CN217876827U - Multifunctional vacuum oven - Google Patents

Abstract

The utility model discloses a multi-functional vacuum oven establishes monitoring device and transfer chamber on the box, establishes nitrogen gas inlet channel, air inlet channel, exhaust passage between box and the transfer chamber, and heating device and toast the chamber are established to the transfer intracavity. The utility model has the advantages that by arranging the monitoring device, the transfer cavity communicated with the baking cavity, the nitrogen inlet channel and the exhaust channel which can be automatically opened and closed, the baking oven can be charged with nitrogen for baking and conventional baking, the operation and the control are convenient, the dual-purpose of one machine is realized, the utilization rate of the baking machine is improved, and the economic cost and the management cost for purchasing the equipment are reduced; through arranging the through holes on the inner wall of the baking cavity, the gas communication between the baking cavity and the transfer cavity can be realized, and supporting plates can be conveniently erected according to actual conditions, so that the baking requirements of different types of products are met; through set up gaseous agitating unit in the transfer chamber, can accelerate gaseous flow to make the intracavity of toasting everywhere keep the gas of nearly the same concentration, ensure that the product quality after toasting keeps stable unanimous.

Description

Multifunctional vacuum oven

Technical Field

The utility model relates to a chip manufacturing technical field, in particular to multi-functional vacuum oven.

Background

In the chip package production process, after the chip D/B process, the substrate and the chip are generally placed in an oven for baking to accelerate the curing process, so that the chip is firmly attached to the substrate.

At present, in order to ensure the quality, a nitrogen oven is generally adopted for baking chips, nitrogen is used as protective gas to isolate products from air, and the products are prevented or delayed from being oxidized at a high temperature, but the oven has higher operation cost, so that a conventional air oven is still adopted when other products are baked. Therefore, the manufacturing enterprise generally needs to equip two ovens, but the utilization rate of the two ovens is not high, and the manpower, material resources and maintenance cost are increased.

To sum up, the utility model discloses improve oven inner structure, make it can be as the nitrogen gas oven, can be used as the air oven again.

SUMMERY OF THE UTILITY MODEL

To the problem that exists among the above-mentioned prior art, the utility model provides a multi-functional vacuum oven, the oven can fill nitrogen gas and toast and conventional toasting, and it is convenient to control, realizes a tractor serves two-purpose, improves the roaster utilization ratio, reduces equipment and purchases economic cost and administrative cost to can ensure to toast the back product quality and keep stable unanimous.

In order to solve the technical problem, the utility model discloses a technical scheme as follows:

a multifunctional vacuum oven comprises an oven body, wherein a monitoring device and a transfer cavity are arranged on the oven body, a nitrogen gas inlet channel, an air inlet channel and an exhaust channel are arranged between the oven body and the transfer cavity, and a heating device and a baking cavity are arranged in the transfer cavity; wherein:

the baking cavity is detachably and fixedly arranged on the transfer cavity, a plurality of through holes are arrayed on two side walls of the baking cavity, a plurality of supporting plates can be erected on the through holes, a baking frame can be erected on every two supporting plates, and a sealing door plate is arranged on one side of the baking cavity and hinged to the box body;

one open ends of the nitrogen inlet channel, the air inlet channel and the exhaust channel are arranged on the side wall of the box body, and the other open ends are arranged on the side wall of the middle containing cavity; control valves are arranged on the nitrogen gas inlet channel, the air inlet channel and the exhaust channel, and each control valve is electrically connected with the monitoring device;

heating device establishes bake out the outside of chamber, including more than one piece that generates heat, every generate heat the piece all with monitoring device electricity is connected.

The monitoring device comprises a nitrogen content detector, a time controller, a temperature controller, a power switch and a plurality of switch pieces.

As a further elaboration of the above technical solution:

in the above technical solution, an airflow stirring device is further disposed in the transfer chamber, the airflow stirring device includes more than one driving member, each driving member is connected to a stirring member in a transmission manner, and each stirring member is capable of rotating or translating in the transfer chamber under the driving of one driving member, so as to accelerate the flow of the gas in the transfer chamber.

In the above technical scheme, the exhaust channel is provided with an exhaust port and an air exhaust port, the exhaust port is arranged on the box body, the air exhaust port is connected with a vacuum pump through a pipeline, and the vacuum pump is electrically connected with the switch piece.

In the above technical solution, the exhaust port and the suction port are both provided with one control valve.

In the above technical solution, each of the control valves is an electromagnetic valve.

In the above technical scheme, the lower end of the box body is also provided with a plurality of universal wheels.

Compared with the prior art, the beneficial effects of the utility model reside in that: by arranging the monitoring device, the transfer cavity communicated with the baking cavity, and the nitrogen inlet channel and the exhaust channel which can be automatically opened and closed, the baking oven can be used for nitrogen-filled baking and conventional baking, is convenient to operate and control, realizes two purposes, improves the utilization rate of the baking machine, and reduces the economic cost and the management cost for purchasing equipment; through arranging the through holes on the inner wall of the baking cavity, the gas communication between the baking cavity and the transfer cavity can be realized, and supporting plates can be conveniently erected according to actual conditions, so that the baking requirements of different types of products are met; through set up gaseous agitating unit in the transfer chamber, can accelerate gaseous flow to make the intracavity of toasting everywhere keep the gas of nearly the same concentration, ensure that the product quality after toasting keeps stable unanimous.

Drawings

FIG. 1 is a schematic front view of the present embodiment;

FIG. 2 isbase:Sub>A schematic sectional view of A-A in FIG. 1

Fig. 3 is a schematic top view of the present embodiment.

In the figure: 10. a box body; 11. a sealing door panel; 20. a monitoring device; 22. a nitrogen content detector; 23. a time controller; 24. a temperature controller; 25. a power switch; 26. a switch member; 30. a transfer chamber; 40. a nitrogen gas inlet channel; 50. an air intake passage; 60. an exhaust passage; 61. an exhaust port; 62. an air extraction opening; 70. a heating device; 80. a baking chamber; 81. a through hole; 82. a supporting plate; 90. a gas agitating device; 91. a drive member; 92. a stirring member; 100. a universal wheel; 1. and (4) controlling the valve.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

The embodiments described by referring to the drawings are exemplary and intended to be used for explaining the present application and are not to be construed as limiting the present application. In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and thus should not be considered limiting. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise. In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral connections; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate. In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly above and obliquely above the second feature, or simply meaning that the first feature is at a lesser level than the second feature.

As shown in fig. 1-2, a multifunctional vacuum oven comprises an oven body 10, wherein a monitoring device 20 and a transfer cavity 30 are arranged on the oven body 10, a nitrogen gas inlet channel 40, an air inlet channel 50 and an exhaust channel 60 are arranged between the oven body 10 and the transfer cavity 30, and a heating device 70 and a baking cavity 80 are arranged in the transfer cavity 30; wherein:

the baking cavity 80 is detachably and fixedly arranged on the transfer cavity 30, a plurality of through holes 81 are arrayed on two side walls of the baking cavity, a plurality of supporting plates 82 can be erected on the plurality of through holes 81, a baking frame can be erected on every two supporting plates 82, a sealing door panel 11 is arranged on one side of the baking cavity 80, and the sealing door panel 11 is hinged on the box body 10;

one open ends of the nitrogen inlet channel 40, the air inlet channel 50 and the exhaust channel 60 are all arranged on the side wall of the box body 10, and the other open ends are all arranged on the side wall of the middle containing cavity 30; the nitrogen inlet channel 40, the air inlet channel 50 and the exhaust channel 60 are all provided with control valves 1, and each control valve 1 is electrically connected with the monitoring device 20;

the heating device 70 is disposed outside the baking chamber 80, and includes more than one heating element, and each heating element is electrically connected to the monitoring device 20.

The monitoring device 20 includes a nitrogen content detector 22, a time controller 23, a temperature controller 24, a power switch 25, and a plurality of switching elements 26.

When the nitrogen is filled for baking, air is pumped out of the oven, nitrogen is injected into the oven, the chemical inertia of the nitrogen is utilized, the wafer on the chip can be effectively prevented or delayed from being oxidized, meanwhile, the nitrogen can press the slightly warped wafer on the substrate, air bubbles between the wafer and the substrate are discharged, and the product quality is improved.

The utility model has the advantages that the monitoring device 20, the transfer cavity 30 communicated with the baking cavity 80, the nitrogen gas inlet channel and the exhaust channel 60 which can be automatically opened and closed are arranged, so that the baking oven can be used for baking by filling nitrogen gas and baking conventionally, the operation and the control are convenient, the dual-purpose is realized, the utilization rate of the baking oven is improved, and the economic cost and the management cost for purchasing equipment are reduced; through arranging the through holes 81 on the inner wall of the baking cavity 80, the gas communication between the baking cavity 80 and the transfer cavity 30 can be realized, and the supporting plates 82 can be erected conveniently according to actual conditions, so that the baking requirements of different types of products are met; through set up gaseous agitating unit 90 in transfer chamber 30, can accelerate the gaseous flow to keep the gas that nearly the same concentration is kept everywhere in the chamber 80 of toasting, ensure that the product quality keeps stable unanimous after toasting.

Specifically, the transfer chamber 30 is further provided with an airflow stirring device 90, the airflow stirring device 90 includes more than one driving element 91, each driving element 91 is connected to a stirring element 92 in a transmission manner, and each stirring element 92 can rotate or translate in the transfer chamber 30 under the driving of one driving element 91, so as to accelerate the flow of the gas in the transfer chamber 30.

Specifically, the exhaust passage 60 is provided with an exhaust port 61 and an exhaust port 62, the exhaust port 61 is provided on the casing 10, and the exhaust port 62 is connected to a vacuum pump through a pipeline, and the vacuum pump is electrically connected to a switch 26.

Specifically, the exhaust port 61 and the suction port 62 are provided with a control valve 1.

Specifically, each control valve 1 is an electromagnetic valve.

Specifically, the lower end of the box 10 is further provided with a plurality of universal wheels 100.

The utility model discloses a working process as follows:

placing products: the base plate to be baked with the chip is arranged on the baking frame, a plurality of supporting plates 82 are hung on through holes 81 on the side wall of the baking cavity 80 according to actual conditions, and finally the baking frame is erected between every two supporting plates 82. After completion, the sealing door panel 11 is closed.

And (3) nitrogen gas filling and baking: the power switch 25 is turned on, the baking time and temperature are set by the time controller 23 and the temperature controller 24, the nitrogen ratio parameter is set by the nitrogen content detector 22, and the exhaust port 61 is closed. After accomplishing, open each switch spare 26, control valve 1 of control extraction opening 62 department is opened, and the vacuum pump begins to extract the air in transit chamber 30 and the baking chamber 80, and the control valve 1 of nitrogen gas inlet channel 40 department is opened simultaneously, injects nitrogen gas into transit chamber 30, and nitrogen gas gets into the baking chamber 80 through a plurality of through-holes 81, and driving piece 91 begins to work simultaneously, drives stirring 92 operation in order to accelerate the internal gas flow of chamber. When the nitrogen content detector 22 detects that the concentration of nitrogen in the baking chamber 80 reaches a set value, a signal is sent to instruct the heating device 70 to start operating according to the set value of the temperature control device 24, and the time controller 23 starts baking timing. After completion, the monitoring device 20 instructs the heating device 70, the gas agitating device 90, and the vacuum pump to stop operating, instructs the suction port 62 to close, closes the nitrogen gas inlet passage 40, and opens the exhaust port 61. After the completion, open sealed door plant 11 and take out the griddle can.

And (3) conventional baking: the operation method is substantially the same as above, and only the nitrogen gas inlet passage 40 needs to be closed and the air inlet passage 50 needs to be opened, and the heating device 70 is instructed to operate in synchronization with the vacuum pump and the airflow stirring device 90.

The above is not intended to limit the technical scope of the present invention, and any modifications, equivalent changes and modifications made to the above embodiments according to the technical spirit of the present invention are all within the scope of the technical solution of the present invention.

Claims (6)

1. A multifunctional vacuum oven comprises an oven body and is characterized in that a monitoring device and a transfer cavity are arranged on the oven body, a nitrogen gas inlet channel, an air inlet channel and an exhaust channel are arranged between the oven body and the transfer cavity, and a heating device and a baking cavity are arranged in the transfer cavity; wherein:

the baking cavity is detachably and fixedly arranged on the transfer cavity, a plurality of through holes are arrayed on two side walls of the baking cavity, a plurality of supporting plates can be erected on the through holes, a baking frame can be erected on every two supporting plates, and a sealing door plate is arranged on one side of the baking cavity and hinged to the box body;

one open ends of the nitrogen inlet channel, the air inlet channel and the exhaust channel are arranged on the side wall of the box body, and the other open ends are arranged on the side wall of the transfer cavity; control valves are arranged on the nitrogen gas inlet channel, the air inlet channel and the exhaust channel, and each control valve is electrically connected with the monitoring device;

the heating device is arranged on the outer side of the baking cavity and comprises more than one heating piece, and each heating piece is electrically connected with the monitoring device;

the monitoring device comprises a nitrogen content detector, a time controller, a temperature controller, a power switch and a plurality of switch pieces.

2. The multifunctional vacuum oven as claimed in claim 1, wherein the transfer chamber further comprises an air flow stirring device, the air flow stirring device comprises more than one driving member, each driving member is connected to a stirring member in a driving manner, and each stirring member can rotate or translate in the transfer chamber under the driving of one driving member, so as to accelerate the flow of the air in the transfer chamber.

3. The multifunctional vacuum oven as claimed in claim 1, wherein the exhaust channel is provided with an exhaust port and an air exhaust port, the exhaust port is provided on the oven body, the air exhaust port is connected with a vacuum pump through a pipeline, and the vacuum pump is electrically connected with a switch member.

4. A multi-function vacuum oven as claimed in claim 3, wherein said exhaust port and said suction port are provided with said control valve.

5. The multi-function vacuum oven as claimed in claim 1, wherein each of said control valves is a solenoid valve.

6. The multifunctional vacuum oven as claimed in any one of claims 1 to 5, wherein the lower end of the oven body is further provided with a plurality of universal wheels.

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