CN217984057U - High-power laser pumping source and fiber laser - Google Patents
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Abstract
Description
【技术领域】【Technical field】
本实用新型实施例涉及激光加工技术领域,尤其涉及一种高功率激光泵浦源及光纤激光器。The embodiment of the utility model relates to the technical field of laser processing, in particular to a high-power laser pump source and a fiber laser.
【背景技术】【Background technique】
近年,随着激光技术的不断发展和推广,越来越多的传统制造行业采用激光技术来提升加工质量,同时大大提升加工效率。近两年来,光纤激光器通过提升激光功率和光束质量,不断扩展了在高端制造行业的运用,比如节能汽车、航空航天、轮船、高铁、高功率清洗切割等行业。极大解决传统加工的技术难题,同时提升加工生产效率。作为光纤激光器最核心的器件,泵浦源在设计上朝着更大功率、高亮度方面不断探索和突破,部分企业的单个泵浦源输出功率达到KW(千瓦)级别。In recent years, with the continuous development and promotion of laser technology, more and more traditional manufacturing industries use laser technology to improve processing quality and greatly improve processing efficiency. In the past two years, fiber lasers have continuously expanded their application in high-end manufacturing industries, such as energy-saving automobiles, aerospace, ships, high-speed rail, and high-power cleaning and cutting industries, by improving laser power and beam quality. Greatly solve the technical problems of traditional processing, while improving processing production efficiency. As the core device of the fiber laser, the pump source is constantly exploring and breaking through in the design of higher power and high brightness. The output power of a single pump source of some enterprises reaches the KW (kilowatt) level.
现有的光纤激光器,剥模光纤与激光泵浦源为分开独立设置,剥模光纤与泵浦源的传输光纤熔接焊接,增加了剥模光纤与泵浦源的连接工序及熔接点,而熔接点对泵浦光的传输有损耗,不利于泵浦光的传输。并且需要在光纤激光器上单独设置一个区域来安装剥模光纤,增加了光纤激光器的体积。In the existing fiber laser, the mode-stripping fiber and the laser pumping source are set separately and independently, and the transmission fiber between the mode-stripping fiber and the pumping source is fused and welded, which increases the connection process and welding points between the mode-stripping fiber and the pumping source, and The transmission of the point-to-pump light is lossy, which is not conducive to the transmission of the pump light. And it is necessary to set a separate area on the fiber laser to install the stripped fiber, which increases the volume of the fiber laser.
【实用新型内容】【Content of utility model】
本实用新型实施例旨在提供一种高功率激光泵浦源及光纤激光器,将剥模光纤直接集成到泵浦源内,降低了激光器泵浦源研发及制造成本。The embodiment of the utility model aims to provide a high-power laser pump source and a fiber laser, which directly integrates the mode-stripped optical fiber into the pump source, reducing the research and development and manufacturing costs of the laser pump source.
本实用新型实施例解决其技术问题采用以下技术方案:The utility model embodiment solves its technical problem and adopts the following technical solutions:
一种高功率激光泵浦源,包括多个光源模块、与所述光源模块数量相同的第一准直透镜及第一反射镜、偏振合束器、聚焦透镜及剥模光纤;其中,所述第一准直透镜、第一反射镜、偏振合束器及聚焦透镜依次设置在所述光源模块出光方向上;所述光源模块发出的泵浦光经过第一准直透镜准后,通过第一反射镜反射至所述偏振合束器进行叠加耦合输出,所述聚焦透镜将叠加耦合的泵浦光聚焦后输入所述剥模光纤进行剥模,剥模后的泵浦光从传输光纤输出。A high-power laser pumping source, including a plurality of light source modules, a first collimating lens and a first reflector with the same number as the light source modules, a polarization beam combiner, a focusing lens, and a mode-stripped optical fiber; wherein, the The first collimating lens, the first reflecting mirror, the polarization beam combiner and the focusing lens are sequentially arranged in the light emitting direction of the light source module; the pump light emitted by the light source module is collimated by the first collimating lens, The reflection mirror is reflected to the polarization beam combiner for superimposed coupling output, and the focusing lens focuses the superimposed coupled pump light and then enters the mode stripped fiber for mode stripping, and the mode stripped pump light is output from the transmission fiber.
作为优选方案,多个所述光源模块呈阵列分布,每一列的光源模块由高到低依次错开设置,每个光源模块均对应设置一个第一准直镜及第一反射镜;所述泵浦源还包括数量与所述光源模块的列数相同,并面向所述第一反射镜设置的第二反射镜;所述偏振合束器包括第一入光面及第二入光面,至少有一列光源模块的发出的泵浦光经过第一反射镜反射至第二反射镜,并由所述第二反射至所述第一入光面;剩余的光源模块中至少有一列光源模块的发出的泵浦光经过第一反射镜反射至第二反射镜,并由所述第二反射至所述第二入光面。As a preferred solution, a plurality of the light source modules are distributed in an array, and the light source modules in each column are arranged in a staggered order from high to low, and each light source module is correspondingly provided with a first collimating mirror and a first reflector; the pumping The source also includes a second reflector with the same number as the number of columns of the light source module and facing the first reflector; the polarization beam combiner includes a first light incident surface and a second light incident surface, at least one The pump light emitted by the row of light source modules is reflected by the first reflector to the second reflector, and is reflected by the second reflector to the first light-incident surface; among the remaining light source modules, the pump light emitted by at least one row of light source modules The pumping light is reflected by the first reflector to the second reflector, and then reflected by the second reflector to the second light incident surface.
作为优选方案,所述泵浦源设有8个阶梯热沉,每个阶梯热沉包括长条状且并排设置一个第一热沉及第二热沉,所述光源模块间隔设置在所述第一热沉上形成阵列分布,所述第一准直镜及第一反射镜对应设置在所述第二热沉上;所述偏振合束器设置有2个,相邻每4个阶梯热沉对应设有一个偏振合束器,其中相邻的两个第一热沉上的光源模块发出的泵浦光被反射进入所述第一入光面,剩余两个第一热沉上的光源模块发出的泵浦光被反射进入所述第二入光面。As a preferred solution, the pumping source is provided with 8 stepped heat sinks, each of which is strip-shaped and arranged side by side with a first heat sink and a second heat sink, and the light source modules are arranged at intervals between the first and second heat sinks. An array distribution is formed on a heat sink, and the first collimating mirror and the first reflector are correspondingly arranged on the second heat sink; the polarization beam combiner is provided with 2, adjacent to every 4 stepped heat sinks Correspondingly, a polarization beam combiner is provided, wherein the pump light emitted by the light source modules on the two adjacent first heat sinks is reflected into the first light incident surface, and the light source modules on the remaining two first heat sinks The emitted pump light is reflected into the second light incident surface.
作为优选方案,所述偏振合束器还包括一个出光面,所述泵浦源还包括一第三反射镜,所述第三反射镜面向其中一个偏振合束器的出光面设置;从其中一个偏振合束器的出光面出射的泵浦光直接射入所述聚焦透镜,从另外一个偏振合束器的出光面出射的泵浦光经过所述第三反射镜反射后射入所述聚焦透镜。As a preferred solution, the polarization beam combiner also includes a light exit surface, and the pump source also includes a third mirror, and the third reflection mirror is arranged facing the light exit surface of one of the polarization beam combiners; The pump light emitted from the light-emitting surface of the polarization beam combiner directly enters the focusing lens, and the pump light emitted from the light-emitting surface of another polarization beam combiner is reflected by the third mirror and then enters the focusing lens. .
作为优选方案,所述聚焦透镜的后方,面向所述聚焦透镜还设有一第四反射镜,从偏振合束器的出光面出射的泵浦光及从第三反射镜反射的泵浦光均经过第四反射镜反射后,射入所述聚焦透镜。As a preferred solution, at the rear of the focusing lens, facing the focusing lens, a fourth reflecting mirror is also provided, and the pumping light emitted from the light-emitting surface of the polarization beam combiner and the pumping light reflected from the third reflecting mirror pass through After being reflected by the fourth reflector, it enters the focusing lens.
作为优选方案,所述泵浦源内部设有一收光腔,所述剥模光纤设置在所述收光腔内,所述收光腔的开口上可拆卸的安装有一镀金盖板。As a preferred solution, a light receiving cavity is provided inside the pump source, the mode-stripped optical fiber is arranged in the light receiving cavity, and a gold-plated cover plate is detachably installed on the opening of the light receiving cavity.
作为优选方案,所述聚焦透镜为一体式结构,以同时实现对所述偏振合束器发射过来的泵浦光进行快轴及慢轴的聚焦;或者,所述聚焦透镜包括依次设置的快轴聚焦透镜及慢轴聚焦透镜,从所述偏振合束器发射出的泵浦光依次经过快轴聚焦透镜及慢轴聚焦透镜分别进行快轴及慢轴聚焦。As a preferred solution, the focusing lens has an integrated structure, so as to realize the fast axis and slow axis focusing of the pump light emitted by the polarization beam combiner at the same time; or, the focusing lens includes sequentially arranged fast axes A focusing lens and a slow-axis focusing lens. The pumping light emitted from the polarization beam combiner passes through the fast-axis focusing lens and the slow-axis focusing lens in turn to perform fast-axis and slow-axis focusing respectively.
作为优选方案,还包括一指示光模组,所述指示光模组包括指示光光源模块及准直透镜,所述准直透镜设置在所述指示光源模块的出光方向上;所述指示光光源模块发射的指示光经所述准直透镜准之后,射入所述聚焦透镜进行聚焦,再通过所述剥模光纤剥模后输出。As a preferred solution, it also includes an indicating light module, the indicating light module includes an indicating light source module and a collimating lens, and the collimating lens is arranged in the light emitting direction of the indicating light source module; the indicating light source After being collimated by the collimating lens, the indicating light emitted by the module enters the focusing lens for focusing, and then passes through the stripping optical fiber before being stripped and output.
作为优选方案,还包括一指示光输入端,所述指示光输入端用于连接外部指示光源,所述指示光源发出的指示光通过第五反射镜反射进入所述聚焦透镜进行聚焦,再通过所述剥模光纤剥模后输出。As a preferred solution, it also includes an indicating light input end, the indicating light input end is used to connect an external indicating light source, the indicating light emitted by the indicating light source is reflected by the fifth reflector and enters the focusing lens for focusing, and then passes through the Output after stripping the mode-stripping fiber.
本实用新型还公开了一种光纤激光器,包括上述任一方案的高功率激光泵浦源。The utility model also discloses a fiber laser, which includes the high-power laser pumping source of any one of the schemes above.
本实用新型的有益效果是:激光器泵浦源内设置有一个剥模光纤,合束后的泵浦光经过聚焦透镜快轴及慢轴的聚焦后,先耦合进入剥模光纤,耦合进入的泵浦光中不需要的杂质光剥除;由于将剥模光纤直接设置在泵浦源内,相较于剥模光纤设置在泵浦源外部的结构而言,提高了激光器泵浦源的集成度和结构的紧凑性。并且泵浦光是直接通过聚焦透镜耦合输入到剥模光纤内的,相较于采用传输光纤耦合而言,省去了传输光纤与剥模光纤的熔接工序,以及熔接工序所使用的传输光纤,简化了剥模光纤与泵浦源的连接工艺。The beneficial effect of the utility model is that: a mode-stripping fiber is arranged in the laser pumping source, and the combined pump light is coupled into the mode-stripping fiber first after being focused by the fast axis and the slow axis of the focusing lens, and then coupled into the pumping light Unnecessary impurities in the light are stripped; since the mode stripped fiber is directly placed in the pump source, compared with the structure in which the mode stripped fiber is placed outside the pump source, the integration and structure of the laser pump source are improved of compactness. And the pump light is directly coupled into the mode-stripped fiber through the focusing lens. Compared with the transmission fiber coupling, the fusion process of the transmission fiber and the mode-stripped fiber, as well as the transmission fiber used in the fusion process, are omitted. The connection process between the stripped mode fiber and the pump source is simplified.
【附图说明】【Description of drawings】
一个或多个实施例通过与之对应的附图进行示例性说明,这些示例性说明并不构成对实施例的限定,附图中具有相同参考数字标号的元件表示为类似的元件,除非有特别申明,附图中的图不构成比例限制。One or more embodiments are exemplified by the corresponding drawings, and these exemplifications are not construed as limiting the embodiments. Elements with the same reference numerals in the drawings represent similar elements, unless otherwise specified Note that the drawings in the drawings are not limited to scale.
图1为本实用新型一实施例的激光器泵浦源的分解结构示意图;Fig. 1 is a schematic diagram of the decomposition structure of a laser pump source according to an embodiment of the present invention;
图2为本实用新型一实施例的激光器泵浦源的剖面示意图;Fig. 2 is a schematic cross-sectional view of a laser pump source according to an embodiment of the present invention;
图3为本实用新型一实施例的底座的第一表面的正投影示意图;Fig. 3 is a schematic diagram of the orthographic projection of the first surface of the base according to an embodiment of the present invention;
图4为本实用新型一实施例的剥模光纤在收光腔内的安装结构示意图;Fig. 4 is a schematic diagram of the installation structure of the mode-stripped optical fiber in the optical receiving cavity according to an embodiment of the present invention;
图5为本实用新型一实施例的底座的第二表面的结构示意图;Fig. 5 is a schematic structural view of the second surface of the base according to an embodiment of the present invention;
图6为本实用新型一实施例的一种具有冷区通道的盖板的结构示意图;Fig. 6 is a schematic structural view of a cover plate with a channel in a cold zone according to an embodiment of the present invention;
图7为本实用新型一实施例的另一种具有冷区通道的盖板的结构示意图。Fig. 7 is a schematic structural view of another cover plate with a channel in a cold zone according to an embodiment of the present invention.
【具体实施方式】【detailed description】
为了便于理解本实用新型,下面结合附图和具体实施例,对本实用新型进行更详细的说明。需要说明的是,当元件被表述“固定于”/“固接于”/“安装于”另一个元件,它可以直接在另一个元件上、或者其间可以存在一个或多个居中的元件。当一个元件被表述“连接”另一个元件,它可以是直接连接到另一个元件、或者其间可以存在一个或多个居中的元件。本说明书所使用的术语“垂直的”、“水平的”、“左”、“右”、“内”、“外”以及类似的表述只是为了说明的目的。In order to facilitate the understanding of the utility model, the utility model will be described in more detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that when an element is expressed as being “fixed on”/“fixed on”/“installed on” another element, it may be directly on the other element, or there may be one or more intervening elements therebetween. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or one or more intervening elements may be present therebetween. The terms "vertical", "horizontal", "left", "right", "inner", "outer" and similar expressions are used in this specification for the purpose of description only.
除非另有定义,本说明书所使用的所有的技术和科学术语与属于本实用新型的技术领域的技术人员通常理解的含义相同。在本实用新型的说明书中所使用的术语只是为了描述具体的实施例的目的,不是用于限制本实用新型。本说明书所使用的术语“和/或”包括一个或多个相关的所列项目的任意的和所有的组合。Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by those skilled in the technical field of the present invention. The terms used in the description of the utility model are only for the purpose of describing specific embodiments, and are not used to limit the utility model. The term "and/or" used in this specification includes any and all combinations of one or more of the associated listed items.
此外,下面所描述的本实用新型不同实施例中所涉及的技术特征只要彼此之间未构成冲突就可以相互结合。In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
结合图1至图7所示,本实用新型实施例提供了一种激光器泵浦源,包括底座1及盖板2,底座1呈扁平状的长方体形状,使底座1相对设置的两个侧表面,具有较大的端面面积,此处,将底座1相对设置的两个侧表面分别命名为底座1的第一表面和第二表面。As shown in Figures 1 to 7, the embodiment of the present invention provides a laser pumping source, including a base 1 and a
底座1的第一表面设有整体凹陷的安装槽10,该安装槽10内设有热沉区101及出光区102,出光区102位于热沉区101的一侧。该热沉区101封装有多个用于发出泵浦光的光源模块100,多个光源模块100错开设置,使光源模块100之间相互不发生干涉,避免光源模块100发射的光线被其它光源模块100遮挡或相互间产生干扰,热沉区101上还设有光学镜片,光学镜片包括数量与光源模块100的数量相同,且沿每个光源模块100的出光方向上依次设置的第一准直镜200及第一反射镜300。The first surface of the base 1 is provided with an overall
本实用新型实施例中,光源模块100可以为单个的激光芯片或单个激光二极管,也可以为将多个激光芯片或激光二极管集成在基板上形成独立封装的bar(巴条或二极管巴条)。单个的巴条相对于单个激光芯片或激光二极管而言具有较高的输出功率,有利于提升泵浦源的集成度及提升泵浦源的输出功率。In the embodiment of the present invention, the
具体的,如图3所示,热沉区101内设有至少一个阶梯热沉,每个阶梯热沉均包括一个形状为长条状的第一热沉12及数量与第一热沉12相同、形状为长条状的第二热沉13,第一热沉12与第二热沉13并排设置。多个光源模块100在第一热沉12上间隔排布,同样的,与一个光源模块100对应的一个第一准直镜200及一个第一反射镜300组成的光学镜片单元在第二热沉13上间隔排布。由此实现了将更多的光源模块100集中封装在体积更小的泵浦源的底座内,提高了泵浦源内光源模块的集成度,实现了泵浦源结构的高集成度及泵浦源功率的高功率输出。Specifically, as shown in FIG. 3, at least one stepped heat sink is provided in the
热沉区101上设有多个阶梯热沉,每个阶梯热沉上设置有一个第一热沉12及一个第二热沉13,第一热沉12包括沿其长度方向设置的多个第一热沉单元(未标示),使光源模块100在阶梯热沉上形成阵列分布,多个第一热沉单元由第一热沉12的外端向第一热沉12的内端呈由高到低的阶梯状分布。第二热沉13包括沿其长度方向设置的多个第二热沉单元(未标示),多个第二热沉单元由第二热沉13的外端向第二热沉13的内端呈由高到低的阶梯状分布。The
其中每个第一热沉单元上均设置有封装平面,光源模块100对应固定在该封装平面上,每个第二热沉单元上均设有光学镜片定位装置(未标示),第一准直镜200及第一反射镜300均通过该光学镜片定位装置实现在第二热沉单元上的定位,并通过导热胶水与第二热沉单元实现粘结固定。Wherein each first heat sink unit is provided with a package plane, the
每个阶梯热沉上设置有一个第一热沉12及一个第二热沉13,并使得位置相对应的第一热沉单元及第二热沉单元设置在同一个台阶上。每个第一热沉单元上可对应安装一个光源模块100,每个第二热沉单元上可对应安装一个第一准直镜200及一个第一反射镜300。Each stepped heat sink is provided with a
由于第一热沉单元及第二热沉单元均呈由高到低的阶梯状排布,可使位于同一第二热沉13的相邻两个第二热沉单元上的第一反射镜300的反射中心不会相互重合,使设置在高台阶面的第一反射镜300的反射中心高于设置在低台阶面的第一反射镜300的顶部,由此实现任一第一反射镜300反射光束不被其他第一反射镜300遮挡,实现光束的有效传播。Since the first heat sink unit and the second heat sink unit are arranged in steps from high to low, it is possible to make the
多个阶梯热沉分为高阶梯热沉及低阶梯热沉,高阶梯热沉与低阶梯热沉相间设置,高阶梯热沉最低的高台阶,高于低阶梯热沉最高的低台阶一个台阶高度。使光源模块100之间相互不发生干涉,避免光源模块100发射的光线被其它光源模块100遮挡或相互间产生干扰。Multiple stepped heat sinks are divided into high-step heat sinks and low-step heat sinks. The high-step heat sinks and low-step heat sinks are arranged alternately. The lowest high step of the high-step heat sink is one step higher than the highest low step of the low-step heat sink. high. The
例如,热沉区101内设有8个阶梯热沉,其中4个为高阶梯热沉,剩余4个为低阶梯热沉,8个阶梯热沉以底座1的中线成镜像设置,即高阶梯热沉及低阶梯热沉布置方式为由底座1的相对的两个侧边往底座1的中线A方向呈高阶梯热沉-低阶梯热沉-高阶梯热沉-低阶梯热沉的方式交替排列。For example, there are 8 stepped heat sinks in the
对应的,热沉区101内同样设置有8个第一热沉12及8个第二热沉13,每个高阶梯热沉上对应设置1个第一热沉12及1个第二热沉13。每个第一热沉12上设置有10至50个光源模块,以光源模块100为单个激光芯片为例,单个激光芯片的功率可达15-35W,每个第二热沉13上设置10至50个第一准直镜200及第一反射镜300。这样通过多个光源模块100叠加可使单个泵浦源的总输出功率达到1.5-6KW(千瓦)的范围,并且采用激光芯片集成输出的泵浦光具有亮度高、功率密度高等特点,可实现采用小芯径的传输光纤进行泵浦光输出,例如可采用135微米的传输光纤进行泵浦光输出,实现高功率、高亮度激光输出。Correspondingly, eight
出光区102上设有将多个光源模块100发出的泵浦光进行合束输出的光学镜片。具体为,出光区102上设有至少一个用于输出合束泵浦光的偏振合束器400,该偏振合束器400设置在光源模块100的出光方向上。光源模块100发出的泵浦光先经过第一准直镜200进行快/慢轴压缩准直,再经过第一反射镜300反射至偏振合束器400,泵浦光通过偏振合束器400后,合束形成合束泵浦光。An optical lens is provided on the
为了实现将多个第一热沉12上设置的光源模块100发出的泵浦光,均能反射至偏振合束器400合束形成合束泵浦光,出光区102上还设有数量与第一热沉12数量相同的第二反射镜500,第二反射镜500设置在光源模块100的出光方向上。第二反射镜500可以改变泵浦光的传输方向,便于合理利用底座1的安装槽10的空间。第二反射镜500可使第一热沉12上设置的光源模块100发出的泵浦光,经过对应的第一准直镜200的准直及第一反射镜300的反射后,均反射至与每个第一热沉12对应设置的第二反射镜500上,再经第二反射镜500反射至偏振合束器400,泵浦光通过偏振合束器400后,合束形成合束泵浦光。In order to realize that the pump light emitted by the
例如,本实施例中,设置了8个第一热沉12及8个第二热沉13,对应的,出光区102上同样设置了8个第二反射镜500。8个第二反射镜500分别对应设置在8个第一热沉12上的光源模块100的出光方向上。可将8个第一热沉12设置的光源模块100及8个第二热沉13设置的第一准直镜200及第一反射镜300对应分成两个泵浦光输出单元,命名为第一泵浦光输出单元1000及第二泵浦光输出单元2000。For example, in this embodiment, eight
其中,第一泵浦光输出单元1000包括以底座1中线A的一侧4个阶梯热沉对应设置的光源模块100、第一准直镜200及第一反射镜300。第二泵浦光输出单元2000包括以底座1中线的另一侧4个阶梯热沉对应设置的光源模块100、第一准直镜200及第一反射镜300。即每个泵浦光输出单元对应包括设置在相邻的4个第一热沉12的光源模块100及设置在相邻的4个第二热沉13上的第一准直镜200及第一反射镜300。偏振合束器400设置有2个,每个偏振合束器400对应一个泵浦光输出单元,将与之对应的光源模块100输出的泵浦光进行合束形成合束泵浦光。Wherein, the first pumping
偏振合束器400上设有两个入光面和一出光面403,两个入光面为第一入光面401、第二入光面402,偏振合束器400还包括一半波片405,半波片405设于第一入光面401上,具体地,半波片405贴合于第一入光面401上。The
偏振合束器400设置在靠近底座1的中线A的两个阶梯热沉的前方,第一泵浦光输出单元1000的靠近底座1侧壁的高阶梯热沉上设置的光源模块100发出的泵浦光经过对应的第一准直镜200的准直及第一反射镜300的反射后,均反射至与该高阶梯热沉对应的第二反射镜500,再由第二反射镜500反射至偏振合束器400的第一入光面401。同样的,与该高阶梯热沉对应的低阶梯热沉设置的光源模块100发出的泵浦光经过对应的第一准直镜200的准直及第一反射镜300的反射后,均反射至与该高阶梯热沉对应的第二反射镜500,再由第二反射镜500反射至偏振合束器400的第一入光面401。此处,由于高阶梯热沉的最低的高台阶高于低阶梯热沉最高的低台阶一个台阶高度,高阶梯热沉对应的第二反射镜500的光线可直接越过低阶梯热沉对应的第二反射镜500的顶部,避免光线发生遮挡或干涉。The
第一泵浦光输出单元1000的靠近底座1中线A的高阶梯热沉上设置的光源模块100发出的泵浦光经过对应的第一准直镜200的准直及第一反射镜300的反射后,直接越过对应的第二反射镜500的顶部反射至偏振合束器400的第二入光面402。同样的,与该高阶梯热沉对应的低阶梯热沉设置的光源模块100发出的泵浦光经过对应的第一准直镜200的准直及第一反射镜300的反射后,均反射至与该高阶梯热沉对应的第二反射镜500,再由低阶梯热沉对应的第二反射镜500反射至偏振合束器400的第二入光面402。The pump light emitted by the
由于第一入光面401上设有半波片405,从第一入光面401入射的泵浦光,在射入第一入光面401之前,先射入半波片405,使入射的泵浦光中的P光及S光均旋转90°,旋转90°后的S光转变成P光,并从偏振合束器400中的偏振分光面404透过并进入消光孔道(未图示)中并被消光孔道消除,而旋转90°后P光转变成S光,并被偏振合束器400中的偏振分光面404反射并从出光面403发射至半波片405。而从第二入光面402入射的泵浦光中的P光透过偏振分光面404后从出光面403发射至半波片405,S光被反射至消光孔道(未图示)中并被消光孔道消除。实现了第一泵浦光输出单元1000的4个第一热沉12的光源模块100发射泵浦光在经过偏振合束器400后被合束发射到聚焦透镜600。Since the
由于第二泵浦光输出单元2000与第一泵浦光输出单元1000呈镜像设置,第二泵浦光输出单元2000的4个第一热沉12的光源模块100发出的泵浦光经过另一个偏振合束器400合束后,其传输方向与第一泵浦光输出单元1000的光源模块100被合束后的泵浦光的传输方向垂直。因此,需要在第二泵浦光输出单元2000的光源模块100被合束后的泵浦光的出光方向上再设置一个第三反射镜700,使第二泵浦光输出单元2000的光源模块100被合束后的泵浦光旋转90°后发射到聚焦透镜600。Since the second pump
从原理上讲,为了进一步的提高泵浦源的输出功率,可以在底座1中线A的一侧或两侧无限拓展第一泵浦光输出单元1000和第二泵浦光输出单元2000,只需保证位于底座1的中线A同一侧均为第一泵浦光输出单元1000或第二泵浦光输出单元2000,并沿中线A对称设置即可。In principle, in order to further increase the output power of the pump source, the first pump
至此,从第一泵浦光输出单元1000及第二泵浦光输出单元2000对应的8个第一热沉12上设置的所有光源模块100发出的泵浦光,均可被对应的偏振合束器400合束后发射到聚焦透镜600上。在一些实施例中,泵浦源可只包括一个一体式的聚焦透镜600,同时实现对偏振合束器400发射过来的泵浦光进行快轴及慢轴的聚焦。为了使泵浦源最终输出的泵浦光具有较好的光速质量,优选的,聚焦透镜600包括快轴聚焦透镜610及慢轴聚焦透镜620。即从偏振合束器400发射出的泵浦光依次经过快轴聚焦透镜610及慢轴聚焦透镜620后,耦合进入传输光纤60,最后泵浦光从传输光纤60输出,可用作光纤激光器的光源。So far, the pump light emitted from all the
作为优选,可以在聚焦透镜600出光方向的前方设置剥模光纤800,泵浦光经过聚焦透镜600快轴及慢轴的聚焦后,先耦合进入剥模光纤800,剥模光纤800将耦合进入的泵浦光中不需要的杂质光剥除,然后再耦合进入传输光纤60,最后泵浦光从传输光纤60输出,可用作光纤激光器的光源。Preferably, the mode-stripping
如图4所示,安装槽10上设有向下凹陷收光腔801,剥模光纤800安装在该收光腔801内,收光腔801的开口上可拆卸的安装有一镀金盖板802,将收光腔801的开口密封。从剥模光纤800内漏出的杂质光被收集在收光腔801内,被收光腔801吸收。从而可避免剥模光纤800剥模的杂质光随意漏出到安装槽10内,影响泵浦光的合束输出。As shown in Figure 4, the mounting
收光腔801的相对的两端分别设有第一固定槽803及第二固定槽804,剥模光纤800的两端分别对应的固定在第一固定槽803及第二固定槽804内,从而将剥模光纤800可靠固定。The opposite ends of the light receiving
还可在第一固定槽803的对应的两侧设置第一连接台805,以及在第二固定槽804的对应的两侧设置第二连接台806,收光腔801内还设有第一固定板807及第二固定板808,第一固定板807可通过螺钉紧固连接在第一连接台805上,与第一固定槽803围合形成固定腔,将剥模光纤800的端部固定。同样的,第二固定板808可通过螺钉紧固连接在第二连接台806上,与第二固定槽804围合形成固定腔,将剥模光纤800的端部固定。The first connecting
收光腔801的侧壁上还设有散热结构,用于吸收收光腔801内产生热量,该散热结构包括沿收光腔侧壁间隔设置的多个散热板或散热片,或者该散热结构包括阵列分布的导热柱或导热针。这些结构形式的散热结构均可以增大散热面积,可快速传导收光腔产生的热量。The side wall of the light receiving
由于在底座10的安装槽内直接设置了收光腔801,剥模光纤800直接设置在收光腔801内,实现了泵浦光直接经过聚焦透镜600快轴及慢轴的聚焦后直接通过剥模光纤800在泵浦源的底座1内实现剥模,相较于采用独立设置的剥模器而言,提高了激光器泵浦源的集成度和结构的紧凑性,降低了泵浦源的重量,实现了泵浦源轻量化的设计。并且泵浦光是直接通过聚焦透镜600耦合输入到剥模光纤800内的,相较于采用传输光纤耦合而言,省去了传输光纤与剥模光纤800的熔接工序,以及熔接工序所使用的传输光纤,简化了剥模光纤800与泵浦源的连接工艺。Since the light receiving
如图3所示,为了使底座1的结构更加紧凑,合理利用底座1的安装槽10的空间,可在聚焦透镜600的后方面向聚焦透镜600再设置一个第四反射镜900,从偏振合束器400的出光面出射的泵浦光及从第三反射镜700反射的泵浦光均经过第四反射镜900反射后,使泵浦光旋转90°后发射到聚焦透镜600,然后再从剥模光纤800耦合进入传输光纤60,最后泵浦光从传输光纤60输出,可用作为光纤激光器的光源。这样可以使快轴聚焦透镜610、慢轴聚焦透镜620及剥模光纤800沿着底座1的侧边方向设置,以使底座1内部结构更加紧凑,以合理利用底座1的安装槽10的空间。As shown in FIG. 3 , in order to make the structure of the base 1 more compact and make reasonable use of the space of the mounting
此外,还可在安装槽上设置指示光模组3000,指示光模组3000包括指示光光源模块(未标示)及准直透镜(未标示),准直透镜设置在指示光光源模块的出光方向上。本实施例中指示光光源模块和准直透镜封装成一体形成TO封装结构,底座1的侧壁上设有安装孔,指示光模组3000设置在该安装孔内。指示光模组3000发出的指示光为红光,红光的波段为620-760nm,在其他实施例中,指示光模组3000也可为其他颜色的指示光模组。In addition, an indicating
指示光模组3000发出的准直指示光可直接输入到聚焦透镜600,经过聚焦透镜600快轴及慢轴的聚焦后,耦合进入剥模光纤800,然后再耦合进入传输光纤60,最后指示光与泵浦光从传输光纤60输出,指示光可用作光纤激光器的指示光源。The collimation indicating light emitted by the indicating
为了使底座1的结构更加紧凑,合理利用底座1的安装槽10的空间,可以在指示光模组3000的出光方向上再设置一个第五反射镜1100,通过第五反射镜1100来改变指示光的传输方向,将指示光反射至聚焦透镜600。这样可使指示光模组3000设置的位置不限于某个固定位置,可以视底座1的具体设计布局等来调整指示光模组3000的安装位置。In order to make the structure of the base 1 more compact and make reasonable use of the space in the mounting
如图3所示,在其他实施例中,还可在安装槽10上设置一指示光输入端,该指示光输入端用于连接外部指示光源,指示光输入端的前方设有一第五反射镜,通过第五反射镜1100将外部指示光源输出的指示光反射至聚焦透镜600,使之经过聚焦透镜600快轴及慢轴的聚焦后,耦合进入剥模光纤800,然后再耦合进入传输光纤60,最后指示光与泵浦光从传输光纤60输出,指示光可用作光纤激光器的指示光源。As shown in Fig. 3, in other embodiments, an indicating light input end may also be provided on the
在一些实施例中,相邻的两个阶梯热沉之间靠近出光区的一端设有导电轨18,导电轨18可为导电铜片或导电铝片,导电轨18将相邻的两个阶梯热沉电性连接,每个阶梯热沉靠近底座1侧壁的一端均连接有一个用于连接供电端的电引脚19,这样两个阶梯热沉、导电轨18及两个电引脚19组合与供电端形成一个串接回路,使供电端给两个阶梯热沉上的光源模块100供电,实现泵浦源的多个阶梯热沉的分段供电。可避免因阶梯热沉上设置的光源模块100过多,使串接回路的电流过大,导致光源模块100烧毁,也可避免因供电电流过大导致阶梯热沉及导电轨18的发热量过高,给泵浦源的底座1散热造成影响。In some embodiments, a
盖板2可拆卸的盖设在底座1的第一表面上,将安装槽10的开口密封,盖板2通过螺钉锁紧在底座1上,用于将光源模块100、光学镜片及剥模光纤800等封装起来。The
底座1还设有一底板3,底座1的第二表面上设有散热区,该散热区与热沉区101相对的位置设有一整体凹陷的第一冷却腔20,使第一冷却腔20与热沉区101的位置相对设置,第一冷却腔20内设有自底部往外延伸的第一隔板11,第一隔板11将第一冷却腔20连续分隔出引导冷却介质流动的冷却槽。The base 1 is also provided with a
如图5所示,底板3盖设在第二表面上,与第一冷却腔20的外延侧壁及第一隔板11的延伸端通过钎焊密封连接,使底板3与冷却槽围合形成散热通道,底座1的侧壁上设有冷却介质入口30和冷却介质出口40,散热通道的一端与冷却介质入口30连通,散热通道的另一端与冷却介质出口40连通。As shown in Figure 5, the
由于光源模块100和第一准直镜200及第一反射镜300等光学镜片均安装固定在热沉区101内,而散热通道位置与热沉区101的位置相对,光源模块100及光学镜片产生的热量可通过底座1位于热沉区101的材料直接传递给与热沉区101的位置相对的散热通道,并与散热通道内的冷却介质(例如冷却水、冷媒、冷却气体等)充分接触,从而被流动的冷却介质快速带走。由于光源模块100及光学镜片产生的热量可通过底座1位于热沉区101的材料直接传递给与热沉区101位置相对的散热通道,热量传递距离更短,热阻更小,响应速度更快,从而提高了散热效率,特别适合应用于由多个大功率光源模块组装形成的大功率泵浦源的冷却散热,例如,单个输出功率为KW(千瓦)级别的激光器泵浦源的冷却散热。Since the
并且,由于将散热通道直接设置在底座1上,使泵浦源的底座自带冷却功能,可以实现将更多的光源模块100集中封装在体积更小的泵浦源的底座内,同时还可满足光源模块100的散热要求,简化了激光器泵浦源的冷却结构布局,可使激光器泵浦源的结构更加紧凑,缩减了激光器泵浦源的体积,降低了激光器泵浦源的研发及制造成本。Moreover, since the heat dissipation channel is directly arranged on the base 1, the base of the pump source has its own cooling function, and more
如图5所示,冷却槽包括位置与每个第一热沉12相对应且沿着第一热沉12的长度方向延伸的至少一个第一冷却槽201及位置与每个第二热沉13相对应且沿着第二热沉13的长度方向延伸的至少一个第二冷却槽202。As shown in FIG. 5 , the cooling groove includes at least one
相邻的第一热沉12对应的第一冷却槽201的端部通过第一连接槽203横向连接,相邻的第二热沉13对应的第二冷却槽202的端部通过第二连接槽204横向连接,以使第一冷却槽201、第一连接槽203、第二冷却槽202及第二连接槽204与底板3围合形成连续的散热通道。The ends of the
光源模块100产生的热量可通过第一热沉12直接传递给第一冷却槽201内流动的冷却介质,而第一准直镜200及第一反射镜300产生的热量可通过第二热沉13直接传递给第二冷却槽202内流动的冷却介质。The heat generated by the
第一冷却槽201沿着第一热沉12的长度方向延伸,使第一冷却槽201的走向与第一热沉12保持一致,使第一冷却槽201内的冷却介质能够尽量流经第一热沉12所处的区域,第一冷却槽201内的冷却介质能够与第一热沉12所处的区域充分接触,以提高冷却效率。The
同样的,第二冷却槽202沿着第二热沉13的长度方向延伸,使第二冷却槽202的走向与第二热沉13保持一致,使第二冷却槽202内的冷却介质能够尽量流经第二热沉13所处的区域,第二冷却槽202内的冷却介质能够与第二热沉13所处的区域充分接触,以提高冷却效率。Similarly, the
如图3所示,优选的,当第一热沉12及第二热沉13的数量设置为多个时,第一热沉12与第二热沉13并排设置,相应的,与每个第一热沉12对应的第一冷却槽201设置为多个时,多个第一冷却槽201沿第一热沉12的宽度方向并排设置;同样的,与每个第二热沉13对应的第二冷却槽202设置为多个时,多个第二冷却槽202沿第二热沉13的宽度方向并排设置。As shown in FIG. 3 , preferably, when the number of the
如图2所示,第一冷却槽201的宽度及深度均大于第二冷却槽202的宽度及深度,可使第一冷却槽201的横截面积大于第二冷却槽202的横截面积,如此,可以改变冷却介质在第一冷却槽201及第二冷却槽202内的流动分布,可将更多的冷却介质引入到第一冷却槽201内,用于带走光源模块100通过第一热沉12传递至第一冷却槽201的热量,以满足光源模块100的正常散热需求。As shown in Figure 2, the width and depth of the
例如,组成第一冷却槽201的两个第一隔板11之间的间距,大于组成第二冷却槽202的两个第一隔板11之间的间距;组成第一冷却槽201的两个第一隔板11的高度,大于组成第二冷却槽202的两个第一隔板11的高度。For example, the spacing between the two
还可在第一冷却槽201内正对着光源模块100的安装位置设置由底部往外延伸的导热结构14,导热结构14有助于快速传递第一热沉12上产生的热量,同时可以增大散热面积,使冷却介质能够充分吸收第一热沉12传递的热量,提高第一冷却槽201内冷却介质的冷却效率。A
例如,导热结构14可为自第一冷却槽201的底部往外延伸的整体式导热板;或自第一冷却槽201的底部往外延伸的,并阵列分布的导热柱或导热针;或自第一冷却槽201的底部往外延伸的,且间隔分布的导热片。这些结构形式的导热结构均可以增大散热面积,可快速传导光源模块100产生的热量,使冷却介质能够充分吸收第一热沉12传递的热量,提高第一冷却槽201内冷却介质的冷却效率。For example, the
优选的,第一隔板11上间隔的设有多个缺口110,使底座1采用锻压工艺一体成型时,便于在锻压模具上设置加强筋,提高锻压模具的结构强度及使用寿命。为了避免在第一隔板11上设置缺口110影响到光源模块100的冷却散热,第一隔板11上缺口110开设的位置设在相邻两个光源模块100之间的间隔所对应的位置,因为相邻两个光源模块100之间的间隔位置发热量较少,整体上对光源模块100散热的影响最小,缺口110开设在这些位置可尽量避免缺口110对冷却散热的削弱作用。Preferably, a plurality of notches 110 are provided at intervals on the
每个第一热沉单元至第一冷却槽201底部的垂直距离相等,使得设置在第一热沉单元上的光源模块100至第一冷却槽201底部的垂直距离相等,可保证光源模块100产生的热量从每个第一热沉单元传递至第一冷却槽201所走的距离保持一致,使每个光源模块100都能够被均匀冷却。同样的,每个第二热沉单元至第二冷却槽202底部的垂直距离相等,使得设置在第二热沉单元上的光学镜片至第二冷却槽202底部的垂直距离相等,可保证热量从每个第二热沉单元传递至第二冷却槽202所走的距离保持一致,使每个光学镜片都能够被均匀冷却。The vertical distance from each first heat sink unit to the bottom of the
理论上讲,第一热沉单元的光源模块100至第一冷却槽201底部的垂直距离越小,以及第二热沉单元的光学镜片至第二冷却槽202底部的垂直距离越小,越有利于光源模块100和第一准直镜200及第一反射镜300等光学镜片的散热。但是受到底座1与底板3采用钎焊进行封装的工艺影响,距离越小,底座1受热越容易产生变形风险,为了保证底座1不产生变形风险的前提下,尽量优化提高散热效率,第一热沉单元的光源模块100至第一冷却槽201底部的垂直距离,以及第二热沉单元的光学镜片至第二冷却槽202底部的垂直距离,均应不小于5mm。Theoretically speaking, the smaller the vertical distance from the
如图5所示,第一冷却腔20内靠近冷却介质入口30的位置还设有分流装置,分流装置包括与冷却介质入口30、第一冷却槽201及第二冷却槽202均连通的分流室150及设置在分流室150内的分流板15,分流板15将分流室150分隔成与第一冷却槽201连通的第一分流槽(未标示)及与第二冷却槽202连通的第二分流槽(未标示)。As shown in Figure 5, a flow distribution device is also provided near the cooling
分流装置有助于将冷却介质入口30流入的冷却介质,通过第一分流槽及第二分流槽更好的分配给第一冷却槽201及第二冷却槽202,以利于冷却介质根据冷却散热需求更合理的在第一冷却槽201及第二冷却槽202内分配流动。The distribution device helps to better distribute the cooling medium flowing into the cooling
结合图3及图5所示,在底座1第二表面的散热区上,与出光区102相对的位置设有整体凹陷的第二冷却腔50,第二冷却腔50内设有自底部往外延伸的第二隔板16,第二隔板16将第二冷却腔50连续分隔出引导冷却介质流动的第三冷却槽501,第一冷却腔20与第二冷却腔50之间设有隔离墙17将第一冷却腔20与第二冷却腔50分隔,只留第一冷却槽201及第二冷却槽202对应的与第三冷却槽501连通,第三冷却槽501与冷却介质出口40连通。As shown in FIG. 3 and FIG. 5 , on the heat dissipation area on the second surface of the base 1 , a
出光区102上的光学镜片及剥模光纤800产生的热量传递至第三冷却槽501,被第三冷却槽501内流动的冷却介质吸收,从而实现对出光区102上的光学镜片及剥模光纤800进行冷却散热。The heat generated by the optical lenses on the
在其他实施例中,散热通道还可这样设置,在底座1的第二表面上一体锻压成型出整体向内凹陷的腔体,并在该腔体内设置至少一条金属管(未标示),例如铜管或铝管,使金属管形成散热通道。或者直接将金属管通过钎焊工艺焊接在底座1的第二表面上。In other embodiments, the heat dissipating channel can also be arranged in such a way that an overall inwardly recessed cavity is integrally forged and formed on the second surface of the base 1, and at least one metal tube (not shown), such as copper tube, is arranged in the cavity. tube or aluminum tube, so that the metal tube forms the heat dissipation channel. Alternatively, the metal pipe is directly welded to the second surface of the base 1 through a brazing process.
金属管可做任意弯曲变形,例如,可将金属管弯曲成上述实施例中提到的第一、二、三冷却槽弯曲的形状,并保证设置金属管的区域与阶梯热沉、光学镜片及剥模光纤的位置相对应。使金属管的散热效果尽量接近上述实施例中冷却槽的散热效果。The metal tube can be bent and deformed arbitrarily, for example, the metal tube can be bent into the shape of the first, second, and third cooling grooves mentioned in the above embodiment, and the area where the metal tube is set and the stepped heat sink, optical lens and The position of the stripped mode fiber corresponds to that. Make the heat dissipation effect of the metal tube as close as possible to the heat dissipation effect of the cooling groove in the above embodiment.
为了提高底座1及底板3的导热性能,以及底座1表面对镀层的附着力,底座1及底板3的材质可为黄铜或铝材等具有良好导热性能的材料。In order to improve the thermal conductivity of the base 1 and the
底座1的外表面上设有镀金层、镀银层、镀锡层或镀镍层。镀金层、镀银层、镀锡层或镀镍层均具有优良的导电性及导热性,对于光源模块发出的光源具有很好的塑造性,可使光源不散光。特别是在阶梯热沉的用于封装光源模块100的表面上设有镀银层,镀银层对光源模块100焊接会强化附着力以及流通性,使光源模块100与镀银层完全贴合,无焊接空洞。此外,镀银层、镀锡层或镀镍层相较于镀金层,成本更低,可使激光泵浦源的成本更具有竞争优势。The outer surface of the base 1 is provided with a gold-plated layer, a silver-plated layer, a tin-plated layer or a nickel-plated layer. The gold-plated layer, silver-plated layer, tin-plated layer or nickel-plated layer all have excellent electrical conductivity and thermal conductivity, and have good shaping properties for the light source emitted by the light source module, which can prevent the light source from astigmatizing. In particular, a silver-plated layer is provided on the surface of the stepped heat sink for encapsulating the
结合图6及图7所示,为了进一步提激光泵浦源的整体散热能力及优化激光泵浦源的散热环境,在盖板2上还设有冷却通道21,用于通入冷却介质对盖板2进行冷却。这样安装槽10的热沉区101内设置的光源模块100和光学镜片,以及出光区102内设置的指示光模组3000及收光腔801内的剥模光纤800,除了可通过底座1上设置的散热通道进行散热冷却外,还可通过在盖板2上设置冷却通道21进行散热冷却,从而可进一步提高激光泵浦源的散热效率。As shown in FIG. 6 and FIG. 7, in order to further improve the overall heat dissipation capability of the laser pump source and optimize the heat dissipation environment of the laser pump source, a cooling
此外,还可将激光泵浦源的其他发热部件设置在盖板2的外表面上,例如,可将有源光纤直接盘绕在盖板2的外表面上,可通过盖板2上设置冷却通道21对有源光纤进行散热冷却。具体的,可将光纤盘直接固定在盖板2的外表面上,或将用于盘绕有源光纤的光纤槽直接加工在盖板的外表面上。In addition, other heat-generating components of the laser pump source can also be arranged on the outer surface of the
如图6所示,在一些实施例中,盖板2为一体式结构的盖板,冷却通道21直接加工在盖板2内,例如通过钻孔的方式直接加工出直通式的冷却通道21。盖板2的侧壁上设有与冷却通道21连通的冷却源入口23及冷却源出口24。As shown in FIG. 6 , in some embodiments, the
如图7所示,在一些实施例中,盖板2为分体结构,盖板2包括第一盖板21及第二盖板22,其中第一盖板21的与第二盖板贴合的一面设有整体的凹陷区,该凹陷区内自底部往外延伸设置有多个间隔布置的凸缘212,多个间隔布置的凸缘212将该凹陷区连续分隔出用于引导冷却介质流动的凹槽211。第二盖板22与第一盖板21通过钎焊密封连接,将凹陷区的开口密封,使凹槽211与第二盖板21密封配合形成冷却通道。盖板2的侧壁上设有与冷却通道连通的冷却源入口23及冷却源出口24。As shown in FIG. 7, in some embodiments, the
在一些实施例中,盖板2为一体式结构的盖板,盖板2的外表面上焊接有至少一条金属管(未标示),例如铜管或铝管,使金属管形成冷却通道。In some embodiments, the
上述激光器泵浦源的封装工艺如下:The packaging process of the above laser pump source is as follows:
S1、提供一底座胚料,在底座胚料上直接加工出具有第一表面及第二表面的底座,得到底座的半成品。S1. A base blank is provided, and a base having a first surface and a second surface is directly processed on the base blank to obtain a semi-finished product of the base.
包括在散热区内加工出自底部往外延伸的并与所述阶梯热沉长度方向保持一致的多个第一隔板,并使多个第一隔板沿所述阶梯热沉宽度方向间隔排布,使第一隔板在散热区内连续分隔出所述冷却槽。including processing a plurality of first partitions extending outward from the bottom in the heat dissipation area and keeping in line with the length direction of the stepped heat sink, and arranging the plurality of first partitions at intervals along the width direction of the stepped heat sink, The first partition continuously separates the cooling groove in the heat dissipation area.
在每个所述阶梯热沉上加工出用于安装所述光源模块的、长条状的第一热沉,及加工出用于安装所述光学镜片的、长条状的第二热沉,并使所述第一热沉与所述第二热沉并排设置。Processing a strip-shaped first heat sink for mounting the light source module on each of the stepped heat sinks, and processing a strip-shaped second heat sink for mounting the optical lens, And the first heat sink and the second heat sink are arranged side by side.
具体的,采用锻压工艺,通过锻压模具将胚料一体锻压成型出具有第一表面及第二表面的底座。Specifically, a forging process is adopted, and the base material is integrally forged and formed by a forging die to form a base having a first surface and a second surface.
包括在底座的第一表面上一体成型出向下凹陷的安装槽及设于安装槽内的多个阶梯热沉及用于进行剥模处理的收光腔。It includes integrally forming a downwardly recessed installation groove on the first surface of the base, a plurality of stepped heat sinks arranged in the installation groove, and a light receiving cavity for stripping the mold.
以及在底座的第二表面上一体成型出向下凹陷的散热区,包括第一冷却腔及第二冷却腔,以及设于散热区内的冷却槽,包括第一冷却槽、第二冷却槽及第三冷却槽。And on the second surface of the base, a downwardly recessed heat dissipation area is integrally formed, including the first cooling cavity and the second cooling cavity, and the cooling grooves arranged in the heat dissipation area, including the first cooling groove, the second cooling groove and the second cooling groove. Three cooling tanks.
锻压工艺具有生产效率高,工艺简单,可省去大量的机加工工序及机加工设备,节省原材料等诸多优势,可降低泵浦源的制造成本,适用于大批量生产,提高泵浦源的生产效率。The forging process has many advantages such as high production efficiency, simple process, saving a lot of machining processes and machining equipment, saving raw materials, etc., can reduce the manufacturing cost of the pump source, is suitable for mass production, and improves the production of the pump source. efficiency.
此外,也可采用机加工例如铣削等方式,在底座胚料上直接加工出具有第一表面及第二表面的底座。In addition, machining such as milling may also be used to directly process the base having the first surface and the second surface on the base blank.
包括在底座的第一表面上铣削出向下凹陷的安装槽及设于安装槽内的多个阶梯热沉及用于进行剥模处理的收光腔。It includes milling a downwardly recessed installation groove on the first surface of the base, a plurality of stepped heat sinks arranged in the installation groove, and a light receiving cavity for mold stripping.
以及在底座的第二表面上铣削出向下凹陷的散热区,包括第一冷却腔及第二冷却腔,以及设于散热区内的冷却槽,包括第一冷却槽、第二冷却槽及第三冷却槽。And on the second surface of the base, a downwardly recessed cooling area is milled, including the first cooling cavity and the second cooling cavity, and the cooling slots located in the cooling area, including the first cooling slot, the second cooling slot and the third cooling slot. cooling tank.
S2、对步骤S1中制成的底座的半成品进行CNC精加工,通过CNC在阶梯热沉上加工出用于封装光源模块的封装平面及用于定位光学镜片的光学镜片定位装置。S2. Carry out CNC finishing on the semi-finished product of the base made in step S1, and process a packaging plane for packaging the light source module and an optical lens positioning device for positioning the optical lens on the stepped heat sink by CNC.
S3、将底板与底座的第二表面采用钎焊工艺进行密封连接,使底座与底板焊接形成一体的泵浦源底座,以将散热区整体封装,使底板与第一冷却槽、第二冷却槽及第三冷却槽围合形成散热通道。S3. The base plate and the second surface of the base are sealed and connected by a brazing process, so that the base and the base plate are welded to form an integrated pump source base, so as to encapsulate the heat dissipation area as a whole, so that the base plate is connected with the first cooling tank and the second cooling tank. and the third cooling groove to form a heat dissipation channel.
具体的,先在底座的散热区的外延端面,以及形成冷却槽的第一隔板的延伸端的端面涂刷一层液体焊料,或者在底座散热区的外延端面以及形成冷却槽的第一隔板的延伸端的端面放置适量的焊料片。接着,将底板盖在底座上,将液体焊料或焊料片覆盖,并放入定形模具中。加热定形模具,控制加热温度,使液体焊料或焊料片熔化将底座与底板焊接形成一体结构的泵浦源底座。Specifically, a layer of liquid solder is first applied on the extension end surface of the heat dissipation area of the base and the end surface of the extension end of the first partition forming the cooling groove, or on the extension end surface of the heat dissipation area of the base and the first partition forming the cooling groove Place an appropriate amount of solder piece on the end face of the extension end. Next, the base plate is placed over the base, covered with liquid solder or solder flakes, and placed in a shaping mold. Heat the shaping mold, control the heating temperature, melt the liquid solder or solder sheet, weld the base and the bottom plate to form a pump source base with an integrated structure.
S4、在步骤S3焊接形成泵浦源底座的外表面,进行电化学表面处理,使泵浦源底座的外表面形成一层电镀层;S4. In step S3, the outer surface of the pump source base is welded to form an electrochemical surface treatment, so that an electroplating layer is formed on the outer surface of the pump source base;
例如,在泵浦源底座的外表面上进行电镀银或电镀金,使泵浦源底座的外表面覆盖一层镀银层或镀金层。For example, electroplating silver or electroplating gold is performed on the outer surface of the pump source base, so that the outer surface of the pump source base is covered with a layer of silver plating or gold plating.
其中,电镀银的工艺包括以下步骤:Wherein, the process of electroplating silver comprises the following steps:
S401、对泵浦源底座进行第一次除油清洗,烘干后再进行喷砂,再进行第二次除油清洗,烘干后备用,第一次除油清洗以及第二次除油清洗均在超声波清洗机内进行,频率设置在40~60赫兹,温度控制在50℃~60℃,此为电镀银阶段的前置步骤;S401. Carry out the first degreasing cleaning on the base of the pump source, dry and then perform sandblasting, then perform the second degreasing cleaning, dry and set aside, the first degreasing cleaning and the second degreasing cleaning All are carried out in an ultrasonic cleaning machine, the frequency is set at 40-60 Hz, and the temperature is controlled at 50°C-60°C. This is the pre-step of the silver plating stage;
S402、对泵浦源底座执行以下工艺流程,完成镀银工序:酸洗→清洗→镀铜→清洗→活化→清洗→镀镍→清洗→活化→清洗→预镀银→镀银→清洗→银保护剂→清洗→脱水→烘干;具体要求如下:S402. Perform the following process on the base of the pump source to complete the silver plating process: pickling→cleaning→copper plating→cleaning→activation→cleaning→nickel plating→cleaning→activation→cleaning→pre-silver plating→silver plating→cleaning→silver Protective agent → cleaning → dehydration → drying; the specific requirements are as follows:
酸洗:稀盐酸酸洗:盐酸浓度:5~10%;Pickling: Dilute hydrochloric acid Pickling: Hydrochloric acid concentration: 5-10%;
清洗:在水池中使用干净清洁的循环水进行清洗;Cleaning: Use clean and clean circulating water in the pool for cleaning;
镀铜:向基体材料表面镀铜,镀铜液体槽参数为:氧化铜浓度:20~40g/L,氧化钠浓度:10~15g/L,温度控制55~65℃,时间为5min;Copper plating: copper plating on the surface of the base material, the parameters of the copper plating liquid tank are: copper oxide concentration: 20-40g/L, sodium oxide concentration: 10-15g/L, temperature control 55-65°C, time 5min;
活化:稀盐酸活化:盐酸浓度:5~10%,活化时间:5~10s;Activation: dilute hydrochloric acid activation: hydrochloric acid concentration: 5-10%, activation time: 5-10s;
镀镍:向基材表面镀镍,镀镍液体槽参数为:硫酸镍含量:200~300g/L,氯化镍含量:40~60g/L,硼酸含量:40~60g/L;镀层厚度:镍3~5μm;并进行哈式试验;Nickel plating: nickel plating on the surface of the substrate, the parameters of the nickel plating liquid tank are: nickel sulfate content: 200-300g/L, nickel chloride content: 40-60g/L, boric acid content: 40-60g/L; coating thickness:
预镀银:镀银液体槽参数为:金属银含量:1~3g/L,氯化钾含量:90~120g/L;Pre-plating silver: The parameters of the silver-plating liquid tank are: metal silver content: 1-3g/L, potassium chloride content: 90-120g/L;
镀银:镀银液体槽参数为:金属银含量:10~20g/L,氯化钾含量:100~150g/L,通过预镀银和镀银工序,镀银层总厚度为0.0025-0.006mm;Silver plating: The parameters of the silver plating liquid tank are: metal silver content: 10-20g/L, potassium chloride content: 100-150g/L, and the total thickness of the silver plating layer is 0.0025-0.006mm through pre-silver plating and silver plating processes ;
涂覆银保护剂:在镀银层表面涂覆银保护剂;Coating silver protective agent: coating silver protective agent on the surface of the silver plating layer;
S403、可靠性测试,得到成品。其中,可靠性测试包括以下项目:镀层厚度、胶纸剥离、摆格测试、达因笔测试、超声清洗、高温烘烤和中性盐雾。具体要求如下:S403. Reliability testing to obtain a finished product. Among them, the reliability test includes the following items: coating thickness, tape stripping, pendulum test, dyne pen test, ultrasonic cleaning, high temperature baking and neutral salt spray. Specific requirements are as follows:
镀层厚度:使用X荧光仪检测,镍3~5μm,银3~6μm;Coating thickness: detected by X-ray fluorescence instrument, nickel 3-5μm, silver 3-6μm;
胶纸剥离:3M 600胶纸180°按压平整剥离测试三次;Adhesive tape peeling:
摆格测试:百格刀划切1*1mm小格,3M胶纸垂直按压三次,脱落面积小于10%;Grid test: cut 1*1mm small grid with a 100-grid knife, press 3M adhesive tape vertically three times, and the shedding area is less than 10%;
达因笔测试:划100mm长的墨条,并观察其90%以上的墨条边在2秒钟内是否发生收缩并形成墨滴;Dyne pen test: draw a 100mm long ink strip, and observe whether more than 90% of the ink strip edges shrink and form ink droplets within 2 seconds;
超声清洗:去离子水超声清洗15分钟螺纹孔内无液体残留;Ultrasonic cleaning: Ultrasonic cleaning with deionized water for 15 minutes without liquid residue in the threaded hole;
高温烘烤:240度高温烘烤30Min,烤箱内自然冷却是否有起皮鼓包;High temperature baking: 240 degrees high temperature baking for 30 minutes, natural cooling in the oven to see if there are skin bulges;
中性盐雾:24h中性盐雾,表面是否有起泡,发黑发黄及斑点;Neutral salt spray: 24h neutral salt spray, whether there are bubbles, black, yellow and spots on the surface;
S5、光源模块及光学镜片封装,将光源模块焊接固定在步骤S2中通过CNC精加工出的封装平面上,并将光学镜片通过光学镜片定位装置进行定位,并通过导热胶水将光学镜片粘结固定在阶梯热沉的第二热沉单元上。S5. Packaging the light source module and optical lens, welding and fixing the light source module on the packaging plane processed by CNC in step S2, positioning the optical lens through the optical lens positioning device, and bonding and fixing the optical lens with heat-conducting glue On the second heat sink unit of the stepped heat sink.
S6、剥模光纤的封装,将剥模光纤安装固定在收光腔内,再将镀金盖板通过锁紧在收光腔上,将收光腔的开口密封,以完成对剥模光纤的封装。S6. Encapsulation of the stripping optical fiber, install and fix the stripping optical fiber in the optical receiving cavity, and then lock the gold-plated cover plate on the optical receiving cavity to seal the opening of the optical receiving cavity to complete the packaging of the stripping optical fiber .
S7、盖板封装,通过螺钉将盖板紧固连接在底座的第一表面上,将底座的安装槽的开口密封,以将安装槽内的光源模块及光学镜片进行整体封装。S7. Encapsulating the cover plate, fastening the cover plate on the first surface of the base with screws, sealing the opening of the installation groove of the base, so as to package the light source module and the optical lens in the installation groove as a whole.
具体的,在底座的安装槽的外延端面间隔设置一圈螺纹孔,通过螺钉穿过盖板与螺纹孔配合连接,将盖板紧固连接在底座上。Specifically, a circle of threaded holes is provided at intervals on the extension end surface of the mounting groove of the base, and the cover plate is fastened to the base by screws passing through the cover plate and mated with the threaded holes.
综上所述:本实用新型实施的泵浦源,由于将散热通道直接设置在底座1上,使泵浦源的底座自带冷却功能,并且通过在底座1上设置多个用于封装光源模块100及光学镜片的阶梯热沉,可以实现将更多的光源模块100集中封装在体积更小的泵浦源的底座1内,实现光源模块100高集成度封装,以及泵浦源的高功率输出。同时还可满足光源模块100的散热要求,简化了激光器泵浦源的冷却结构布局。To sum up: the pump source implemented in the utility model, since the heat dissipation channel is directly arranged on the base 1, the base of the pump source has its own cooling function, and by setting a plurality of modules on the base 1 for packaging the
并且阶梯热沉、用于剥模的收光腔以及用于引导冷却介质流动的冷却槽,均通过锻压或铣削等方式直接加工在底座1上,可使激光器泵浦源的结构更加紧凑,缩减了激光器泵浦源的体积,减轻了激光器泵浦源的重量,实现泵浦源的轻量化设计,降低了激光器泵浦源的研发及制造成本。In addition, the stepped heat sink, the light receiving cavity for mold stripping and the cooling groove for guiding the flow of cooling medium are all directly processed on the base 1 by forging or milling, which can make the structure of the laser pump source more compact and reduce the The volume of the laser pump source is reduced, the weight of the laser pump source is reduced, the lightweight design of the pump source is realized, and the research and development and manufacturing costs of the laser pump source are reduced.
最后应说明的是:以上实施例仅用以说明本实用新型的技术方案,而非对其限制;在本实用新型的思路下,以上实施例或者不同实施例中的技术特征之间也可以进行组合,步骤可以以任意顺序实现,并存在如上所述的本实用新型的不同方面的许多其它变化,为了简明,它们没有在细节中提供;尽管参照前述实施例对本实用新型进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本实用新型各实施例技术方案的范围。Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present utility model, rather than to limit them; Combinations, steps can be implemented in any order, and there are many other variations of the different aspects of the utility model as described above, which are not provided in detail for the sake of brevity; although the utility model has been described in detail with reference to the foregoing embodiments, Those skilled in the art should understand that: it is still possible to modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not deviate from the essence of the corresponding technical solutions The scope of the technical solutions of each embodiment of the utility model.
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