the laser irradiation assembly 500 can sufficiently clean the inner peripheral wall surface of the quartz inner tube 100. The quartz inner tube 100 has a plurality of purification regions along the length direction thereof, and after one purification region is cleaned, the translation driving assembly 300 drives the laser irradiation assembly 500 to move along the length direction of the quartz inner tube 100, so as to perform the organic small molecule material cleaning treatment on the next purification region.
The laser cleaning device for the quartz inner tube provided by the embodiment adopts the structural design, can overcome the problems of the existing cleaning method for the quartz inner tube 100, such as solvent soaking, scrubbing and high-temperature baking, and fully removes the organic small molecular materials attached to the quartz inner tube 100.
In some embodiments, the laser cleaning apparatus for quartz inner tube further comprises a laser receiver, a tank 600 and a controller.
The box 600 has a cavity, and an opening of the cavity is disposed toward the left or the right. In the present embodiment, the opening of the cavity faces in the leftward direction. The size of the cavity is sufficient to accommodate the quartz inner tube 100. The inner peripheral wall surface of the cavity is a reflecting surface, and the laser beam irradiated to the cavity wall surface can be reflected by the reflecting surface.
In this embodiment, the case 600 includes a bottom plate, a side plate, and a top plate, the bottom plate being provided with one, the top plate being provided with one, and the side plate being provided with three. The bottom plate is located below the side plates, the side plates are located below the top plate, and the bottom plate, the top plate and all the side plates jointly enclose a box body 600 with an opening facing to the left. The top plate and the side plates are detachably connected, such as in a bolt connection mode or a mortise connection mode. In other embodiments, the top panel directly overlies the side panels. With the arrangement, after the top plate is detached, the quartz inner tube 100 can be conveniently placed in or taken out of the cavity of the box body 600. Moreover, the side plates, the bottom plate and the top plate are all provided with a reflecting film 800, and the reflecting film 800 is positioned on the inner side surfaces of the side plates, the bottom plate and the top plate and can reflect laser beams. The inner side of the base plate may be a plane and the quartz inner tube 100 may be directly placed on the base plate. In other embodiments, the inner side surface of the bottom plate is a cambered surface, and the cambered surface is matched with the quartz inner tube 100, so that the quartz inner tube 100 can be stably placed on the bottom plate.
The laser receiver is provided at one side of the laser irradiation assembly 500 to receive the laser beam reflected by the reflective film 800, and the laser receiver is provided on the rotary stage 420 of the rotary driving assembly 400 like the laser irradiation assembly 500 to be rotatable together with the rotary stage 420.
The laser receiver and the rotation driving assembly 400 are electrically connected to the controller respectively, the laser receiver is equivalent to a detection unit, when the laser receiver receives a reflected laser beam, the laser receiver is triggered and generates a detection signal, the controller generates a control instruction after receiving the detection signal, and the rotation driving assembly 400 drives the laser irradiation assembly 500 and the laser receiver to rotate by a certain angle after receiving the control instruction.
It should be noted that, as shown in fig. 3, the quartz inner tube 100 is located in the box 600 and in a suspended state, so as to better distinguish the positional relationship among the box 600, the reflective film 800 and the quartz inner tube 100, and actually, the quartz inner tube 100 is directly placed on the bottom plate of the box 600. The case 600 and the elevation driving assembly 200 may be provided on the mounting plate 700.
Before cleaning the quartz inner tube 100, the quartz inner tube 100 is placed in the cavity of the box body 600, the laser beam emitted by the laser head of the laser irradiation assembly 500 irradiates towards the tube wall of the quartz inner tube 100 to remove the organic small molecule material attached to the tube wall, and after the organic small molecule material is removed, the tube wall of the quartz inner tube 100 is in a cleaned state, and at the moment, if the laser beam continues to irradiate, because the transparent quartz inner tube 100 has good light transmission performance, the laser beam can penetrate through the tube wall of the quartz inner tube 100 and is reflected by the reflecting surface of the box body 600; then the laser beam is received by the laser receiver, triggers the laser receiver, and lets the laser receiver send a signal to the controller, and the controller produces control command and sends to the rotation driving subassembly 400, and the rotation driving subassembly 400 drives laser irradiation subassembly 500 and laser receiver and rotates certain angle to carry out laser irradiation to the uncleaned pipe wall of quartz inner tube 100.
The arrangement of the laser receiver, the box body 600 with the reflecting surface and the controller can achieve the purpose of automatically detecting that the quartz inner tube 100 is cleaned.
It will be appreciated that the controller may be a PLC controller, capable of simple logic control functions, which may be located on the table with the laser receiver. The control mode of controller does not belong to the utility model discloses a protection scope belongs to prior art, the utility model discloses what claim is the connected mode of controller.
While the preferred embodiments of the present invention have been described, the present invention is not limited to the above-described embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and such equivalent modifications or substitutions are to be included within the scope of the present invention defined by the claims.
Claims (6)
1. The utility model provides a laser cleaning device of quartz inner tube which characterized in that includes:
the lifting driving component is provided with a first fixed end and a first movable end, and the first movable end can move up and down relative to the first fixed end;
the translation driving assembly is provided with a second fixed end and a second movable end, the second movable end can move left and right relative to the second fixed end, and the second fixed end is connected with the first movable end;
the rotary driving assembly is provided with a third fixed end and a third movable end, the third movable end can rotate around an axis extending from left to right relative to the third fixed end, and the third fixed end is connected with the second movable end;
the laser irradiation assembly is connected with the third fixing end, and the laser irradiation direction of the laser irradiation assembly is perpendicular to the rotation axial direction of the laser irradiation assembly.
2. The laser cleaning device for the quartz inner tube according to claim 1, further comprising a laser receiver, a box body and a controller; the box body is provided with a cavity for containing a quartz inner tube, the opening of the cavity is arranged towards the left or the right, the inner peripheral wall surface of the cavity is a reflecting surface, the laser receiver is arranged on one side of the laser irradiation assembly and used for receiving reflected laser beams, and the laser receiver and the rotary driving assembly are respectively electrically connected with the controller.
3. The laser cleaning device for the quartz inner tube according to claim 2, wherein the box body comprises a bottom plate, side plates and a top plate, the side plates are provided with three parts, the side plates are arranged above the bottom plate, the top plate is arranged above the side plates, the three parts of the side plates, the bottom plate and the top plate enclose the box body, the top plate is detachably connected to the side plates, and the side plates, the bottom plate and the top plate are all provided with reflecting films.
4. The laser cleaning device for the quartz inner tube of claim 1, wherein the rotary driving assembly comprises a first servo motor and a rotary platform, the first servo motor is provided with a first output shaft, the first output shaft is in transmission connection with the rotary platform so as to drive the rotary platform to rotate around an axis extending from left to right, and the laser irradiation assembly is arranged on the rotary platform.
5. The laser cleaning device for the quartz inner tube of claim 1, wherein the translation driving assembly comprises a second servo motor and a translation rod, the second servo motor is provided with a second output shaft, and the second output shaft is in transmission connection with the translation rod so as to drive the translation rod to move in the left-right direction.
6. The laser cleaning device for the quartz inner tube of claim 1, wherein the lifting driving assembly comprises a third servo motor and a lifting rod, the third servo motor has a third output shaft, and the third output shaft is in transmission connection with the lifting rod to drive the lifting rod to move in the up-and-down direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221196385.XU CN218014630U (en) | 2022-05-17 | 2022-05-17 | Laser cleaning device for quartz inner tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221196385.XU CN218014630U (en) | 2022-05-17 | 2022-05-17 | Laser cleaning device for quartz inner tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218014630U true CN218014630U (en) | 2022-12-13 |
Family
ID=84371663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221196385.XU Active CN218014630U (en) | 2022-05-17 | 2022-05-17 | Laser cleaning device for quartz inner tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218014630U (en) |
-
2022
- 2022-05-17 CN CN202221196385.XU patent/CN218014630U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108568969B (en) | 3D prints aftertreatment equipment | |
| CN214348371U (en) | Quartz tube cleaning device | |
| CN108838532B (en) | Laser-beam welding machine with clean function of laser lens | |
| CN218014630U (en) | Laser cleaning device for quartz inner tube | |
| CN116652413B (en) | Ceramic copper-clad carrier plate cutting and coding integrated equipment | |
| CN111515155A (en) | Turnover type ultrasonic cleaning method for PCB (printed Circuit Board) | |
| CN111215394A (en) | Novel laser type cleaning equipment | |
| CN111085507A (en) | Laser cleaning machine for cylindrical nickel screen | |
| CN108453390A (en) | A kind of full-automation formula laser marking machine | |
| CN117862682A (en) | Laser film removing equipment and method for lithium battery cell insulating protective film | |
| CN113369763A (en) | Boiler barrel welding synchronous flaw detection device | |
| CN110404887B (en) | Laser net washing machine | |
| CN115193826B (en) | Movable laser cleaning and rust removing equipment | |
| CN216299866U (en) | Online tire mold laser cleaning equipment | |
| CN216631963U (en) | Outdoor photovoltaic power generation component cleaning device | |
| CN216460586U (en) | Crystal support glue removing equipment | |
| CN213969497U (en) | Manual and automatic integrated laser welding machine | |
| CN212977808U (en) | 3D single-disc sweeping machine | |
| CN113909173A (en) | Automatic change brilliant support and remove gluey equipment | |
| CN112846507A (en) | Laser welding device is used in processing of car convenient to adjust | |
| CN110066120B (en) | Optical fiber preform pickling device and method | |
| CN218080940U (en) | Oxygen sensor laser-beam welding machine | |
| CN209849461U (en) | Laser cleaning workstation | |
| CN217251391U (en) | Laser cleaning device for surface of special pressure-bearing equipment | |
| CN220993494U (en) | Numerical control machine tool carrying base |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |