CN218012047U

CN218012047U - Electronic semiconductor MOCVD tail gas processing device with protective structure

Info

Publication number: CN218012047U
Application number: CN202221745522.0U
Authority: CN
Inventors: 潘兴良; 仲蕾; 潘政宇; 蒋平; 胥志伟
Original assignee: Jiangsu Tianxing Environmental Protection Co ltd
Current assignee: Jiangsu Tianxing Environmental Protection Co ltd
Priority date: 2022-07-05
Filing date: 2022-07-05
Publication date: 2022-12-13
Anticipated expiration: 2032-07-05

Abstract

The utility model relates to an electron semiconductor MOCVD tail gas processing technology field discloses an electron semiconductor MOCVD tail gas processing apparatus with protective structure, including removing base and purifying box, its characterized in that: the purifying box is located the top outer wall that removes the base, install the slide bar on the both sides outer wall of purifying box respectively, sliding clamping has the carriage release lever on the lateral wall of slide bar, the both ends of carriage release lever articulate respectively has the connecting rod, the one end of connecting rod articulates there is the anticollision board, a lateral wall of carriage release lever is installed first spring, the one end and the purifying box of first spring are connected, install the damping rod on the both sides outer wall of purifying box respectively, the one end of damping rod is connected with the anticollision board, through the anticollision board that sets up, the connecting rod, the carriage release lever, first spring and damping rod, extrude connecting rod and damping rod when the anticollision board receives the striking, the connecting rod drives the first spring of carriage release lever extrusion, first spring cooperation damping rod buffering impact, thereby make the purifying box protecting effect higher.

Description

Electronic semiconductor MOCVD tail gas processing device with protective structure

Technical Field

The utility model relates to an electron semiconductor MOCVD tail gas processing technology field, in particular to electron semiconductor MOCVD tail gas processing apparatus with protective structure.

Background

The MOCVD technique has had great success in the preparation of semiconductor materials and devices and thin films, but the MOCVD is still a developing semiconductor ultra-fine processing technique, and further development of the MOCVD technique will bring wider prospects to microelectronic techniques and optoelectronic techniques.

Current electronic semiconductor MOCVD tail gas treatment facility lacks protective structure, receives the problem that leads to the part to cause the damage after the external factor striking, based on this, the utility model designs an electronic semiconductor MOCVD tail gas processing apparatus with protective structure to solve above-mentioned problem.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an electron semiconductor MOCVD tail gas processing apparatus with protective structure to propose electron semiconductor MOCVD tail gas treatment facility in solving above-mentioned background and lack protective structure's problem.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides an electron semiconductor MOCVD tail gas processing apparatus with protective structure, is including removing base and purifying box, the purifying box is located on removing the top outer wall of base, install the slide bar on the both sides outer wall of purifying box respectively, the slip joint has the carriage release lever on the lateral wall of slide bar, the both ends of carriage release lever articulate respectively has the connecting rod, the one end of connecting rod articulates there is the anticollision board, install first spring on a lateral wall of carriage release lever, the one end of first spring with the purifying box is connected, install the damping rod on the both sides outer wall of purifying box respectively, the one end of damping rod with the anticollision board is connected, install the intake pipe on one side outer wall of purifying box.

Preferably, the outer walls of the two sides of the purifying box are respectively provided with a sliding groove, and the moving rod is in sliding clamping connection with the sliding grooves.

Preferably, the outer walls of the two sides of the purifying box are respectively provided with a second spring, and one end of each second spring is connected with the corresponding anti-collision plate.

Preferably, an air blower is installed on the outer wall of the top of the purification box, the output end of the air blower is connected with an air conveying pipe, and one end of the air conveying pipe penetrates through the purification box and is connected with a diffusion plate.

Preferably, install the guide plate on the inner wall of purifying box, install the spray nozzle on a lateral wall of guide plate, install conveyor components on the bottom inner wall of purifying box, conveyor components's one end with the spray nozzle is connected.

Preferably, the conveying assembly comprises a liquid tank, a water pump and a water pipe, the liquid tank is located on the inner wall of the bottom of the purifying tank, the water pump is located on the outer wall of the top of the liquid tank, the output end of the water pump is connected with the water pipe, and one end of the water pipe is connected with the spraying nozzle.

Preferably, a discharge pipe is installed on the outer wall of one side of the purification box.

The utility model discloses a technological effect and advantage:

1. through crashproof board, connecting rod, carriage release lever, first spring and the damping rod that sets up, extrusion connecting rod and damping rod when crashproof board receives the striking, and the connecting rod drives the first spring of carriage release lever extrusion, and first spring cooperation damping rod buffering impact to make purifying box protecting effect higher.

2. Through the air-blower that sets up, give off the board and spray nozzle, the air-blower is carried wind to giving off the board, gives off the board air-out and blows off tail gas downwards, and spray nozzle sprays the harmful gas of medicament in to tail gas and carries out purification treatment to be favorable to degrading the harmful gas in the tail gas.

Drawings

Fig. 1 is a schematic view of the overall three-dimensional structure of the present invention.

Fig. 2 is a cross-sectional view of the planar structure of the purifying box of the present invention.

Fig. 3 is an enlarged view of a portion a in fig. 1 according to the present invention.

In the figure: 1. moving the base; 2. a purification box; 3. an air inlet pipe; 4. a discharge pipe; 5. a slide bar; 6. a travel bar; 7. a connecting rod; 8. a first spring; 9. a chute; 10. a damping rod; 11. a second spring; 12. an anti-collision plate; 13. a blower; 14. a gas delivery pipe; 15. a diffusion plate; 16. a baffle; 17. a spray nozzle; 18. a delivery assembly; 181. a liquid tank; 182. a water pump; 183. a water pipe.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The utility model provides an electron semiconductor MOCVD tail gas processing apparatus with protective structure as shown in fig. 1-3, including removing base 1 and purifying box 2, purifying box 2 is located the top outer wall of removing base 1, install slide bar 5 on the both sides outer wall of purifying box 2 respectively, sliding clamping has carriage release lever 6 on slide bar 5's the lateral wall, carriage release lever 6's both ends articulate respectively has connecting rod 7, connecting rod 7's one end articulates there is crashproof board 12, a side wall mounting of carriage release lever 6 has first spring 8, first spring 8's one end is connected with purifying box 2, install damping rod 10 on purifying box 2's the both sides outer wall respectively, damping rod 10's one end is connected with crashproof board 12, install second spring 11 on purifying box 2's the both sides outer wall respectively, second spring 11's one end is connected with crashproof board 12, crashproof board 12 receives the striking and extrudees connecting rod 7 simultaneously, damping rod 10 and second spring 11, it extrudes first spring 8 to drive carriage release lever 6 through slide bar 5 through connecting rod 7, damping rod 10, first spring 8, impact spring 11 cooperates the effect of second spring and extrudes first spring 11, install discharge pipe on one side of purifying box 2 outer wall, install discharge pipe 4 on one side of purifying box 2.

In this embodiment, spout 9 has been seted up on the both sides outer wall of purifying box 2 respectively, and

carriage release lever

6 and 9 slip joint of spout, and carriage release lever 6 promotes stable effect through the supplementary slip of spout 9.

In this embodiment, install air-blower 13 on the top outer wall of purifying box 2, the output of air-blower 13 is connected with air-supply pipe 14, and the one end of air-supply pipe 14 is run through purifying box 2 and is connected with and gives off board 15, and air-blower 13 carries wind through air-supply pipe 14 and gives off board 15 and blows off tail gas.

In this embodiment, install guide plate 16 on the inner wall of purifying box 2, spray nozzle 17 is installed on a side wall of guide plate 16, install delivery unit 18 on the bottom inner wall of purifying box 2, delivery unit 18's one end is connected with spray nozzle 17, delivery unit 18 includes liquid tank 181, water pump 182 and water pipe 183, liquid tank 181 is located purifying box 2's bottom inner wall, water pump 182 is located the top outer wall of liquid tank 181, water pump 182's output is connected with water pipe 183, the one end of water pipe 183 is connected with spray nozzle 17, tail gas passes through guide plate 16 and gets into spray nozzle 17 position, water pump 182 carries spray nozzle 17 blowout with the inside medicament of liquid tank 181 through water pipe 183, thereby degrade the harmful substance in the tail gas.

This practical theory of operation: the utility model relates to an electron semiconductor MOCVD tail gas processing apparatus with protective structure, during the use, at first remove this product to the service position, tail gas gets into 2 insides of purifying box through intake pipe 3, and air-blower 13 carries gas through gas-supply pipe 14 to give off board 15 and blow off, blows off tail gas downwards, and water pump 182 carries the medicament of liquid tank 181 inside to spray nozzle 17 blowout, the harmful substance in the degradation tail gas through water pipe 183.

When the anti-collision plate 12 is collided, the anti-collision plate 12 simultaneously extrudes the connecting rod 7, the damping rod 10 and the second spring 11, the connecting rod 7 drives the movable rod 6 to slide through the sliding rod 5 to extrude the first spring 8, and the impact force is buffered under the action of the damping rod 10, the first spring 8 and the second spring 11.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.

Claims

1. The utility model provides an electron semiconductor MOCVD tail gas processing apparatus with protective structure, includes mobile base (1) and purifying box (2), its characterized in that: purifying box (2) are located on the top outer wall of removal base (1), install slide bar (5) on the both sides outer wall of purifying box (2) respectively, slide clamping has carriage release lever (6) on the lateral wall of slide bar (5), the both ends of carriage release lever (6) articulate respectively has connecting rod (7), the one end of connecting rod (7) articulates there is crashproof board (12), a side wall mounting of carriage release lever (6) has first spring (8), the one end of first spring (8) with purifying box (2) are connected, install damping rod (10) on the both sides outer wall of purifying box (2) respectively, the one end of damping rod (10) with crashproof board (12) are connected, install intake pipe (3) on one side outer wall of purifying box (2).

2. The electronic semiconductor MOCVD tail gas treatment device with the protection structure of claim 1, wherein: sliding grooves (9) are formed in the outer walls of the two sides of the purifying box (2) respectively, and the moving rod (6) is connected with the sliding grooves (9) in a sliding and clamping mode.

3. The electronic semiconductor MOCVD tail gas processing device with the protection structure, according to claim 1, is characterized in that: and second springs (11) are respectively installed on the outer walls of the two sides of the purifying box (2), and one ends of the second springs (11) are connected with the anti-collision plate (12).

4. The electronic semiconductor MOCVD tail gas processing device with the protection structure, according to claim 1, is characterized in that: install air-blower (13) on the top outer wall of purifying box (2), the output of air-blower (13) is connected with gas-supply pipe (14), the one end of gas-supply pipe (14) is run through purifying box (2) is connected with and gives off board (15).

5. The electronic semiconductor MOCVD tail gas processing device with the protection structure, according to claim 1, is characterized in that: install guide plate (16) on the inner wall of purifying box (2), a side wall mounting of guide plate (16) has spray nozzle (17), install conveying component (18) on the bottom inner wall of purifying box (2), the one end of conveying component (18) with spray nozzle (17) are connected.

6. The electronic semiconductor MOCVD tail gas processing device with the protection structure, according to claim 5, is characterized in that: the conveying assembly (18) comprises a liquid tank (181), a water pump (182) and a water pipe (183), the liquid tank (181) is located on the inner wall of the bottom of the purifying tank (2), the water pump (182) is located on the outer wall of the top of the liquid tank (181), the output end of the water pump (182) is connected with the water pipe (183), and one end of the water pipe (183) is connected with the spraying nozzle (17).

7. The electronic semiconductor MOCVD tail gas processing device with the protection structure, according to claim 1, is characterized in that: and a discharge pipe (4) is arranged on the outer wall of one side of the purification box (2).