CN217909777U

CN217909777U - Gas treatment equipment

Info

Publication number: CN217909777U
Application number: CN202221587072.7U
Authority: CN
Inventors: C·H·阿普尔加思; G·黎; L·丹东尼奥; M·施洛特贝克
Original assignee: Entegris Inc
Current assignee: Entegris Inc
Priority date: 2021-06-23
Filing date: 2022-06-22
Publication date: 2022-11-29
Anticipated expiration: 2032-06-22
Also published as: JP2024526183A; EP4359107A1; TW202332499A; TWI847164B; CN115501747A; WO2022271464A1; KR20240025614A; US20220410061A1

Abstract

The present application relates to gas treatment devices. Gas treatment systems including preheaters for treating a flow of gas, flowing the gas to a contact medium (e.g., a purification medium, a catalyst, a sorbent), and related methods are described.

Description

Gas treatment equipment

Technical Field

The present disclosure relates to gas treatment systems including preheaters for treating gases by flowing the gases to contact a medium, and related methods.

Background

Gases are used as raw materials or processing materials (collectively, "raw material gases") for many different commercial and industrial uses, including in the manufacture of semiconductors and microelectronic devices.

To prepare the gases used in the process, the gas stream may be treated or treated in a variety of different ways to produce a variety of different effects on the gases. The gas may be heated, cooled, purified, or filtered before the raw material gas is used in the manufacturing process.

The gas purification system is adapted to supply a consistent flow of highly purified raw material gas to a piece of manufacturing equipment (e.g., a semiconductor or microelectronic processing tool). Example gases include nitrogen, argon, helium, hydrogen, ammonia, carbon dioxide, clean dry air ("CDA"), and oxygen, each in highly purified form.

Techniques for purifying a gas stream may involve contacting the gas with a media material that may remove a quantity of impurities from the gas. Impurities are removed from a gas stream by some techniques by sequestering the impurities, for example, by adsorbing the impurities on the surface of an adsorbent (i.e., an "adsorbent media"). By other techniques, a catalyst can be used to chemically convert the impurities to derivative compounds that are considered more desirable or less undesirable than the original impurities.

Manufacturers have designed highly specialized equipment for performing gas purification processes. A system for purifying a gas will include a receptacle (vessel) that holds one type of media (e.g., a purification media), such as an adsorbent or a catalyst, and attached flow control equipment that directs the flow of raw material gas through the vessel to contact the media. Controls are included to control process conditions such as temperature, pressure and flow rate.

Many gas purification systems include a preheater for preheating the gas prior to flowing through the vessel containing the medium. For example, to improve the efficiency of the catalytic purification process, the gas may be preheated prior to contacting the catalyst. Equipment for these types of catalytic processes includes a vessel containing the catalyst, a flow control for flowing the gas through the catalyst, and a preheater to heat the gas to an elevated temperature before the gas flows to contact the catalyst.

The gas preheater may also be useful in an adsorption gas purification system. In these systems, adsorption purification is performed by flowing a gas to contact an adsorption media. Flowing the gas through the adsorbent media causes the impurities to be adsorbed onto the adsorbent media. After a period of use, impurities can accumulate on the adsorbent media. After sufficient accumulation, the adsorbent media becomes less effective and can be "regenerated" by removing accumulated impurities from the media.

By passing the heated gas ("regeneration gas") through the adsorbent media in the original vessel, the regeneration process can be conducted with the adsorbent media remaining in the same vessel as the media contained during the purification step. The regeneration gas contacts the surface of the adsorption media and adsorbed impurities that have accumulated on the surface of the media will be desorbed from the surface and carried away from the adsorption media by the regeneration gas.

In order to effectively regenerate the adsorbent media with the regeneration gas, the regeneration gas is typically preheated prior to contacting the adsorbent media. The equipment required for the regeneration process includes a vessel containing the adsorbent media, a flow control for flowing a regeneration gas through the adsorbent media during the regeneration step, and a preheater for heating the regeneration gas prior to flowing the regeneration gas through the adsorbent media.

SUMMERY OF THE UTILITY MODEL

Conventional preheaters for gas purification systems are separated from the vessel containing the media ("media vessel"). Some preheater designs (as "stand-alone" designs) place the preheater at a location spaced from the media container and connect the preheater to the media container by an extended gas flow conduit. Other designs place the preheater near the media container, possibly as part of a common structure ("integrated" designs), but these designs do not provide any size advantage, meaning that the size of the preheater with an "integrated" design is the same as the size of the "stand-alone" preheater. Furthermore, preheaters of the "integrated" design do not allow for the sharing of thermal energy between the preheater and the media container, except by flowing heated gas from the preheater to the media container.

The following description relates to gas treatment equipment including media containers and preheaters of novel and inventive design. In addition to the heat exchanged by the preheat gas flowing from the preheater to the media container, the novel design also allows the preheater to share thermal energy with the media container through the preheater and the structure of the media container (e.g., through the side walls of the structure). Additionally or alternatively, the novel design allows for a reduction in the size of the preheater, or a reduction in the overall size of the combined preheater and media container.

The gas treatment plants described typically include a preheater for preheating the gas stream prior to its flow to subsequent treatment operations, such as operations in which the gas stream is contacted with a medium to bring the gas into contact with the medium. For example, the media may be a catalyst or an adsorption media.

A series of different types of gas treatment operations involve contacting a gas with another material, generally referred to herein as a "medium. The medium can be any of a variety of materials, specific examples being solid materials (i.e., as opposed to liquid or gaseous materials), which can be in a range of forms (e.g., particles, granules of solid (non-liquid, non-gaseous) blocks having a porous morphology and of various sizes), and can serve as catalysts, adsorbents, or other uses when in contact with a gas.

When treating a gas by contacting the gas with a medium such that the medium interacts with the gas, the process may require or may be improved by operating the process at an elevated temperature, by heating the gas, the medium, or both. For example, a process of purifying a raw material gas by a catalytic technique is generally performed at a high temperature. Also, the adsorbent media regeneration process for adsorption-type purification techniques is typically performed at high temperatures. For these methods, the gas of interest (raw material gas or regeneration gas) is preheated before the gas is contacted with the medium of interest (catalyst or adsorption medium).

During the process of contacting the gas with the medium at elevated temperature to allow the medium to interact with the gas, preferred conditions include a uniform temperature distribution throughout the process (meaning throughout the bed of the medium). Preferably, the vessel containing the medium and through which the gas flows will be controlled to the desired process temperature, and the entire vessel and all locations of the vessel, gas and medium will be maintained at the same desired process temperature. The thermal gradient throughout the vessel is preferably minimized to produce high process efficiency.

In a typical gas purification system design, the gas preheater is a completely separate structure from the vessel containing the medium (e.g., purification medium such as a catalyst or sorbent). An individual (stand-alone) preheater is a piece of independent process equipment that requires separate flow control, separate temperature and pressure control and sensors, separate heating and insulation equipment, and a completely separate physical containment structure. A separate preheater must be built to control the gas flow at the same pressure as the pressure of the medium vessel, and the preheater must contain heating elements and insulation that are completely separate from the heating elements and insulation of the medium vessel.

According to a modified version of the independent design, the gas preheater may be built such that the output of the preheater is close to the input of the media container. The preheater is physically arranged "in line" with the media container. The gas enters the preheater and flows through the preheater at a location completely upstream of and in line with the media container. The preheater and the media container are maintained in substantially separate physical configurations. The two physical structures do not share any substantial common structure and the two separate structures do not allow a large (useful) amount of thermal energy exchange, which means that the preheated gas flows from the preheater into the media container, except in the case.

The present application describes gas treatment devices that include a preheater integrated into the physical structure of a media container in a manner that allows the preheater to share space with the media container or to share thermal energy with the media container through conductive heat transfer, or both. The described design allows a large amount of thermal energy to be transferred from the preheater to the media container by means of heat conduction through the two-dimensional physical surfaces of the preheater and the media container, in particular through the two-dimensional side walls of the preheater and the media container.

An example of a gas purification apparatus as described includes a media vessel having an inlet at one end, and an outlet at an opposite end, and a length and volume extending between the two ends. According to an example apparatus, the preheater is located along at least a portion of a length of the media container. Further, for example, the preheater may contact the media container along a length of the media container, and the contacting allows thermal energy to be transferred by heat conduction between the preheater and the media container. An example apparatus includes a preheater positioned along a length of a media container including one end of the media container and a portion extending from the end of the media container to an opposite end along the length of the media container.

Using the example design, the surface of the preheater along the length of the preheater is in contact with or shared with the surface of the media container along the length of the media container. When two surfaces are shared or in thermal contact, the combined structure can potentially be designed with an overall reduction in physical components. The reduced number of physical components may allow for cost savings, may allow for a reduction in the overall size (particularly the length) of the two combined components, or both.

An example preheater design includes an interior volume that includes at least one portion that is annular in shape. The annular preheater volume may provide intimate contact between gases flowing through the annular preheater volume and the heating elements contacting the outer surface of the preheater. Intimately contacting the gas flowing through the annular volume of the preheater with the heating elements may improve the efficiency with which the heating elements heat the gas, which may potentially allow the use of a preheater of reduced size (e.g., having a smaller internal volume or smaller overall space requirements as compared to other preheater designs).

Examples of the annular interior volume of the preheater may include one or more interior surfaces that direct the gas stream through the annular volume. One example is a channel at the interior surface of the annular volume that directs the gas to follow a helical path extending along the length of the annular volume. The spiral passage, which is part of the annular volume of the preheater, can force the gas flowing through the preheater to flow around the circumference of the preheater and gradually (in a spiral path) along the length of the preheater. The annular path distributes the heat energy evenly through the preheater in the gas, which means that the heat energy is efficiently and evenly transferred from the heating elements in contact with the preheater to the gas flow within the inner volume of the preheater. Efficient transfer of thermal energy to the gas produces a gas stream from the preheater that is highly uniform in temperature, has little or no variation in the temperature inside the gas, and has a reduced or substantially eliminated thermal gradient inside the gas as it exits the preheater.

In one aspect, the present disclosure relates to a gas treatment apparatus comprising: a media container comprising a media container inlet end comprising a media container inlet, a media container outlet end comprising a media container outlet, a media container sidewall extending a length between the inlet end and the outlet end, and a media container interior extending between the inlet end and the outlet end; and a gas preheater positioned along the length of the media container sidewall.

In another aspect, the present disclosure is directed to a method of using a gas treatment apparatus. The apparatus includes: a media container comprising a media container inlet end comprising a media container inlet, a media container outlet end comprising a media container outlet, a media container sidewall extending a length between the inlet end and the outlet end, a media container interior extending between the inlet end and the outlet end, and media contained in the interior; a gas preheater positioned along the length of the media container sidewall; and a heating element covering at least a portion of the preheater. The method comprises the following steps: flowing a gas through the gas preheater to preheat the gas, and passing the preheated gas through the media vessel interior and into contact with the media.

Drawings

Fig. 1 illustrates a prior art arrangement of a preheater and a media container.

Fig. 2 illustrates a prior art arrangement of a preheater and media container.

FIG. 3 illustrates a gas treatment system of the present specification.

FIG. 4 illustrates a gas treatment system of the present description.

Fig. 5A and 5B illustrate examples of preheaters including internal flow control surfaces.

All figures are schematic, illustrative and not necessarily drawn to scale.

Detailed Description

A gas treatment plant for treating a gas stream and comprising a preheater is described below. Methods of using the apparatus for treating a gas by heating ("preheating") the gas prior to performing subsequent treatment operations on the gas stream are also described.

Equipment and techniques for treating a gas stream may involve contacting the gas stream with a medium. To purify the gas, the gas contains impurities, and the medium may reduce the amount of impurities in the gas during contact of the medium with the gas.

With some gas purification techniques, impurities are removed from a gas stream by sequestering the impurities, for example, by adsorbing the impurities on the surface of an adsorbent material. The gas flows to contact the solid adsorbent material and impurities present in the gas are attracted to and adsorbed onto the surface of the adsorbent to remove the impurities from the gas. A variety of adsorbent materials are known. The adsorbent can be of various sizes and shapes, such as small particles, granules, pellets, shells, cubes, monoliths, and the like, having a desired amount of surface area per volume.

The composition of the adsorbent material of the gas purification process may also vary and may be selected based on the type of gas being treated, the type of impurities, the desired removal efficiency, or other factors. Examples of adsorbents known to be useful for adsorbing impurities from gas streams include: activated carbon, zeolite materials, "metal-organic framework" (MOF) sorbents, getters such as zinc vanadium and zinc aluminum getters, and the like, as well as other sorbents.

The types of gases that contain impurities and that can be treated using adsorbents to remove impurities include nitrogen, argon, helium, hydrogen, ammonia, carbon dioxide, clean dry air ("CDA"), and oxygen, among others.

During use of the adsorption gas purification system, a certain amount of impurities will accumulate on the adsorbent. Accumulated impurities may be removed from the adsorbent by a "regeneration" step, and the adsorbent may then be used again to purge the gas. In the regeneration step, a gas stream ("regeneration gas") is passed through the adsorbent at an elevated temperature. As described herein, the high temperature is generated by a preheater.

The regeneration gas may be any gas that is effective to remove accumulated impurities from the adsorbent media during the regeneration step. The composition of the regeneration gas used to remove impurities from the adsorbent media depends on factors including the type of raw material gas being treated with the adsorbent media. For the example system, the regeneration gas that may be used to remove accumulated impurities from the adsorption media used to remove impurities from a particular type of raw material gas (identified in parentheses) includes the following regeneration gases: nitrogen/hydrogen mixture (nitrogen), argon/hydrogen mixture (argon), helium/hydrogen mixture (helium), hydrogen (hydrogen), nitrogen/hydrogen mixture (ammonia), nitrogen/hydrogen mixture (carbon dioxide), clean dry air (clean dry air), oxygen (oxygen).

The gas purification step may use a catalyst to reduce or remove a certain amount of impurities from the gas by different gas purification techniques. By these techniques, impurities contained in the gas can be chemically converted, e.g., chemically reduced or chemically oxidized, by using a catalyst to chemical compounds that are more desirable or less undesirable than the original impurities. Example catalysts are effective for chemical reduction of Nitrogen Oxides (NO) _x ) To oxidize carbon monoxide or to oxidize hydrocarbons (e.g., methane) to form water and carbon dioxide. With these techniques, the gas flows to contact the catalyst material and the impurities (e.g., nitrogen oxides, carbon monoxide, or hydrocarbons, such as methane) are chemically converted (e.g., chemically reduced or chemically oxidized) to chemical compounds that are preferred over the original impurities.

The composition of the catalyst of the gas purification process may also vary and may be selected based on the type of gas being treated, the type of impurities contained in the gas being treated, the desired efficiency of removing the impurities, and other factors. Examples of catalysts known to be useful for converting impurities contained in gas streams include: rhodium, platinum, palladium, and the like.

A gas treatment apparatus for treating a gas by flowing the gas through a media bed includes a vessel containing a medium ("media vessel") and a flow control adapted to direct the flow of the gas through the medium. The apparatus also contains a preheater for heating ("preheating") the gas prior to its entry into the media vessel.

According to an example of the described gas treatment apparatus, a useful apparatus includes a media container having an inlet end, an outlet end, a length extending between the ends, and a sidewall extending along the length and defining an interior volume of the media container. The side walls may be made of a rigid thermally conductive material (e.g., metal).

Further, according to an example apparatus, a portion of the preheater is positioned adjacent to an outer surface of the media container along at least a portion of the length of the media container. A useful or preferred preheater may comprise a two-dimensional surface in thermal contact with the outer two-dimensional surface of the media container.

A preheater that is "in thermal contact" with the media container refers to a preheater having a two-dimensional surface (e.g., a sidewall) that is positioned sufficiently close to the two-dimensional surface (e.g., a sidewall) of the media container to allow a useful amount of thermal energy to be transferred from the surface of the preheater to the surface of the media container; during use of the preheater to supply the preheated gas to the media container, the useful amount of thermal energy may be more than a negligible amount of thermal energy transferred from the preheater to the media container. The amount of thermal energy that can be transferred between two surfaces will depend on the distance or amount of contact between the two surface structures, the composition and thermal conductivity of the two surface structures, and the composition and form of any (solid, liquid, gaseous) material disposed between the two surfaces.

To provide a useful amount of thermal contact between the preheater and the media container, the example gas treatment apparatus can be configured such that the two-dimensional heat conducting surface of the sidewall of the preheater is in direct contact with the two-dimensional heat conducting surface of the sidewall of the media container. The sidewall structure of the preheater may be identified as a separate physical structure which is not an essential component of the media container, and the two different sidewall structures are in direct physical contact with each other to allow efficient transfer of thermal energy from the preheater sidewall surface to the surface of the media container sidewall by thermal conduction.

Alternatively, separate sidewalls of each of the media container and the preheater (which may be separately identifiable and associated with only one of the media container or the preheater) may be separated by a small distance or space and still be considered in thermal contact. The space between the two side walls may be empty (i.e., filled with air) or filled with a thermally conductive material. The two sidewall structures may have opposing surfaces that face each other a distance small enough to allow the desired heat transfer between the structures. Example distances may be relatively small, such as less than 10 millimeters, or less than 5, 2, or 1 millimeter. The presence of a gas or solid material (e.g., air or a thermally conductive solid) between the two sidewall surfaces may allow for efficient heat transfer between the two sidewalls.

Alternatively, the gas treatment plant as described may be constructed in such a way that the side walls of the media container and the side walls of the preheater are made of a single physical structure. The single sidewall structure serves to define the interior of the media container on one side of the sidewall (the "interior" of the single sidewall) and also serves to define the interior of the preheater on the opposite side of the sidewall (the "exterior" of the single sidewall).

In contrast, if the arrangement of the media container and the sidewall structure of the preheater does not allow a useful amount of thermal energy to be transferred from the preheater to the media container during the gas treatment step as described herein, then the two structures are considered not to be in thermal contact with each other. Various designs of prior gas treatment systems place the preheater and the media container in non-thermal contact.

For example, referring to FIG. 1, the "stand-alone" preheater 10 is a separate device and is positioned a distance away from the media container 20. The two units are connected only by a gas flow conduit that passes the preheated gas from the outlet of the preheater 10 to the inlet of the media container 20. The preheater 10 includes an interior volume that is heated using a heater 12 (not explicitly shown) and insulated by an insulating material 18, each of the heater 12 and insulating material 18 typically being located at an outer peripheral surface of the preheater structure.

The gas enters the inlet 14, passes through the interior volume of the preheater 10, including through the annular volume at the periphery adjacent the heater 12. The internal volume of the preheater 10 is maintained at an elevated temperature using the heater 12 to achieve the desired increase in gas temperature. The preheated gas 22 flows out of the outlet 16 and then flows through a conduit (not shown) connected to the input 30 of the media container 20. The media container 20 includes an interior containing a media 26 and heated and insulated by a heater 24 (not explicitly shown) and an insulating material 28, each of the heater 24 and the insulating material 28 being located at a periphery of the media container 20 to surround the media container 20. The exchange of thermal energy from the preheater 10 to the media container 20 is limited to the exchange that occurs with the flow of the preheated gas 22 from the preheater 10 to the media container 20. The physical structure of the media container 20 is not in thermal contact with the physical structure of the preheater 10.

Referring to FIG. 2, a gas treatment system 32 is schematically illustrated that includes a media vessel 40 and a preheater 42 located "upstream" of an inlet 46 of the media vessel 40. "upstream" refers to a system in which the stream is first directed through a preheater and then through the media vessel 40. As shown, the preheater 42 is a device positioned a distance from the media container 40 that is in line with the media container 40 and the preheater is separated from the media container by the clearance space 50. The preheater 42 is connected to the inlet 46 of the media container 44 by an interstitial space 50 (containing a thermocouple 52), and the preheated gas enters the interstitial space 50 through the outlet 48 of the preheater 42. In the design of the preheater and media container system, the preheater 42 is said to be "integrated" with the media container.

The preheater 42 includes an interior volume 34 and a filter 36 that are heated using heaters (not shown) that may be located on an exterior surface of the preheater 42 and insulated by the insulating material 38, each of the preheater 42 and the insulating material 38 typically being located at the periphery of the preheater 42. During use of the preheater 42, the gas stream enters the inlet 44 and passes through the interior volume 34 of the preheater 42, including through the annular volume at the periphery adjacent the heater. The heater heats the interior volume 34 to an elevated temperature to raise the temperature of the gas flowing through the volume 34. The preheated gas 60 flows out of the outlet 48, through the interstitial space 50, and then into the media container 40 through the inlet 46. The media container 40 includes an interior containing media 66 and heated and insulated by a heater (not shown) and insulating material 38, each of the preheater and insulating material 38 surrounding an exterior surface of the media container 40.

As the preheated gas 60 flows from the preheater 42 to the media container 40, heat energy exchange occurs between the media container 40 and the preheater 42. The media container 40 is not in thermal contact with the preheater 42. The media container 40 and "integrated" preheater 42 are configured such that the outlet end of the preheater 42 is positioned in-line with the inlet 46 of the media container 40. No portion of the preheater 42 extends along any portion of the length of the media container 40 and the two-dimensional surface of the sidewall (68) of the preheater is not in thermal contact with the two-dimensional surface of the sidewall (70) of the media container.

As illustrated, the side wall 70 of the media container 40 and the side wall 68 of the preheater 42 may be constructed from a single piece of material that extends along the length of both the media container 40 and the preheater 42. The use of this single piece of material as a sidewall structure for both the media container and the preheater does not result in thermal contact between the media container and the preheater at least because the amount of thermal energy that can be transferred along the material, through the thickness of the material, and along the length of the material is negligible.

In contrast to such previous designs, the example preheater of the present specification includes a physical structure in thermal contact with the media container, e.g., on a two-dimensional surface of the structure. The thermal contact between the media container and the preheater allows a useful amount of thermal energy to be transferred from the preheater to the media container by heat conduction.

To achieve this thermal energy transfer, the two-dimensional surface portion of the preheater is located physically adjacent to the outer two-dimensional surface of the media container along the length of the media container, and may preferably be in direct physical contact with the outer surface of the media container. Preferably, the preheater side walls and the media container side walls are each made of a material with good thermal conductivity, such as metal.

According to an example gas treatment plant design, the preheater includes an internal volume extending along the length of the media vessel. More specifically, the preheater comprises a total internal volume through which gas flows during use, the total internal volume comprising an annular portion ("annular volume"). The annular volume extends along a portion of a preheater positioned along an outer surface of the media container over at least a portion of a length of the media container between the media container inlet and the media container outlet.

In an example preheater, the total volume inside the preheater also includes a non-annular (e.g., cylindrical) portion that is located adjacent to and in line with the outlet end of the media vessel. This portion of the total internal volume of the preheater is referred to herein as the "end volume" of the preheater. Example end volumes may have a cross-sectional shape and size (e.g., diameter) approximately equal to the cross-sectional shape and size of the media container, and may have a length extending in a direction parallel to the length of the media container.

Depending on the use of the preheater, the preheater may include one or more passages that allow the gas stream to pass between an external location and the preheater internal volume (which may be an end volume or an annular volume). These passages extend through the outer side or end wall of the preheater and may be referred to as "passages", "inlets" or "outlets". However, the passages typically allow gas to flow into or out of the preheater in either direction, and whether the passages are referred to as "inlets" or "outlets", the passages may serve as either inlets or outlets during the different process steps performed by the gas treatment plant in which the preheater is used.

In some types of example preheaters, the preheater may include two passes. One passage may be positioned to allow gas flow between the annular volume of the preheater and an external location. Different passages may be positioned to allow gas flow between the end volume of the preheater and an external location.

In an alternative example, the preheater may include only one passageway positioned to allow gas to flow between the annular portion of the preheater and an external location. This example does not require a second pass directly between the end volume of the preheater and an external location.

In an example apparatus, placing the preheater outside of the media container along a portion of the length of the media container may allow for useful or advantageous features of the apparatus. These may include one or more of the following: the effective performance of the preheater, for example, in terms of gas flow and efficiency and uniformity of heating the gas; reducing the requirements on supporting equipment, such as multiple individual heating devices and insulating materials for the combination of pre-heaters and media containers; structural advantages based on reduced size and space requirements of the design of the present specification; or milder operating conditions of the gas flowing through the preheater, such as a reduction in the pressure or flow rate of the regeneration gas that must flow through the preheater.

In general, a preheater as described can be implemented with improved efficiency when used for preheating the gas delivered to the media container. The preheater is located along the length of the media container at the outer surface of the media container and is preferably in thermal contact with the media container, providing an efficient way to heat the gas flowing through the preheater while heating at least a portion of the media container and the media contained therein.

As one advantage, the location of the preheater along the length of the media container, and the location of the preheater and the media container along the shared length of the gas treatment device, may allow for a reduction in the overall size of the preheater or device. The total combined volume of the preheater and the media vessel can be substantially reduced relative to the total combined volume of a comparable media vessel and an "independent" preheater or a comparable media vessel and an "integrated" preheater.

In addition, the positioning of the preheater at the outer surface of the media container along the length of the media container may allow for a reduction in the size and number of total heating elements and insulation required to heat and insulate the preheater and the media container. Both the "independent" preheater design and the "integrated" preheater design (see fig. 1 and 2) do not achieve any significant amount of heat transfer between the media container and the preheater except for the flow of heated gas between the preheater and the media container. Instead, the preheater as described allows heat energy to flow from the preheater into the media container by means of heat conduction through the preheater and the side walls of the media container. The heating element and the insulating material are used to heat and insulate the preheater, are positioned in thermal contact with the media container, and are used to simultaneously heat and insulate both the preheater and the media container (at least a portion of the media container).

In addition, the positioning of the preheater at the exterior surface of the media container along the length of the media container provides a single structure of compact (effective) overall size, which includes a reduced overall length of the two combined preheater and media container structures as compared to previous designs. The total combined length of the preheater and media vessel of the present description can be substantially reduced relative to the total combined length of a comparable media vessel and an "integrated" preheater having the same processing capacity (e.g., comprising the same size of media vessel).

In some gas treatment plants, the volume of the preheater relative to the media container may be less than the volume of the relative volumes of the preheater and media containers of different designs, such as the "stand-alone" design or the "integrated" design shown at fig. 1 and 2. In example designs, the volume of the preheater of the gas treatment system of the present description (e.g., as illustrated at fig. 3 or 4) may be less than 50%, 40%, 30%, 20%, or 10% of the volume of the media container.

Similarly, depending on the application of the gas treatment plant, the flow rate (by volume) of the gas stream through the preheater may be reduced, or the pressure reduced, or both, relative to the flow rate (by volume) of the gas through the media vessel of the gas treatment plant, as compared to the gas stream required by a different design of preheater (e.g., "stand-alone" preheater or "integrated" preheater). For example, the preheater of the present specification for preheating the regeneration gas may perform effectively during the regeneration step, using a significantly smaller flow rate per volume of regeneration gas through the preheater than is required for the preheater of a "stand-alone" design or the preheater of an "integrated" preheater for preheating the regeneration gas.

One specific example of a gas treatment plant as described is a gas purification system comprising an adsorbent contained in a media vessel. See fig. 3. To provide high purity of the raw material gases used in commercial manufacturing processes, the process may begin with a highly purified source of raw material gases ("raw material gases") that are typically contained in and delivered from storage containers. The raw material gas is treated at some point in the manufacturing process by an additional (final) purification step before it is delivered from the storage container for use in the manufacturing process. By conventional techniques, this step is performed by flowing the raw material gas from the storage vessel into and through a gas purification system containing the adsorbent media in particulate form, i.e., a "bed" of adsorbent media particles. The gas stream is caused to pass through the bed of adsorbent media particles so that the gas contacts the surfaces of the adsorbent media. When the raw material gas comes into contact with the surface of the adsorption medium, impurities present in the raw material gas at an extremely low content are adsorbed by the adsorption medium and removed from the raw material gas.

During the period of use of the gas purification system, impurities removed from the raw material gas will adsorb onto the adsorption medium and gradually accumulate on the adsorption medium. After sufficient accumulation, the adsorbent media becomes packed with impurities and less efficient. The media may be replaced or "regenerated". Media regeneration refers to a process of removing a certain amount of accumulated impurities from the media to allow the media to be reused for removing impurities from the raw material gas.

By passing the heated gas ("regeneration gas") through the adsorbent media in the vessel, the regeneration process can be conducted with the adsorbent media retained in the adsorption vessel used to hold the media during the purification step. The regeneration gas contacts the surface of the adsorption media and impurities adsorbed on and accumulated on the surface of the media are desorbed from the surface and carried away from the media in the flow of the regeneration gas. By removing a sufficient amount of adsorbed impurities from the adsorbent, the regenerated adsorbent can be reused to remove impurities from the raw material gas.

The regeneration gas may be heated (i.e., preheated) before being brought into contact with the adsorbent media. The heated regeneration gas is capable of removing a greater amount of impurities from the adsorbent media than the unheated regeneration gas.

Referring to fig. 3, illustrated is an example of a gas treatment apparatus as described herein for purifying a gas by adsorbing impurities in the gas to the surface of a bed of adsorbent media particles, and further, capable of performing the step of regenerating the adsorbent media by passing a heated regeneration gas through the bed of adsorbent media to remove impurities from the adsorbent media.

The gas treatment plant 100 includes a media container and a preheater as part of a single gas treatment plant. The preheater is structurally combined with the media vessel in a manner that provides effective preheating of the regeneration gas flowing through the preheater.

The apparatus 100 includes a media vessel 110 defining a media vessel interior 120 (cylindrical, as illustrated) containing media 122 (as illustrated) in the form of a bed of media particles. The media 122 may be particles of an adsorbent material, and the gas processing apparatus 100 may be used as a gas purification apparatus to remove impurities from a raw material gas by adsorbing the impurities onto the media 122 as the raw material gas is flowed through a bed of media 122.

The media container 110 includes an inlet 140, an outlet 142, and an interior volume 120 between the inlet and the outlet. More specifically, the media container 110 includes an inlet end 130 (in an upper or "top" position, as illustrated) that includes an end wall 134, the end wall 134 containing a media container inlet (opening) 140. Media container 110 also includes an outlet end 132 (at a lower or "bottom" position) that includes an end wall 136, and a media container outlet (or passages) 142. The media container interior 120 is defined by an inlet end wall 134, an outlet end wall 136, and a sidewall (illustrated as cylindrical) 138. The media container outlet 142 can be a support structure, such as a screen or perforated plate or tray, that contains a plurality of openings sized smaller than the size of the particles of media 122. Thus, the media container outlet 142 may support particles of the media 122 while allowing a gas stream to pass between the interior of the container 110 and the interior of the preheater 150.

The preheater 150 is located at the outlet end, in contact with the bottom portion of the media container 110, and along at least a portion of the length of the outside of the media container 110. The length of the media container 110 is the distance between the inlet end wall 134 and the outlet end wall 136.

The preheater 150 is made of interior sidewalls 152, the interior sidewalls 152 (optionally and as illustrated) being of the same construction as the sidewalls 138 of the media container 110. The preheater 150 also includes an outer sidewall 154 located opposite the inner sidewall 152. The preheater 150 also includes a preheater outlet 158 and a preheater inlet 162.

The preheater 150 includes a preheater internal volume 160 that includes two sections: an annular volume 160a and an end volume 160b. Annular volume 160a is a volume having a generally annular shape and is bounded and defined by inner sidewall 152 on the inside and outer sidewall 154 on the outside and extends along a portion of the length of media container 110. The end volume 160b is a volume having a generally flat cylindrical shape with a height (in the length direction of the media container 110) that is generally less than the diameter, defined and delimited by the media container end wall 136 on one side (top side) of the end volume 160b and the preheater end wall 156 on the opposite side (bottom side) of the end volume 160b.

The insulating or heating layer 170 may comprise a heater, an insulating (low thermal conductivity) material, or both, and is positioned above the preheater 150 and the vessel 110 to enclose both the preheater 150 and the vessel 110. At the exit end of the vessel 110 at a location of the preheater 150 along a lower portion of the length of the apparatus 100, heat from the heater of the heating layer 170 flows into the preheater 150 to heat the gas flowing through the interior volume of the preheater 150. Heat may also be transferred from the preheater 150 to the vessel 110 by conduction through the side wall 152 (also the side wall 138).

In use, the apparatus 100 may be used as a gas purification apparatus to process (purify) raw material gases provided for use in a manufacturing process (not shown), for example for manufacturing semiconductors or microelectronic devices. For this purpose, relatively high purity raw material gas may flow into the media container 110 through the media container inlet 140. The raw material gas passes through the vessel 110, contacts the surface of the adsorption media 122, passes through the media vessel outlet 142, then passes through the end volume 160b of the preheater 150, and exits the preheater 150 through the preheater outlet 158. During this process, the valve of the preheater inlet 162 is closed and no gas flow is allowed through the inlet 162.

The preheater outlet 158 is directly or indirectly connected to a manufacturing device, such as a semiconductor or microelectronic device manufacturing system, that will receive the treated raw material gas exiting the preheater outlet 158.

The raw material gas exiting the preheater exit 158 has a reduced impurity content as compared to the raw material gas entering the vessel 110 at the inlet 140. As the raw material gas passes through the vessel 110 and contacts the media 122, impurities of the raw material gas are adsorbed and accumulated on the surface of the adsorption media 122. After a certain amount of impurities accumulate during use, the medium 122 becomes less useful, and may be regenerated by contacting the medium 122 with a regeneration gas in such a way that the regeneration gas will remove (desorb) a certain amount of the accumulated impurities from the medium 122.

In an example system, the regeneration gas may flow through the vessel 110 in a direction opposite to the direction of the flow of the raw material gas through the vessel 110; that is, during the purge step, the raw material gas flows from top to bottom (as illustrated), from inlet 140 to outlet 142, and during the regeneration step, the regeneration gas flows from bottom to top, from outlet 142 (now serving as an inlet) to inlet 140 (now serving as an outlet).

In a system as shown at fig. 3, the regeneration gas may be preheated using preheater 150, and the preheated regeneration gas will flow from the preheater interior space through vessel outlet 142 into interior 120 of media vessel 110. The regeneration gas may be preheated while the heat heats the preheater by flowing the regeneration gas through the inlet 162, through the interior volume 160 of the preheater 150, and then through the media vessel outlet 142 (as an inlet), and into and through the interior 120 of the media vessel 110.

The temperature of the regeneration gas when entering the interior volume 160 of the preheater through the inlet 162 may be any useful temperature, such as ambient temperature (e.g., 23 degrees celsius) or an approximate ambient temperature, for example, a temperature in the range of 20 to 25 degrees celsius. The temperature of the preheater and the preheated gas can be any useful temperature, such as a temperature of at least 200 degrees celsius, for example, a temperature in the range of from 210 to 350 ℃.

The preheated regeneration gas passes through the media vessel 110 into contact with the media 122 and causes accumulated impurities present on the surface of the media 122 to be desorbed by the regeneration gas and removed from the adsorbent media surface. The regeneration gas exits vessel 110 by flowing through vessel "inlet" 140 (which serves as an outlet) while carrying impurities that have been desorbed and removed from the adsorbent media 122.

In certain example gas purification apparatuses, the flow rate of the regeneration gas through the preheater and the media container during the regeneration step may be lower than the flow rate of the raw material gas through the media container and the preheater during the step of purifying the raw material gas.

The flow rate of the raw material gas through the media container may vary depending on the type of gas, the type of media (catalyst, adsorbent), and the type and amount of impurities to be removed, among others. In "standard cubic meterHour (NM) ³ Hr), an example of a flow rate of raw material gas through the media container may be in the range of 10 to 200NM ³ /hr, e.g. 20 to 160NM ³ In the range of/hr.

According to an example method of using a gas treatment plant as described, during the regeneration step, the flow rate of the regeneration gas may be a fraction of the flow rate of the raw material gas flowing through the media vessel during the purge step. The regeneration gas flow rate may be less than 50%, 40%, 30%, 20%, 15%, or 10% of the flow rate of the raw material gas through the media vessel during the purging step. The ability to perform the regeneration step using a significantly lower flow rate of regeneration gas compared to the flow rate of the raw material gas during the purification step may be advantageous, as the preheater may be built in a smaller size, e.g. volume.

Similarly, the pressure of the regeneration gas flowing through the preheater may be a fraction of the pressure of the raw material gas passing through the media vessel during the purification step. The pressure of the feed gas within the media vessel during the purification step can be in the range of 1 to 300 pounds per square inch gauge (psig). The pressure of the regeneration gas within the preheater as described may be in the range of 1 to 60 pounds per square inch gauge (psig) during the regeneration step. Alternatively, the pressure (psig) of the regeneration gas flowing through the preheater during the regeneration step can be less than 50%, 40%, or 30% of the pressure (psig) of the raw material gas flowing through the media vessel during the purification step.

Table 1 shows examples of materials and operating conditions that may be used in processing various types of raw material gases (listed in the top row) by passing the raw material gases through an adsorption gas purification system as described in the purification step.

Table 1 also shows examples of materials (regeneration gases ("regeneration gases")) and process parameters that may be used in gas treatment apparatuses as described herein. The table describes the raw material gas that passed through the purge step (top row), an example flow rate of the raw material gas during the purge step, the chemical composition of the regeneration gas used to regenerate the adsorbent media, an example flow rate of the regeneration gas, and an example maximum temperature during regeneration.

TABLE 1

The gas treatment device of the present description may be used with different types of media. Referring to fig. 4, illustrated is an example of a gas treatment apparatus as described herein for purifying a gas by passing the gas through a bed of catalyst particles.

The gas treatment plant 200 contains a media container and a preheater as part of a single (combined) gas treatment plant. The preheater is structurally combined with the media container in a manner that provides effective preheating of the raw material gas flowing through the preheater and then through the media container.

The apparatus 200 includes a media vessel 210 defining a media vessel interior 220 (cylindrical, as illustrated) containing media 222 (as illustrated) in the form of a bed of catalyst particles. The media 222 may be particles of catalyst particles. The gas treatment apparatus 200 can be used as a gas purification apparatus to remove (e.g., chemically alter) impurities from a raw material gas by reaction with catalyst surfaces when the raw material gas is flowed through a bed to contact the catalyst particles 222.

The media container 210 includes an inlet 240, an outlet 242, and an interior volume 220 between the inlet and outlet. More specifically, the media container 210 includes an inlet end 230 (in an upper or "top" position, as illustrated) that includes an end wall 234, the end wall 234 containing one or more media container inlets (openings) 240. Media container 210 also includes an outlet end 232 (at a lower or "bottom" position) that includes an end wall 236. The media container interior 220 is defined by an inlet end wall 234, an outlet end wall 236, and a sidewall (illustrated as cylindrical) 238. The media vessel outlet end 232 can comprise a support structure, such as a screen or perforated plate or tray, comprising a plurality of openings sized smaller than the size of the particles of media 222. Thus, media container outlet end 232 may support particles of media 222 while allowing gas flow between the interior of container 210 and outlet 242.

The apparatus 200 also includes a preheater 250 positioned at the inlet end, in contact with the upper portion of the media container 210, and along at least a portion of the length of the outside of the media container 210. The length of media container 210 is the distance between inlet end wall 234 and outlet end wall 236.

The preheater 250 is made of an inner sidewall 252, the inner sidewall 252 (optionally and as illustrated) being identical in construction to the sidewall 238 of the media container 210. The preheater 250 also includes an outer sidewall 254 located opposite the inner sidewall 252. The preheater 250 also includes a preheater inlet 262.

The preheater 250 includes a preheater internal volume 260 that includes two sections: an annular volume 260a and an end volume 260b. The annular volume 260a is a volume having a generally annular shape bounded and defined by an inner sidewall 252 on the inside and an outer sidewall 254 on the outside and extending along a portion of the length of the media container 210. The end volume 260b is a volume having a generally flat cylindrical shape with a height (in the length direction of the media container 210) that is generally less than the diameter, defined and bounded by the media container end wall 234 on one side (bottom side, as illustrated) of the end volume 260b and the preheater end wall 256 on the opposite side (top side, as illustrated) of the end volume 260b.

The insulating or heating layer 270 may comprise a heater, an insulating (low thermal conductivity) material, or both, and is positioned above the preheater 250 and the media container 210 to enclose both the preheater 250 and the media container 210. At the inlet end of the container 210 at the location of the preheater 250 along the upper portion of the length of the apparatus 200, heat from the heater of the heating layer 270 flows into the preheater 250 to heat the gas flowing through the interior volume of the preheater 250. Heat may also enter the vessel 210 from the preheater 250 through the sidewall 252 (also sidewall 238).

In use, the apparatus 200 may be used as a gas purification apparatus to treat (purify) raw material gases provided as purified raw material gases for use in a manufacturing process (not shown), for example for manufacturing semiconductors or microelectronic devices. For this purpose, relatively high purity raw material gas may flow into the media container 210 through the media container inlet 240 after being preheated using the preheater 250. The raw material gas passes through the preheater inlet 262, through the volume 160 of the preheater 250, through the inlet 240 and into the media container 210.

The temperature of the raw material gas when entering the interior volume 260 of the preheater through the inlet 262 can be any useful temperature, such as ambient temperature (e.g., 23 degrees celsius) or near ambient temperature, for example, a temperature in the range of 20 to 25 degrees celsius. The temperature of the preheater and the preheated gas can be any useful temperature, such as a temperature of at least 200 degrees celsius, for example, a temperature in the range of from 210 to 350 ℃.

The preheated gas passes through the catalyst particle bed 222 and then through the media vessel outlet 242. The outlet 242 is directly or indirectly connected to a manufacturing device, such as a semiconductor or microelectronic device manufacturing system, that will receive the treated raw material gas exiting the preheater outlet 242. The raw material gas exiting the preheater exit 242 has a reduced impurity content as compared to the raw material gas entering the preheater 250 at the inlet 262.

In certain examples of a preheater as described, the interior volume comprising the annular volume and the end volume may more specifically comprise an annular volume defined by a sidewall comprising channels that direct the gas flow through the annular volume to increase the efficiency of the preheater. One example of a useful flow channel for the annular volume is a spiral flow channel that flows gas through a spiral path that wraps around the circumference of the media container multiple times while proceeding from the preheater inlet to the end volume of the preheater.

Referring to fig. 5A and 5B, illustrated is one example of a preheater sidewall configuration that results in a helical flow path of the gas through the annular space of the preheater. Illustrated is a portion of a gas treatment apparatus 300 that includes a preheater 350 and a media container 310.

Fig. 5A is a cross-sectional view showing the sidewall surface and interior of the preheater. Fig. 5B is a cross-sectional view showing the interior of the media container and the cross-section of the preheater side walls and interior.

The preheater 350 includes a preheater internal volume 360 that includes two sections: an annular volume 360a and an end volume 360b. The annular volume 360a is a volume having a generally annular shape bounded and defined by the grooved surface of the inner sidewall 352 on the inside and the non-grooved outer sidewall 354 on the outside. The annular volume 360a extends along a portion of the length of the media container 310, the media container 310 containing media 302 (shown in fig. 5B, but not shown in fig. 5A). The thermocouple 312 is shown at fig. 5A.

As illustrated, the groove inner sidewall 352 includes a surface with a circular groove 370, the circular groove 370 forming a spiral passage 380, the spiral passage 380 extending circumferentially around the media vessel 310 between the preheater inlet 356 and the end volume 360b. At the location of the inlet 356, i.e., at the upper (as illustrated) location of the annular volume 360a, the annular volume contains a continuous annular space 358 that extends completely around the circumference of the media container 310 in a non-helical, circular path at the lengthwise location of the inlet 356. In a particularly preferred example of the annular volume 360a, the spiral passage 380 meets the annular space 358 at a location circumferentially opposite the inlet 356; that is, the spiral passage 380 meets the annular space 358 at a location 180 degrees from the inlet 356 relative to the circumference of the annular volume 360a.

In use, gas (e.g., regeneration gas or raw material gas) enters inlet 356 (see arrows indicating the direction of flow), enters annular space 358, flows partway (180 degrees) around the circumference of annular volume 360a, and enters the upper end of spiral passage 358 (as illustrated). The gas flows through the annular volume 360a in a helical path to the end volume 360b. During flow through spiral passage 358, a heater (now shown) in contact with outer sidewall 354 heats the gas and raises the temperature of the gas to a desired temperature. The preheated gas enters the end volume 360b and then passes through the media bed 302 into the interior 304 of the media vessel 310.

In a first aspect, a gas treatment apparatus comprises: a media container, comprising: a media container inlet end comprising a media container inlet, a media container outlet end comprising a media container outlet, a media container sidewall extending a length between said inlet end and said outlet end, and a media container interior extending between said inlet end and said outlet end; and a gas preheater positioned along the length of the media container sidewall.

Also disclosed is a second aspect according to the first aspect, wherein the gas preheater is in thermal contact with the media container sidewall.

Also disclosed is a third aspect according to the first or second aspects, the gas preheater extends around a circumference of the media container sidewall.

Also disclosed is a fourth aspect according to any of the preceding aspects, wherein the preheater extends from the outlet end along a portion of the length of the media container side wall.

Also disclosed is a fifth aspect according to any of the preceding aspects, further comprising a heating element in thermal contact with at least a portion of the preheater, wherein the preheater is disposed between the media container sidewall and the heating element.

Also disclosed is a sixth aspect according to any one of the preceding aspects, further comprising an insulation covering at least a portion of the preheater, wherein the preheater is disposed between the medium container and the insulation.

A seventh aspect according to any of the preceding aspects is also disclosed, further comprising a perforated end wall at the media container outlet, the perforated end wall separating the media container interior from the interior of the preheater.

Also disclosed is an eighth aspect according to any of the preceding aspects, wherein the preheater has an inner volume of the preheater that is less than 30% of the volume of the interior of the media container.

Also disclosed is a ninth aspect according to any of the preceding aspects, the apparatus comprising a preheater inlet for allowing passage of gas between an external location and a preheater interior, the preheater inlet being located between the media container inlet end and the media container outlet end.

Also disclosed is a tenth aspect according to the ninth aspect, further comprising: a preheater outlet allowing passage of gas between an external location and a preheater interior, and an opening at the outlet end of the media vessel allowing passage of gas between the preheater interior and the media vessel interior.

Also disclosed is an eleventh aspect according to any one of the preceding aspects, the preheater comprising: an inner sidewall extending along a portion of the length of the media container sidewall and around a perimeter of the sidewall, an outer sidewall extending along a portion of the length of the media container sidewall and around a perimeter of the sidewall, a preheater end wall spaced from the media container outlet, and a preheater internal volume comprising: an annular volume bounded by the inner sidewall and the outer sidewall, and an end volume bounded by the end of the media container outlet and the preheater end wall.

Also disclosed is a twelfth aspect according to the eleventh aspect, wherein the annular volume comprises a helical channel that flows gas through the annular volume in a helical path around a circumference of the annular volume.

Also disclosed is a thirteenth aspect according to any of the preceding aspects, the media vessel comprising media selected from an adsorbent media and a catalyst.

In a fourteenth aspect, a method of using a gas treatment plant, wherein the plant comprises: a media container, comprising: a media container inlet end comprising a media container inlet, a media container outlet end comprising a media container outlet, a media container sidewall extending a length between said inlet end and said outlet end, a media container interior extending between said inlet end and said outlet end, and a medium contained within said interior; a gas preheater positioned along the length of the media container sidewall; and a heating element covering at least a portion of the preheater, the method comprising: flowing a gas through the preheater to preheat the gas, and passing the preheated gas through the media vessel interior and into contact with the media.

Also disclosed is a fifteenth aspect according to the fourteenth aspect, wherein the medium is an adsorption medium and the gas is a regeneration gas, the method comprising: flowing a raw material gas through the media vessel interior and in contact with the adsorbent media to allow impurities contained in the raw material gas to be adsorbed by the adsorbent media and removed from the process gas, after flowing the raw material gas through the media vessel interior: flowing a regeneration gas through the preheater to preheat the regeneration gas, and flowing the preheated regeneration gas through the media vessel interior and into contact with the adsorbent media.

Also disclosed is a sixteenth aspect according to the fifteenth aspect, the apparatus comprising: a preheater inlet for allowing passage of gas between an external location and a preheater interior, said preheater inlet being located between said media container inlet end and said media container outlet end, a preheater outlet for allowing passage of gas between an external location and said preheater interior, and an opening at said outlet end of said media container for allowing passage of gas between said preheater interior and said media container interior, said method comprising: wherein: the process gas enters the media vessel interior through the media vessel inlet and the process gas exits the media vessel interior through the media vessel outlet to enter the preheater interior and the process gas exits the preheater interior through the preheater outlet.

Also disclosed is a seventeenth aspect according to the sixteenth aspect, wherein the regeneration gas enters the preheater interior through the preheater inlet, the regeneration gas exits the preheater interior through the media vessel outlet to enter the media vessel interior, and the regeneration gas exits the media vessel interior through the media vessel inlet.

Also disclosed is an eighteenth aspect according to any one of the fourteenth to seventeenth aspects, further comprising: flowing a raw material gas through the media vessel interior at a raw material gas flow rate, and flowing a regeneration gas through the preheater at a regeneration gas flow rate that is less than the raw material gas flow rate.

Also disclosed is a nineteenth aspect according to the eighteenth aspect, wherein the regeneration gas flow rate is less than 50% of the process gas flow rate.

Also disclosed is a twentieth aspect according to any one of the fourteenth to nineteenth aspects, further comprising: flowing the raw material gas through the interior at a raw material gas pressure, and flowing the regeneration gas through the preheater at a regeneration gas pressure less than the raw material gas pressure.

Also disclosed is a twenty-first aspect according to the twentieth aspect, wherein the regeneration gas pressure is less than 50% of the raw material gas pressure.

Also disclosed is the twenty-second aspect according to any one of the fifteenth to twenty-first aspects, wherein the raw material gas is selected from the group consisting of nitrogen, argon, hydrogen, ammonia, carbon dioxide, clean dry air and oxygen.

Also disclosed is a twenty-third aspect according to the fourteenth aspect, wherein the medium comprises a catalyst, and the gas is a raw material gas selected from the group consisting of nitrogen, argon, hydrogen, carbon dioxide, clean dry air and oxygen.

Also disclosed is a twenty-fourth aspect according to the fourteenth and fifteenth aspects, wherein the impurity is nitrogen oxide, carbon monoxide or hydrocarbon.

Also disclosed is a twenty-fifth aspect according to the fourteenth and fifteenth aspects, wherein the impurity is methane.

Claims

1. A gas treatment plant, characterized in that it comprises:

a media container, comprising:

a media container inlet end comprising a media container inlet,

a media container outlet end comprising a media container outlet,

a media container sidewall extending a length between the inlet end and the outlet end, an

A media container interior extending between the inlet end and the outlet end; and

a gas preheater positioned along the length of the media container sidewall.

2. The gas treatment plant of claim 1, wherein the gas preheater is in thermal contact with the media container sidewall.

3. The gas processing plant of claim 1, wherein the gas preheater extends around a circumference of the media container sidewall.

4. The gas treatment plant of claim 1, wherein the gas preheater extends from the outlet end along a portion of the length of the media vessel sidewall.

5. The gas treatment apparatus of claim 1, further comprising a heating element in thermal contact with at least a portion of the gas preheater, wherein the gas preheater is disposed between the media container sidewall and the heating element.

6. The gas processing plant of claim 1, further comprising insulation covering at least a portion of the gas preheater, wherein the gas preheater is disposed between the media container and the insulation.

7. The gas treatment plant of claim 1, further comprising a perforated end wall at the outlet of the media container, the perforated end wall separating the media container interior from the interior of the gas preheater.

8. The gas treatment plant according to claim 1, characterized in that the gas preheater comprises:

an inner sidewall extending along a portion of the length of the media container sidewall and around a perimeter of the sidewall,

an outer sidewall extending along a portion of the length of the media container sidewall and around a perimeter of the sidewall,

a preheater end wall spaced from the media container outlet, an

A preheater internal volume comprising:

an annular volume bounded by the inner sidewall and the outer sidewall, an

An end volume bounded by an end of the media container outlet and the preheater end wall.

9. The gas processing apparatus of claim 8, wherein the annular volume includes a spiral passage that causes gas to flow through the annular volume in a spiral path around a circumference of the annular volume.

10. The gas processing plant of claim 1 wherein the media vessel includes media selected from the group consisting of adsorbent media and catalysts.