CN218014530U - Temperature control device of semiconductor cleaning equipment - Google Patents

Temperature control device of semiconductor cleaning equipment Download PDF

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Publication number
CN218014530U
CN218014530U CN202222629423.2U CN202222629423U CN218014530U CN 218014530 U CN218014530 U CN 218014530U CN 202222629423 U CN202222629423 U CN 202222629423U CN 218014530 U CN218014530 U CN 218014530U
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China
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fixed mounting
temperature
control device
temperature control
semiconductor
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CN202222629423.2U
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Chinese (zh)
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赵红武
崔志刚
范磊
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Wuhan Xinzhi Semiconductor Co ltd
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Wuhan Xinzhi Semiconductor Co ltd
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Abstract

The utility model belongs to the technical field of the control by temperature change, especially, be a semiconductor cleaning equipment's temperature control device is including wasing the case, fixed mounting has the cleaning roller in the die cavity of wasing the case, fixed mounting has two plectrums in the die cavity of cleaning roller, fixed mounting has M type heating rod in the die cavity of wasing the case, fixed mounting has the fin in the bottom die cavity of wasing the case, one side fixed mounting who washs the case has temperature monitor, one side fixed mounting of temperature monitor has the temperature measurement stick, the dead slot has been seted up to one side of wasing the case, the utility model discloses heatable semiconductor cleaning fluid makes the semiconductor cleaning fluid reach best use temperature, can not only improve cleaning efficiency and can also improve the abluent degree of semiconductor, and the heating rod is M type heating efficiency height, can observe the temperature of washing fluid in real time through being equipped with temperature monitor, makes the temperature of washing fluid keep in best in-use state.

Description

Temperature control device of semiconductor cleaning equipment
Technical Field
The utility model belongs to the technical field of the control by temperature change, concretely relates to semiconductor cleaning equipment's temperature control device.
Background
A semiconductor refers to a material having a conductivity between a conductor and an insulator at normal temperature. The semiconductor has wide application in radio, television and temperature measurement, for example, the diode is a device made of semiconductor, and the importance of the semiconductor is very great from the viewpoint of technological or economic development.
At present, in the cleaning process of semiconductors, strict requirements are required on the temperature of semiconductor cleaning liquid, the temperature of the cleaning liquid is too high or too low, and serious influences are generated on the cleaning effect and the semiconductors, when the temperature of the cleaning liquid is too high, the semiconductors in the cleaning liquid can be damaged, when the temperature is too low, the cleaning effect of the cleaning liquid on the semiconductors can be unsatisfactory, and different semiconductors need to be cleaned at different temperatures to achieve the best effect, and therefore the problems need to be improved.
SUMMERY OF THE UTILITY MODEL
For solving the above-mentioned problem that exists among the prior art, the utility model provides a semiconductor cleaning equipment's temperature control device has the heatable washing liquid, and the characteristics that can cool down when the high temperature of washing liquid.
In order to achieve the above object, the utility model provides a following technical scheme: including wasing the case, fixed mounting has cleaning roller in the die cavity of wasing the case, fixed mounting has two plectrums in cleaning roller's the die cavity, fixed mounting has M type heating rod in the die cavity of wasing the case, fixed mounting has the fin in the bottom die cavity of wasing the case, one side fixed mounting who washs the case has temperature monitor, one side fixed mounting of temperature monitor has the temperature measurement stick, the dead slot has been seted up to one side of wasing the case, the temperature measurement hole has been seted up to one side of wasing the case, the bottom fixed mounting who washs the case has a plurality of supporting legs.
As the utility model discloses a preferred technical scheme of semiconductor cleaning equipment's temperature control device, one side fixed mounting who washs the case has drive machine, drive machine's axle head fixed mounting second band pulley.
As the utility model discloses a preferred technical scheme of semiconductor cleaning equipment's temperature control device, the fixed surface of M type heating rod installs the handle, the dead slot has been seted up to the upper and lower both sides of handle.
As the utility model discloses a preferred technical scheme of semiconductor cleaning equipment's temperature control device, one side fixed mounting who washs the case has a plurality of radiator fan, one side fixed mounting of radiator fan has the mounting.
As the utility model discloses a preferred technical scheme of semiconductor cleaning equipment's temperature control device, driving motor's fixed surface installs a plurality of motor fixed plate, a plurality of the equal fixed mounting in one end of motor fixed plate has the screw.
As the utility model discloses a preferred technical scheme of semiconductor cleaning equipment's temperature control device, one side fixed mounting who washs the case has first band pulley, the fixed surface of first band pulley installs driving belt.
As the utility model discloses a preferred technical scheme of semiconductor cleaning equipment's temperature control device, the fixed surface of second band pulley installs driving belt, driving belt's other end fixed mounting is at the surface of first drive wheel.
As the utility model discloses a preferred technical scheme of semiconductor cleaning equipment's temperature control device, mounting fixed mounting is in one side of supporting legs, the equal fixed mounting in both sides of mounting has the screw.
As the utility model discloses a preferred technical scheme of semiconductor cleaning equipment's temperature control device, the bottom fixed mounting who washs the case has a plurality of supporting legs, a plurality of the equal fixed mounting in bottom of supporting legs has a plurality of rubber pad.
As the utility model discloses a preferred technical scheme of semiconductor cleaning equipment's temperature control device, one side fixed mounting who washs the case has the water inlet, one side fixed mounting who washs the case has the delivery port.
Compared with the prior art, the beneficial effects of the utility model are that:
1. when the utility model is used, the semiconductor cleaning liquid can reach the optimal service temperature by arranging the M-shaped heating rod to heat the semiconductor cleaning liquid, thereby not only improving the cleaning efficiency, but also improving the cleaning degree of the semiconductor cleaning, and the heating rod has high M-shaped heating efficiency, and the temperature of the cleaning liquid can be observed in real time by arranging the temperature display, so that the temperature of the cleaning liquid is kept in the optimal service state;
2. the utility model discloses when using, can make unnecessary heat discharge in the semiconductor washing liquid through being equipped with the fin, can improve the radiating efficiency of fin when the temperature of semiconductor washing liquid is too high through being equipped with a plurality of radiator fan for the heat dissipation prevents that the high temperature from causing the damage to the semiconductor.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:
fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic diagram of the explosion structure of the present invention;
fig. 3 is a schematic structural diagram of a side view of the present invention;
fig. 4 is a schematic structural diagram of a side view of the present invention;
fig. 5 is a schematic structural view of a side view of the present invention;
FIG. 6 is a schematic cross-sectional view of the present invention shown in FIG. 5
In the figure: 1. a cleaning tank; 2. cleaning the roller; 3. a shifting sheet; 4. supporting legs; 5. a rubber pad; 6. a temperature display; 7. an M-shaped heating rod; 8. a handle; 9. a temperature measuring rod; 10. a fixing member; 11. a heat radiation fan; 12. a heat sink; 13. a temperature measuring hole; 14. an empty groove; 15. a first pulley; 16. a drive belt; 17. a drive motor; 18. a motor fixing plate; 19. a water inlet; 20. a water outlet; 21. a screw; 22. a second pulley.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.
Example 1
Referring to fig. 1-6, the present invention provides the following technical solutions: the utility model provides a semiconductor cleaning equipment's temperature control device is including wasing case 1, fixed mounting has cleaning roller 2 in the die cavity of wasing case 1, fixed mounting has two plectrums 3 in cleaning roller 2's the die cavity, fixed mounting has M type heating rod 7 in the die cavity of wasing case 1, the bottom die cavity fixed mounting who washs case 1 has fin 12, one side fixed mounting who washs case 1 has temperature monitor 6, one side fixed mounting of temperature monitor 6 has temperature measurement stick 9, empty groove 14 has been seted up to one side of wasing case 1, temperature measurement hole 13 has been seted up to one side of wasing case 1, the bottom fixed mounting who washs case 1 has a plurality of supporting legs 4, one side fixed mounting who washs case 1 has water inlet 19, one side fixed mounting who washs case 1 has delivery port 20.
Wherein, one side of the cleaning box 1 is fixedly provided with a transmission motor 17, the shaft end of the transmission motor 17 is fixedly provided with a second belt wheel 22, the outer surface of the second belt wheel 22 is fixedly provided with a transmission belt 16, the transmission motor 17 outputs work to the second belt wheel 22, and the second belt wheel 22 drives the cleaning roller 2 to rotate through the transmission belt 16.
The handle 8 is fixedly mounted on the outer surface of the M-shaped heating rod 7, empty grooves are formed in the upper side and the lower side of the handle 8, and when the M-shaped heating rod 7 is damaged and needs to be replaced, the handle 8 can be pulled to enable the M-shaped heating rod 7 to be separated from the cavity.
The outer surface of the second belt wheel 22 is fixedly provided with a transmission belt 16, the other end of the transmission belt 16 is fixedly arranged on the outer surface of the first transmission wheel 15, and the second belt wheel 22 applies work to the first transmission wheel 15 through the transmission belt 16 during work.
Wherein, the fixing member 10 is fixedly installed at one side of the supporting leg 4, the two sides of the fixing member 10 are both fixedly installed with screws 21, and the fixing member 10 can be installed at one side of the cleaning tank 1 under the action of the screws 21.
The during operation starts driving motor 17, transmit output to first band pulley 15 through driving belt 16 on, thereby drive and wash cylinder 2 clockwise rotary motion, a plurality of through-hole has been seted up to the surface of washing cylinder 2, can be with impurity and dust discharge to the washing liquid when wasing the semiconductor, after the washing is accomplished, driving motor 17 drives and washes cylinder 2 anticlockwise rotary motion, can discharge the semiconductor material in wasing cylinder 2 through two plectrums 3 that are equipped with in wasing cylinder 2, make the temperature of washing liquid reach best use temperature through being equipped with M type heating rod 7 semiconductor washing liquid, can not only improve the cleaning efficiency but also improve the ableness degree of semiconductor washing, and the heating rod is M type heating efficiency height, through being equipped with temperature measurement rod 9 and the temperature that detects the washing liquid, and the real-time temperature of washing liquid is arrived through temperature display 6, but prevent that the high temperature of washing liquid from causing the heatable damage to the semiconductor.
Example 2
Referring to fig. 1-6, the present invention provides the following technical solutions: a plurality of cooling fans 11 are fixedly installed on one side of a cleaning box 1, and a fixing piece 10 is fixedly installed on one side of each cooling fan 11.
Wherein, a plurality of motor fixing plates 18 are fixedly arranged on the outer surface of the transmission motor 17, screws 21 are fixedly arranged at one ends of the motor fixing plates 18, and the transmission motor 17 can be fixedly arranged at one side of the cleaning box 1 under the action of the screws 21.
Wherein, one side of the cleaning box 1 is fixedly provided with a first belt wheel 15, the outer surface of the first belt wheel 15 is fixedly provided with a transmission belt 16, and the output work of a transmission motor 17 acts on the first belt wheel 15 through the transmission belt 16, thereby driving the cleaning roller 2 to rotate.
Wherein, the bottom fixed mounting who washs case 1 has a plurality of supporting legs 4, and the equal fixed mounting in bottom of a plurality of supporting legs 4 has a plurality of rubber pad 5, and the bottom installation rubber pad 5 of supporting legs 4 can alleviate noise and vibration that the machine during operation produced.
Wherein, wash one side fixed mounting of case 1 and have water inlet 19, wash one side fixed mounting of case 1 and have delivery port 20, when the washing liquid needs to be changed, can discharge contaminated washing liquid through delivery port 20, can change clean washing liquid through water inlet 19.
When the temperature of the cleaning liquid is too high, in order to avoid damaging the semiconductor, the heat radiating fins 12 are arranged to discharge redundant heat, if the emergency heat radiation is needed, the heat radiating fan 11 can be started, the wind power generated by the heat radiating fan 11 can take away more heat through gaps among the heat radiating fins, the heat radiating efficiency of the heat radiating fins 12 is improved, the heat radiation is accelerated, and the damage to the semiconductor caused by the too high temperature is prevented.
The utility model discloses a theory of operation and use flow: the utility model discloses in the in-process that uses, the during operation starts driving motor 17, transmit output to first band pulley 15 through driving belt 16 on, thereby drive the clockwise rotary motion of cleaning roller 2, a plurality of through-hole has been seted up to cleaning roller 2's surface, can discharge impurity and dust during the washing liquid when wasing the semiconductor, the washing is accomplished the back, driving motor 17 drives cleaning roller 2 anticlockwise rotary motion, semiconductor material in can will wasing roller 2 discharges through two plectrums 3 that are equipped with in the cleaning roller 2, M type heating rod 7 heatable semiconductor washing liquid, make the temperature of washing liquid reach best use temperature, improve the cleaning efficiency, and the heating rod is M type heating efficiency height, one side fixed mounting of M type heating rod 7 has handle 8, when M type heating rod 7 damages and needs to be changed, M type heating rod 7 breaks away from in the die cavity when can pulling handle 8, the temperature that temperature measurement rod 9 can detect the washing liquid, and can observe the real-time temperature of washing liquid through temperature display 6, in case the high temperature. When the temperature of washing liquid is too high, can discharge unnecessary heat through being equipped with fin 12, if can start radiator fan 11 when promptly dispelling the heat, more heat can be taken away through the gap between the radiator plate to the wind-force that radiator fan 11 produced, the radiating efficiency of fin 12 has been improved, accelerate the heat dissipation and prevent that the high temperature from causing the damage to the semiconductor, contaminated washing liquid can discharge through delivery port 20 when the washing liquid needs to be changed, removable clean washing liquid through water inlet 19, rubber pad 5 can reduce the noise and the vibration that the machine during operation produced to be installed to the bottom of supporting legs 4, therefore, this device is when wasing, has higher practicality, and is suitable for using widely, and staff's user demand has been perfected.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described above, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. The utility model provides a semiconductor cleaning equipment's temperature control device, includes washs case (1), its characterized in that: the cleaning device is characterized in that a cleaning roller (2) is fixedly mounted in a cavity of the cleaning box (1), two shifting pieces (3) are fixedly mounted in the cavity of the cleaning roller (2), an M-shaped heating rod (7) is fixedly mounted in the cavity of the cleaning box (1), a cooling fin (12) is fixedly mounted in the bottom cavity of the cleaning box (1), a temperature display (6) is fixedly mounted on one side of the cleaning box (1), a temperature measuring rod (9) is fixedly mounted on one side of the temperature display (6), a hollow groove (14) is formed in one side of the cleaning box (1), a temperature measuring hole (13) is formed in one side of the cleaning box (1), and a plurality of supporting legs (4) are fixedly mounted on the bottom of the cleaning box (1).
2. The temperature control device of a semiconductor cleaning apparatus according to claim 1, characterized in that: one side fixed mounting of wasing case (1) has drive motor (17), the axle head fixed mounting second band pulley (22) of drive motor (17).
3. The temperature control device of a semiconductor cleaning apparatus according to claim 1, characterized in that: the outer surface of the M-shaped heating rod (7) is fixedly provided with a handle (8), and the upper side and the lower side of the handle (8) are provided with empty grooves.
4. The temperature control device of a semiconductor cleaning apparatus according to claim 1, characterized in that: one side of the cleaning box (1) is fixedly provided with a plurality of radiating fans (11), and one side of each radiating fan (11) is fixedly provided with a fixing piece (10).
5. The temperature control device of a semiconductor cleaning apparatus according to claim 2, characterized in that: the outer surface of the transmission motor (17) is fixedly provided with a plurality of motor fixing plates (18), and one end of each motor fixing plate (18) is fixedly provided with a screw (21).
6. The temperature control device of a semiconductor cleaning apparatus according to claim 1, characterized in that: wash one side fixed mounting of case (1) has first band pulley (15), the surface fixed mounting of first band pulley (15) has driving belt (16).
7. The temperature control device of a semiconductor cleaning apparatus according to claim 2, characterized in that: and a transmission belt (16) is fixedly arranged on the outer surface of the second belt wheel (22), and the other end of the transmission belt (16) is fixedly arranged on the outer surface of the first belt wheel (15).
8. The temperature control device of semiconductor cleaning equipment according to claim 4, characterized in that: the fixing piece (10) is fixedly installed on one side of the supporting leg (4), and screws (21) are fixedly installed on two sides of the fixing piece (10).
9. The temperature control device of a semiconductor cleaning apparatus according to claim 1, characterized in that: the bottom fixed mounting who washs case (1) has a plurality of supporting legs (4), a plurality of the equal fixed mounting in bottom of supporting legs (4) has a plurality of rubber pad (5).
10. The temperature control device of a semiconductor cleaning apparatus according to claim 1, characterized in that: one side fixed mounting who washs case (1) has water inlet (19), one side fixed mounting who washs case (1) has delivery port (20).
CN202222629423.2U 2022-10-08 2022-10-08 Temperature control device of semiconductor cleaning equipment Active CN218014530U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222629423.2U CN218014530U (en) 2022-10-08 2022-10-08 Temperature control device of semiconductor cleaning equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222629423.2U CN218014530U (en) 2022-10-08 2022-10-08 Temperature control device of semiconductor cleaning equipment

Publications (1)

Publication Number Publication Date
CN218014530U true CN218014530U (en) 2022-12-13

Family

ID=84356480

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202222629423.2U Active CN218014530U (en) 2022-10-08 2022-10-08 Temperature control device of semiconductor cleaning equipment

Country Status (1)

Country Link
CN (1) CN218014530U (en)

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