CN217997413U - Diffusion furnace tube air extraction pipeline - Google Patents

Abstract

The utility model provides a diffusion boiler tube air suction pipeline, including middle adapting unit and a plurality of inspiratory component, adapting unit is the cross structure, and the inspiratory component correspondence is fixed on four ports about adapting unit, the inspiratory component is L type trachea, and the minor face of four inspiratory components direction of buckling is arranged clockwise, and the inspiratory component on the relative port about buckle opposite direction, about the inspiratory component on the relative port buckle opposite direction. This bleeder line can directly insert on the extraction opening on the stove tail door, and towards the installation in the stove, after air exhaust device started, the special structural design of bleeder line can change the gaseous flow condition in the way, has overcome the defect that single mouthful of air exhaust originally caused, makes diffusion more even in the boiler tube to improve the square resistance homogeneity of silicon chip, further improve the holistic photoelectric conversion efficiency of battery.

Description

Diffusion furnace tube air extraction pipeline

Technical Field

The utility model belongs to the solar cell field of making, concretely relates to diffusion boiler tube exhaust tube.

Background

In the diffusion process of the existing crystalline silicon solar cell production, as shown in fig. 1, an air inlet pipe 5 placed at the bottom of a furnace pipe is used for ventilating the interior of the furnace pipe 4, air is introduced from the furnace tail to be conveyed towards the direction of a furnace opening, and then mixed gas introduced into the furnace pipe is pumped out from the furnace opening to the furnace tail by an air pumping device at the furnace tail, so that the air is subjected to silicon wafer reaction deposition on a graphite boat in the furnace pipe, the air pumping device is directly connected to an air pumping opening 6 on the furnace tail door, the air pumping opening 6 is positioned in the middle of the furnace tail door, air flow horizontally passes through the center of the furnace pipe during air pumping, the concentration of the air around the furnace pipe and in the middle of the furnace pipe is uneven, the doping concentration in the middle of the furnace pipe is higher than that around, and the uniformity of the sheet resistance of the silicon wafer is poor.

Disclosure of Invention

In view of the above, the utility model provides a diffusion boiler tube bleeder line, this bleeder line can directly insert on the extraction opening on the stove tail gate, and towards the installation in the stove, air exhaust device starts the back, and the special structural design of bleeder line can change the gaseous flow condition in the way, has overcome the defect that single mouthful of bleeding led to the fact originally, makes the interior diffusion of boiler tube more even to improve the square resistance homogeneity of silicon chip, further improve the holistic photoelectric conversion efficiency of battery. The specific technical scheme is as follows.

The utility model provides a diffusion furnace tube air extraction pipeline which characterized in that: the air suction device comprises a middle connecting part and a plurality of air suction parts, wherein the connecting part is of a four-way structure, the air suction parts are correspondingly fixed on four ports of the connecting part in the vertical and horizontal directions, the air suction parts are L-shaped air pipes, the short sides of the four air suction parts are arranged clockwise in the bending direction, the bending directions of the air suction parts on the upper and lower opposite ports are opposite, and the bending directions of the air suction parts on the left and right opposite ports are opposite.

Further, the middle part of the connecting part is provided with an air suction nozzle which is communicated with an internal air passage of the connecting part.

Further, the air exhaust pipeline is made of quartz.

Further, the inner wall pipe diameter of the air suction part is 1cm.

Further, the four air suction components have the same structure and size.

The utility model discloses a diffusion boiler tube air exhaust pipeline, be the gas circuit structure of a cross, can be through in the air bleed mouth of air bleed mouth lug mounting on the furnace tail door, easy to assemble and change, bleed in four L type inspiratory components of rethread connecting portion outer end are to the boiler tube, the minor face of buckling of inspiratory component is clockwise direction and distributes on same circumcircle, such structure can be when bleeding abundant mix the airflow in the boiler tube, the air current that makes furnace mouth department is the helical state and flows through to the furnace tail, thereby improve the boiler tube around with the gas concentration difference in the middle of the boiler tube, it is more even to make the interior diffusion of boiler tube, the square resistance homogeneity of silicon chip is improved.

Additional aspects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic illustration of the gas path within a prior art furnace tube;

fig. 2 is a schematic view of the whole structure of the air pumping pipeline of the diffusion furnace tube of the present invention:

fig. 3 is a schematic diagram of the front structure of the air exhaust pipeline of the diffusion furnace tube of the present invention:

FIG. 4 is a schematic view of a gas path in a furnace using the pumping line of the present application;

FIG. 5 is a graph showing the effect of improving the front and rear sheet resistance uniformity versus a box shape;

the device comprises a gas extraction pipeline 1, a connecting part 10, a gas suction part 11, a gas suction nozzle 2, a graphite boat 3, a furnace tube 4, a gas inlet tube 5 and a gas extraction opening 6.

Detailed Description

The embodiments described below by referring to the drawings are exemplary only for explaining the present invention, and should not be construed as limiting the present invention.

The term "connected" and the like are to be understood broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; they may be directly connected or indirectly connected through an intermediate medium, or they may be connected through the inside of two elements, and it is obvious to those skilled in the art that the specific meanings of the above terms in the present invention can be understood through specific situations.

Referring to fig. 2 to 3, the diffusion furnace tube air suction pipeline of the embodiment includes a middle connection part 10 and a plurality of air suction parts 11, the connection part 10 is a four-way structure, the air suction parts 11 are correspondingly fixed on four ports of the connection part 10, namely, the four air suction parts 11 are identical in structure and size, the air suction parts 11 are L-shaped air tubes, the short sides of the four air suction parts 11 are arranged clockwise, the bending directions of the air suction parts 11 on the upper and lower opposite ports are opposite, and the bending directions of the air suction parts 11 on the left and right opposite ports are opposite, so that an annular air suction path is integrally formed, that is, openings of the bent short side air tubes are distributed on the same circumcircle, and the diameter of the circumcircle can reach 15 cm.

In addition, the air exhaust pipeline is made of quartz, is high temperature resistant and can not cause impurity pollution in the furnace tube. The pipe diameter of the inner wall of the air suction component is 1cm, and the wall thickness is 1mm.

Preferably, the middle part of the connecting part 10 is provided with an air suction nozzle 2, and the air suction nozzle 2 is communicated with the internal air passage of the connecting part 10. The air suction nozzle 2 is a columnar air pipe, the length of the air suction nozzle is 5cm, one end of the air suction nozzle is connected with a four-way air suction pipeline, one end of the air suction nozzle is directly inserted into an air suction opening on the tail of the diffusion furnace, the outer diameter of the air suction nozzle 2 is slightly smaller than the inner diameter of the air suction opening 6, the specific outer diameter is advocated that the air suction nozzle 2 can be inserted into the air suction opening and air leakage cannot occur, and the air suction nozzle can be adjusted according to actual needs.

Use diffusion furnace tube air suction line's of this embodiment side to hinder the homogeneity effect to for example figure 5, before improving promptly prior art unchangeable time side and hinder the homogeneity condition, when improving the air suction line that the back used this application promptly, the data of selecting the diffusion stage in earlier stage, middle stage, later stage see the side and hinder the homogeneity, and it is better to obviously use the side of this application air suction line to hinder the homogeneity.

While the invention has been described in detail and with reference to the illustrative embodiments thereof, it should be understood that numerous other modifications and embodiments can be devised by those skilled in the art that will fall within the spirit and scope of the principles of this invention. In particular, reasonable variations and modifications are possible in the component parts and/or arrangements of the subject combination arrangement within the scope of the foregoing disclosure, the drawings and the appended claims without departing from the spirit of the invention. Except variations and modifications in the component parts and/or arrangements, the scope of which is defined by the appended claims and equivalents thereof.

Claims (5)

1. A diffusion furnace tube air extraction pipeline is characterized in that: the air suction device comprises a middle connecting part and a plurality of air suction parts, wherein the connecting part is of a four-way structure, the air suction parts are correspondingly fixed on four ports of the connecting part in the vertical and horizontal directions, the air suction parts are L-shaped air pipes, and the short sides of the four air suction parts are arranged clockwise in the bending direction.

2. The diffusion furnace tube air extraction pipeline as claimed in claim 1, wherein the connecting part is provided with an air extraction nozzle at the middle part, and the air extraction nozzle is communicated with the internal air passage of the connecting part.

3. The diffusion furnace tube pumping line of claim 1, wherein the pumping line is made of quartz.

4. The diffusion furnace tube suction line according to claim 1, wherein the inner wall tube diameter of the suction part is 1cm.

5. The diffusion furnace tube suction line according to claim 1 or 4, wherein the four suction parts have the same structure and size.

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