CN217916174U - Crystal bar wire cutting equipment for semiconductor integrated circuit chip - Google Patents
Crystal bar wire cutting equipment for semiconductor integrated circuit chip Download PDFInfo
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- CN217916174U CN217916174U CN202221915203.XU CN202221915203U CN217916174U CN 217916174 U CN217916174 U CN 217916174U CN 202221915203 U CN202221915203 U CN 202221915203U CN 217916174 U CN217916174 U CN 217916174U
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Abstract
The utility model relates to a single crystal silicon rod processing technology field, concretely relates to crystal bar wire-electrode cutting equipment for semiconductor integrated circuit chip, including base and two vertical rails, still include conveying mechanism, cutting mechanism and support tight mechanism, conveying mechanism includes drive assembly and a plurality of toper conveying roller, cutting mechanism includes the slide, the line of cut, draw subassembly and lifting unit, support tight mechanism and include baffle and adjusting part, adjusting part establishes at the top of base, the baffle slides and sets up on adjusting part, drive assembly, draw subassembly and lifting unit and controller are electric connection, the utility model relates to a crystal bar wire-electrode cutting equipment for semiconductor integrated circuit chip can be when at every turn carrying the line of cut, and it is rotatory directly to drive a plurality of toper conveying roller through drive assembly to drive the silicon rod level and carry forward, need not artifical supplementary pay-off, labour saving and time saving is favorable to having promoted machining efficiency.
Description
Technical Field
The utility model relates to a single crystal silicon rod processing technology field, concretely relates to crystal bar wire-electrode cutting equipment for semiconductor integrated circuit chip.
Background
The silicon single crystal rod is formed by shaping or pulling in a hearth through a zone melting or Czochralski process. After being processed, the silicon single crystal rod needs to be cut into a plurality of long segments for manufacturing wafers.
The existing cutting equipment has the following defects:
1. the single cutting length can not be adjusted flexibly, the flexibility is poor, and the cutting requirements of different sizes can not be met.
2. Put the microscope carrier with the silicon rod through the manual work on, when the silicon rod volume is great, very inconvenient when carrying to cutting mechanism, waste time and energy, reduced cutting efficiency.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a crystal bar wire-electrode cutting equipment for semiconductor integrated circuit chip.
To achieve the purpose, the utility model adopts the following technical proposal:
provides a crystal bar wire cutting device for a semiconductor integrated circuit chip, which comprises a base and two vertical rails, wherein the two vertical rails are symmetrically arranged at the top of the base,
the cutting mechanism is arranged on the top of the base and used for conveying the single crystal silicon rod, the conveying mechanism comprises a driving component and a plurality of conical conveying rollers, two supporting frames are symmetrically arranged on the top of the base, the driving component is arranged on the supporting frames, the conical conveying rollers are rotatably arranged between the two supporting frames through articulated shafts,
the cutting mechanism is arranged on the top of the two vertical rails and comprises a sliding plate, a cutting line, a traction assembly and a lifting assembly, the sliding plate is arranged on the top of the two vertical rails in a sliding manner, the traction assembly is arranged on the outer wall of the sliding plate, the cutting line is sleeved on the traction assembly, the lifting assembly is arranged between the sliding plate and one of the vertical rails,
the abutting mechanism is arranged at the top of the base and used for abutting against the free end of the single crystal silicon rod, the abutting mechanism comprises a baffle and an adjusting component, the adjusting component is arranged at the top of the base, the baffle is arranged on the adjusting component in a sliding mode, and the driving component, the traction component, the lifting component and the controller are all electrically connected.
Preferably, the driving assembly comprises a stepping motor, a first belt and a plurality of first synchronizing wheels, each first synchronizing wheel is sleeved on the outer wall of one hinge shaft, the first belt is sleeved among the plurality of first synchronizing wheels, the stepping motor is fixedly arranged at the top of the base, the output end of the stepping motor is fixedly connected with the end part of one hinge shaft, and the stepping motor is electrically connected with the controller.
Preferably, the traction assembly includes electric putter, the gear, rack and four line wheels, four line wheels all rotate through the rotation axis and set up on the one end outer wall of slide, the line of cut is rolled up with the outer wall of four line wheels and is established the connection, the fixed guide rail that is equipped with on the other end outer wall of slide, the rack slides and sets up the inside at the guide rail, gear housing establishes on one of them rotation axis that is close to electric putter, gear and rack toothing are connected, electric putter is fixed to be established on the outer wall of guide rail, the fixed draw runner that is equipped with on its output, draw runner and rack fixed connection, be equipped with on the guide rail and supply the gliding groove of dodging of draw runner, wherein all the cover is equipped with the second synchronizing wheel on two outer walls that are located the rotation axis of top, the cover is equipped with the second belt between two second synchronizing wheels, electric putter is connected with the controller electricity.
Preferably, the lifting assembly comprises a cylinder and a pull rod, the pull rod is fixedly arranged on the outer wall of the sliding plate, the cylinder is fixedly arranged on the outer wall of one of the vertical rails, the output end of the cylinder is fixedly connected with the bottom of the pull rod, the bottom of the sliding plate is provided with an avoiding groove, and the cylinder is electrically connected with the controller.
Preferably, the adjusting part comprises a bolt and a limiting bottom shell, the limiting bottom shell is fixedly arranged at the top of the base, the bottom of the baffle is connected with the inner portion of the limiting bottom shell in a sliding mode, a plurality of jacks are formed in the outer wall of the limiting bottom shell, a plurality of pin holes are formed in the inner wall of the limiting bottom shell, a through hole for the bolt to pass through is formed in the bottom of the baffle, the bolt is inserted into the inner portion of one of the pin holes, the bolt passes through one of the jacks and is connected with the through hole in an inserting mode, and the axis direction of each pin hole is consistent with that of one of the jacks.
Preferably, a binding band is arranged between the two support frames, and a limiting clamp for winding the binding band is fixedly arranged on the outer wall of the top of one support frame.
The utility model has the advantages that:
1. the utility model discloses a design conveying mechanism, drive assembly and a plurality of toper conveying roller promptly can be when silicon rod is carried to the line of cut at every turn, and it is rotatory directly to drive a plurality of toper conveying roller through drive assembly to drive the silicon rod level and carry forward, need not artifical supplementary pay-off, labour saving and time saving is favorable to having promoted machining efficiency.
2. The utility model discloses a design adjusting part and baffle, shelter from spacingly through the free end of baffle to the silicon rod, can ensure that the cutting length of silicon rod is unanimous at every turn, reach the effect of isometric cutting, can not cause the error, simultaneously when needs adjust the single cutting length of silicon rod, only need adjusting baffle in the position of spacing drain pan, thereby the position at adjusting baffle and base top, the interval of adjusting baffle and line of cut, reach the effect of adjusting silicon rod single cutting length, satisfy not unidimensional cutting demand, and then promoted the flexibility of this equipment.
3. The utility model discloses a design bandage, when the cutting, through bandage tightening silicon rod outer wall, the cooperation baffle carries on spacingly to the cutting section, plays fixed effect, simultaneously through designing a plurality of toper conveying roller, ensures that the silicon rod can only the level is carried forward, can not take place the drunkenness when the cutting, prevents to cause the cutting error, avoids causing the loss, promotes the cutting quality.
Drawings
In order to more clearly illustrate the technical solution of the embodiment of the present invention, the drawings in the embodiment of the present invention are briefly described below.
Fig. 1 is a schematic perspective view of the first embodiment of the present invention;
fig. 2 is a schematic perspective view of the second embodiment of the present invention;
FIG. 3 is an enlarged view taken at A in FIG. 2;
FIG. 4 is an enlarged view of FIG. 2 at B;
FIG. 5 is an enlarged view at C in FIG. 2;
FIG. 6 is a cross-sectional view of the slide plate of the present invention;
FIG. 7 is an enlarged view of FIG. 6 at D;
fig. 8 is a three-dimensional exploded view of the baffle, the latch and the limiting bottom case of the present invention;
in the figure: the device comprises a vertical rail 1, a driving component 2, a conical conveying roller 3, a sliding plate 4, a cutting line 5, a traction component 6, a lifting component 7, a baffle 8, an adjusting component 9, a stepping motor 10, a first belt 11, a first synchronous wheel 12, an electric push rod 13, a gear 14, a rack 15, a wire wheel 16, a sliding strip 17, a second synchronous wheel 18, a second belt 19, a binding band 27, an air cylinder 20, a pull rod 21, a plug pin 22, a limiting bottom shell 23, a jack 24, a pin hole 25, a through hole 26 and a limiting clamp 28.
Detailed Description
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
Wherein the showings are for the purpose of illustration only and are shown by way of illustration only and not in actual form, and are not to be construed as limiting the present patent; to better illustrate the embodiments of the present invention, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product.
The utility model provides a technical scheme, referring to figure 1, a crystal bar wire cutting device for a semiconductor integrated circuit chip, which comprises a base and two vertical rails 1, wherein the two vertical rails 1 are symmetrically arranged at the top of the base,
the silicon single crystal silicon rod cutting machine further comprises a conveying mechanism, a cutting mechanism and a propping mechanism, wherein the conveying mechanism is arranged at the top of the base and used for conveying a silicon single crystal rod, the conveying mechanism comprises a driving component 2 and a plurality of conical conveying rollers 3, the top of the base is symmetrically provided with two supporting frames, the driving component 2 is arranged on the supporting frames, the conical conveying rollers 3 are all rotatably arranged between the two supporting frames through articulated shafts,
the cutting mechanism is arranged at the top of the two vertical rails 1 and comprises a sliding plate 4, a cutting line 5, a traction assembly 6 and a lifting assembly 7, the sliding plate 4 is arranged at the top of the two vertical rails 1 in a sliding way, the traction assembly 6 is arranged on the outer wall of the sliding plate 4, the cutting line 5 is sleeved on the traction assembly 6, the lifting assembly 7 is arranged between the sliding plate 4 and one vertical rail 1,
the abutting mechanism is arranged at the top of the base and used for abutting against the free end of the single crystal silicon rod, the abutting mechanism comprises a baffle 8 and an adjusting component 9, the adjusting component 9 is arranged at the top of the base, the baffle 8 is arranged on the adjusting component 9 in a sliding mode, and the driving component 2, the traction component 6, the lifting component 7 and the controller are all electrically connected.
Referring to fig. 3, the driving assembly 2 includes a stepping motor 10, a first belt 11 and a plurality of first synchronous wheels 12, each first synchronous wheel 12 is sleeved on an outer wall of one hinged shaft, the first belt 11 is sleeved between the plurality of first synchronous wheels 12, the stepping motor 10 is fixedly disposed at the top of the base, an output end of the stepping motor 10 is fixedly connected with an end of one of the hinged shafts, the stepping motor 10 is electrically connected with the controller, when a free end of the silicon rod is cut off, the binding band 27 is loosened, the stepping motor 10 is started through the controller, so that the output end of the stepping motor rotates, because the output end of the stepping motor is fixedly connected with an end of one of the hinged shafts, and because each conical conveying roller 3 is rotatably connected with two support frames through the hinged shaft, each first synchronous wheel 12 is sleeved with one hinged shaft, the plurality of first synchronous wheels 12 are sleeved through the first belt 11, and then the plurality of conical conveying rollers 3 are driven to rotate, so as to drive the silicon rod placed thereon to be conveyed to an end close to the hinged shaft 8 until being attached to an outer wall of the baffle 8, so as to perform a next cutting operation.
Referring to fig. 7, the traction assembly 6 includes an electric push rod 13, a gear 14, a rack 15 and four wire wheels 16, the four wire wheels 16 are all rotatably disposed on an outer wall of one end of the sliding plate 4 through a rotating shaft, the cutting line 5 is wound and connected with outer walls of the four wire wheels 16, a guide rail is fixedly disposed on an outer wall of the other end of the sliding plate 4, the rack 15 is slidably disposed inside the guide rail, the gear 14 is sleeved on one rotating shaft close to the electric push rod 13, the gear 14 is meshed and connected with the rack 15, the electric push rod 13 is fixedly disposed on an outer wall of the guide rail, a sliding strip 17 is fixedly disposed on an output end of the electric push rod, the sliding strip 17 is fixedly connected with the rack 15, the electric push rod 13 is electrically connected with the controller, when a silicon rod is fixed, the electric push rod 13 is started through the controller, so that the output end of the electric push rod drives the sliding strip 17 to retract the sliding strip 17, because the sliding strip 17 is fixedly connected with the rack 15, the rack 15 is slidably connected with the guide rail, the gear 14 is meshed and connected with the rack 15, the electric push rod 13 is driven by the rotating shaft 16, and the rotating shaft 16, the two wire wheels are controlled to extend clockwise, and the rotating shaft 16, and the two wire wheels 14 are connected with the rotating shaft, the rotating shaft 16.
Referring to fig. 2, the lifting assembly 7 includes a cylinder 20 and a pull rod 21, the pull rod 21 is fixedly arranged on the outer wall of the sliding plate 4, the cylinder 20 is fixedly arranged on the outer wall of one of the vertical rails 1, the output end of the cylinder is fixedly connected with the bottom of the pull rod 21, the bottom of the sliding plate 4 is provided with an avoiding groove, the cylinder 20 is electrically connected with the controller, when the cutting line 5 slides back and forth between the four line wheels 16, the cylinder 20 is started through the controller, so that the output end of the cylinder contracts, because the output end of the cylinder is fixedly connected with the sliding plate 4 through the pull rod 21, the sliding plate 4 is slidably connected with the two vertical rails 1, and then the sliding plate 4 is driven to descend, and the silicon rod is cut until the silicon rod is cut off.
Referring to fig. 8, the adjusting assembly 9 includes a plug 22 and a limiting bottom case 23, the limiting bottom case 23 is fixedly disposed at the top of the base, the bottom of the baffle 8 is slidably connected with the inside of the limiting bottom case 23, a plurality of insertion holes 24 are disposed on the outer wall of the limiting bottom case 23, a plurality of pin holes 25 are disposed on the inner wall of the limiting bottom case 23, a through hole 26 for the plug 22 to pass through is disposed at the bottom of the baffle 8, the plug 22 is inserted into one of the pin holes 25, the plug 22 passes through one of the insertion holes 24 and is inserted into the through hole 26, the axial directions of each pin hole 25 and one of the insertion holes 24 are identical, when the single cutting length needs to be adjusted, the plug 22 is manually pulled out, then the baffle 8 is grasped to slide in the limiting bottom case 23 along the bottom thereof, and when the single cutting length is satisfied by sliding, the plug 22 sequentially passes through the insertion holes 24, the through holes 26 and the pin holes 25, so as to limit the bottom of the baffle 8.
Referring to fig. 4, a binding band 27 is arranged between the two support frames, a limiting clamp 28 for winding the binding band 27 is fixedly arranged on the outer wall of the top of one support frame, during cutting, the monocrystalline silicon rod is firstly horizontally placed on the tops of the plurality of conical conveying rollers 3, and after the free end of the monocrystalline silicon rod is attached to the outer wall of the baffle plate 8, one end of the binding band 27 is wound on the limiting clamp 28, so that tightening of the outer wall of the silicon rod is realized, positioning is realized, and the silicon rod is prevented from moving during cutting.
Claims (6)
1. The utility model provides a crystal bar wire-electrode cutting equipment for semiconductor integrated circuit chip, includes base and two vertical rails (1), and two vertical rails (1) are the symmetry and set up the top at the base, its characterized in that:
the silicon single crystal silicon rod cutting machine further comprises a conveying mechanism, a cutting mechanism and a pressing mechanism, wherein the conveying mechanism is arranged at the top of the base and used for conveying a silicon single crystal rod, the conveying mechanism comprises a driving component (2) and a plurality of conical conveying rollers (3), the top of the base is symmetrically provided with two supporting frames, the driving component (2) is arranged on the supporting frames, the conical conveying rollers (3) are rotatably arranged between the two supporting frames through articulated shafts,
the cutting mechanism is arranged at the top of the two vertical rails (1), the cutting mechanism comprises a sliding plate (4), a cutting line (5), a traction assembly (6) and a lifting assembly (7), the sliding plate (4) is arranged at the top of the two vertical rails (1) in a sliding manner, the traction assembly (6) is arranged on the outer wall of the sliding plate (4), the cutting line (5) is sleeved on the traction assembly (6), the lifting assembly (7) is arranged between the sliding plate (4) and one of the vertical rails (1),
the tight mechanism that supports establishes in the top of base in order to be used for supporting the free end of single crystal silicon rod, supports tight mechanism and includes baffle (8) and adjusting part (9), and adjusting part (9) are established at the top of base, and baffle (8) slide to be set up on adjusting part (9), and drive assembly (2), traction assembly (6) and lifting unit (7) are electric connection with the controller.
2. The apparatus according to claim 1, wherein: drive assembly (2) include step motor (10), first belt (11) and a plurality of first synchronizing wheel (12), and every first synchronizing wheel (12) all overlaps and establish on the outer wall of a articulated shaft, and first belt (11) cover is established between a plurality of first synchronizing wheel (12), and step motor (10) are fixed to be established at the top of base, and the tip fixed connection of its output and one of them articulated shaft, step motor (10) are connected with the controller electricity.
3. The apparatus according to claim 2, wherein: traction assembly (6) includes electric putter (13), gear (14), rack (15) and four line wheels (16), four line wheels (16) all set up on the one end outer wall of slide (4) through rotation axis rotation, line of cut (5) are rolled up with the outer wall of four line wheels (16) and are established the connection, the fixed guide rail that is equipped with on the other end outer wall of slide (4), rack (15) slide and set up the inside at the guide rail, gear (14) cover is established on one of them rotation axis that is close to electric putter (13), gear (14) and rack (15) meshing are connected, electric putter (13) are fixed to be established on the outer wall of guide rail, fixed draw runner (17) that is equipped with on its output, draw runner (17) and rack (15) fixed connection, be equipped with on the guide rail and supply runner (17) gliding groove of dodging, wherein all the cover is equipped with second synchronizing wheel (18) on the outer wall of two rotation axes that are located the top, the cover is equipped with second belt (19) between two second synchronizing wheel (18), electric putter (13) are connected with the controller electricity.
4. The apparatus according to claim 3, wherein: lifting unit (7) include cylinder (20) and pull rod (21), and pull rod (21) are fixed to be established on the outer wall of slide (4), and cylinder (20) are fixed to be established on the outer wall of one of them vertical rail (1), the bottom fixed connection of its output and pull rod (21), and the bottom of slide (4) is equipped with dodges the groove, and cylinder (20) are connected with the controller electricity.
5. The apparatus according to claim 4, wherein: adjusting part (9) are including bolt (22) and spacing drain pan (23), fixed the establishing at the top of base in spacing drain pan (23), the bottom of baffle (8) and the inside sliding connection of spacing drain pan (23), be equipped with a plurality of jack (24) on the outer wall of spacing drain pan (23), be equipped with a plurality of pinhole (25) on its inner wall, the bottom of baffle (8) is equipped with through-hole (26) that supply bolt (22) to pass, bolt (22) are inserted and are established the inside of one of them pinhole (25), and bolt (22) pass one of them jack (24) and peg graft with through-hole (26), the axis direction of every pinhole (25) and one jack (24) is all unanimous.
6. The apparatus according to claim 5, wherein: a binding belt (27) is arranged between the two support frames, and a limiting clamp (28) for winding the binding belt (27) is fixedly arranged on the outer wall of the top of one support frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221915203.XU CN217916174U (en) | 2022-07-21 | 2022-07-21 | Crystal bar wire cutting equipment for semiconductor integrated circuit chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221915203.XU CN217916174U (en) | 2022-07-21 | 2022-07-21 | Crystal bar wire cutting equipment for semiconductor integrated circuit chip |
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| Publication Number | Publication Date |
|---|---|
| CN217916174U true CN217916174U (en) | 2022-11-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221915203.XU Active CN217916174U (en) | 2022-07-21 | 2022-07-21 | Crystal bar wire cutting equipment for semiconductor integrated circuit chip |
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| CN (1) | CN217916174U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117532074A (en) * | 2024-01-09 | 2024-02-09 | 常州海特赐仁传动科技有限公司 | Blank cutting equipment and method for ball screw machining |
| CN117984452A (en) * | 2024-03-07 | 2024-05-07 | 浙江驰宇养生科技有限公司 | Stone cutter capable of cutting at multiple angles and cutting method thereof |
-
2022
- 2022-07-21 CN CN202221915203.XU patent/CN217916174U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117532074A (en) * | 2024-01-09 | 2024-02-09 | 常州海特赐仁传动科技有限公司 | Blank cutting equipment and method for ball screw machining |
| CN117532074B (en) * | 2024-01-09 | 2024-04-05 | 常州海特赐仁传动科技有限公司 | Blank cutting equipment and method for ball screw machining |
| CN117984452A (en) * | 2024-03-07 | 2024-05-07 | 浙江驰宇养生科技有限公司 | Stone cutter capable of cutting at multiple angles and cutting method thereof |
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