CN217901558U

CN217901558U - Optical detection device

Info

Publication number: CN217901558U
Application number: CN202221880375.8U
Authority: CN
Inventors: 吴阳; 严振中; 刘富文; 陶一晨
Original assignee: Hezhi Technology Suzhou Co ltd
Current assignee: Hezhi Technology Suzhou Co ltd
Priority date: 2022-07-20
Filing date: 2022-07-20
Publication date: 2022-11-25
Anticipated expiration: 2032-07-20

Abstract

The utility model relates to a light detection device. The light detection device includes: a light source assembly for generating and outputting detection light; the spatial light modulator is arranged on the optical axis of the detection light, and is used for receiving the detection light, modulating the detection light and outputting modulated light with different emergent angles at different moments, wherein the modulated light carries graphic information; the first light splitting component is arranged on the optical axis of the modulated light and is used for converging part of the modulated light to the surface of a first sample to be measured; the device is also used for projecting a first reflected light beam reflected from the original path of the surface of the first sample to be detected to the detection module so as to obtain the characteristic information of the first sample to be detected through the detection module. The first sample to be detected can be rapidly scanned through the light detection device, so that the scanning efficiency is improved.

Description

Optical detection device

Technical Field

The utility model relates to an optical detection sensing technology field especially relates to light detection device.

Background

At present, two methods are mainly used to scan a sample to be measured. Firstly, a two-dimensional scanning objective table for placing a sample to be detected is moved, and the movement of light spots on the sample to be detected is realized by moving the two-dimensional scanning objective table, so that the sample to be detected is scanned; secondly, scanning is realized by using a galvanometer system, two scanning galvanometers are oppositely arranged to have a certain angle, laser sequentially irradiates on a sample to be detected through the two scanning galvanometers, and the position of the sample to be detected irradiated by the laser is changed by respectively controlling the directions of the two scanning galvanometers in the scanning process, so that the sample to be detected is scanned.

However, the detection efficiency of the former is seriously limited by the mechanical movement speed of the object stage, and the scanning speed is slow; the latter needs to use single-mode laser, which has less usable wavelength and higher cost.

SUMMERY OF THE UTILITY MODEL

In view of the above, it is desirable to provide a photodetecting device in view of the above problems.

A light detection arrangement, the light detection arrangement comprising:

a light source assembly for generating and outputting detection light;

the spatial light modulator is arranged on the optical axis of the detection light, and is used for receiving the detection light, modulating the detection light and outputting modulated light with different emergent angles at different moments, wherein the modulated light carries graphic information;

a detection module;

the first light splitting component is arranged on the optical axis of the modulated light and used for converging part of the modulated light to the surface of a first sample to be measured; the detection module is used for acquiring the characteristic information of the first sample to be detected.

In one embodiment, the light source assembly comprises:

a light source for generating primary light;

and the first lens group is arranged on the optical axis of the initial light and is used for collimating the initial light so as to output the detection light.

In one embodiment, the first light splitting assembly includes:

a first light splitter disposed on an optical axis of the modulated light;

the second lens group is used for converging the modulated light which penetrates through the first light splitter on the surface of the first sample to be detected and projecting a first reflected light beam reflected back from the original path of the surface of the first sample to be detected to the first light splitter;

the first light splitter is used for projecting the first reflected light beam to the detection module.

In one embodiment, the detection module includes a third lens group and a first detection element, wherein the third lens group is configured to focus the first reflected light beam onto a detection surface of the first detection element.

In one embodiment, the first detection assembly comprises a camera, a photo-thermal detector, a spectral detector, or a photo-magnetic detector.

In one embodiment, the detection module further includes a second beam splitter disposed on the optical axis of the modulated light for projecting the first reflected light beam to the fourth lens set, a fourth lens set for converging the first reflected light beam on a detection surface of the second detection element, and a second detection element for receiving the first reflected light beam to obtain characteristic information of the first sample under test.

In one embodiment, the second light splitting component is disposed between the first light splitter and the second lens group.

In one embodiment, the first detection assembly includes a camera and the second detection assembly includes a photo-thermal detector, a spectral detector, or a photo-magnetic detector.

In one embodiment, the light detection apparatus further includes a third light splitting element disposed on an optical path of the first reflected light beam projected by the second light splitting element, the number of the second detection elements is multiple, and the third light splitting element is configured to split the first reflected light beam into multiple sub-first reflected light beams and project the multiple sub-first reflected light beams to multiple second detection elements respectively.

In one embodiment, the optical detection device further includes a photoelectric detection component, and the photoelectric detection component is connected to a first sample to be detected, and is configured to output an electrical signal to the first sample to be detected, and receive an electrical signal fed back by the first sample to be detected, so as to perform photocurrent imaging on the first sample to be detected, and obtain photoelectric response efficiencies of the first sample to be detected at different positions.

In one embodiment, the light detection device further comprises a fourth light splitting component and a third detection component, wherein the fourth light splitting component is used for receiving the rest of the modulated light reflected by the first light splitting component and converging the modulated light to the surface of a second sample to be detected; the fourth light splitting assembly is further used for projecting a second reflected light beam reflected back from the original path of the surface of the second sample to be detected to the third detection assembly so as to acquire the characteristic information of the second sample to be detected through the third detection assembly.

In one embodiment, the light detection apparatus further includes a fifth light splitter disposed on an optical axis of the second reflected light beam for projecting the second reflected light beam to the fifth lens group, a fifth lens group for converging the second reflected light beam on a detection surface of the fourth detector, and a fourth detector for receiving the second reflected light beam to acquire characteristic information of the second sample under test.

According to the light detection device, the spatial light modulator is used as the scanning mechanism, and the spatial light modulator opens and closes the micro reflectors in different areas to obtain the projection pattern in any light spot shape, so that the light spots can rapidly move on the first sample to be detected without moving the first sample to be detected through the objective table, and the scanning speed is improved. In addition, relative to the galvanometer system, the spatial light modulator has a wider range of light wavelengths to be processed, so that the light source component does not comprise a single-mode laser, the available wavelengths are more, and the cost is reduced.

Drawings

FIG. 1 is a schematic diagram illustrating a scanning of a sample to be measured by a movable stage;

FIG. 2 is a schematic diagram illustrating a principle of scanning a sample to be measured by using a galvanometer system;

FIG. 3 is a schematic diagram of the structure of a light detection device in one embodiment;

FIG. 4 is a schematic diagram of the movement of the projected light spot on the first sample to be measured according to one embodiment;

fig. 5 to 9 are schematic structural diagrams of the light detection device in different embodiments.

Description of reference numerals:

101-camera, 102-second beam splitter, 103-third beam splitter, 104-laser emitter, 105-illumination light source, 106-sample to be measured, 107-stage, 201-first scanning galvanometer, 202-second scanning galvanometer, 203-fourth beam splitter, 301-light source assembly, 3011-light source, 3012-first lens group, 302-spatial light modulator, 303-first beam splitter, 3031-first beam splitter, 3032-second lens group, 304-detection module, 3041-third lens group, 3042-first detection assembly, 3043-second beam splitter, 3044-fourth, 3045-second detection assembly, 305-photoelectric detection assembly, 306-first sample to be measured, 307-fourth beam splitter, 3071-sixth beam splitter, 3072-sixth lens group, 308-third detection assembly, 3081-light detector, 3082-seventh lens group, 309-second sample to be measured, 310-fifth beam splitter, 3101-seventh beam splitter, 311-fifth beam splitter, fourth beam splitter, 401-projection pattern.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The invention may be embodied in many other forms different from those described herein and similar modifications may be made by those skilled in the art without departing from the spirit and scope of the invention and, therefore, the invention is not to be limited to the specific embodiments disclosed below.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless explicitly defined otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be interconnected within two elements or in a relationship where two elements interact with each other unless otherwise specifically limited. The specific meaning of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. As used herein, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are for purposes of illustration only and do not denote a single embodiment.

As described in the background, at present, two methods are mainly used to scan a sample to be tested.

In one mode, a two-dimensional scanning stage 107 on which a sample 106 to be measured is placed is moved, as shown in fig. 1, an illumination light source 105 emits illumination light, the illumination light is projected onto the sample 106 to be measured through a third light splitter 103, and the illumination light reflected from the sample 106 to be measured is projected onto an imaging surface of a camera 101 through a second light splitter 102 and the third light splitter 103, so that the position of the sample 106 to be measured is determined. The laser emitter 104 emits laser, the laser is projected onto the surface of the sample 106 to be measured through the second light splitter 102 and the third light splitter 103, and the laser reflected by the sample 106 to be measured is projected onto the imaging surface of the camera 101 through the second light splitter 102 and the third light splitter 103, so as to obtain the graphic information of the laser irradiation area on the sample 106 to be measured. It is understood that the stage 107 can be moved to move the laser spot on the sample 106, so as to scan the sample 106.

Another way is to use a galvanometer system to realize scanning, as shown in fig. 2, similarly, the illumination light source 105 emits illumination light, the illumination light is projected onto the sample 106 to be measured through the fourth light splitter 203, and the illumination light reflected from the sample 106 to be measured is projected onto the imaging surface of the camera 101 through the fourth light splitter 203 and the second scanning galvanometer 202, so as to determine the position of the sample 106 to be measured. The first scanning galvanometer 201 and the second scanning galvanometer 202 are oppositely arranged to have a certain angle, laser emitted by the laser emitter 104 sequentially passes through the first scanning galvanometer 201, the second scanning galvanometer 202 and the fourth light splitter 203 to irradiate the sample 106 to be measured, the laser reflected by the sample 106 to be measured is projected on an imaging surface of the camera 101 through the fourth light splitter 203 and the second scanning lens 202, and in the scanning process, the positions of the laser irradiated on the sample 106 to be measured can be changed by respectively controlling the directions of the first scanning galvanometer 201 and the second scanning galvanometer 202, so that the scanning of the sample 106 to be measured can be realized.

However, the detection efficiency of the former method is severely limited by the mechanical movement speed of the stage, because each point is acquired, the stepping motor is controlled to advance one step, and the scanning speed is slow. The latter method requires the use of single-mode laser, and has the advantages of less available wavelength and higher cost.

To solve the above problem, please refer to fig. 3 and 4, fig. 3 shows a schematic structural diagram of a light detection device in an embodiment of the present invention, and an embodiment of the present invention provides a light detection device, which includes a light source assembly 301, a spatial light modulator 302, a detection module 304, and a first light splitting assembly 303. The light source assembly 301 is configured to generate and output detection light; the spatial light modulator 302 is disposed on an optical axis of the detection light, and is configured to receive the detection light, modulate the detection light, and output modulated light with different exit angles at different times, where the modulated light carries pattern information, that is, the spatial light modulator 302 opens and closes micro mirror plates in different areas to obtain a projection pattern 401 in a predetermined light spot shape; the first light splitting element 303 is disposed on an optical axis of the modulated light, and is configured to converge the modulated light to the surface of the first sample 306 to be detected, and is further configured to project a first reflected light beam reflected from a surface of the first sample 306 to be detected to the detection module 304, so as to obtain characteristic information of the first sample 306 to be detected through the detection module 304.

The first light splitting assembly 303 may include a light splitting sheet. The detection module 304 may include a camera, through which the graphic information on the first sample 306 to be detected is acquired.

Specifically, when a first sample 306 to be detected is scanned, the light source assembly 301 outputs detection light to the spatial light modulator 302, the spatial light modulator 302 opens and closes a micro mirror plate in a corresponding region, the detection light is reflected by the micro mirror plate to output modulation light carrying graphic information, the modulation light is converged to the surface of the first sample 306 to be detected by the first light splitting assembly 303, a first reflection light beam reflected back along the original path of the surface of the first sample 306 to be detected is emitted to the first light splitting assembly 303, the first light splitting assembly 303 projects the first reflection light beam to the detection module 304, and therefore the detection module 304 acquires characteristic information of the first sample 306 to be detected.

As shown in fig. 4, in the above optical detection apparatus, the spatial light modulator 302 is used as a scanning mechanism, so that the spatial light modulator 302 can be controlled to open and close micro-mirrors in different areas to obtain a projection pattern 401 with any light spot shape, and further, the light spot can be rapidly moved on the first sample 306 to be measured without moving the first sample 306 to be measured through the stage 107, thereby increasing the scanning speed; and the light detection device of the embodiment needs fewer structures, has a simple integral structure, and is beneficial to reducing the cost and improving the integral stability. In addition, the light wavelength range that can be processed by the spatial light modulator 302 is wider than that of a galvanometer system, so that the light source assembly 301 does not include a single-mode laser and has a large number of available wavelengths, which is beneficial to further reducing the cost.

In one embodiment, as shown in fig. 5, the light source assembly includes a light source 3011 and a first lens group 3012. The light source 3011 is used to generate primary light; the first lens group 3012 is disposed on an optical axis of the original light, and is configured to perform collimation processing on the original light to output the detection light.

It will be appreciated that the primary light generated by the light source 3011 is often divergent light, and therefore needs to be collimated in order to reduce losses during transmission. Therefore, the first lens group 3012 is disposed on the optical axis of the original light, and the original light is collimated by the first lens group 3012, and parallel light, that is, detection light is output.

In use, the light source 3011 comprises a multimode laser or an LED light source, wherein the power of the multimode laser is higher than the power of the single mode laser in the galvanometer system.

Optionally, the light source module further comprises an optical fiber for transmitting the primary light.

In one embodiment, as shown in fig. 5, the first light splitting assembly 303 includes a first light splitting sheet 3031 and a second lens group 3032. A first light splitter 3031 is disposed on the optical axis of the modulated light; the second lens group 3032 is configured to converge the modulated light transmitted through the first light splitter 3031 on the surface of the first sample 306 to be measured, and project a first reflected light beam reflected back from the surface of the first sample 306 to be measured to the first light splitter 3031; the first light splitter 3031 is configured to project the first reflected light beam to the detection module 304.

Specifically, the first light splitter 3031 is disposed on the optical axis of the modulated light, the modulated light is transmitted from the first light splitter 3031 and then enters the second lens group 3032, and the second lens group 3032 focuses the incident modulated light to converge the modulated light on the surface of the first sample 306 to be measured. It can be understood that the light is reflected on the surface of the first to-be-measured sample 306, the first reflected light beam reflected back along the original path from the surface of the first to-be-measured sample 306 is projected onto the first light splitter 3031, the first light splitter 3031 reflects the first reflected light beam projected onto the surface thereof, the first reflected light beam is projected onto the detection module 304, the detection module 304 receives the first reflected light beam, and the characteristic information of the first to-be-measured sample 306 is obtained based on the received first reflected light beam.

In one embodiment, as shown in fig. 5, the detecting module 304 includes a third lens group 3041 and a first detecting element 3042, wherein the third lens group 3041 is configured to focus the first reflected light beam on a detecting surface of the first detecting element 3042.

In this embodiment, the third lens group 3041 converges the first reflected light beam on the detecting surface of the first detecting element 3042, so as to improve the light signal received by the first detecting element 3042, which is beneficial for the first detecting element 3042 to accurately obtain the characteristic information of the first to-be-detected sample 306.

In one embodiment, the first detection assembly 3042 includes a camera, a photo-thermal detector, a spectral detector, or a photo-magnetic detector.

Specifically, when the first detecting element 3042 includes a camera, the first light splitter 3031 projects the first reflected light beam onto an image plane of the camera, so as to acquire the graphic information of the first to-be-detected sample 306 through the camera. Similarly, when the first detecting element 3042 includes a photo-thermal detector, the photo-thermal detector receives the first reflected light beam on the first sample 306 to obtain optical information (e.g., reflectivity), and transmits the obtained optical information to the processing device, and the temperature distribution information on the first sample 306 to be detected is obtained through processing by the processing device. When the first detecting assembly 3042 includes a spectrum detector, the spectrum detector receives the first reflected light beam on the first sample 306 to obtain spectrum information (including but not limited to light information generated by reflection, scattering or stimulated radiation, etc.), wherein the spectrum detector may be a fluorescence spectrometer or a raman spectrometer. When the first detecting component 3042 includes a photo-magnetic detector, the photo-magnetic detector collects the polarization change of light at the light irradiation point on the first sample 306 to be detected, and sends the result to the processing device, so as to obtain the magnetic information at the light irradiation point on the first sample 306 to be detected, and after the scanning process of the first sample 306 to be detected is completed, the magnetic information of the whole first sample 306 to be detected can be obtained. It is to be appreciated that the information acquired by the first detection component 3042 may be sent to a processing device for further processing.

In application, the detecting device (camera, photo-thermal detector, spectral detector or magneto-optical detector) in the first detecting assembly 3042 may be replaced to obtain different characteristic information of the first sample 306 to be detected. For example, initially, the detecting device of the first detecting assembly 3042 is a camera, and after the camera obtains the graphic information of the first sample 306 to be measured, the camera may be replaced by a photo-thermal detector to obtain the temperature distribution information of the first sample 306 to be measured.

In an embodiment, as shown in fig. 6, the detecting module 304 further includes a second beam splitting element 3043, a fourth lens group 3044 and a second detecting element 3045, the second beam splitting element 3043 is disposed on the optical axis of the modulated light and is used for projecting the first reflected light beam to the fourth lens group 3044, the fourth lens group 3044 is used for converging the first reflected light beam on the detecting surface of the second detecting element 3045, and the second detecting element 3045 is used for receiving the first reflected light beam to obtain the characteristic information of the first sample to be detected 306.

The second light splitting assembly 3043 can include a fifth light splitter, through which the first reflected light beam is projected to the fourth lens group 3044. The second beam splitting assembly 3043 may be disposed between the first light splitter 3031 and the second lens group 3032, or disposed between the first light splitter 3031 and the spatial light modulator 302.

Specifically, the modulated light passes through the first light splitter 3031 and the second light splitting assembly 3043, and then is converged on the surface of the first sample to be measured 306 by the second lens group 3032, and is reflected on the surface of the first sample to be measured 306. When the second beam splitter 3043 is disposed between the first light splitter 3031 and the second lens assembly 3032, a portion of the first reflected light beam reflected back along the original path of the surface of the first sample 306 to be detected is transmitted through the second light splitter 3043 to the first light splitter 3031, a portion of the first reflected light beam is reflected by the second light splitter 3043 and is transmitted to the fourth lens assembly 3044, and the fourth lens assembly 3044 converges the first reflected light beam on the detecting surface of the second detecting assembly 3045, so that the second detecting assembly 3045 receives the first reflected light beam to obtain the characteristic information of the first sample 306 to be detected. When the second light splitting element 3043 is disposed between the first light splitting element 3031 and the spatial light modulator 302, a portion of the first reflected light beam reflected back along the original path of the surface of the first sample 306 to be detected transmits through the first light splitting element 3031 to the second light splitting element 3043, and is reflected by the second light splitting element 3043 to the fourth lens group 3044, the fourth lens group 3044 converges the first reflected light beam on the detecting surface of the second detecting element 3045, so that the second detecting element 3045 receives the first reflected light beam to obtain the characteristic information of the first sample 306 to be detected.

It is understood that when the detecting module 304 includes the second beam splitting element 3043, the fourth lens group 3044 and the second detecting element 3045, the characteristic information of the first to-be-detected sample 306 can be detected by the first detecting element 3042 and the second detecting element 3045 at the same time, so as to improve the detecting efficiency.

In one embodiment, as shown in fig. 6, the second light splitting assembly 3043 is disposed between the first light splitter 3031 and the second lens group 3032.

Wherein the first detection assembly 3042 includes a camera and the second detection assembly 3045 includes a photo-thermal detector, a spectral detector, or a photo-magnetic detector.

It can be understood that when the second beam splitting element 3043 is disposed between the first light splitter 3031 and the second lens group 3032, the first reflected light beam received by the second beam splitting element 3043 does not pass through the first light splitter 3031, and the loss of the first reflected light beam is lower, so that the loss of the first reflected light beam received by the second detecting element 3045 is lower, thereby facilitating the second detecting element 3045 to obtain accurate characteristic information. Although the first reflected light beam received by the camera has a certain loss, the camera can perform exposure compensation, and the camera can still obtain a relatively clear image of the first sample 306 to be measured. Therefore, when the second beam splitting element 3043 is disposed between the first beam splitter 3031 and the second lens set 3032, the camera and the second detecting element 3045 can obtain accurate feature information.

In an embodiment, the optical detection apparatus further includes a third light splitting element disposed on an optical path of the first reflected light beam projected by the second light splitting element 3043, the number of the second detecting elements 3045 is plural, and the third light splitting element is configured to split the first reflected light beam into a plurality of sub-first reflected light beams and project the plurality of sub-first reflected light beams to the plurality of detecting elements respectively.

In this embodiment, the third light splitting element is disposed on the light path of the first reflected light beam projected by the second light splitting element 3043, and the first reflected light beam is divided into multiple sub-first reflected light beams and respectively projected onto the multiple second detecting elements 3045, so that the multiple second detecting elements 3045 operate simultaneously, and thus, more characteristic information of the first sample 306 to be detected can be obtained simultaneously, and the detection efficiency is improved.

In an embodiment, as shown in fig. 7, the light detection apparatus further includes a photoelectric detection component 305, where the photoelectric detection component 305 is connected to the first sample 306 to be detected, and is configured to output an electrical signal to the first sample 306 to be detected, and receive an electrical signal fed back by the first sample 306 to perform photocurrent imaging on the first sample 306 to be detected, and obtain photoelectric response efficiencies of different positions of the first sample 306 to be detected.

It can be understood that, based on the photoelectric effect, after the first sample 306 to be measured is irradiated by light, the electrical conductivity inside the first sample 306 to be measured changes, and then an electrical signal is output to the first sample 306 to be measured, and an electrical signal fed back by the first sample 306 to be measured is received, so that photocurrent imaging can be performed on the first sample 306 to be measured, and the digital micromirror device 302 controls projection of a light spot, that is, the movement of an irradiation point on the first sample 306 to be measured on the first sample 306, thereby obtaining photoelectric response efficiencies of different positions of the first sample 306 to be measured.

In one embodiment, the photo detection assembly 305 includes a probe, a source meter and a lock-in amplifier, both of which are connected to the probe, the source meter is used for providing a positive bias voltage or a negative bias voltage to the first sample 306 to be measured, and the lock-in amplifier is used for obtaining an electrical signal fed back by the first sample 306 to be measured and separating an electrical signal with a specific frequency from the fed back electrical signal. Two probes are usually disposed, and the two probes respectively contact two electrodes of the first sample 306 to be tested. The lock-in amplifier may be connected to the processing device, and the processing device obtains the electrical signal with a specific frequency separated by the lock-in amplifier, so as to realize the photoelectric detection on the first sample 306 to be detected.

In another embodiment, the photo detection assembly 305 includes a sample holder, a source meter, and a lock-in amplifier, and the sample holder may be connected to the source meter and the lock-in amplifier through pins; it is also possible to connect via pins to a lock-in amplifier which is then connected to the source meter. The sample holder is used for supporting the sample and is electrically connected with the sample, so that the source meter provides positive bias voltage or negative bias voltage for the sample to be detected through the sample holder, and the electric signal fed back by the first sample to be detected 306 is transmitted to the phase-locked amplifier through the sample holder; the lock-in amplifier is used for acquiring the electric signal fed back by the first sample 306 to be measured and separating the electric signal with a specific frequency from the fed back electric signal. The lock-in amplifier may be connected to the processing device, and the processing device obtains the electrical signal with a specific frequency separated by the lock-in amplifier, so as to realize the photoelectric detection on the first sample 306 to be detected.

In application, the photoelectric detection element 305, the first detection element 3042, and the second detection element 3045 may work independently, or at least two of the photoelectric detection element 305, the first detection element 3042, and the second detection element 3045 may work simultaneously.

In one embodiment, as shown in fig. 8, the light detection apparatus further includes a fourth light splitting component 307 and a third detection component 308, where the fourth light splitting component 307 is configured to receive a portion of the modulated light reflected by the first light splitting component 303 and focus the portion of the modulated light onto a surface of a second sample to be measured 309; the fourth light splitting component 307 is further configured to project a second reflected light beam reflected from the surface of the second sample 309 to be detected to the third detecting component 308, so as to obtain characteristic information of the second sample 309 to be detected through the third detecting component 308.

It can be understood that when the modulated light is incident on the first light splitting element 303, part of the modulated light is transmitted from the first light splitting element 303 to the surface of the first sample 306 to be measured, and the rest of the modulated light is reflected by the first light splitting element 303 and is not utilized. The fourth light splitting component 307 is arranged on the reflection optical axis of the first light splitting component 303, receives the rest of the modulated light reflected by the first light splitting component, converges the modulated light on the surface of the second sample to be detected 309, and projects the second reflected light beam reflected from the surface of the second sample to be detected 309 to the third detection component 308, so that the characteristic information of the second sample to be detected 309 is obtained through the third detection component 308. Through the arrangement, the light detection device of the embodiment not only improves the utilization rate of modulated light, but also can simultaneously realize the characteristic detection of two samples to be detected, thereby further improving the scanning efficiency.

In one embodiment, as shown in fig. 8, the fourth light splitting assembly 307 includes a sixth light splitting plate 3071 and a sixth lens group 3072, the sixth lens group 3072 is configured to converge the remaining modulated light reflected by the sixth light splitting plate 3071 on the surface of the second sample 309, and project a second reflected light beam reflected from the surface of the second sample 309 to the sixth light splitting plate 3071, and the sixth light splitting plate 3071 is configured to project the second reflected light beam to the third detecting assembly 308.

In one embodiment, the third detecting component 308 includes a seventh lens group 3082 and a light detector 3081, wherein the light detector 3081 is a camera, a photo-thermal detector, a spectral detector or a magneto-optical detector, and the seventh lens group 3082 is used for converging the second reflected light beam on a detecting surface of the light detector 3081.

In one embodiment, as shown in fig. 9, the light detection apparatus further includes a fifth light splitting element 310, a fifth lens assembly 311 and a fourth detection element 312, the fifth light splitting element 310 is disposed on the optical axis of the second reflected light beam and is used for projecting the second reflected light beam to the fifth lens assembly 311, the fifth lens assembly 311 is used for converging the second reflected light beam on the detection surface of the fourth detection element 312, and the fourth detection element 312 is used for receiving the second reflected light beam to acquire the characteristic information of the second sample 309 to be measured. Among them, the fifth light splitting assembly 310 may include a seventh light splitting sheet 3101, and the second reflected light beam is projected to the fifth lens group 311 by the seventh light splitting sheet 3101. The fifth light splitting element 310 may be disposed between the sixth light splitting sheet 3071 and the fifth lens group 311, or between the sixth light splitting sheet 3071 and the third detector. The fourth detection component 312 may include a camera, a photo-thermal detector, a spectral detector, or a magneto-optical detector.

It can be understood that the fifth light splitting component 310 splits the second reflected light beam, and the third detection component 308 and the fourth detection component 312 can simultaneously detect the characteristic information of the second sample to be detected 309, thereby improving the detection efficiency.

In one embodiment, as shown in fig. 9, the fifth light splitting element 310 is disposed between the sixth light splitting plate 3071 and the fifth lens group 311.

Wherein the third detection assembly 308 comprises a camera and the fourth detection assembly 312 comprises a photo-thermal detector, a spectral detector, or a magneto-optical detector.

In one embodiment, the beamsplitter may be a non-polarizing beamsplitter.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims

1. A light detection device, characterized in that the light detection device comprises:

a light source assembly for generating and outputting detection light;

the spatial light modulator is arranged on an optical axis of the detection light and used for receiving the detection light, modulating the detection light and outputting modulated light with different emergent angles at different moments, wherein the modulated light carries graphic information;

a detection module;

the first light splitting component is arranged on the optical axis of the modulated light and is used for converging part of the modulated light to the surface of a first sample to be measured; the detection module is used for acquiring the characteristic information of the first sample to be detected through the detection module.

2. A light detecting device according to claim 1, wherein the light source module comprises:

a light source for generating primary light;

3. The light detection apparatus of claim 1, wherein the first light splitting component comprises:

a first light splitter disposed on an optical axis of the modulated light;

4. A light detecting device according to claim 3, wherein said detecting module comprises a third lens group and a first detecting element, wherein said third lens group is configured to focus said first reflected light beam on a detecting surface of said first detecting element.

5. The light detection arrangement of claim 4, wherein the first detection component comprises a camera, a photo-thermal detector, a spectral detector, or a magneto-optical detector.

6. The optical detection device of claim 4, wherein the detection module further comprises a second beam splitter disposed on the optical axis of the modulated light for projecting the first reflected beam onto the fourth lens group, a fourth lens group for converging the first reflected beam onto a detection surface of the second detection element, and a second detection element for receiving the first reflected beam to obtain characteristic information of the first sample under test.

7. The light detection apparatus of claim 6, wherein the first detection component comprises a camera and the second detection component comprises a photo-thermal detector, a spectral detector, or a photo-magnetic detector.

8. A light detecting device according to claim 7, wherein said second beam-splitting element is disposed between said first light-splitting element and said second lens group.

9. The optical detection device according to any one of claims 6 to 8, further comprising a third light splitting element disposed on an optical path of the first reflected light beam projected by the second light splitting element, wherein the number of the second detection elements is plural, and the third light splitting element is configured to split the first reflected light beam into a plurality of sub-first reflected light beams and project the plurality of sub-first reflected light beams to the plurality of second detection elements, respectively.

10. The optical detection device according to claim 1, further comprising a photoelectric detection component, wherein the photoelectric detection component is connected to a first sample to be detected, and is configured to output an electrical signal to the first sample to be detected and receive an electrical signal fed back by the first sample to perform photocurrent imaging on the first sample to be detected, and obtain photoelectric response efficiencies of the first sample to be detected at different positions.

11. The optical detection device according to claim 1, further comprising a fourth light splitting component and a third detection component, wherein the fourth light splitting component is configured to receive the remaining portion of the modulated light reflected by the first light splitting component and converge the modulated light on the surface of the second sample to be detected; the fourth light splitting assembly is further used for projecting a second reflected light beam reflected back from the original path of the surface of the second sample to be detected to the third detection assembly so as to acquire the characteristic information of the second sample to be detected through the third detection assembly.

12. The optical detection device according to claim 11, further comprising a fifth optical splitter, a fifth lens group and a fourth detection element, wherein the fifth optical splitter is disposed on an optical axis of the second reflected light beam and is configured to project the second reflected light beam to the fifth lens group, the fifth lens group is configured to converge the second reflected light beam on a detection surface of the fourth detection element, and the fourth detection element is configured to receive the second reflected light beam to obtain characteristic information of the second sample under test.