CN217877175U

CN217877175U - Diffusion furnace pipeline cleaning equipment

Info

Publication number: CN217877175U
Application number: CN202221120981.XU
Authority: CN
Inventors: 秦有贵; 辛奇; 胡凯; 徐峰; 杨军; 闫乐成; 秦宝宏
Original assignee: Shanghai Xinli Electronic Technology Co ltd
Current assignee: Shanghai Xinli Electronic Technology Co ltd
Priority date: 2022-05-11
Filing date: 2022-05-11
Publication date: 2022-11-22
Anticipated expiration: 2032-05-11

Abstract

The utility model discloses a diffusion furnace pipeline cleaning equipment, including wasing the cover, wash a plurality of washing pieces of cover outer wall fixedly connected with, wash the cover inner wall and be equipped with the parent tube, be equipped with the spacing groove in the parent tube, spacing inslot wall bottom is rotated and is connected with the dwang, parent tube week side has inlayed a plurality of mounting grooves, the dwang passes through mounting groove, stop gear and washs cover inner wall fixed connection, parent tube one side fixedly connected with locating lever, stop gear includes the install bin with mounting groove fixed connection, install bin inner wall fixedly connected with spring, the utility model discloses well stop gear's setting is convenient for better carry out spacing to washing the cover, is convenient for better bring the washing cover into the parent tube inside, and the setting of spring is convenient for better drive washing cover 24636to the pipeline, is convenient for better wash the pipeline, and the setting of spacing pearl is convenient for better reduction friction between slider and the install bin.

Description

Diffusion furnace pipeline cleaning equipment

Technical Field

The utility model relates to a pipeline cleaning field especially relates to a diffusion furnace pipeline cleaning equipment.

Background

In the semiconductor component diffusion industry, the granularity of quartz pipelines and silicon carbide pipelines of a diffusion furnace is an important process index, and the diffusion furnace pipelines can be cleaned regularly in order to ensure the granularity of the diffusion furnace pipelines.

The existing pipeline cleaning mechanism is difficult to insert the cleaning mechanism into the pipe body in the using process, so that the pipeline cleaning equipment for the diffusion furnace is designed.

SUMMERY OF THE UTILITY MODEL

The technical problem to be solved by the utility model is that; the existing pipeline cleaning mechanism is difficult to insert the cleaning mechanism into the pipe body in the using process.

In order to solve the technical problem, the utility model discloses a technical scheme be: the cleaning equipment for the diffusion furnace pipeline comprises a cleaning sleeve, wherein the outer wall of the cleaning sleeve is fixedly connected with a plurality of cleaning blocks, the inner wall of the cleaning sleeve is provided with a base pipe, a limiting groove is arranged in the base pipe, the bottom of the inner wall of the limiting groove is rotatably connected with a rotating rod, a plurality of mounting grooves are embedded in the periphery of the base pipe, the rotating rod is fixedly connected with the inner wall of the cleaning sleeve through the mounting grooves and a limiting mechanism, and one side of the base pipe is fixedly connected with a positioning rod;

stop gear include with mounting groove fixed connection's install bin, install bin inner wall fixedly connected with spring, spring other end fixedly connected with slider, the slider week side has inlayed a plurality of spacing pearls, the slider other end run through the install bin and with wash the cover inner wall fixed connection, the slider is close to the one end fixedly connected with stay cord of spring, the stay cord other end run through the install bin and with dwang fixed connection.

The utility model discloses further set up to: the section of the cleaning sleeve is circular, and the cleaning sleeve is bonded with the cleaning block.

Through the technical scheme, the cleaning sleeve and the cleaning block are made of sponge materials.

The utility model discloses further set up to: the section of parent tube is circular, the parent tube passes through the bearing and is connected with the dwang rotation.

Through the technical scheme, the base tube is made of rubber.

The utility model discloses further set up to: the section of mounting groove is circular, the mounting groove inner wall bonds with stop gear.

Through the technical scheme, the groove depth of the mounting groove is not less than one centimeter.

The utility model discloses further set up to: the number of the limiting mechanisms is not less than twenty.

Through the technical scheme, the length of the limiting mechanism is not less than one point and five centimeters.

The utility model discloses further set up to: the section of dwang is "T" type, the dwang bonds with the stay cord among the stop gear.

Through the technical scheme, the rotating rod is made of the stainless steel material.

The utility model discloses further set up to: the section of install bin is circular, the wall thickness of install bin is not less than three millimeters, the install bin bonds with the mounting groove inner wall.

Through the technical scheme, the installation box is made of the stainless steel material.

The utility model discloses further set up to: spacing pearl outer wall and installation incasement wall laminating, the section of slider is "T" type.

Through the technical scheme, the sliding block is made of the stainless steel material.

The utility model has the advantages as follows:

1. the utility model discloses in wash set, wash the setting of piece and be convenient for better washing the pipeline, the setting of parent tube is convenient for better carry on spacing to wash set to insert the parent tube inside the pipeline better, the setting of spacing groove is convenient for better carry on spacing to the dwang;

2. the utility model discloses well stop gear's setting is convenient for better spacing to wash the cover, is convenient for better bring into the parent tube with washing the cover inside, and the setting of spring is convenient for better drive wash cover \24636tothe pipeline, is convenient for better wash the pipeline, and the setting of spacing pearl is convenient for better reduction slider and the frictional force between the install bin.

Drawings

Fig. 1 is a side view of the present invention;

FIG. 2 is a perspective view of the middle cleaning sleeve of the present invention;

FIG. 3 is an enlarged view of FIG. 1 at A;

fig. 4 is a side view of the middle limiting mechanism of the present invention.

In the figure: 1. cleaning the sleeve; 2. cleaning the block; 3. a base pipe; 4. a limiting groove; 5. rotating the rod; 6. positioning a rod; 7. mounting grooves; 8. a limiting mechanism; 801. installing a box; 802. a spring; 803. a slider; 804. A limiting bead; 805. and (6) pulling a rope.

Detailed Description

The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.

Please refer to fig. 1-3, a diffusion furnace pipeline cleaning equipment, including cleaning sleeve 1, cleaning sleeve 1 outer wall fixedly connected with a plurality of cleaning block 2, cleaning sleeve 1 inner wall is equipped with parent tube 3, be equipped with spacing groove 4 in the parent tube 3, spacing groove 4 inner wall bottom is rotated and is connected with dwang 5, parent tube 3 week side has inlayed a plurality of mounting grooves 7, dwang 5 passes through mounting groove 7, stop gear 8 and cleaning sleeve 1 inner wall fixed connection, parent tube 3 one side fixedly connected with locating lever 6, cleaning sleeve 1's section is circular, cleaning sleeve 1 bonds with cleaning block 2. The cleaning sleeve 1 and the cleaning block 2 are made of sponge materials. The section of parent tube 3 is circular, and parent tube 3 passes through the bearing and is connected with dwang 5 rotation. The base tube 3 is made of rubber. The section of mounting groove 7 is circular, and 7 inner walls of mounting groove bond with stop gear 8. The depth of the mounting groove 7 is not less than one centimeter.

As shown in fig. 1-4, the limiting mechanism 8 includes an installation box 801 fixedly connected to the installation groove 7, a spring 802 is fixedly connected to an inner wall of the installation box 801, a slider 803 is fixedly connected to another end of the spring 802, a plurality of limiting beads 804 are embedded around the slider 803, another end of the slider 803 penetrates through the installation box 801 and is fixedly connected to an inner wall of the cleaning sleeve 1, a pull rope 805 is fixedly connected to one end of the slider 803 close to the spring 802, and another end of the pull rope 805 penetrates through the installation box 801 and is fixedly connected to the rotating rod 5. The number of the limiting mechanisms 8 is not less than twenty. The length of the limiting mechanism 8 is not less than one point and five centimeters. The section of the rotating rod 5 is T-shaped, and the rotating rod 5 is bonded with a pull rope 805 in the limiting mechanism 8. The rotating rod 5 is made of stainless steel. The section of the installation box 801 is circular, the wall thickness of the installation box 801 is not less than three millimeters, and the installation box 801 is adhered to the inner wall of the installation groove 7. The mounting case 801 is made of stainless steel. The outer wall of the limiting bead 804 is attached to the inner wall of the installation box 801, and the section of the sliding block 803 is T-shaped. The slider 803 is made of stainless steel.

The utility model discloses when using, hold locating lever 6, rotate dwang 5, dwang 5 drives stay cord 805 and removes to dwang 5 direction to bring into parent tube 3 direction with washing cover 1, thereby inside inserting the pipeline with parent tube 3, reverse locating lever 6 when placing suitable position, spring 802 drives slider 803 and resets, thereby drives and washs cover 1 and the laminating of pipe inner wall, is convenient for better wash pipe inner wall.

The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.

Claims

1. The utility model provides a diffusion furnace pipeline cleaning equipment, includes cleaning sleeve (1), its characterized in that: the cleaning device is characterized in that a plurality of cleaning blocks (2) are fixedly connected to the outer wall of the cleaning sleeve (1), a base pipe (3) is arranged on the inner wall of the cleaning sleeve (1), a limiting groove (4) is arranged in the base pipe (3), the bottom of the inner wall of the limiting groove (4) is rotatably connected with a rotating rod (5), a plurality of mounting grooves (7) are embedded in the peripheral side of the base pipe (3), the rotating rod (5) is fixedly connected with the inner wall of the cleaning sleeve (1) through the mounting grooves (7) and a limiting mechanism (8), and a positioning rod (6) is fixedly connected to one side of the base pipe (3);

stop gear (8) include install bin (801) with mounting groove (7) fixed connection, install bin (801) inner wall fixedly connected with spring (802), spring (802) other end fixedly connected with slider (803), slider (803) week side has inlayed a plurality of spacing pearl (804), slider (803) other end run through install bin (801) and with wash cover (1) inner wall fixed connection, one end fixedly connected with stay cord (805) that slider (803) are close to spring (802), stay cord (805) other end run through install bin (801) and with dwang (5) fixed connection.

2. The diffusion furnace pipe cleaning equipment according to claim 1, wherein: the section of the cleaning sleeve (1) is circular, and the cleaning sleeve (1) is bonded with the cleaning block (2).

3. The diffusion furnace pipe cleaning equipment according to claim 1, wherein: the section of parent tube (3) is circular, parent tube (3) are connected with dwang (5) rotation through the bearing.

4. The diffusion furnace pipe cleaning equipment according to claim 1, wherein: the section of mounting groove (7) is circular, mounting groove (7) inner wall bonds with stop gear (8).

5. The diffusion furnace pipe cleaning equipment according to claim 1, wherein: the number of the limiting mechanisms (8) is not less than twenty.

6. The diffusion furnace pipe cleaning device according to claim 1, wherein: the section of dwang (5) is "T" type, dwang (5) bond with stay cord (805) in stop gear (8).

7. The diffusion furnace pipe cleaning equipment according to claim 1, wherein: the section of installation case (801) is circular, the wall thickness of installation case (801) is not less than three millimeters, installation case (801) and mounting groove (7) inner wall bond.

8. The diffusion furnace pipe cleaning device according to claim 1, wherein: the outer wall of the limiting bead (804) is attached to the inner wall of the installation box (801), and the section of the sliding block (803) is T-shaped.