CN217860667U - Chip polishing machine suitable for various thicknesses - Google Patents

Abstract

The utility model belongs to the field of chip production equipment, in particular to a chip polishing machine suitable for various thicknesses, aiming at the problem that the existing chips with different thicknesses cannot be polished; the polishing liquid needs to be repeatedly applied to the polishing cloth to reduce the working efficiency. The following scheme is proposed now, which includes a base plate, a polishing box is fixedly connected to the top of the base plate, a fixing plate is fixedly connected to the top of the base plate, and a protection box is fixedly connected to one side of the fixing plate, including a A lifting mechanism, the lifting mechanism is fixedly connected with a reinforcement plate, the bottom of the reinforcement plate is fixedly connected with a fixed box, and one side of the fixed box is fixedly connected with a placement box for storing polishing liquid; The polishing mechanism used for chip polishing in the box can polish chips of different thickness through the lifting mechanism, and the chip can be polished through the polishing mechanism to improve work efficiency.

Description

A Chip Polishing Machine Applicable to Multiple Thicknesses

technical field

The utility model relates to the technical field of chip production equipment, in particular to a chip polishing machine suitable for various thicknesses.

Background technique

The invention of the semiconductor chip was a pioneering work of the twentieth century that ushered in the information age. In recent years, with the rapid development of the domestic semiconductor chip manufacturing industry and the successive production of many world-renowned semiconductor chip manufacturers in China, the application of some key technologies in the semiconductor chip manufacturing process has attracted more and more attention. The most important process frequently used in the semiconductor chip manufacturing process and one of the key technologies to maintain the overall and partial planarization of semiconductor chips, semiconductor chip polishing has received high attention.

The notification number CN 205310072 U discloses a chip polishing machine, which includes a fixed frame on which a motor and an adjustment switch are installed, an upper plate is arranged on the top of the fixed frame, and a semicircular hole is arranged on the upper plate, the motor is a hollow shaft motor, and the drive shaft of the motor is Set the hollow shaft, set the universal joint under the hollow shaft, set the suction pipe at the bottom of the universal joint, set the suction machine at one end of the suction pipe, set the cover plate at the top of the hollow shaft, set a through hole on the cover plate, and connect the cover plate and the hollow shaft with bolts , the upper bearing seat is set at the joint between the hollow shaft and the upper table, and the lower bearing seat is set at the joint between the motor and the fixed frame. There are following problems in this technical scheme:

1. Chips with different thicknesses cannot be polished;

2. The polishing liquid needs to be repeatedly applied to the polishing cloth, which reduces work efficiency. Therefore, we propose a chip polishing machine suitable for various thicknesses to solve the above problems.

Utility model content

The purpose of this utility model is to solve the disadvantages in the prior art that chips of different thicknesses cannot be polished; the polishing liquid needs to be repeatedly applied on the polishing cloth to reduce work efficiency, and proposes a chip polishing machine suitable for various thicknesses .

In order to achieve the above object, the utility model adopts the following technical solutions:

A chip polishing machine applicable to various thicknesses, comprising a bottom plate, a polishing box is fixedly connected to the top of the bottom plate, a fixing plate is fixedly connected to the top of the bottom plate, and a protection box is fixedly connected to one side of the fixing plate,

It includes a lifting mechanism arranged in the protection box, the lifting mechanism is fixedly connected with a reinforcement plate, the bottom of the reinforcement plate is fixedly connected with a fixed box, and one side of the fixed box is fixedly connected with a storage box for storing polishing liquid ;

It also includes a polishing mechanism for chip polishing arranged in the fixed box, the polishing box is provided with a fixing mechanism for fixing the chip, and a collection box for collecting the polishing liquid is placed on the top of the bottom plate, and the lifting mechanism can be used for Chips with different thicknesses are polished, and the chips can be polished by the polishing mechanism to improve work efficiency.

Preferably, the lifting mechanism includes a first motor, a screw and a screw nut, and a long hole is opened on one side of the protection box, and the top of the first motor is fixedly connected to the top inner wall of the protection box, so that The top of the screw rod is fixedly connected with the output shaft of the first motor, the screw nut is threadedly connected with the screw rod, the bottom end of the screw rod is connected with the bottom inner wall of the protection box in rotation, and one side of the reinforcing plate is connected with the One side of the screw nut is fixedly connected, the rotation of the output end of the first motor drives the rotation of the screw rod, and the rotation of the screw rod makes the screw nut move longitudinally, and at the same time drives the reinforcement plate, the fixing box, the second motor, the polishing wheel, the placement The vertical movement of the box and the output tube can adjust the longitudinal position of the polishing wheel, which is convenient for polishing chips with different thicknesses.

Preferably, the polishing mechanism includes a second motor, a polishing wheel and a concave ring, the bottom of the second motor is fixedly connected to the bottom inner wall of the fixed box, and the output end of the second motor passes through the fixed box and connects with the polishing The top of the wheel is fixedly connected, the bottom of the concave ring is fixedly connected with the top of the polishing wheel, the inner wall of the bottom of the concave ring and the bottom of the polishing wheel are all provided with a plurality of round holes, and the bottom of the fixed box is fixedly connected with a square One side of the square plate is provided with a square hole, the bottom of the storage box is provided with an output tube, one end of the output tube runs through the square plate and extends into the concave ring, and the output end of the second motor drives the polishing wheel and When the concave ring rotates, the polishing liquid will flow to the chip through multiple circular holes when the polishing wheel is rotating, so as to polish the chip and improve work efficiency.

Preferably, the fixing mechanism includes an air extractor, a hollow column and an air intake pipe, one side of the air extractor is fixedly connected to one side of the polishing box, and the bottom of the hollow column is fixedly connected to the bottom inner wall of the polishing box , the top of the hollow column is provided with a plurality of suction holes, the two ends of the air intake pipe are respectively fixedly connected with one side of the hollow column and the top of the air extractor, and one side of the polishing box is provided with a liquid discharge pipe , the other end of the drain pipe is located above the collection box, the air pump will suck the air in the hollow column through the intake pipe, and then the chip will be sucked on the hollow column, so as to fix the chip and polish the used polishing Fluid will flow into the polishing box and then through the drain tube to the collection box.

Preferably, one side of the fixing plate is provided with two grooves, one side of the reinforcing plate is fixedly connected with a support bar, one side of the two support bars is fixedly connected with a slider, and the sides of the two sliders One side is slidably connected with the inner walls of the two grooves respectively, and the frictional force of the support bar is reduced when moving through the groove and the slider, and the movement is smoother.

Preferably, the material of the output pipe and the drain pipe is a PPR pipe, and the material of the placement box is transparent glass, and the transparent glass material can clearly see how much polishing fluid there is. The output pipe and the drain pipe are PPR material, PPR material is hard enough to shape, environmental protection.

Beneficial effects: due to the arrangement of the first motor, the rotation of the output end of the first motor drives the rotation of the screw rod, and the rotation of the screw rod makes the screw nut move longitudinally, and also drives the longitudinal movement of the reinforcing plate, the fixing box, and the polishing wheel, so that The longitudinal position of the polishing wheel can be adjusted to facilitate polishing of chips of different thicknesses;

Since the second motor and the polishing liquid are set, the output end of the second motor drives the rotation of the polishing wheel and the concave ring. When the polishing wheel rotates, the polishing liquid will flow to the chip through a plurality of circular holes, thereby polishing the chip. ,Improve work efficiency;

The utility model has a reasonable structure, can polish chips with different thicknesses through the lifting mechanism, and can polish the chips through the polishing mechanism, thereby improving work efficiency.

Description of drawings

Fig. 1 is a schematic front view of a chip polishing machine suitable for various thicknesses proposed by the present invention;

Fig. 2 is a schematic diagram of a threaded mandrel of a chip polishing machine suitable for various thicknesses proposed by the present invention;

Fig. 3 is a schematic diagram of an air extractor of a chip polishing machine suitable for various thicknesses proposed by the utility model;

Fig. 4 is a schematic diagram of the second motor of a chip polishing machine applicable to various thicknesses proposed by the utility model.

In the figure: 1. Base plate; 2. Fixed plate; 3. Air pump; 4. Polishing box; 5. Collection box; 6. Protection box; 7. First motor; 8. Reinforcement plate; 9. Placement box; 10 , hollow column; 11, intake pipe; 12, fixed box; 13, second motor; 14, polishing wheel; 15, concave ring; 16, output pipe; 17, drain pipe; 18, screw mandrel; 19, wire Rod nut; 20, slide block; 21, groove.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. example.

Embodiment one

Referring to Figures 1-4, a chip polishing machine suitable for various thicknesses includes a bottom plate 1, a polishing box 4 is fixedly connected to the top of the bottom plate 1, a fixed plate 2 is fixedly connected to the top of the bottom plate 1, and one side of the fixed plate 2 is fixed A protective box 6 is connected, including a lifting mechanism arranged in the protective box 6. A reinforcing plate 8 is fixedly connected to the lifting mechanism. The bottom of the reinforcing plate 8 is fixedly connected with a fixed box 12, and one side of the fixed box 12 is fixedly connected with a The placement box 9 of the polishing solution; also includes a polishing mechanism for chip polishing arranged in the fixed box 12, a fixing mechanism for fixing the chip is provided in the polishing box 4, and a collection box for collecting the polishing solution is placed on the top of the bottom plate 1 5. Chips with different thicknesses can be polished through the lifting mechanism, and chips can be polished through the polishing mechanism to improve work efficiency.

Embodiment two

Improvement on the basis of Embodiment 1: a chip polishing machine suitable for various thicknesses, including a bottom plate 1, a polishing box 4 is fixedly connected to the top of the bottom plate 1, a fixed plate 2 is fixedly connected to the top of the bottom plate 1, and the fixed plate 2 One side is fixedly connected with a protection box 6, including a lifting mechanism arranged in the protection box 6. The lifting mechanism includes a first motor 7, a screw mandrel 18 and a screw nut 19, and one side of the protection box 6 is provided with an elongated hole. The top of the first motor 7 is fixedly connected with the top inner wall of the protection box 6, the top of the screw mandrel 18 is fixedly connected with the output shaft of the first motor 7, the screw mandrel nut 19 is threaded with the screw mandrel 18, and the bottom of the screw mandrel 18 is connected with the screw mandrel 18. The inner wall of the bottom of the protection box 6 is rotationally connected, and one side of the reinforcing plate 8 is fixedly connected with one side of the screw nut 19. The rotation of the output end of the first motor 7 drives the rotation of the screw mandrel 18, and the rotation of the screw mandrel 18 makes the screw mandrel nut 19 rotate. 19 moves longitudinally, and simultaneously drives the longitudinal movement of reinforcing plate 8, fixed box 12, second motor 13, polishing wheel 14, placement box 9, output pipe 16, can adjust the longitudinal position of polishing wheel 14 like this, is convenient to different Thickness chips are polished, and the lifting mechanism is fixedly connected with a reinforcement plate 8, and one side of the fixed plate 2 is provided with two grooves 21, and one side of the reinforcement plate 8 is fixedly connected with a support bar, and one side of the two support bars Both are fixedly connected with sliders 20, and one side of the two sliders 20 is slidably connected with the inner walls of the two grooves 21, and the grooves 21 and the sliders 20 reduce friction when the support bar moves, making the movement more smooth , the bottom of the reinforcement plate 8 is fixedly connected with a fixed box 12, and one side of the fixed box 12 is fixedly connected with a placement box 9 for storing polishing liquid; it also includes a polishing mechanism for chip polishing arranged in the fixed box 12, and the polishing mechanism Comprising a second motor 13, a polishing wheel 14 and a concave ring 15, the bottom of the second motor 13 is fixedly connected to the bottom inner wall of the fixed box 12, and the output end of the second motor 13 runs through the fixed box 12 and is connected to the top of the polishing wheel 14 Fixedly connected, the bottom of the concave ring 15 is fixedly connected with the top of the polishing wheel 14, the inner wall of the bottom of the concave ring 15 and the bottom of the polishing wheel 14 are provided with a plurality of round holes, the bottom of the fixed box 12 is fixedly connected with a square plate, the square plate One side is provided with a square hole, and the bottom of the placement box 9 is provided with an output pipe 16, and one end of the output pipe 16 runs through the square plate and extends into the concave ring 15, and the output end of the second motor 13 drives the polishing wheel 14 and the concave ring. When the ring 15 rotates, the polishing liquid will flow to the chip through a plurality of circular holes when the polishing wheel 14 rotates, thereby polishing the chip and improving work efficiency. The polishing box 4 is provided with a fixing mechanism for fixing the chip. The fixing mechanism includes There are air extractor 3, hollow column 10 and intake pipe 11, one side of air extractor 3 is fixedly connected with one side of polishing box 4, the bottom of hollow column 10 is fixedly connected with the bottom inner wall of polishing box 4, and the bottom inner wall of hollow column 10 The top is provided with a plurality of suction holes, and the two ends of the air inlet pipe 11 are fixedly connected with one side of the hollow column 10 and the top of the air extractor 3 respectively, and one side of the polishing box 4 is provided with a drain pipe 17, an output pipe 16 and The material of the discharge pipe 17 is a PPR pipe, The material of the placement box 9 is transparent glass, and the transparent glass material can clearly see how much polishing liquid is left. The output pipe 16 and the drain pipe 17 are made of PPR material. The PPR material is hard enough to be shaped and environmentally friendly. The drain pipe 17 is another One end is located above the collection box 5, and the air extractor 3 will suck the air in the hollow column 10 through the air intake pipe 11, and then suck the chip on the hollow column 10, thereby fixing the chip and polishing the used polishing solution Will flow into the polishing box 4, then flow into the collection box 5 through the drain pipe 17, the top of the bottom plate 1 is placed with a collection box 5 for collecting the polishing liquid,

The working principle of the utility model: when starting to use, place the chip to be polished on the hollow column 10, then turn on the air extractor 3, and the air extractor 3 will suck the air in the hollow column 10 through the intake pipe 11, and then The chip will be sucked on the hollow column 10 to fix the chip, and then the first motor 7 will be started, the rotation of the output end of the first motor 7 will drive the rotation of the screw 18, and the rotation of the screw 18 will make the screw nut 19 move longitudinally At the same time, the longitudinal movement of the reinforcement plate 8, the fixed box 12, the second motor 13, the polishing wheel 14, the placement box 9, and the output pipe 16 is driven, so that the longitudinal position of the polishing wheel 14 can be adjusted, which is convenient for chips of different thicknesses. Polishing, when the polishing wheel 14 is attached to the chip, the polishing liquid is poured into the placement box 9, the polishing liquid will flow into the concave ring 15 through the output pipe 16, and then the second motor 13 is turned on, and the output of the second motor 13 The end drives the rotation of the polishing wheel 14 and the concave ring 15. When the polishing wheel 14 rotates, the polishing liquid will flow to the chip through a plurality of circular holes, thereby polishing the chip and improving work efficiency. The used polishing liquid will be Flow into the polishing box 4, then flow into the collection box 5 through the drain pipe 17, because the placement box 9 is made of transparent glass, you can clearly see how much polishing fluid there is, because the output pipe 16 and the drain pipe 17 are PPR material, PPR material is hard enough to shape, environmental protection.

However, as is well known to those skilled in the art, the working principles and wiring methods of the air extractor 3, the first motor 7 and the second motor 13 are commonplace, and they all belong to conventional means or common knowledge, and will not be repeated here. , those skilled in the art can make arbitrary selections according to their needs or convenience.

The above is only a preferred embodiment of the present utility model, but the scope of protection of the present utility model is not limited thereto. Anyone familiar with the technical field is within the technical scope disclosed by the utility model. Any equivalent replacement or change of the technical solution and the concept of the utility model shall fall within the scope of protection of the utility model.

Claims (6)

1. A chip polishing machine applicable to various thicknesses, comprising a base plate (1), the top of the base plate (1) is fixedly connected with a polishing box (4), and the top of the base plate (1) is fixedly connected with a fixed plate ( 2), one side of the fixed plate (2) is fixedly connected with a protective box (6), which is characterized in that: It includes a lifting mechanism arranged in the protection box (6), a reinforcing plate (8) is fixedly connected to the lifting mechanism, a fixed box (12) is fixedly connected to the bottom of the reinforcing plate (8), and the fixed box ( One side of 12) is fixedly connected with a placement box (9) for storing the polishing solution; It also includes a polishing mechanism for chip polishing arranged in the fixed box (12), the polishing box (4) is provided with a fixing mechanism for fixing the chip, and the top of the bottom plate (1) is placed for collecting the polishing liquid. collection box (5). 2. A chip polishing machine suitable for various thicknesses according to claim 1, characterized in that: the lifting mechanism includes a first motor (7), a screw (18) and a screw nut (19), One side of the protection box (6) is provided with an elongated hole, the top of the first motor (7) is fixedly connected to the top inner wall of the protection box (6), and the top of the screw rod (18) is connected to the first The output shaft of the motor (7) is fixedly connected, the screw nut (19) is threadedly connected with the screw mandrel (18), and the bottom end of the screw mandrel (18) is rotatably connected with the bottom inner wall of the protection box (6). One side of the reinforcing plate (8) is fixedly connected with one side of the screw nut (19). 3. A chip polishing machine suitable for multiple thicknesses according to claim 1, characterized in that: said polishing mechanism includes a second motor (13), a polishing wheel (14) and a concave ring (15), The bottom of the second motor (13) is fixedly connected with the bottom inner wall of the fixed box (12), and the output end of the second motor (13) passes through the fixed box (12) and is fixedly connected with the top of the polishing wheel (14) , the bottom of the concave ring (15) is fixedly connected with the top of the polishing wheel (14), the inner wall of the bottom of the concave ring (15) and the bottom of the polishing wheel (14) are provided with a plurality of circular holes, the fixed The bottom of the box (12) is fixedly connected with a square plate, one side of the square plate is provided with a square hole, the bottom of the placement box (9) is provided with an output pipe (16), and one end of the output pipe (16) runs through the square plate And extend in the concave ring (15). 4. A chip polishing machine suitable for various thicknesses according to any one of claims 1-3, characterized in that: the fixing mechanism includes an air extractor (3), a hollow column (10) and an air intake pipe (11), one side of the air extractor (3) is fixedly connected to one side of the polishing box (4), the bottom of the hollow column (10) is fixedly connected to the bottom inner wall of the polishing box (4), the The top of the hollow column (10) is provided with a plurality of suction holes, and the two ends of the air intake pipe (11) are respectively fixedly connected with one side of the hollow column (10) and the top of the air extractor (3), and the polished One side of the box (4) is provided with a drain pipe (17), and the other end of the drain pipe (17) is located above the collection box (5). 5. A chip polishing machine suitable for various thicknesses according to claim 1, characterized in that two grooves (21) are opened on one side of the fixing plate (2), and the reinforcing plate (8 ) is fixedly connected with a support bar, one side of the two support bars is fixedly connected with a slider (20), and one side of the two sliders (20) slides with the inner walls of the two grooves (21) respectively connect. 6. A kind of chip polishing machine applicable to multiple thicknesses according to claim 3, characterized in that: the material of the output pipe (16) and the drain pipe (17) is a PPR pipe, and the placement box ( 9) The material is transparent glass.

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