CN217931754U - Fixing device and detection system - Google Patents

Abstract

The utility model discloses a fixing device and detecting system. The fixing device comprises a first fixing frame, a fixing disc and a plurality of fixing assemblies; the first fixing frame is provided with a first hole; each fixing component is arranged on the first fixing frame around the first hole and comprises a first driver and a fixing piece, and the first driver is used for driving the fixing piece to enter or leave the first hole; the fixing piece is provided with a first connecting part and a first abutting part, and the first connecting part is connected with the output end of the first driver; the fixed disc is provided with a bottom surface, the fixed disc is arranged in the first hole, and the first abutting part abuts against the bottom surface. The fixing of the fixed disc in the first hole can be achieved through the abutting of the fixing pieces, the fixed disc or the probe card is required to be replaced after detection operation is completed, the fixed disc is detached from the first fixing frame along the bottom face direction, the fixed disc does not need to be taken out after the detection device resets, and detachment efficiency is improved.

Description

Fixing device and detection system

Technical Field

The utility model belongs to the technical field of the wafer detection technique and specifically relates to a fixing device and detecting system are related to.

Background

In the related art, in order to inspect a wafer, a probe card needs to be fixed by using a fixing device. In the fixing device in the prior art, a supporting groove is usually arranged on a fixing seat, a probe card is placed in the supporting groove and then is pre-tightened and fixed, after detection operation is completed, in order to prevent the detection device and the probe card from interfering, the probe card needs to be detached and replaced after the detection device is reset, so that the process is not compact, and the detection efficiency of a wafer is affected, therefore, research and solution for the problem are needed.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a fixing device can improve the efficiency of the dismantlement of probe card.

The utility model also provides a detecting system who is provided with above-mentioned fixing device.

According to the utility model discloses fixing device, include:

the first fixing frame is provided with a first hole;

the fixing assemblies are arranged on the first fixing frame and arranged around the first hole, each fixing assembly comprises a first driver and a fixing piece, the first driver is provided with an output end, and the first driver is used for driving the fixing piece to enter or separate from the first hole; the fixing piece is provided with a first connecting part and a first abutting part, and the first connecting part is connected with the output end;

the fixed disc is used for fixing the probe card, the bottom surface of the fixed disc is arranged on the fixed disc, the fixed disc is arranged in the first hole, and the first abutting portion abuts against the bottom surface.

According to the utility model discloses fixing device is provided with following beneficial effect at least: the first abutting parts of the fixing parts abut against the bottom surface of the fixed disk, and the second abutting parts abut against the side surface of the fixed disk, so that the fixed disk can be fixed in the first hole, and subsequent detection operation can be performed. After the detection operation of wafer is accomplished and when needing to change fixed disk or probe card, first driver orders about the mounting and withdraws first hole, the fixed disk loses to support and holds and gets into the unblock state this moment, and the fixed disk is provided with the movement trend towards the bottom surface direction, the staff connects the fixed disk in the bottom surface of mount and gets, or, utilize and carry the device to connect the fixed disk and get, can realize the quick dismantlement of fixed disk, need not wait detection device after reseing, the orientation that deviates from the bottom surface on the mount again takes out the fixed disk, the dismantlement efficiency of fixed disk has been improved.

According to some embodiments of the utility model, the mounting still is provided with the second and supports the portion of holding, the fixed disk still is provided with the side, the second support the portion of holding with the side is supported and is held.

According to some embodiments of the present invention, the fixing assembly further comprises a second fixing frame, the second fixing frame is fixedly connected to the first fixing frame, and the fixing member is slidably connected to the second fixing frame.

According to some embodiments of the present invention, the fixing member is further provided with a second connecting portion, the second fixing frame is provided with a second hole and a third hole, the second hole is provided with a first position and a second position, the first position and the second position are arranged in sequence along the direction of the first abutting portion toward the second connecting portion, the third hole is provided with a third position and a fourth position, the third position and the fourth position are arranged in sequence along the direction of the second connecting portion toward the first abutting portion; the fixing component further comprises a connecting piece, a first rotating shaft and a second rotating shaft, the connecting piece is fixedly connected to the output end, the connecting piece is provided with a fourth hole, the fourth hole is provided with a fifth position and a sixth position, the fifth position and the sixth position are sequentially arranged along the direction of the second connecting portion towards the first abutting portion, the first rotating shaft is rotatably connected to the first connecting portion, the first rotating shaft is simultaneously inserted into the first position and the fifth position, the second rotating shaft is rotatably connected to the second connecting portion, the second rotating shaft is inserted into the third position, the first rotating shaft can slide to the second position and the sixth position along with the movement of the output end away from the fixing disc, and the second rotating shaft can slide to the fourth position, so that the fixing piece can rotate clockwise along the first rotating shaft.

According to some embodiments of the present invention, the fourth hole further comprises an extension section, one end of the extension section communicates with the sixth position, and the other end of the extension section extends in a direction close to the first driver.

According to some embodiments of the utility model, fixing device still includes the locating part, the locating part is provided with spacing hole, the locating part still is provided with pretension portion, pretension portion set up in spacing downthehole, the locating part is fixed in the second mount, the output is worn to locate spacing hole, pretension portion is used for the restriction the motion of output.

According to some embodiments of the utility model, first mount is provided with the storage tank, fixed subassembly sets up in each in the storage tank.

According to some embodiments of the utility model, the internal surface in first hole is provided with the location boss, the location boss with the fixed disk deviates from the terminal surface of bottom surface is supported and is held.

According to the utility model discloses detecting system includes:

the utility model discloses a fixing device;

the detection device comprises a detection head, the detection device and the fixing device are sequentially arranged along the gravity direction, the position of the detection head corresponds to that of the fixing disc, and the detection head is used for carrying out wafer detection on the probe card.

According to the utility model discloses detecting system is provided with following beneficial effect at least: detection system is through using the utility model discloses fixing device can realize the quick fixed of fixed disk and dismantle, has improved the dismantlement efficiency of fixed disk to solve the fixed disk and the interference problem that detects the head and probably appear, from this, makeed the detection process compacter, improved the efficiency that the wafer detected.

According to some embodiments of the utility model, detecting system still includes moves and carries the device, move and carry the device and include the second driver and hold carrier, the second driver is used for ordering about hold carrier along keeping away from detecting device's direction motion, hold carrier with the bottom surface of fixed disk is supported and is held, in order to bear the fixed disk.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The invention is further described with reference to the following figures and examples, in which:

fig. 1 is a schematic view of a fixing device according to an embodiment of the present invention;

FIG. 2 is a schematic view of the fixture of FIG. 1;

FIG. 3 is a schematic view of another perspective of the fixture of FIG. 1;

fig. 4 is an exploded view of a securing assembly according to an embodiment of the present invention;

FIG. 5 is an assembled view of the fixing assembly of FIG. 4;

FIG. 6 is a schematic view of the securing assembly of FIG. 4 in a locked condition;

FIG. 7 is a schematic view of the securing assembly of FIG. 4 in an unlocked state;

fig. 8 is a schematic diagram of a detection system according to an embodiment of the present invention.

Reference numerals are as follows:

the fixing device 100, the first fixing frame 110, the first hole 120, the receiving groove 130, the fixing component 140, the fixing plate 150, the bottom surface 160, the side surface 170, and the positioning boss 180;

the first driver 200, the output end 210, the connecting member 215, the fourth hole 220, the extending section 225, the fifth position 230, the sixth position 235, the first rotating shaft 240, the first connecting portion 241, the second rotating shaft 245, the fixing member 250, the second abutting portion 251, the first abutting portion 252, the second connecting portion 253, the limiting member 260, the limiting hole 265, the third hole 270, the fourth position 271, the third position 272, the second hole 280, the first position 281, the second position 282, and the second fixing frame 290;

an inspection system 300, an inspection apparatus 310, a transfer apparatus 320, and a carrier 330.

Detailed Description

Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it should be understood that the orientation or positional relationship indicated with respect to the orientation description, such as up, down, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, a plurality of means is one or more, a plurality of means is two or more, and the terms greater than, less than, exceeding, etc. are understood as not including the number, and the terms greater than, less than, within, etc. are understood as including the number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present invention, unless there is an explicit limitation, the terms such as setting, installing, connecting, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meaning of the terms in the present invention by combining the specific contents of the technical solution.

In the description of the present invention, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The fixing device and the detection system according to the embodiments of the present invention are described below with reference to the drawings.

Referring to fig. 1 to 5, a fixing device 100 according to an embodiment of the present invention includes a first fixing frame 110, a fixing plate 150, and a plurality of fixing assemblies 140. The first fixing frame 110 is provided with a first hole 120. Each fixing component 140 is mounted on the first fixing frame 110, and each fixing component 140 is disposed around the first hole 120, the fixing component 140 includes a first driver 200 and a fixing member 250, the first driver 200 is provided with an output end 210, and the first driver 200 is used for driving the fixing member 250 to enter or leave the first hole 120; the fixing member 250 is provided with a first connecting portion 241 and a first abutting portion 252, and the first connecting portion 241 is connected to the output end 210. The fixing plate 150 is used for fixing the probe card, the fixing plate 150 is provided with a bottom surface 160, the fixing plate 150 is arranged in the first hole 120, and the first abutting portion 252 abuts against the bottom surface 160.

It should be noted that, the locking state herein refers to a state in which the fixing plate 150 is fixed to the first fixing frame 110; the unlocked state refers to a state in which the fixing plate 150 and the first fixing frame 110 are relatively movable. The bottom surface 160 of the fixed tray 150 is an end surface facing one side in the direction of gravity when the fixed tray 150 is fixed.

Before the fixed disk 150 is locked, the fixed disk 150 can move in the first hole 120, and after the fixed disk 150 is located at the set position of the first hole 120, the output end 210 of the first driver 200 pushes the fixing member 250 into the first hole 120, so that the first abutting portion 252 abuts against the bottom surface 160 of the fixed disk 150, and the fixed disk 150 is fixed in the first hole 120 by abutting against the fixed disks 150 through the plurality of fixing members 250, so that the fixed disk 150 is in a locked state for subsequent detection operation.

When the fixed disk 150 needs to be replaced after the detection operation is completed, the first driver 200 drives the fixing member 250 to withdraw the first hole 120, at this time, the fixed disk 150 loses the abutting state and enters the unlocking state, and the fixed disk 150 is provided with a movement trend towards the direction of the bottom surface 160, a worker accesses the fixed disk 150 on the bottom surface 160 of the fixed rack, or the fixed disk 150 is accessed by using the transfer device 320, so that the fixed disk 150 can be quickly detached, the fixed disk 150 does not need to be taken out from the direction deviating from the bottom surface 160 on the first fixed rack 110 after the detection device 310 is reset, and the detachment efficiency of the fixed disk 150 is improved.

Specifically, the first actuator 200 may be selected from a hydraulic actuator or an electric actuator, which is conventional in the art, and the body of the first actuator 200 is fixed on the fixing frame, and the output end 210 is movable relative to the fixing frame to drive the fixing member 250 to move.

Referring to fig. 4, according to some embodiments of the present invention, the fixing member is further provided with a second supporting portion, and the fixing plate is further provided with a side surface, and the second supporting portion is supported by the side surface.

The second abutting part abuts against the side face, so that the fixed disc can be limited and clamped in the horizontal direction, the movement of the fixed disc in the first hole is further limited, and the fixing stability of the fixing device is improved.

Referring to fig. 1 and 4, according to some embodiments of the present invention, the fixing assembly 140 further includes a second fixing frame 290, the second fixing frame 290 is fixedly connected to the first fixing frame 110, and the fixing member 250 is slidably connected to the second fixing frame 290. The second fixing frame 290 is slidably connected with the fixing member 250, so that a structural connection can be provided between the fixing member 250 and the first fixing frame 110, and a part of the gravity of the fixing member 250 and the reaction force of the fixing member 250 to the supporting force of the fixing plate 150 are directly shared by the first fixing frame 110, so that the load of the first driver 200 and the output end 210 is reduced, and the service life of the fixing assembly 140 is prolonged.

Specifically, a groove structure or a hole structure for sliding may be provided on the second fixing frame 290 between the second fixing frame 290 and the fixing member 250, a rotating shaft is provided on the fixing member 250, sliding connection is achieved through cooperation of the rotating shaft and the groove structure or the hole structure, and the groove structure and the hole structure can also play a certain guiding role on the rotating shaft, so as to further guide the moving direction of the fixing member 250.

Referring to fig. 4 to 7, according to some embodiments of the present invention, the fixing member 250 is further provided with a second connecting portion 253, the second fixing frame 290 is provided with a second hole 280 and a third hole 270, the second hole 280 is provided with a first position 281 and a second position 282, the first position 281 and the second position 282 are sequentially arranged along the direction of the first abutting portion 252 toward the second connecting portion 253, the third hole 270 is provided with a third position 272 and a fourth position 271, and the third position 272 and the fourth position 271 are sequentially arranged along the direction of the second connecting portion 253 toward the first abutting portion 252; the fixing assembly 140 further includes a connecting member 215, a first rotating shaft 240 and a second rotating shaft 245, the connecting member 215 is fixedly connected to the output end 210, the connecting member 215 is provided with a fourth hole 220, the fourth hole 220 is provided with a fifth position 230 and a sixth position 235, the fifth position 230 and the sixth position 235 are sequentially arranged along a direction of the second connecting portion 253 towards the first abutting portion 252, the first rotating shaft 240 is rotatably connected to the first connecting portion 241, the first rotating shaft 240 is rotatably connected to one end of the fixing member 250 close to the first driver 200, the first rotating shaft 240 is simultaneously inserted into the first position 281 and the fifth position 230, the second rotating shaft 245 is rotatably connected to the second connecting portion 253, and the second rotating shaft 245 is inserted into the third position 272, along with the movement of the output end away from the fixing plate 150, the first rotating shaft 240 can slide to the second position 282 and the sixth position 235, and the second rotating shaft 245 can slide to the fourth position 271, so that the fixing member 250 rotates clockwise along the first rotating shaft 240.

Through the cooperation of the second hole 280 and the first rotating shaft 240, the first rotating shaft 240 can be moved from the first position 281 to the second position 282 by the output end 210, so that the position of the first connecting portion 241 in the unlocked state is higher than the position of the first connecting portion 241 in the locked state along the gravity direction. Through the cooperation between the third hole 270 and the second rotating shaft 245, the second rotating shaft 245 can be driven by the output end 210 to move from the third position 272 to the fourth position 271, so that the position of the second connecting portion 253 in the unlocked state is lower than the position of the second connecting portion 253 in the locked state along the gravity direction. The height difference between the positions of the first connecting portion 241 of one end of the fixing member 250 adjacent to the first actuator 200 in the locked state and the second connecting portion 253 in the unlocked state in the locked state and the unlocked state enables the clockwise rotation of the fixing member 250 in the process of shifting the locked state to the unlocked state or the counterclockwise rotation in the process of shifting the unlocked state to the locked state.

Compared with the embodiment in which the fixing member 250 cannot rotate, the fixing member 250 of the present embodiment can reduce friction between the first abutting portion 252 and the bottom surface 160 during the transition between the locked state and the unlocked state, thereby reducing wear on the first abutting portion 252 and the fixed disk 150.

Referring to fig. 4 to 7, according to a further embodiment of the present invention, the fourth hole 220 is further provided with an extension section 225, one end of the extension section 225 is communicated with the sixth position 235, and the other end of the extension section 225 extends in a direction close to the first driver 200.

By arranging the extension section 225, after the fixing member 250 is converted from the unlocked state to the locked state, the connecting member 215 can continue to move along the extension section 225, so as to be close to the second abutting portion 251 and abut against the fixing member 250 directly. Compared with the way that the connecting piece 215 transmits the force to the fixing piece 250 through the first rotating shaft 240, the connecting piece 215 is in direct contact with the fixing piece 250, and the force-transmitting effect is better due to the large force-receiving area, so that the abutting effect of the fixing piece 250 on the fixing disc 150 is ensured. And the stress of the first rotating shaft 240 is also reduced correspondingly, and the service life of the first rotating shaft 240 is prolonged.

Referring to fig. 4, according to some embodiments of the present invention, the fixing device 100 further includes a limiting member 260, the limiting member 260 is provided with a limiting hole 265, the limiting member 260 is further provided with a pre-tightening portion, the pre-tightening portion is disposed in the limiting hole 265, the limiting member 260 is fixed to the second fixing frame 290, the output end 210 is disposed through the limiting hole 265, and the pre-tightening portion is used for limiting the movement of the output end 210.

Note that the pretensioner is not shown in the drawings.

After the output end 210 moves to the set position, the pre-tightening portion of the limiting member 260 is close to the output end 210 in the limiting hole 265 and abuts against the output end 210, so as to fix the position of the output end 210, so as to reduce the probability that the output end 210 is separated from the set position when the first driver 200 fails, thereby improving the stability of the fixing device 100.

Specifically, the limiting member 260 may be selected as a locking unit, and the pre-tightening portion is an elastic membrane of the locking unit, and the locking unit drives the elastic membrane to move by air pressure or hydraulic pressure, so as to fix the output end 210.

Referring to fig. 1 and 2, according to some embodiments of the present invention, the first fixing frame 110 is provided with a containing groove 130, and the fixing component 140 is disposed in each containing groove 130. By disposing the receiving groove 130 and installing the fixing element 140 in the receiving groove 130, the degree of integration of the first fixing frame 110 and the fixing element 140 in the three-dimensional space can be improved, and the volume of the fixing device 100 can be further reduced.

Further, the fixing device 100 further includes a cover plate fixedly connected to the first fixing frame 110, the cover plate is used for covering or uncovering the accommodating groove 130 to reduce direct contact between external dust or other substances and the fixing assembly 140, protect the fixing assembly 140, and provide support for the fixing assembly 140 in the gravity direction, when the first driver 200 is not firmly connected to the first fixing frame 110, the cover plate can reduce the probability that the fixing assembly 140 directly slides out of the accommodating groove 130.

Referring to fig. 2, according to some embodiments of the present invention, the inner surface of the first hole 120 is provided with a positioning boss 180, and the positioning boss 180 abuts against the end surface of the fixed disk 150 departing from the bottom surface 160.

When the fixing plate 150 enters the first hole 120 along the direction opposite to the gravity direction, the positioning boss 180 can provide positioning guide for the fixing plate 150, and when the end surface of the fixing plate 150 departing from the bottom surface 160 abuts against the positioning boss 180, the fixing plate 150 is located at the set position in the first hole 120, so that subsequent fixing of the fixing plate 150 and detection of a wafer are facilitated.

Specifically, the positioning boss 180 may be an annular boss, or may be one or more protrusions, as long as the fixing plate 150 can be abutted and limited.

Referring to fig. 8, according to the utility model discloses a detection system 300, including the utility model discloses a fixing device 100 and detection device 310, detection device 310 includes detects the head, along the direction of gravity, and detection device 310 sets gradually with fixing device 100, and the position that detects the head corresponds with the position of fixed disk 150, detects the head and is used for carrying out wafer inspection to the probe card.

Through using the utility model discloses fixing device 100, can realize fixed disk 150's quick fixed, and after fixed disk 150 got into the unblock state, the staff connects the fixed disk 150 in the bottom surface 160 of mount and gets, or, utilize and move the device 320 that carries and connect the fixed disk 150 and get, can realize fixed disk 150's quick dismantlement, detection device 310 after not waiting resets, the orientation that deviates from bottom surface 160 from first mount 110 again takes out fixed disk 150, fixed disk 150's dismantlement efficiency has been improved, therefore, make the detection process compacter, the efficiency that improves the wafer and detect.

Note that the detection head is not shown in the figure.

Referring to fig. 8, according to some embodiments of the present invention, the detecting system 300 further includes a transferring device 320, the transferring device 320 includes a second driver and a carrying member 330, the second driver is used to drive the carrying member 330 to move in a direction away from the detecting device 310, and the carrying member 330 abuts against the bottom surface 160 of the fixing tray 150 to carry the fixing tray 150.

Note that the second driver is not shown in the figure.

By providing the transfer device 320, when the fixed disk 150 needs to be detached, the supporting member 330 abuts against the bottom surface 160 of the fixed disk 150 to support the fixed disk 150, and when the fixing assembly 140 enters the unlocking state and releases the abutting against the fixed disk 150, the second driver drives the supporting member 330 to move along the gravity direction, so that the fixed disk 150 is separated from the first hole 120, thereby facilitating the subsequent replacement of the fixed disk 150 or the probe card.

In particular, the second actuator may be selected to be a hydraulic or electric actuator as is conventional in the art.

Further, the moving assembly can be further disposed on the transferring device 320, and the moving assembly includes a third driver and a roller, and the third driver is configured to drive the roller to drive the transferring device 320 to move in the horizontal direction, so as to transfer the fixing tray 150 to a predetermined position for replacing the fixing tray 150 or the probe card.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art. Furthermore, the embodiments of the present invention and features of the embodiments may be combined with each other without conflict.

Claims (10)

1. Fixing device for wafer inspection, its characterized in that includes:

the first fixing frame is provided with a first hole;

the fixing assemblies are arranged on the first fixing frame and arranged around the first hole, each fixing assembly comprises a first driver and a fixing piece, the first driver is provided with an output end, and the first driver is used for driving the fixing piece to enter or separate from the first hole; the fixing piece is provided with a first connecting part and a first abutting part, and the first connecting part is connected with the output end;

the fixed disk is used for fixing the probe card, the fixed disk is provided with a bottom surface, the fixed disk is arranged in the first hole, and the first abutting part abuts against the bottom surface.

2. The fixing device as claimed in claim 1, wherein the fixing member is further provided with a second abutting portion, the fixing plate is further provided with a side surface, and the second abutting portion abuts against the side surface.

3. The fastening device of claim 1 or 2, wherein the fastening assembly further comprises a second fastening frame, the second fastening frame is fixedly connected with the first fastening frame, and the fastening member is slidably connected with the second fastening frame.

4. A fixing device according to claim 3, wherein the fixing member is further provided with a second connecting portion, the second fixing frame is provided with a second hole and a third hole, the second hole is provided with a first position and a second position, the first position and the second position are arranged in sequence along the direction of the first abutting portion toward the second connecting portion, the third hole is provided with a third position and a fourth position, the third position and the fourth position are arranged in sequence along the direction of the second connecting portion toward the first abutting portion; the fixing component further comprises a connecting piece, a first rotating shaft and a second rotating shaft, the connecting piece is fixedly connected to the output end, the connecting piece is provided with a fourth hole, the fourth hole is provided with a fifth position and a sixth position, the fifth position and the sixth position are sequentially arranged along the direction of the second connecting portion towards the first abutting portion, the first rotating shaft is rotatably connected to the first connecting portion, the first rotating shaft is simultaneously inserted into the first position and the fifth position, the second rotating shaft is rotatably connected to the second connecting portion, the second rotating shaft is inserted into the third position, the first rotating shaft can slide to the second position and the sixth position along with the movement of the output end away from the fixing disc, and the second rotating shaft can slide to the fourth position, so that the fixing piece can rotate clockwise along the first rotating shaft.

5. The fastening device of claim 4, wherein the fourth hole is further provided with an extension, one end of the extension communicates with the sixth position, and the other end of the extension extends in a direction close to the first driver.

6. The fixing device according to claim 3, further comprising a limiting member, wherein the limiting member is provided with a limiting hole, the limiting member is further provided with a pre-tightening portion, the pre-tightening portion is disposed in the limiting hole, the limiting member is fixed to the second fixing frame, the output end is disposed through the limiting hole, and the pre-tightening portion is used for limiting the movement of the output end.

7. The fixing device of claim 1, wherein the first fixing frame is provided with receiving grooves, and the fixing component is disposed in each receiving groove.

8. The fixing device as claimed in claim 1, wherein a positioning boss is provided on an inner surface of the first hole, and the positioning boss abuts against an end surface of the fixed disk, which is away from the bottom surface.

9. A detection system, comprising:

the fixture of any one of claims 1 to 8;

the detection device comprises a detection head, the detection device and the fixing device are sequentially arranged along the gravity direction, the position of the detection head corresponds to that of the fixed disc, and the detection head is used for carrying out wafer detection on the probe card.

10. The detecting system of claim 9, further comprising a transferring device, wherein the transferring device comprises a second driver and a carrying member, the second driver is used for driving the carrying member to move in a direction away from the detecting device, and the carrying member abuts against the bottom surface of the fixed tray to carry the fixed tray.

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