CN217910102U

CN217910102U - Raw material stirrer for preparing silicon wafer cleaning fluid

Info

Publication number: CN217910102U
Application number: CN202221079765.5U
Authority: CN
Inventors: 张晓光; 梁莹
Original assignee: Tianjin Mingyao Science & Technology Co ltd
Current assignee: Tianjin Mingyao Science & Technology Co ltd
Priority date: 2022-05-07
Filing date: 2022-05-07
Publication date: 2022-11-29
Anticipated expiration: 2032-05-07

Abstract

The utility model belongs to the technical field of stirrers, in particular to a raw material stirrer for preparing silicon wafer cleaning liquid, which comprises a stirring tank and a tank cover covered on the top of the stirring tank, wherein a pressure relief valve is fixedly arranged on the tank cover, a driving motor is fixedly arranged at the middle position of the top of the tank cover, and the output end of the driving motor penetrates through a driving shaft fixedly connected with the tank cover; through the bottom installation air guide inserted bar at the agitator tank, make the inlet end and the outside negative pressure pump of air guide inserted bar be connected, the negative pressure pump can be to air guide in the air guide inserted bar, the first air guide hole exhaust on the air current accessible second agitator is derived, under the high-speed pivoted condition of air stirring shaft, not only first agitator can be with mechanical mode stirring mixing material together with the stirring rake of its tip, first air guide hole and second air guide hole department exhaust gas also can disturb the material, promote the material and mix, thereby shorten the holistic mix time of material.

Description

Raw material stirrer for preparing silicon wafer cleaning fluid

Technical Field

The utility model belongs to the technical field of the agitator, concretely relates to silicon chip washing liquid is raw material agitator for preparation.

Background

The silicon wafer cleaning agent is widely applied to cleaning silicon wafers in the industries of photovoltaics, electronics and the like; because the silicon wafer is polluted in the transportation process, the surface cleanliness is not very high, and the corrosion and the etching which are about to be carried out are greatly influenced, a series of cleaning operations are firstly carried out on the surface of the silicon wafer, the general idea of cleaning is to firstly remove organic contamination on the surface and then dissolve an oxide film, and because the oxide layer is 'contamination and sinking', the epitaxial defect can be caused; then removing particles, metal and the like, and simultaneously passivating the surface of the silicon wafer.

The silicon wafer cleaning liquid is usually formed by mixing and stirring a plurality of raw materials, the existing stirrer usually adopts a screw rod to stir and mix the raw materials in a closed tank body, only a single mechanical mode is adopted for stirring, and in the stirring process, the material mixing speed is relatively slow, so that the defect of long stirring time is caused.

SUMMERY OF THE UTILITY MODEL

The utility model provides a silicon chip washing liquid preparation is with raw material mixing ware to solve the problem that proposes in the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a silicon chip washing liquid preparation is with raw material agitator, closes including agitator tank and lid the cover at agitator tank top, fixed mounting has the relief valve on the cover, just the fixed driving motor that is equipped with in top intermediate position department of cover, driving motor's output runs through cover fixedly connected with drive shaft, the hollow (mixing) shaft of bottom fixedly connected with of drive shaft, fixed first agitator and the second agitator of being equipped with on the week lateral wall of hollow (mixing) shaft, first agitator and second agitator symmetric distribution are in the both sides of hollow (mixing) shaft, through the connecting rod intercommunication on the lateral wall of hollow (mixing) shaft the second agitator, the inside bottom intermediate position department fixed mounting of agitator tank has the air guide inserted bar, the week side of air guide inserted bar is equipped with the air guide seat that is central symmetric distribution, the air guide seat is located the bottom of agitator tank, set up the second air guide hole of evenly distributed on the air guide seat, just the air guide inserted bar communicates with the air guide seat, the input of air guide inserted bar is connected with the connecting pipe, the other end of connecting pipe is connected with the negative pressure pump, the bottom of hollow pressure spring is equipped with the check valve, the top that is used for opening the air guide spring and the equal electric connection of motor (mixing) shaft.

Preferably, the second stirrer is a spindle, and the outer side wall of the second stirrer is provided with first air guide holes which are uniformly distributed.

Preferably, a cavity is formed in the hollow stirring shaft, the first air guide hole is communicated with the cavity through the connecting rod, and the output end of the air guide inserted rod is communicated with the cavity through the spring check valve.

Preferably, the end of the first stirrer is provided with a stirring paddle, and the stirring paddle is rotatably connected with the first stirrer.

Preferably, first agitator and second agitator all are provided with three groups, three groups first agitator, second agitator are central symmetry along circumference and distribute in hollow mixing shaft's the outside, and distribute in proper order from top to bottom along axial direction.

Preferably, the bottom of agitator tank is provided with three groups of supporting legs that are centrosymmetric distribution, the supporting leg with agitator tank fixed connection.

Preferably, the number of the air guide seats is three, and the three air guide seats are distributed in a central symmetry manner.

Preferably, an air pipe is fixedly installed at the end part of the negative pressure pump.

Compared with the prior art, the beneficial effects of the utility model are that:

the utility model discloses an installation air guide inserted bar in the bottom of agitator tank, make the inlet end and the outside negative pressure pump of air guide inserted bar be connected, the negative pressure pump can be to air guide in the air guide inserted bar, first air guide hole exhaust on the air current accessible second agitator is derived, under the high-speed pivoted condition as the hollow (mixing) shaft, not only first agitator can be with mechanical system stirring mixing material together with the stirring rake of its tip, first air guide hole and second air guide hole department combustion gas also can disturb the material, promote the material and mix, thereby shorten the holistic mix time of material.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic view of the present invention;

FIG. 2 is a schematic view of the internal structure of the present invention;

FIG. 3 is a schematic top view of the air guide seat of the present invention;

fig. 4 is a schematic diagram of the distribution structure of the first stirrer and the second stirrer in the present invention.

In the figure: 1. a stirring tank; 11. a can lid; 12. supporting legs; 13. a pressure relief valve; 2. a drive motor; 21. a drive shaft; 3. a hollow stirring shaft; 301. a cavity; 31. a spring check valve; 32. a connecting rod; 4. a first stirrer; 41. a stirring paddle; 5. a second stirrer; 51. a first air-guide hole; 6. an air guide inserted link; 61. a valve guide; 7. a gas guide seat; 71. a second air guide hole; 8. a connecting pipe; 9. a negative pressure pump; 91. the trachea.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides the following technical solutions: the utility model provides a silicon chip washing liquid preparation uses raw material mixing ware, close the cover 11 at the agitator tank 1 top including agitator tank 1 and lid, fixed mounting has relief valve 13 on the cover 11, and the fixed driving motor 2 that is equipped with in top intermediate position department of cover 11, driving motor 2's output runs through cover 11 fixedly connected with drive shaft 21, the bottom fixedly connected with hollow (mixing) shaft 3 of drive shaft 21, fixed being equipped with first agitator 4 and second agitator 5 on the week lateral wall of hollow (mixing) shaft 3, first agitator 4 and the symmetric distribution of second agitator 5 are in the both sides of hollow (mixing) shaft 3, communicate second agitator 5 through connecting rod 32 on the lateral wall of hollow (mixing) shaft 3, fixed mounting has air guide inserted bar 6 in the inside bottom intermediate position department of agitator tank 1, the week side of inserted bar 6 is equipped with the air guide seat 7 that is central symmetric distribution, air guide seat 7 is located the bottom of agitator tank 1, air guide seat 7 is last to have seted up evenly distributed second air guide hole 71, and air guide inserted bar 6 and air guide seat 7 intercommunication, the input of inserted bar 6 is connected with connecting pipe 8, the other end of connecting pipe 8 is connected with negative pressure power supply pump 9, the bottom that hollow spring 3 is equipped with the valve spring drive spring 31 is used for the top of opening of check valve spring 3 and the outside is connected with the motor outside of the air guide bar 31, the valve spring 21.

In this embodiment, the air guide insertion rod 6 is installed at the bottom of the stirring tank 1, the air inlet end of the air guide insertion rod 6 is connected with the external negative pressure pump 9, meanwhile, three sets of air guide seats 7 are installed on the periphery of the air guide insertion rod 6, the negative pressure pump 9 can guide air into the air guide insertion rod 6 and supply air into the air guide seats 7, so that the air guide seats 7 discharge air flow through the second air guide holes 71 to disturb the material in the stirring tank 1 and promote material mixing, the hollow stirring shaft 3 is driven to rotate by the driving shaft 21, a spring check valve 31 matched with the valve guide rod 61 is arranged at the bottom of the hollow stirring shaft 3, when the valve guide rod 61 at the head end of the air guide insertion rod 6 is inserted into the spring check valve 31 at the bottom of the hollow stirring shaft 3, the spring check valve 31 is opened to conduct the air guide insertion rod 6 to the cavity 301 inside the hollow stirring shaft 3, at the moment, the air flow can also be discharged and guided out through the first air guide holes 51 on the second stirrer 5, so that when the hollow stirring shaft 3 rotates at a high speed, not only the first stirrer 4 together with the stirring paddle 41 at the end thereof can stir the mixed material, but also can accelerate the mixed material mixing at the mixed material 71, and the whole discharged time can be shortened.

Specifically, the second stirrer 5 is a spindle, the outer side wall of the second stirrer 5 is provided with first air guide holes 51 which are uniformly distributed, the spindle-shaped second stirrer 5 has lower resistance in the material, and the first air guide holes 51 which are uniformly distributed can generate air flow in a large area, so that more air bubbles are mixed in the material, and uniform mixing of the material is accelerated.

Specifically, a cavity 301 is formed in the hollow stirring shaft 3, the first air guide hole 51 is communicated with the cavity 301 through a connecting rod 32, and the output end of the air guide inserting rod 6 is communicated with the cavity 301 through a spring check valve 31.

Specifically, the tip of first agitator 4 is equipped with stirring rake 41, and stirring rake 41 rotates with first agitator 4 to be connected, and when first agitator 4 at the horizontal direction pivoted in-process, stirring rake 41 also can rotate on first agitator 4 to enlarged the stirring scope of first agitator 4, accelerated material mixing speed.

Specifically, first agitator 4 and second agitator 5 all are provided with three groups, and three first agitators 4 of group, second agitator 5 are central symmetry along circumference and distribute in the outside of hollow mixing shaft 3, and distribute in proper order from top to bottom along the axial direction, through three first agitators 4 of group and second agitator 5 of distributing about setting up, can increase the holistic stirring scope of agitator to accelerate the stirring speed.

Specifically, agitator tank 1's bottom is provided with three groups and is the supporting leg 12 of central symmetry distribution, supporting leg 12 and agitator tank 1 fixed connection, and supporting leg 12 is used for supporting agitator tank 1, keeps agitator tank 1 stability under operating condition.

Specifically, air guide seat 7 sets up to three, and three air guide seat 7 is central symmetry and distributes, and the air current bubble that three air guide seat 7 of group formed can cover 1 bottom space of agitator tank of large tracts of land to accelerate material mixing speed.

Specifically, negative pressure pump 9's tip fixed mounting has trachea 91, and wherein, trachea 91 is used for admitting air in to negative pressure pump 9, consequently can be through the connecting pipe 8 air current of drum into in to agitator tank 1 to accelerate the mixing rate of material, after the mixture finishes, can directly change the junction of connecting pipe 8 and negative pressure pump 9, make connecting pipe 8 be connected with the collection cylinder.

The utility model discloses a theory of operation and use flow: when the stirring device works, a plurality of raw materials of cleaning liquid are placed into the stirring tank 1 in advance, then the tank cover 11 is covered, the sealing state of the inside of the stirring tank 1 is kept, the negative pressure pump 9 can guide air into the air guide insertion rod 6 and supply air into the air guide seat 7, so that the air guide seat 7 discharges air flow through the second air guide hole 71 to disturb the materials in the stirring tank 1 and promote the mixing of the materials, the hollow stirring shaft 3 is driven to rotate through the driving shaft 21, the bottom of the hollow stirring shaft is provided with the spring check valve 31 matched with the valve guide rod 61, when the valve guide rod 61 at the head end of the air guide insertion rod 6 is inserted into the spring check valve 31 at the bottom of the hollow stirring shaft 3, the spring check valve 31 is opened to enable the air guide insertion rod 6 to be communicated with the cavity 301 in the hollow stirring shaft 3, at the moment, the air flow can also be discharged through the first air guide hole 51 on the second stirrer 5 and the pressure relief valve, so that when the hollow stirring shaft 3 rotates at a high speed, not only the first stirrer 4 but also can stir the stirring paddle 41 at the end of the first air guide hole 51 and the second air guide hole 71 to discharge the air flow, so as to accelerate the mixing of the materials, the mixing tank 1, the whole of the mixing tank can be connected with the connecting pipe 13, and the mixing tank 1, after the pressure of the mixing tank is released, and the connecting pipe 8, so that the pressure of the mixing tank can be directly connected with the mixing tank 1, and the mixing tank 8.

In the description of the present invention, it should be noted that the terms "vertical", "upper", "lower", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A raw material stirrer for preparing silicon wafer cleaning fluid is characterized in that: including agitator tank (1) and lid close tank cover (11) at agitator tank (1) top, fixed mounting has relief valve (13) on tank cover (11), just the fixed driving motor (2) that is equipped with of top intermediate position department of tank cover (11), the output of driving motor (2) runs through tank cover (11) fixedly connected with drive shaft (21), the bottom fixedly connected with hollow mixing shaft (3) of drive shaft (21), fixed being equipped with first agitator (4) and second agitator (5) on the week lateral wall of hollow mixing shaft (3), first agitator (4) and second agitator (5) symmetric distribution are in the both sides of hollow mixing shaft (3), communicate through connecting rod (32) on the lateral wall of hollow mixing shaft (3) second agitator (5), the fixed mounting of the inside bottom intermediate position department of agitator tank (1) has air guide inserted bar (6), the air guide inserted bar (6) all sides are equipped with air guide seat (7) that are central symmetric distribution, air guide seat (7) are located the air guide tank (1), air guide seat (7) is even is seted up with air guide bar (6) and air guide seat (7), air guide bar (6) and input end (71) and air guide bar (6) are connected with the connecting pipe (7), the other end of connecting pipe (8) is connected with negative pressure pump (9), the bottom of hollow mixing shaft (3) is equipped with spring check valve (31), the top of air guide inserted bar (6) is equipped with and is used for opening valve guide arm (61) of spring check valve (31), driving motor (2) and negative pressure pump (9) all with external power source electric connection.

2. The raw material stirrer for silicon wafer cleaning liquid preparation according to claim 1, characterized in that: the second stirrer (5) is a spindle body, and first air guide holes (51) which are uniformly distributed are formed in the outer side wall of the second stirrer (5).

3. The raw material stirrer for silicon wafer cleaning liquid preparation according to claim 2, characterized in that: cavity (301) have been seted up to hollow mixing shaft (3) inside, first air guide hole (51) with cavity (301) are passed through connecting rod (32) intercommunication, air guide inserted bar (6) output is passed through spring check valve (31) with cavity (301) intercommunication.

4. The raw material stirrer for silicon wafer cleaning liquid preparation according to claim 1, characterized in that: the tip of first agitator (4) is equipped with stirring rake (41), stirring rake (41) with first agitator (4) rotate to be connected.

5. The raw material stirrer for silicon wafer cleaning liquid preparation according to claim 1, characterized in that: first agitator (4) and second agitator (5) all are provided with three groups, three groups first agitator (4), second agitator (5) are central symmetry along circumference and distribute in the outside of hollow mixing shaft (3), and distribute from top to bottom along axial direction in proper order.

6. The raw material stirrer for silicon wafer cleaning liquid preparation according to claim 1, characterized in that: the bottom of agitator tank (1) is provided with three groups of supporting legs (12) that are central symmetry and distribute, supporting leg (12) with agitator tank (1) fixed connection.

7. The raw material stirrer for silicon wafer cleaning liquid preparation according to claim 1, characterized in that: the number of the air guide seats (7) is three, and the three air guide seats (7) are distributed in a central symmetry manner.

8. The raw material stirrer for silicon wafer cleaning liquid preparation according to claim 1, characterized in that: an air pipe (91) is fixedly arranged at the end part of the negative pressure pump (9).