CN217948257U

CN217948257U - Transition chamber of coating equipment

Info

Publication number: CN217948257U
Application number: CN202222227859.9U
Authority: CN
Inventors: 龙梅丽
Original assignee: LG Display Optoelectronics Technology China Co Ltd
Current assignee: LG Display Optoelectronics Technology China Co Ltd
Priority date: 2022-08-23
Filing date: 2022-08-23
Publication date: 2022-12-02
Anticipated expiration: 2032-08-23

Abstract

The utility model discloses a transition cavity of coating equipment, including the main part, be provided with the cavity in the main part, the inside base that is provided with of cavity, the interval is provided with the support frame on the base, and the support frame is used for support panel, and the support frame passes through connecting piece and pedestal connection, is provided with gas passage in the base, and gas passage's both ends are first end and second end respectively, and first end communicates with the air exhaust equipment outside the main part, and second end and cavity intercommunication, second end are close to the connecting piece. The gas channel is communicated with the air extraction equipment by arranging the gas channel, so that impurities in the cavity can be extracted by the air extraction equipment, and the impurities are prevented from being accumulated in the cavity; because the both sides of connecting piece are the place that impurity production volume is the most, set up the second end and be close to the connecting piece, can be so that the second end is close to the source that impurity produced, improves clean effect.

Description

Transition chamber of coating equipment

Technical Field

The utility model relates to a panel processing equipment field especially relates to a transition cavity of coating equipment.

Background

When a display panel of a display device is processed, a film plating device is required to perform a film plating process on the display panel (hereinafter referred to as a panel).

Referring to fig. 1 and 2, the coating apparatus includes a transition chamber 100 ', a distribution chamber 200' and a plurality of coating chambers 300 ', both the distribution chamber 200' and the coating chambers 300 'are in vacuum environment, after a panel enters the transition chamber 100', the transition chamber 100 'needs to be vacuumized first, then the panel is sent into the distribution chamber 200', and the panel is sent into the corresponding coating chamber 300 'by a manipulator in the distribution chamber 200'; when the coating of the panel is completed, the panel returns to the transition chamber 100 'through the distribution chamber 200', and at this time, gas needs to be introduced into the transition chamber 100 'to restore the atmospheric pressure in the transition chamber 100', and then the panel can be transferred to the outside. A base 1 ' is arranged in a cavity of the transition chamber 100 ', a supporting frame 2 ' for supporting a panel is arranged on the base 1 ', and the supporting frame 2 ' and the base 1 ' are spaced by a gasket 3 '.

The prior art has the following problems: the transition chamber 100 ' is continuously switched between a vacuum state and an atmospheric pressure state, the change of the air pressure in the transition chamber 100 ' is large, the parts expand or contract under the influence of the air pressure, friction (especially two sides of the gasket 3 ') occurs between the parts, impurities are generated, and the impurities are easily attached to the panel, so that the coating quality of the panel is influenced.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a: a transition chamber of a coating apparatus is provided, which can keep the internal environment clean.

In order to achieve the purpose, the utility model adopts the following technical proposal:

the transition chamber comprises a main body, a cavity is arranged in the main body, a base is arranged in the cavity, support frames are arranged on the base at intervals and used for supporting a panel, the support frames are connected with the base through connecting pieces, a gas channel is arranged in the base, the two ends of the gas channel are respectively a first end and a second end, the first end is communicated with air extraction equipment outside the main body, the second end is communicated with the cavity, and the second end is adjacent to the connecting pieces.

The preferable scheme of the transition chamber of the coating equipment comprises a three-way pipe, wherein the three-way pipe comprises a main pipe and two branch pipes, the first end of the three-way pipe is communicated with the air extraction equipment through the main pipe and one of the branch pipes, the other branch pipe is communicated with the ventilation equipment, and the ventilation equipment is used for conveying clean cold air to the cavity.

As a preferable scheme of the transition chamber of the coating equipment, a valve is arranged on the branch pipe, and the branch pipe is detachably connected with the ventilation equipment and/or the air suction equipment.

As a preferable scheme of the transition chamber of the coating equipment, the number of the second ends is multiple, and the second end is arranged below the support frame.

As a preferable scheme of the transition chamber of the coating equipment, a movable spray head is arranged in the chamber, and the spray head is connected with the second end through a hose.

As a preferable scheme of the transition chamber of the coating equipment, the base is provided with a guide assembly, and the spray head is arranged on the guide assembly in a sliding manner.

As a preferable scheme of a transition chamber of the coating equipment, the guide assembly comprises a fixed seat, a screw rod, a sliding block and a sliding rail, the fixed seat is fixed on the base, the screw rod is rotatably connected with the fixed seat, the sliding block is in threaded connection with the screw rod, the sliding rail is fixed on the fixed seat, the sliding block is arranged on the sliding rail in a sliding manner, and the spray head is arranged on the sliding block.

As a preferable scheme of a transition chamber of the coating equipment, the coating equipment comprises a motor, wherein an output shaft of the motor is detachably connected with the screw rod.

As a preferable scheme of a transition chamber of the coating equipment, the fixing seat comprises a plate body and connecting plates arranged on two sides of the plate body, one end of the screw rod is connected with the connecting plates through a bearing, and the other end of the screw rod penetrates through the connecting plates to be connected with an output shaft of the motor.

As a preferable scheme of a transition chamber of the coating equipment, a blowing machine is arranged in the chamber and blows air towards the connecting piece.

The utility model has the advantages that: the gas channel is communicated with the air extraction equipment by arranging the gas channel, so that impurities in the cavity can be extracted by the air extraction equipment, and the impurities are prevented from being accumulated in the cavity; because the both sides of connecting piece are the place that impurity production volume is the most, set up the second end and be close to the connecting piece, can be so that the second end is close to the source that impurity produced, improve clean effect.

Drawings

The present invention will be described in further detail with reference to the accompanying drawings and examples.

Fig. 1 is a schematic view of a coating apparatus according to the prior art.

Fig. 2 is a schematic view of a transition chamber of a coating apparatus according to the prior art.

Fig. 3 is a schematic front sectional view of a transition chamber of a coating apparatus according to an embodiment of the present invention.

FIG. 4 isbase:Sub>A schematic sectional view A-A of FIG. 3.

FIG. 5 is a schematic side view and sectional view of a transition chamber of a coating apparatus according to an embodiment of the present invention.

Fig. 6 is a schematic view of the guiding assembly and the motor according to the embodiment of the present invention.

In fig. 1 and 2:

100', a transition chamber; 200', a dispensing chamber; 300', a film coating chamber;

1', a base; 2', a support frame; 3', a gasket;

in fig. 3 to 6:

100. a cavity; 200. a main body; 300. a door;

1. a base; 101. a gas channel; 1011. a first end; 1012. a second end; 2. a support frame; 3. a connecting member; 4. a three-way pipe; 41. a main tube; 42. a branch pipe; 5. a valve; 6. a blower; 7. a guide assembly; 701. a fixed seat; 7011. a plate body; 7012. a connecting plate; 702. a screw rod; 703. a slider; 704. a bearing; 705. a slide rail; 8. a spray head; 9. a hose; 10. an electric motor.

Detailed Description

The advantages and features of the present invention and the methods of accomplishing the same will become apparent with reference to the following detailed description of the embodiments taken in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and the embodiments are provided only to accomplish the disclosure of the present invention and to enable those skilled in the art to sufficiently understand the scope of the present invention, and the present invention is limited only by the scope of the claims. Like reference numerals denote like constituent elements throughout the specification.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

As shown in fig. 3 and 4, the utility model provides a pair of transition cavity (hereinafter referred to as transition cavity) of coating equipment, including main part 200, be provided with cavity 100 in the main part 200, the both sides of main part 200 are provided with door 300, when door 300 is opened, the panel can enter into the inside of cavity 100, cavity 100 is inside to be provided with base 1, the interval is provided with support frame 2 on the base 1, support frame 2 is used for supporting panel, support frame 2 passes through connecting piece 3 and is connected with base 1, be provided with gas passage 101 in the base 1, gas passage 101's both ends are first end 1011 and second end 1012 respectively, first end 1011 communicates with the external air extraction equipment of main part, second end 1012 communicates with cavity 100, second end 1012 is close to connecting piece 3. By arranging the gas channel 101, the gas channel 101 is communicated with an air extraction device (not shown in the figure), so that impurities in the cavity 100 can be extracted by the air extraction device, and the impurities are prevented from being accumulated in the cavity 100; because the two sides of the connecting piece 3 are the places with the most impurity generation amount, the second end 1012 is arranged adjacent to the connecting piece 3, so that the second end 1012 is adjacent to the source of the impurity generation, and the cleaning effect is improved.

Specifically, the transition chamber includes a three-way pipe 4, the three-way pipe 4 includes a main pipe 41 and two branch pipes 42, the main pipe 41 is communicated with the first end 1011, one branch pipe 42 is communicated with the air extraction equipment, that is, the first end 1011 is communicated with the air extraction equipment through the main pipe 41 and one of the branch pipes 42, the other branch pipe 42 is communicated with the ventilation equipment, and the ventilation equipment is used for conveying clean cold air to the cavity 100. By arranging the ventilation equipment, when the cavity 100 needs to be restored to the atmospheric pressure after the panel coating is finished, air can be conveyed to the cavity 100 through the ventilation equipment, so that the adjustment speed of the atmospheric pressure is accelerated, and at the moment, the gas channel 101 has two functions of air suction and air injection; it can be understood that the coating equipment coats the panel at high temperature, and the ventilation equipment introduces cold air into the cavity 100, so that the panel can be cooled, and the subsequent transportation operation of the panel is facilitated.

Preferably, a valve 5 is provided in the branch pipe 42, and the branch pipe 42 is detachably connected to the ventilating device and the air exhausting device. By arranging the valves 5, when the air extraction equipment and the ventilation equipment work independently, the corresponding valves 5 can be closed, so that gas leakage is avoided; for example, when the chamber 100 needs to be returned to atmospheric pressure, the valve 5 on the branch pipe 42 connected to the ventilation device is opened, and the valve 5 on the branch pipe 42 connected to the air extraction device is closed, so that the gas introduced by the ventilation device can enter the chamber 100.

In this embodiment, the support frame 2 is connected to the base 1 through a stud (not shown in the figure), the connecting member 3 is a gasket, the connecting member 3 is sleeved on the periphery of the stud, and the support frame 2 has a large size, so that a plurality of studs are provided, that is, a plurality of connecting members 3 are also provided, so that the sources of impurity generation are many, and the embodiment is provided with a plurality of second ends 1012, so that the cleaning efficiency of impurities can be improved; preferably, a plurality of second ends 1012 are arranged at intervals around the periphery of the connecting member 3, and a portion of the second ends 1012 is arranged below the supporting frame 2, the gap between the supporting frame 2 and the base 1 is small, the gas flow rate is low, impurities are easy to accumulate, and the cleaning tool is difficult to extend into the gap for cleaning, and a portion of the second ends 1012 is located below the supporting frame 2, so that the impurities accumulated in the gap between the supporting frame 2 and the base 1 can be pumped away, and the cleaning of the environment in the chamber 100 is ensured.

Referring to FIG. 5, in one embodiment, a removable spray head 8 is disposed within the chamber 100, and the spray head 8 is coupled to the second end 1012 via a hose 9. By arranging the movable spray head 8, a cleaner can precisely clean the cavity 100 by moving the spray head 8, and the dust collection range of the air extractor is enlarged. The provision of the showerhead 8 may increase the cleaning margin and reduce the number of second ends 1012, thereby reducing the strength impact of the gas passages 101 on the susceptor 1.

Referring to fig. 5 and 6, preferably, the base 1 is provided with a guide assembly 7, and the spray head 8 is slidably disposed on the guide assembly 7. Through setting up direction subassembly 7, can lead to the removal of shower nozzle 8, avoid shower nozzle 8 and other spare parts to take place the position interference to avoid shower nozzle 8 and other spare parts to bump.

Referring to fig. 6, specifically, the guiding assembly 7 includes a fixing base 701, a screw rod 702, a sliding block 703 and a sliding rail 705, the fixing base 701 is fixed on the base 1, the screw rod 702 is rotatably connected with the fixing base 701, the sliding block 703 is in threaded connection with the screw rod 702, the sliding rail 705 is fixed on the fixing base 701, the length of the sliding rail 705 is consistent with the length direction of the screw rod 702, the sliding block 703 is slidably disposed on the sliding rail 705, and the spraying head 8 is disposed on the sliding block 703. Through setting up fixing base 701, lead screw 702 and slider 703, when rotating lead screw 702, because lead screw 702 and slider 703 are threaded connection, under the spacing of fixing base 701, can change the rotary motion of lead screw 702 into the rectilinear movement of slider 703 to drive the nozzle and remove. Referring to fig. 4 and 5, in the present embodiment, a plurality of connecting members 3 are arranged along the width direction of the base 1, and the length of the screw 702 extends along the width direction of the base 1, at this time, one nozzle 8 can perform dust suction cleaning on the plurality of connecting members 3, so as to reduce the number of the second ends 1012.

Preferably, the motor 10 may be disposed in the chamber 100, and an output shaft of the motor 10 is detachably connected to the lead screw 702. By arranging the motor 10, the screw rod 702 can be driven to rotate by the motor 10, so that the manual operation amount is reduced; through setting up motor 10 and can dismantle with lead screw 702 and be connected, when need not clean, can lift motor 10 off, can normally transport the panel in the assurance cavity 100.

In this embodiment, the fixing base 701 includes a plate body 7011 and a connecting plate 7012 disposed on two sides of the plate body 7011, one end of the screw 702 is connected to the connecting plate 7012 through a bearing 704, and the other end of the screw 702 penetrates the connecting plate 7012 to be connected to an output shaft of the motor 10. Through setting up the one end through connecting plate 7012 of lead screw 702, can make things convenient for the lead screw 702 to be connected fixedly with motor 10 output shaft, in this embodiment, it is fixed through the shaft coupling between lead screw 702 and the motor 10 output shaft.

Specifically, an air blower 6 is provided in the cavity 100, and the air blower 6 blows air toward the connector 3. Through the arrangement of the air blower 6, the air blower 6 blows air to the connecting piece 3, air around the connecting piece 3 can be disturbed, impurities accumulated around the connecting piece 3 are raised, and therefore the impurities can be taken out of the cavity 100 as far as possible, and dead corners in cleaning are avoided.

Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but may be manufactured in various forms, and those skilled in the art will understand that the present invention may be embodied in other specific forms without changing the technical spirit or essential features of the invention. It is therefore to be understood that the above described embodiments are illustrative and not restrictive in all respects.

Claims

1. The transition chamber of the coating equipment comprises a main body, wherein a cavity is arranged in the main body, a base is arranged in the cavity, support frames are arranged on the base at intervals and used for supporting a panel, and the support frames are connected with the base through a connecting piece.

2. The transition chamber of coating equipment according to claim 1, comprising a tee comprising a main pipe and two branch pipes, wherein the first end is communicated with the air suction equipment through the main pipe and one of the branch pipes, and the other branch pipe is communicated with a ventilation equipment, and the ventilation equipment is used for delivering clean cold air to the chamber.

3. The transition chamber of a coating device according to claim 2, characterized in that a valve is arranged on the branch pipe, and the branch pipe is detachably connected with the ventilation device and/or the air suction device.

4. The transition chamber of a plating apparatus according to claim 1, wherein the second end is provided in plurality, and the second end is provided below the support frame.

5. The transition chamber of a plating apparatus according to claim 1, wherein a movable nozzle is disposed in the chamber, and the nozzle is connected to the second end via a hose.

6. The transition chamber of a plating apparatus according to claim 5, wherein a guide assembly is provided on the base, and the shower head is slidably provided on the guide assembly.

7. The transition chamber of coating equipment according to claim 6, wherein the guide assembly comprises a fixing seat, a screw rod, a sliding block and a sliding rail, the fixing seat is fixed on the base, the screw rod is rotatably connected with the fixing seat, the sliding block is in threaded connection with the screw rod, the sliding rail is fixed on the fixing seat, the sliding block is slidably arranged on the sliding rail, and the spray head is arranged on the sliding block.

8. The transition chamber of a coating device according to claim 7, comprising a motor, wherein an output shaft of the motor is detachably connected with the screw rod.

9. The transition chamber of a coating device according to claim 8, wherein the fixing base comprises a plate body and connecting plates disposed at two sides of the plate body, one end of the screw rod is connected with the connecting plates through a bearing, and the other end of the screw rod penetrates through the connecting plates and is connected with an output shaft of the motor.

10. The transition chamber of coating equipment according to claim 1, wherein a blower is provided in the chamber, and the blower blows air toward the connection member.