CN217954911U - Limiting device and workpiece table - Google Patents
Limiting device and workpiece table Download PDFInfo
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- CN217954911U CN217954911U CN202221704954.7U CN202221704954U CN217954911U CN 217954911 U CN217954911 U CN 217954911U CN 202221704954 U CN202221704954 U CN 202221704954U CN 217954911 U CN217954911 U CN 217954911U
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Abstract
The utility model relates to a lithography apparatus technical field particularly, relates to a stop device and work piece platform. The limiting device comprises a first limiting piece and a second limiting piece, and the first limiting piece and the second limiting piece are respectively used for being fixed on two structures which move relatively; the first limiting part is provided with a limiting rod, a strip-shaped seam is formed in the limiting rod and penetrates through two opposite sides of the limiting rod, and the limiting rod is used for limiting the limit relative position of the second limiting part. The workpiece table comprises a limiting device. The utility model provides a stop device and work piece platform can realize limiting displacement, simultaneously, can reduce the impact that produces in the work piece platform, alleviates the impact that the work piece platform bore, especially can protect breakable components and parts to, can prolong the life of work piece platform, and can reduce the noise.
Description
Technical Field
The utility model relates to a lithography apparatus technical field particularly, relates to a stop device and work piece platform.
Background
A workpiece stage in a lithographic apparatus requires both a large stroke and high precision, so the workpiece stage is usually a stacked structure of a long stroke driving module and a short stroke driving module.
In order to ensure the safety of each part of the workpiece table, a limiting device is generally arranged between the planar motor and the stator of the long-stroke driving module and between the planar motor and the stator of the short-stroke driving module, however, when the conventional limiting device collides, large impact force is easily generated, so that the workpiece table bears large impact, the service life of the workpiece table is influenced, and large noise is generated.
In summary, how to overcome the above-mentioned defects of the existing workpiece stage is a technical problem to be solved by those skilled in the art.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a stop device and work piece platform to there is the technical problem who produces great impact easily in the work piece platform among the alleviating prior art.
The utility model provides a stop device, including first locating part and second locating part, first locating part with the second locating part is used for fixing respectively at two structural at relative motion.
The first limiting part is provided with a limiting rod, a strip-shaped seam is formed in the limiting rod and penetrates through two opposite sides of the limiting rod, and the limiting rod is used for limiting the limiting position of the second limiting part.
Preferably, as an implementation mode, the strip-shaped slit is U-shaped, the U-shaped notch of the strip-shaped slit faces away from the second limiting member, and a flexible hinge is formed at a position of the limiting rod, which is located on the periphery of the strip-shaped slit.
Preferably, as an embodiment, the side wall of the limiting rod is wrapped with a flexible material layer.
Preferably, as an embodiment, the flexible material layer is externally wrapped with a metal layer.
Preferably, as an implementation manner, the second limiting member has a limiting groove, and the limiting rod is in plug-in fit with the limiting groove.
Preferably, as an implementation mode, the cross section of the limiting groove is annular.
Preferably, as an implementation manner, a first groove is formed in the middle of the first limiting member, and the limiting rod is located in the first groove; the second locating part is provided with two second grooves, the limiting groove is formed in the position, located between the two second grooves, of the second locating part, and the positions, located on two sides of the first groove, of the first locating part are in clearance fit with the two second grooves respectively.
Preferably, as an implementation manner, a third groove is formed at an end of the first limiting member, and the limiting rod is located in the third groove; a fourth groove is formed in the middle of the second limiting part, the limiting groove is formed in the end of the second limiting part, and the first limiting part is in clearance fit with the fourth groove.
Preferably, as an implementation mode, the first limiting member is used for being fixed on the stator, and the second limiting member is used for being fixed on the mover;
or, the first limiting part is used for being fixed on the rotor, and the second limiting part is used for being fixed on the stator.
Correspondingly, the utility model also provides a workpiece table, it includes above-mentioned stop device.
Compared with the prior art, the beneficial effects of the utility model reside in that:
the utility model provides a stop device mainly comprises first locating part and second locating part, and wherein, first locating part has the gag lever post, and the gag lever post can restrict the extreme position of second locating part to, can realize the two spacing each other, and then, be fixed with the structure of two relative motion of first locating part and second locating part respectively, can realize spacing each other under the cooperation of first locating part and second locating part.
Particularly, set up the bar seam on the gag lever post to make the bar seam run through the relative both sides of gag lever post, when the collision appears in two structures of relative motion, the gag lever post can take place the collision with the second locating part, and at this moment, the bar seam alright provide the space for the deformation of gag lever post, and the gag lever post takes place to warp, absorbs the energy that the collision produced, so, alright reduce the collision acceleration of two structures of relative motion.
Therefore, the utility model provides a stop device can realize the spacing effect to two structures of relative motion, simultaneously, still can reduce the impact that produces when two structures of relative motion collide, is applied to the work piece platform in, can alleviate the impact that the work piece platform bore, especially can protect breakable components and parts to, can prolong the life of work piece platform, and can reduce the noise.
The utility model provides a workpiece table, because of having above-mentioned stop device, the event has all advantages of above-mentioned stop device, can realize the mutual limiting displacement of stator and active cell, simultaneously, can reduce the impact that produces in the workpiece table, alleviates the impact that the workpiece table bore, especially can protect breakable components and parts to, prolong the life of workpiece table, and can reduce the noise.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a perspective exploded view of a structure of a limiting device according to an embodiment of the present invention;
fig. 2 is an exploded top view of the limiting device shown in fig. 1 according to an embodiment of the present invention;
fig. 3 is a perspective view of a structure of a workpiece stage according to an embodiment of the present invention;
FIG. 4 is a cross-sectional view of a workpiece table provided in accordance with an embodiment of the present invention in FIG. 3;
fig. 5 is a perspective exploded view of another configuration of a spacing device provided in accordance with an embodiment of the present invention;
fig. 6 is an exploded top view of the limiting device shown in fig. 5 according to an embodiment of the present invention;
fig. 7 is a perspective view of another structure of a workpiece stage according to an embodiment of the present invention;
FIG. 8 is a cross-sectional view of a workpiece table of the present invention shown in FIG. 7;
fig. 9 is a cross-sectional view of a limiting rod in the limiting device according to the embodiment of the present invention.
Description of the reference numerals:
100-a first limit stop; 110-a limiting rod; 111-a flexible hinge; 112-strip-shaped seam; 113-a layer of flexible material; 114-a metal layer; 120-a first groove; 130-a third groove;
200-a second stop; 210-a limiting groove; 220-a second groove; 230-a fourth groove;
300-a stator;
400-mover.
Detailed Description
The technical solutions of the present invention will be described more clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The present invention will be described in further detail below with reference to specific embodiments and with reference to the accompanying drawings.
Referring to fig. 1 to 9, the present embodiment provides a limiting device, which includes a first limiting member 100 and a second limiting member 200, where the first limiting member 100 and the second limiting member 200 are respectively used to be fixed on two structures that move relatively; the first position-limiting member 100 has a position-limiting rod 110, a strip-shaped slit 112 is formed on the position-limiting rod 110, the strip-shaped slit 112 penetrates through two opposite sides of the position-limiting rod 110, and the position-limiting rod 110 is used for limiting the limit position of the second position-limiting member 200.
The limiting device provided by the embodiment mainly comprises a first limiting member 100 and a second limiting member 200, wherein the first limiting member 100 has a limiting rod 110, and the limiting rod 110 can limit the limiting position of the second limiting member 100, so that the mutual limiting between the two can be realized, and further, two relative-movement structures respectively fixed with the first limiting member 100 and the second limiting member 200 can realize the mutual limiting under the cooperation of the first limiting member 100 and the second limiting member 200.
Particularly, the bar-shaped slit 112 is formed in the limiting rod 110, and the bar-shaped slit 112 penetrates through two opposite sides of the limiting rod 110, when two structures moving relatively collide with each other, the limiting rod 110 may collide with the second limiting member 200, at this time, the bar-shaped slit 112 may provide a space for deformation of the limiting rod 110, the limiting rod 110 may deform, and energy generated by the collision is absorbed, so that collision acceleration of the two structures moving relatively may be reduced.
Therefore, the stop device that this embodiment provided can realize the spacing effect to two structures of relative motion, simultaneously, and the impact that produces when still can reducing two structures of relative motion collide is applied to the work piece platform in, can alleviate the impact that the work piece platform bore, especially can protect breakable components and parts to, can prolong the life of work piece platform, and can reduce the noise.
Preferably, the shape of the strip-shaped slit 112 may be set to be U-shaped, and the U-shaped gap of the strip-shaped slit 112 faces away from the second limiting member 200, so that the position of the limiting rod 110, which is located at the periphery of the strip-shaped slit 112, forms a U-shaped structure, and the U-shaped structure deforms toward the strip-shaped slit 112 or away from the strip-shaped slit 112 when colliding with the second limiting member 200, thereby playing a role in absorbing collision energy; meanwhile, the part of the limiting rod 110, which is positioned at the inner side of the strip-shaped seam 112, can limit the part, which is positioned at the periphery of the strip-shaped seam 112, so that the deformation of the limiting rod 110 is not too large, and the requirement of hard limiting can be met.
Of course, the stop rod 110 itself is a non-brittle material with some toughness, and thus, may itself form the flexible hinge 111.
Preferably, the side wall of the limiting rod 110 may be wrapped with a flexible material layer 113, so as to absorb the collision energy from the second limiting member 200 by using the flexible material layer 113, and reduce the collision acceleration, so that a further buffering effect can be achieved, and the impact borne by the workpiece table can be alleviated.
The flexible material layer 113 may be made of a flexible material such as rubber, polyurethane, etc., which has a certain elasticity and a better energy absorption effect.
Further, a metal layer 114 may be wrapped outside the flexible material layer 113.
It should be noted that the metal is hard, so that the wear resistance of the limiting rod 110 can be improved, the limiting precision between the limiting rod 110 and the second limiting member 200 can be ensured in a long time, and the service life of the limiting device can be prolonged.
The metal layer 114 may be made of a hard metal material such as tungsten alloy, or may be formed by coating a wear-resistant coating such as DLC coating on a metal having insufficient hardness such as stainless steel.
Preferably, the second limiting member 200 may be provided with a limiting groove 210, and the limiting rod 110 is inserted into the limiting groove 210, so that the limiting reliability of the first limiting member 100 and the second limiting member 200 can be improved.
Preferably, the cross section of the limiting groove 210 is formed in an annular shape, so that the transverse deviation of the limiting rod 110 can be limited in all directions by the limiting groove 210, and a better limiting effect can be ensured.
The position of the limiting rod 110 in the first limiting member 100 and the position of the limiting groove 210 in the second limiting member 200 can be selected from any one of the following setting modes:
firstly, referring to fig. 1 to 4, a first groove 120 is formed in the middle of the first limiting member 100, and the limiting rod 110 is disposed in the first groove 120; correspondingly, two second grooves 220 are formed in the second limiting member 200, the limiting groove 210 is formed in a position, located between the two second grooves 220, of the second limiting member 200, and positions, located on two sides of the first groove 120, of the first limiting member 100 are in clearance fit with the two second grooves 220, so that a mutual limiting effect between the first limiting member 100 and the second limiting member 200 can be further ensured.
Secondly, referring to fig. 5 to 8, a third groove 130 is formed at an end of the first limiting member 100, and the limiting rod 110 is disposed in the third groove 130; correspondingly, the middle portion of the second limiting member 200 is provided with a fourth groove 230, the limiting groove 210 is provided at the end portion of the second limiting member 200, and the first limiting member 100 is in clearance fit with the fourth groove 230, so that the mutual limiting effect between the first limiting member 100 and the second limiting member 200 can be further ensured.
In addition, the first limiting member 100 and the second limiting member 200 can be connected and fixed with two structures that move relatively according to any one of the following schemes:
first, the first limiting member 100 is fixed on the stator 300, and the second limiting member 200 is fixed on the mover 400, so that the relative position of the mover 400 and the stator 300 can be limited by the mutual limiting action of the first limiting member 100 and the second limiting member 200, and the collision energy can be absorbed, thereby reducing the impact force generated in the workpiece table.
Secondly, the first limiting member 100 is fixed on the mover 400, and the second limiting member 200 is fixed on the stator 300, so that the relative position of the mover 400 and the stator 300 can be limited by the mutual limiting action of the first limiting member 100 and the second limiting member 200, the collision energy can be absorbed, and the impact force generated in the workpiece table can be reduced.
Referring to fig. 3, 4, 7 and 8, the embodiment further provides a workpiece table, which includes the limiting device.
The work piece platform that this embodiment provided, because of having above-mentioned stop device, the event has all advantages of above-mentioned stop device, can realize stator 300 and active cell 400's limiting action each other, simultaneously, can reduce the impact that produces in the work piece platform, alleviates the impact that the work piece platform bore, especially can protect breakable components and parts to, the life of extension work piece platform, and can reduce the noise.
The limiting device can be arranged on a long-stroke module of the workpiece table and can also be arranged on a short-stroke module of the workpiece table.
That is, the stator and the mover may be a mover and a stator of a driving motor mounted on a long stroke module of the workpiece table, or a mover and a stator of a driving motor mounted on a short stroke module of the workpiece table.
Preferably, four limiting devices are arranged, and the four limiting devices are respectively distributed at the positions, close to the four edges, of the stator.
To sum up, the embodiment of the utility model discloses a stop device and workpiece table, its a great deal of technical defect who has overcome traditional workpiece table. The embodiment of the utility model provides a stop device and work piece platform can realize limiting displacement, simultaneously, can reduce the impact that produces in the work piece platform, alleviates the impact that the work piece platform bore, especially can protect breakable components and parts to, can prolong the life of work piece platform, and can reduce the noise.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.
Claims (10)
1. A limiting device, comprising a first limiting member (100) and a second limiting member (200), wherein the first limiting member (100) and the second limiting member (200) are respectively used for being fixed on two structures which move relatively;
the first limiting part (100) is provided with a limiting rod (110), a strip-shaped seam (112) is formed in the limiting rod (110), the strip-shaped seam (112) penetrates through two opposite sides of the limiting rod (110), and the limiting rod (110) is used for limiting the limiting position of the second limiting part (200).
2. The limiting device according to claim 1, characterized in that the strip-shaped slit (112) is U-shaped, and the U-shaped notch of the strip-shaped slit (112) faces away from the second limiting member (200), and the part of the limiting rod (110) located at the periphery of the strip-shaped slit (112) forms a flexible hinge (111).
3. A spacing device according to claim 1, characterized in that the side walls of the spacing rod (110) are wrapped with a layer of flexible material (113).
4. A spacing device according to claim 3, characterized in that the exterior of said layer (113) of flexible material is wrapped with a metallic layer (114).
5. The limiting device according to claim 1, wherein the second limiting member (200) has a limiting groove (210), and the limiting rod (110) is inserted into the limiting groove (210).
6. Limiting device according to claim 5, characterized in that the limiting groove (210) is annular in cross-section.
7. The limiting device according to claim 5, wherein a first groove (120) is formed in the middle of the first limiting member (100), and the limiting rod (110) is located in the first groove (120); two second grooves (220) are formed in the second limiting part (200), the limiting groove (210) is formed in the position, located between the two second grooves (220), of the second limiting part (200), and the positions, located on the two sides of the first groove (120), of the first limiting part (100) are in clearance fit with the two second grooves (220) respectively.
8. The limiting device according to claim 5, wherein a third groove (130) is formed at an end of the first limiting member (100), and the limiting rod (110) is located in the third groove (130); a fourth groove (230) is formed in the middle of the second limiting member (200), the limiting groove (210) is formed in the end of the second limiting member (200), and the first limiting member (100) is in clearance fit with the fourth groove (230).
9. The limiting device according to any one of claims 1 to 8, wherein the first limiting member (100) is adapted to be fixed to a stator (300), and the second limiting member (200) is adapted to be fixed to a mover (400);
or, the first limiting part (100) is used for being fixed on the rotor (400), and the second limiting part (200) is used for being fixed on the stator (300).
10. A workpiece table comprising a stop arrangement as claimed in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221704954.7U CN217954911U (en) | 2022-07-04 | 2022-07-04 | Limiting device and workpiece table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221704954.7U CN217954911U (en) | 2022-07-04 | 2022-07-04 | Limiting device and workpiece table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217954911U true CN217954911U (en) | 2022-12-02 |
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ID=84220654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221704954.7U Active CN217954911U (en) | 2022-07-04 | 2022-07-04 | Limiting device and workpiece table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217954911U (en) |
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2022
- 2022-07-04 CN CN202221704954.7U patent/CN217954911U/en active Active
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Effective date of registration: 20230926 Address after: 100176 floor 2, building 2, yard 19, Kechuang 10th Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing (Yizhuang group, high-end industrial area of Beijing Pilot Free Trade Zone) Patentee after: BEIJING U-PRECISION TECH Co.,Ltd. Patentee after: Beijing Youwei Precision Measurement and Control Technology Research Co.,Ltd. Address before: 100176 floor 2, building 2, yard 19, Kechuang 10th Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing (Yizhuang group, high-end industrial area of Beijing Pilot Free Trade Zone) Patentee before: BEIJING U-PRECISION TECH Co.,Ltd. |