CN217983288U - Carrier and treatment facility - Google Patents

Abstract

The utility model discloses a carrier and treatment facility relates to the photovoltaic technology field to the mode of preparing the mask among the solution prior art is complicated, and is with high costs, leads to back of the body contact solar cell's preparation efficiency to reduce, problem that the cost of manufacture is high. The carrier includes: a carrier assembly and a baffle. The bearing assembly is provided with a bearing space; the plurality of baffles are arranged in the bearing space at intervals, the bearing space is divided into at least one first space and at least one second space by the plurality of baffles, the first space and the second space are alternately arranged, the first space is used for accommodating a workpiece, a hollow area is formed in at least one baffle corresponding to each first space, the orthographic projection of the hollow area corresponds to an area to be processed in one side surface of the workpiece, a treating agent for treating the surface of the workpiece is arranged in the area to be processed corresponding to the workpiece through the hollow area, and the hollow area is communicated with the second space and the first space. The utility model also provides a treatment facility, including above-mentioned technical scheme the carrier.

Description

Carrier and treatment facility

Technical Field

The utility model relates to a photovoltaic technology field especially relates to a carrier and treatment facility.

Background

The back contact solar cell is a back junction photovoltaic cell with an interdigital shape. Because the emitter and the metal contact of the back contact solar cell are both positioned on the back surface of the cell, the structure effectively reduces the front shading loss and increases the effective contact area of the cell. Therefore, not only can higher short-circuit current be obtained, but also the back surface can allow wider metal grid lines to reduce the series resistance so as to improve the filling factor, and further the back contact solar cell has higher photoelectric conversion efficiency.

In the prior art, in order to form P + and N + interdigital structures of a back contact solar cell, a patterned SiO layer is usually formed on the surface of the solar cell _X 、SiO ₂ And masking to form a non-masked diffusion region and a masked shielding region on the surface of the battery so as to form a P + region and an N + region. However, the above-described method for preparing the mask is complicated and costly. Therefore, the manufacturing efficiency of the back contact solar cell is reduced, and the manufacturing cost is increased.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a carrier and treatment facility for improve back of the body contact solar cell's preparation efficiency, reduce the cost of manufacture.

In order to achieve the above object, in a first aspect, the present invention provides a carrier. The carrier includes: a carrier assembly and a baffle. The bearing assembly is provided with a bearing space; the plurality of baffles are arranged in the bearing space at intervals, the bearing space is divided into at least one first space and at least one second space by the plurality of baffles, the first space and the second space are alternately arranged, the first space is used for accommodating a workpiece, a hollow area is formed in at least one baffle corresponding to each first space, the orthographic projection of the hollow area corresponds to an area to be processed in one side surface of the workpiece, a treating agent for treating the surface of the workpiece is arranged in the area to be processed corresponding to the workpiece through the hollow area, and the hollow area is communicated with the second space and the first space.

Compared with the prior art, the utility model provides an in the carrier, because the finishing agent of handling workpiece surface can set up in the pending territory that corresponds with the work piece through the fretwork region orientation, at this moment, utilize the fretwork region of seting up on the baffle alright with the directional processing of simple quick realization finishing agent to workpiece surface to make pending regional structure that forms actual need. Namely, the proper partition plate is selected according to different regions to be processed of the workpiece. Compared with the prior art in which process equipment is utilized to manufacture patterned SiO _X 、SiO ₂ The mode of mask utilizes the utility model provides a carrier is handled not only simple and conveniently to the work piece, has reduced the complexity of technology, has improved the preparation efficiency of work piece. Meanwhile, the investment of process equipment is reduced, and the manufacturing cost is reduced.

In one implementation, the bearing assembly includes: a base plate and a first connecting piece. The two substrates are arranged oppositely and at intervals, and the substrates and the partition plates are arranged oppositely. The first connecting piece comprises two ends, the two ends of the first connecting piece are respectively connected with the base plate, and the partition plate is connected with the first connecting piece. And a bearing space is arranged between the assembled base plate and the first connecting piece.

Under the condition of adopting the technical scheme, the bearing assembly only comprises the base plate and the first connecting piece, and the bearing assembly is simple in structure, easy to manufacture, convenient for workers to rapidly assemble and capable of saving working time.

In one implementation, the bearing component further includes: a stopper. The limiting part comprises two ends, the two ends of the limiting part are connected with the base plate respectively, and the limiting part is located between two adjacent first connecting pieces and used for assisting in limiting the relative position of the workpiece and the bearing space. The baffle is connected with first connecting piece and locating part respectively.

Adopt under the circumstances of above-mentioned technical scheme, utilize the locating part can ensure that baffle and work piece set up in bearing space completely, avoid appearing baffle and work piece and take place for the outstanding condition of bearing component. The situation that the position of the partition plate and the workpiece is deviated in the process of being placed in the bearing assembly can be avoided. Based on this, not only can the relative position of the partition plate and the workpiece be ensured to be fixed, but also the position of the treating agent applied on the workpiece can be ensured to be the area to be treated of the workpiece, and further the accuracy of the treatment on the workpiece can be ensured. Then, the position of the partition plate and the workpiece in the bearing assembly can be fixed, so that the phenomenon that the workpiece or the partition plate falls off from the bearing assembly due to shaking or other conditions in the actual processing process and the workpiece or the partition plate is damaged is reduced or avoided. I.e. the stop element may also ensure the safety of the work piece and the partition.

In one implementation, the substrate is perpendicular to a central axis of the first connecting member; the partition plate and the substrate are parallel to each other.

Under the condition of adopting the technical scheme, the partition plate can be opposite to the surface of the workpiece, namely the orthographic projection of the partition plate is superposed with the surface of the workpiece. At the moment, the structure formed on the surface of the workpiece after the treating agent passes through the hollow-out area formed on the partition board is consistent with the actually required structure, the condition that the formed structure is inconsistent with the actually required structure shape is reduced or avoided, and the quality of the treated workpiece is further ensured.

In one implementation, the spacing of each first space is different from the thickness of the workpiece by 0 μm to 10 μm.

Under the condition of adopting above-mentioned technical scheme, owing to there is above-mentioned difference, be convenient for place the work piece in first space this moment, reduce or avoid work piece and baffle collision each other to lead to the condition emergence of work piece or baffle damage. It will be appreciated that the difference is not sufficient to allow the treating agent to adhere or deposit onto the surface of the workpiece through the space between the first space and the workpiece, without affecting the normal treatment of the workpiece and without affecting the quality of the later formed workpiece.

In one implementation, the distance between every two second spaces is 1 mm-10 mm.

By adopting the technical scheme, the normal circulation of the treating agent can be ensured, and the actually required structure is formed on each workpiece to be treated. Meanwhile, more partition plates can be arranged in the bearing space to form more first spaces and second spaces, so that the carrier can process a plurality of workpieces simultaneously. Therefore, the processing time can be saved, the processing efficiency of the workpiece can be improved, the processing cost can be reduced, and the processing capacity of the carrier can be improved.

In one implementation, the treatment agent includes a dopant gas or a deposition gas;

the second space is used for introducing doping gas, and the hollow area is used for introducing the doping gas in the second space into the adjacent first space and enabling the doping gas to contact and diffuse with an area to be processed in the surface of one side of the workpiece corresponding to the orthographic projection of the hollow area;

or the second space is used for introducing deposition gas, and the hollow area is used for introducing the deposition gas in the second space into the adjacent first space and depositing the deposition gas in an area to be processed in the surface of one side of the workpiece corresponding to the orthographic projection of the hollow area.

Adopt under the condition of above-mentioned technical scheme, adopt the utility model provides a carrier not only can realize doping the treating agent to the work piece, can also be at the surface deposition treating agent of work piece simultaneously. Based on this, can select suitable processing agent to handle the work piece according to actual need to expand the application scope of carrier, increase the application scene of carrier. Further, compare in prior art, because the utility model provides a carrier both can realize doping and handle and can also realize the deposition treatment. In this case, the processing equipment can be saved, and the processing cost can be reduced.

In one implementation mode, a first space is used for accommodating a workpiece, and the surface to be processed of the workpiece faces to the partition board with the hollow area;

or, be used for holding two work pieces in a first space, the fretwork region has all been seted up to two baffles that this first space corresponds, and the surface that treats that is located two work pieces in this first space sets up back to back.

Adopt under the condition of above-mentioned technical scheme, adopt the utility model provides a carrier can be according to the surface quantity of pending work piece, selects suitable baffle in order to realize only handling a work piece once, perhaps handles two work pieces simultaneously to further improve the treatment effeciency to the work piece.

In one implementation, the hollow area is a grid groove-shaped hollow area or a mesh-shaped hollow area.

Under the condition of adopting the technical scheme, the selectivity of the shape of the hollow-out area is more, and at the moment, the partition plate with the hollow-out area in the proper shape can be selected according to actual needs. Based on this, the partition board provided with the hollow area can adapt to different application scenes, and the application range of the partition board is further expanded.

In one implementation, the carrier further includes a second connecting member; the second connecting member connects the plurality of partitions in series for adjusting the interval of the first space and the interval of the second space.

Under the condition of adopting above-mentioned technical scheme, because a plurality of baffles of second connecting piece series connection, at this moment, utilize the second connecting piece can remove a plurality of baffles simultaneously to adjust the interval in first space and the interval in second space simultaneously. Based on this, before placing the work piece in first space, can increase the interval in first space earlier to place the work piece in first space safely fast. Then, after the workpiece is placed in the first space, the second connecting piece is moved to adjust the distance between the first space, so that the treating agent can only diffuse and move through the hollow area and the second space (namely, the partition plates positioned at two sides of the battery piece are tightly attached to the battery piece), the treating agent is prevented from being attached to or deposited in an area of the workpiece which is not required to be treated, and the quality of the treated workpiece is further ensured. After the battery piece is processed, the distance between the first spaces can be adjusted to be larger by moving the second connecting piece again, so that the battery piece can be taken out from the first spaces quickly and safely.

In one implementation, the carrier further includes an oxidation resistant coating; the anti-oxidation coating is respectively arranged on the bearing component and the partition plate.

By adopting the technical scheme, the service life of the carrier can be prolonged, the condition that the treatment of the workpiece is influenced by oxide or other substances formed on the surface of the carrier can be reduced or avoided, and the quality of the treated workpiece is further improved.

The utility model also provides a treatment facility, including above-mentioned technical scheme the carrier.

Compared with the prior art, the utility model provides a treatment facility's beneficial effect and above-mentioned technical scheme the beneficial effect of carrier is the same, and the no longer need be repeated here.

Drawings

The accompanying drawings, which are described herein, serve to provide a further understanding of the invention and constitute a part of this specification, and the exemplary embodiments and descriptions thereof are provided for explaining the invention without unduly limiting it. In the drawings:

fig. 1 is a schematic view illustrating a first use perspective of a carrier according to an embodiment of the present invention;

fig. 2 is a schematic view of a second use perspective of the carrier according to an embodiment of the present invention;

fig. 3 is a schematic view illustrating a third usage perspective of the carrier according to the embodiment of the present invention;

fig. 4 is a schematic view of a part of the assembled structure of the load bearing assembly and the battery plate according to the embodiment of the present invention;

fig. 5 is a partial structural view of a second assembled battery cell and a carrier assembly according to an embodiment of the present invention;

FIG. 6 is a schematic view of a first separator according to an embodiment of the present invention;

FIG. 7 is a schematic view of a second type of separator according to an embodiment of the present invention;

FIG. 8 is a schematic view of a third separator according to an embodiment of the present invention;

fig. 9 is an assembly diagram of the second connecting member, the battery piece and the separator according to the embodiment of the present invention.

Reference numerals:

1-a carrier assembly, 10-a first space, 11-a second space;

12-base plate, 13-first connecting piece, 14-limiting piece;

2-partition board, 20-hollow area, 21-non-hollow area;

3-battery plate, 4-second connecting piece, 40-first second connecting piece,

41-second connector.

Detailed Description

In order to make the technical problem, technical solution and beneficial effects to be solved by the present invention more clearly understood, the following description is made in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In addition to the contents described in the background section, in the prior art, in order to form the P + and N + interdigitated structures of the back contact solar cell, local diffusion of phosphorus and boron is performed on the back surface of the cell by using a photolithography technique to form P + regions and N + regions of the interdigitated structures, respectively. Or, printing a boron-containing interdigital diffusion masking layer on the back surface of the cell, and then performing boron diffusion on the interdigital diffusion masking layer to form an N + region. And finally, carrying out phosphorus diffusion on the unprinted part area to form a P + area. However, the above process is not only complicated, but also requires expensive laser equipment, which increases the manufacturing cost.

In addition, in addition to the back contact solar cell described above, a selective emitter (SE-selective emitter) crystalline silicon solar cell is used. In the prior art, heavy doping is generally performed on a contact part of a metal grid line and a silicon wafer, and light doping is performed between electrodes to reduce diffusion layer recombination, so that open-circuit voltage and fill factors of a battery are improved, and further photoelectric conversion efficiency of the battery is improved. That is, heavily doped regions and lightly doped regions with the same polarity need to be formed in different regions, so that electrode contacts can be well formed in the subsequent electrode preparation process. At present, in order to achieve the above purpose, a mask plate is inserted into a diffusion boat manually, and then doped regions with different concentrations are formed by a secondary diffusion method. However, the above process needs manual work to participate many times, and a mask plate needs to be additionally inserted, so that the working efficiency is low, and the cost is high.

In order to solve the above technical problem, an embodiment of the utility model provides a carrier.

Referring to fig. 1 to 8, the carrier may include: a carrier assembly 1 and a partition 2. The bearing component 1 is provided with a bearing space; the plurality of partition plates 2 are arranged in the bearing space at intervals, the bearing space is divided into at least one first space 10 and at least one second space 11 by the plurality of partition plates 2, the first spaces 10 and the second spaces 11 are alternately arranged, the first spaces 10 are used for accommodating workpieces, a hollowed-out area 20 is formed in at least one partition plate 2 corresponding to each first space 10, the orthographic projection of the hollowed-out area 20 corresponds to an area to be processed in the surface of one side of the workpiece, a treating agent for processing the surface of the workpiece is arranged in the area to be processed corresponding to the workpiece through the hollowed-out area 20, and the hollowed-out area 20 is communicated with the second space 11 and the first space 10.

The workpiece carried by the carrier can be a back contact solar cell, a selective emitter crystalline silicon solar cell, and of course, other cells or non-cell type structures to be processed can be adopted. The following description will be given by taking a back contact solar cell and a selective emitter crystalline silicon solar cell as examples, and hereinafter referred to as a cell. It is to be understood that the following description is only for purposes of understanding, and is not intended to be limiting.

Referring to fig. 2, the materials, shapes and sizes of the bearing assembly 1 and the partition board 2 can be selected according to actual conditions. In the embodiment of the present invention, the material of the supporting component 1 and the partition board 2 may be quartz or graphite. The thickness of the separator 2 may be 50 μm to 500. Mu.m, and may be, for example, 50 μm, 90 μm, 120 μm, 260 μm, 300 μm, 350 μm, or 500 μm.

Referring to fig. 1 to 8, in the carrier provided by the embodiment of the present invention, since the treating agent for treating the surface of the workpiece can be directionally disposed in the region to be treated corresponding to the workpiece through the hollow region 20, at this time, the hollow region 20 disposed on the partition board 2 can be used to achieve the directional treatment of the treating agent on the surface of the workpiece simply and quickly, so as to enable the treating agent to be directional-treatedThe areas to be processed form the actually required structures. That is, it is only necessary to select an appropriate partition plate 2 according to the difference of the regions to be processed of the workpiece. Compared with the prior art in which process equipment is utilized to manufacture patterned SiO _X 、SiO ₂ The mode of mask utilizes the utility model provides a carrier is handled the work piece not only simple and conveniently, has reduced the complexity of technology, has improved the preparation efficiency of work piece (back contact solar cell promptly). Meanwhile, the investment of process equipment is reduced, and the manufacturing cost is reduced. Then, the embodiment of the utility model provides a carrier only includes bearing component 1 and 2 two parts of baffle, and this carrier is simple structure not only, easily preparation, and the staff fast assembly of still being convenient for simultaneously has practiced thrift operating time.

As a possible implementation manner, referring to fig. 1 to 3, the bearing assembly 1 may include: a base plate 12 and a first connector 13. The two substrates 12 are disposed opposite to each other at an interval, and the substrates 12 are disposed opposite to the partition 2. The first connecting member 13 includes two ends, the two ends of the first connecting member 13 are respectively connected to the substrate 12, and the partition board 2 is connected to the first connecting member 13. Wherein, a bearing space is arranged between the assembled base plate 12 and the first connecting piece 13.

Under the condition of adopting the technical scheme, referring to fig. 1 to 3, the bearing assembly 1 only comprises the base plate 12 and the first connecting piece 13, and the bearing assembly 1 is not only simple in structure and easy to manufacture, but also convenient for workers to quickly assemble, and saves the working time.

Referring to fig. 1 to 3, the shape of the substrate 12 may be a square, a rectangle, or any other shape. The first connecting member 13 may be a connecting rod or a connecting plate. When the first connecting member 13 is a connecting rod, one connecting rod is disposed at each of four corners of the square substrate. At this time, the substrate 12 and the first connector 13 form a square frame structure. When the first connecting member 13 is a connecting plate, one connecting plate is provided at each of any three sides of the square base plate. At this time, the substrate 12 and the first connector 13 form a cubic structure having an open face. It should be understood that the side length of the square substrate matches the size of the workpiece, and in this case, the workpiece is conveniently placed in the bearing space. Next, the connection manner of the base plate 12 and the first connection member 13 is also various, and may be welding, bonding, mortise and tenon connection, bolt connection, or the like, and is not limited specifically herein.

In the embodiment of the present invention, a connecting rod is disposed at each of the four corners of the square substrate. The distance between the connecting rods is equal and is 0.1cm-1cm larger than the size of the cell to be placed, such as 0.1cm, 0.3cm, 0.5cm, 0.8cm or 1 cm. The minimum width of the connecting rod ranges from 1.5cm to 3cm, e.g., 1.5cm, 1.8cm, 2cm, 2.6cm, or 3cm, etc. The connecting rod can be in a cylindrical or cuboid shape.

In an alternative, referring to fig. 1 to 3, the base plate 12 is perpendicular to the central axis of the first connecting member 13, and the partition plate 2 and the base plate 12 are parallel to each other.

Under the condition of adopting the technical scheme, referring to fig. 1 to 3 and 6, the partition board 2 can be opposite to the surface of the workpiece, namely the orthographic projection of the partition board 2 is superposed with the surface of the workpiece. At this time, it is ensured that the structure formed on the surface of the workpiece after the treating agent passes through the hollow area 20 formed on the partition board 2 is consistent with the actually required structure, the situation that the formed structure is inconsistent with the actually required structure shape is reduced or avoided, and the quality of the treated workpiece is further ensured. In the embodiment of the present invention, the connecting rod is perpendicularly connected to the substrate 12.

In an alternative manner, referring to fig. 2, the bearing assembly 1 may further include: a stopper 14. The limiting member 14 includes two ends, the two ends of the limiting member 14 are respectively connected to the substrate 12, and the limiting member 14 is located between two adjacent first connecting members 13, so as to assist in limiting the relative position of the workpiece and the bearing space. The partition board 2 is connected to the first connecting member 13 and the limiting member 14, respectively.

With the above technical solution, referring to fig. 2, the limiting member 14 can ensure that the partition board 2 and the workpiece are completely disposed in the bearing space, so as to avoid the occurrence of the protrusion of the partition board 2 and the workpiece relative to the bearing assembly 1. Namely, the situation that the partition board 2 and the workpiece are displaced in the process of being placed in the bearing component 1 can be avoided. Based on this, not only can the relative position of the partition plate 2 and the workpiece be ensured to be fixed, but also the position where the treating agent is applied to the workpiece can be ensured to be the region to be treated of the workpiece, thereby ensuring the accuracy of the treatment of the workpiece. Then, the partition board 2 and the workpiece can be ensured to be fixed in position in the bearing component 1, so that the situation that the workpiece or the partition board 2 falls off from the bearing component 1 and the workpiece or the partition board 2 is damaged in the actual processing process due to shaking or other situations can be reduced or avoided. I.e. the stop 14, also ensures the safety of the work piece and the partition 2.

Referring to fig. 2, the position-limiting element 14 is a position-limiting rod, and when the first connecting element 13 is a connecting rod, the substrate 12 and the first connecting element 13 form a frame structure. At this time, a plurality of limiting rods are disposed between the two substrates 12, and the limiting rods are located between two adjacent connecting rods. The embodiment of the utility model provides an in, be provided with a gag lever post respectively in frame rack structure's arbitrary trilateral. The minimum width of the stopper rod is in the range of 0.5cm to 1.5cm, for example, 0.5cm, 0.8cm, 1cm, 1.3cm, or 1.5 cm. The limiting rod can be cylindrical or cuboid.

As a possible implementation, referring to fig. 1 to 5, the distance between each first space 10 and the thickness of the workpiece has a difference of 0 μm to 10 μm. For example, the difference may be 0 μm, 2.4 μm, 5.7 μm, 8 μm, 9.5 μm, 10 μm, or the like. Due to the difference, the workpiece can be conveniently placed in the first space 10, and the damage of the workpiece or the partition board 2 caused by the collision between the workpiece and the partition board 2 is reduced or avoided. It will be appreciated that the above-mentioned difference is not sufficient to allow the treating agent to adhere or deposit onto the surface of the workpiece through the space between the first space 10 and the workpiece, without affecting the normal treatment of the workpiece and without affecting the quality of the later formed workpiece. Illustratively, when the thickness of the battery piece 3 is 165 μm, the pitch of the first spaces 10 may be between 165 μm and 175 μm. For example, it may be 165 μm, 168 μm, 170 μm, 172 μm or 175 μm. When the thickness of the battery sheet 3 is 100 μm, the pitch of the first spaces 10 may be 100 μm to 110 μm. For example, it may be 100. Mu.m, 102. Mu.m, 105.6. Mu.m, 108. Mu.m or 110. Mu.m.

As a possible implementation, referring to fig. 1 to 5, the distance between each second space 11 is 1mm to 10mm. For example, the pitch of the second spaces 11 may be 1mm, 3mm, 8mm, 9.6mm, 10mm, or the like. In this case, it is possible to ensure not only the normal flow of the treating agent but also the formation of the actually required structure on each workpiece to be treated. Meanwhile, more partition boards 2 can be arranged in the bearing space to form more first spaces 10 and second spaces 11, so that the carrier can process a plurality of workpieces simultaneously. Therefore, the processing time can be saved, the processing efficiency of the workpiece can be improved, the processing cost can be reduced, and the processing capacity of the carrier can be improved. In the embodiment of the present invention, the distance between the second spaces 11 is 2mm to 4mm. For example, the pitch of the second spaces 11 may be 2mm, 2.3mm, 3mm, 3.5mm, 4mm, or the like.

As one possible implementation, referring to fig. 1 to 8, the treatment agent may include a doping gas or a deposition gas. The second space 11 is used for introducing doping gas, and the hollow area 20 is used for introducing the doping gas in the second space 11 into the adjacent first space 10 and enabling the doping gas to contact and diffuse with an area to be processed in one side surface of the workpiece corresponding to the orthographic projection of the hollow area 20. Or, the second space 11 is used for introducing deposition gas, and the hollow area 20 is used for introducing the deposition gas in the second space 11 into the adjacent first space 10 and depositing the deposition gas in an area to be processed in a side surface of the workpiece corresponding to the orthographic projection of the hollow area 20.

Adopt under the condition of above-mentioned technical scheme, adopt the embodiment of the utility model provides a carrier not only can realize doping the treating agent to the work piece, can also be at the surface deposition treating agent of work piece simultaneously. Based on this, can select suitable processing agent to handle the work piece according to actual need to expand the application scope of carrier, increase the application scene of carrier. Further, compare in prior art, because the embodiment of the utility model provides a carrier both can realize doping and handle and can also realize deposition treatment, can save treatment facility this moment, reduces treatment cost.

As an example, the above-mentioned treatment agent for doping may be phosphorus oxychloride(POCl ₃ ) Oxygen, boron tribromide (BBr) ₃ ) Boron trichloride (BCl) ₃ ) And so on. The treating agent for Deposition (e.g., LPCVD, low Pressure Chemical Vapor Deposition) may be Silane (SiH) ₄ ) In this case, the amorphous silicon layer, the microcrystalline silicon layer or the polycrystalline silicon layer may be formed after the deposition on the surface of the cell. Of course, the cell can also be doped and deposited simultaneously by using the carrier provided by the embodiment of the present invention, and the treating agent is Silane (SiH) ₄ ) And diborane (B) ₂ H ₆ )。

As a possible implementation, see fig. 4 to 6, a first space 10 is provided for accommodating a workpiece, and the surface to be processed of the workpiece faces the partition 2 having the hollowed-out area 20. Or, two workpieces are accommodated in one first space 10, the hollow areas 20 are respectively formed in the two partition boards 2 corresponding to the first space 10, and the surfaces to be processed of the two workpieces located in the first space 10 are arranged in a reverse manner.

Adopt under the condition of above-mentioned technical scheme, adopt the embodiment of the utility model provides a carrier can be according to the surface quantity of pending work piece, selects suitable baffle in order to realize only handling a work piece once, perhaps handles two work pieces simultaneously to further improve the treatment effeciency to the work piece.

For example, referring to fig. 4 to 6, the carrier provided by the embodiment of the present invention may be configured to place one battery piece 3 or two battery pieces 3 in the first space 10. When one cell 3 is placed in the first space 10, if both sides of the cell 3 are to be processed, the separator 2 having the hollow area 20 is only required to be disposed on both sides of the cell 3. If one side of the cell 3 is to be processed, the separator 2 having the hollow area 20 may be disposed on the side of the cell 3 to be processed. Of course, two battery pieces 3 in back-to-back contact may be disposed in the first space 10, and the surface of the two battery pieces 3 in contact is a surface that does not need to be processed. At this time, the diaphragm 2 having the hollowed-out area 20 is disposed on the side of the workpiece to be processed.

In an alternative, referring to fig. 6 to 8, the hollow area 20 is a grid groove-shaped hollow area or a mesh-shaped hollow area. Since the shape of the hollow area 20 has more selectivity, the partition board 2 having the hollow area 20 with a suitable shape can be selected according to actual needs. Based on this, the partition board 2 provided with the hollow area 20 can adapt to different application scenes, and further the application range of the partition board 2 is expanded.

For example, the hollow area 20 may be a rectangular hollow area (see fig. 6), a grid groove-shaped hollow area (see fig. 7) formed by an i-shaped structure, or a mesh-shaped hollow area (see fig. 8). It should be understood that the shape of the hollow area 20 is made according to the actual required pattern. For example, referring to fig. 7, during the processing of the battery sheet 3, the battery main grid lines may be disposed in the vertically through regions in the i-shape, and the contact grid lines may be disposed in the transverse regions in the i-shape. At this time, the transmission distance between two adjacent contact grid lines can be shorter, and the resistance loss inside the battery piece 3 can be further reduced. It should be understood that the periphery of the hollow area 20 is a non-hollow area 21.

As a possible implementation, referring to fig. 1 to 9, the carrier may further include a second connecting member 4. The second connection member 4 connects the plurality of partition plates 2 in series for adjusting the interval of the first spaces 10 and the interval of the second spaces 11. Since the second connection member 4 connects the plurality of partition plates 2 in series, at this time, the plurality of partition plates 2 may be simultaneously moved by the second connection member 4 to simultaneously adjust the interval of the first spaces 10 and the interval of the second spaces 11. Based on this, before placing the workpiece in the first space 10, the distance between the first spaces 10 can be increased, so as to conveniently and safely place the workpiece in the first space 10. Then, after the workpiece is placed in the first space 10, the distance between the first spaces 10 is adjusted by moving the partition boards 2, so that the treating agent can only diffuse and move through the hollow area 20 and the second space 11 (i.e. the partition boards 2 at the two sides of the battery piece 3 can be tightly attached to the battery piece 3), so as to ensure that the treating agent does not adhere to or deposit on the area of the workpiece which is not required to be treated, thereby ensuring the quality of the treated workpiece. After the battery piece 3 is disposed, the distance between the first spaces 10 can be increased by moving the second connecting member 4 again, so that the battery piece 3 can be taken out of the first spaces 10 quickly and safely.

In the following, two possible implementations are described as examples, and the connection relationship between the second connecting member and the partition board is described. It is to be understood that the following description is only for purposes of understanding, and is not intended to be limiting.

Example one: and numbering all the partition plates arranged in the bearing space in sequence. And then, connecting all the odd-numbered partition plates in series by using the second connecting piece, or connecting all the even-numbered partition plates in series by using the second connecting piece.

Example two: referring to fig. 9, all the partitions 2 disposed in the carrying space are numbered in sequence. Thereafter, all the even-numbered separators 2 are connected in series by the first second connecting members 40, and all the odd-numbered separators 2 are connected in series by the second connecting members 41.

In an alternative, referring to fig. 4 and 5, the concentration of the treatment agent doped or deposited on the cell sheet 3 may be adjusted by adjusting the pitch of the second spaces 11. Specifically, when the pitch of the second spaces 11 is large, the concentration of the treatment agent adhering or depositing on the surface of the battery piece 3 is high. At this time, the size of the pitch of the second space 11 may be adjusted according to actual needs to form a heavily doped region or a lightly doped region on the surface of the battery piece 3. Compared with the prior art, the method has the advantages that the size of the distance between the second spaces 11 is set before actual processing, a mask plate does not need to be additionally inserted, and the operation of workers is not needed again. Based on this, not only reduced the processing procedure, improved work efficiency, still reduced treatment cost simultaneously.

In conclusion, utilize the embodiment of the utility model provides a carrier not only can obtain the battery piece region of different polarity, can also obtain the battery piece region of different concentrations simultaneously.

As a possible implementation manner, referring to fig. 2, the carrier may further include an oxidation-resistant coating, and the oxidation-resistant coating is respectively disposed on the bearing component 1 and the partition board 2. At the moment, the service life of the carrier can be prolonged, meanwhile, the condition that the processing of the workpiece is influenced by oxide or other substances formed on the surface of the carrier can be reduced or avoided, and the quality of the processed workpiece is further improved.

The embodiment of the utility model provides a still provide a treatment facility, including above-mentioned technical scheme the carrier.

The embodiment of the utility model provides a treatment facility's beneficial effect and above-mentioned technical scheme the beneficial effect of carrier is the same, and the no longer repeated description is done here.

For example, the arrangement direction of the plurality of partition boards in the above carrier may be inclined, horizontal or vertical with respect to the horizontal plane. That is, the carrier as a whole may be disposed obliquely, vertically or horizontally with respect to the horizontal plane.

Example one: referring to fig. 3, an included angle is formed between the arrangement direction of the plurality of partition boards 2 in the carrier and a horizontal plane, and the included angle is greater than 0 ° and less than 90 °. For example 1 °, 10 °, 30 °, 60 ° or 89 °. In an embodiment of the present invention, the included angle is greater than 5 ° and less than 45 °.

Example two: referring to fig. 1, the arrangement direction of the plurality of separators 2 in the carrier is parallel to a horizontal plane. At this time, the battery piece can be closely attached to the separator 2 below the battery piece under the action of gravity. When the surface of the cell close to the horizontal plane also needs to be attached or deposited with the treating agent, the treating agent can be further ensured to be attached or deposited on the cell only through the hollow-out area and not attached or deposited on other areas of the surface. When the surface of the cell near the horizontal plane does not need to be attached or deposited with the treating agent, the surface is closely attached to the separator 2 below the cell. At this time, it can be further ensured that the treating agent does not adhere to or deposit on the surface. Based on this, the quality of the processed battery piece can be further ensured by arranging the carrier in the way of the second example.

Example three: referring to fig. 2, the arrangement direction of the plurality of separators 2 in the carrier is perpendicular to the horizontal plane.

In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. A carrier, comprising:

the bearing assembly is provided with a bearing space;

the bearing space is divided into at least one first space and at least one second space by the plurality of partition boards, the first spaces and the second spaces are alternately arranged, the first spaces are used for accommodating workpieces, a hollowed-out area is formed in at least one partition board corresponding to each first space, the orthographic projection of each hollowed-out area corresponds to an area to be processed in one side surface of the workpiece, a treating agent for treating the surface of the workpiece is arranged in the area to be processed corresponding to the workpiece through the hollowed-out areas, and the hollowed-out areas are communicated with the second spaces and the first spaces.

2. The carrier of claim 1, wherein the carrier assembly comprises:

the two substrates are opposite and arranged at intervals, and the substrates are opposite to the partition plate;

the first connecting piece comprises two ends, the two ends of the first connecting piece are respectively connected with the base plate, and the partition plate is connected with the first connecting piece;

and the bearing space is arranged between the assembled base plate and the first connecting piece.

3. The carrier of claim 2, wherein the carrier assembly further comprises:

the limiting piece comprises two ends, the two ends of the limiting piece are respectively connected with the substrate, and the limiting piece is positioned between two adjacent first connecting pieces and used for assisting in limiting the relative position of the workpiece and the bearing space;

the partition board is connected with the first connecting piece and the limiting piece respectively.

4. The carrier according to claim 2, wherein the base plate is perpendicular to a central axis of the first connector;

the partition plate and the substrate are parallel to each other.

5. The carrier according to claim 1, wherein a difference between a pitch of each of the first spaces and a thickness of the workpiece is 0 μm to 10 μm;

the distance between every two second spaces is 1 mm-10 mm.

6. The carrier of claim 1, the treatment agent comprising a dopant gas or a deposition gas;

the second space is used for introducing the doping gas, the hollow-out area is used for introducing the doping gas in the second space into the adjacent first space and enabling the doping gas to be in contact diffusion with an area to be processed in one side surface of the workpiece corresponding to the orthographic projection of the hollow-out area;

or the second space is used for introducing deposition gas, and the hollow area is used for introducing the deposition gas in the second space into the adjacent first space and depositing the deposition gas in an area to be processed in the side surface of the workpiece corresponding to the orthographic projection of the hollow area.

7. The carrier of claim 1, wherein a first space is provided for accommodating a workpiece, and a surface to be processed of the workpiece faces the partition having the hollow area;

or, one first space is used for accommodating two workpieces, the hollow areas are formed in the two partition plates corresponding to the first space, and the surfaces to be processed of the two workpieces located in the first space are arranged in a back-to-back mode.

8. The vehicle according to claim 1, wherein the hollowed-out area is a grid-groove-shaped hollowed-out area or a mesh-shaped hollowed-out area.

9. The carrier of claim 1, further comprising a second connector; the second connecting piece is connected with a plurality of partition plates in series and used for adjusting the distance between the first spaces and the distance between the second spaces; or the like, or, alternatively,

the carrier further comprises an oxidation resistant coating; the anti-oxidation coating is respectively arranged on the bearing component and the partition plate.

10. A treatment apparatus, characterized in that it comprises a carrier according to any one of claims 1 to 9.

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