CN217860667U

CN217860667U - Chip polishing machine suitable for various thicknesses

Info

Publication number: CN217860667U
Application number: CN202222070346.1U
Authority: CN
Inventors: 胡敬祥; 邱祥文; 王选; 胡旭南
Original assignee: SHENZHEN FONDA GRINDING TECHNOLOGY CO LTD
Current assignee: SHENZHEN FONDA GRINDING TECHNOLOGY CO LTD
Priority date: 2022-08-08
Filing date: 2022-08-08
Publication date: 2022-11-22
Anticipated expiration: 2032-08-08

Abstract

The utility model belongs to the field of chip production equipment, in particular to a chip polishing machine applicable to various thicknesses, which aims at the problem that the existing chips with different thicknesses can not be polished; the polishing solution needs to be repeatedly coated on polishing cloth, so that the problem of working efficiency is reduced, and the following scheme is provided, wherein the polishing solution comprises a bottom plate, the top of the bottom plate is fixedly connected with a polishing box, the top of the bottom plate is fixedly connected with a fixing plate, one side of the fixing plate is fixedly connected with a protection box, the protection box comprises a lifting mechanism arranged in the protection box, the lifting mechanism is fixedly connected with a reinforcing plate, the bottom of the reinforcing plate is fixedly connected with a fixing box, and one side of the fixing box is fixedly connected with a placing box for storing the polishing solution; still including setting up the polishing mechanism who is used for the chip polishing in fixed incasement, can polish for the chip of different thickness through elevating system, can polish the chip through polishing mechanism, improve work efficiency.

Description

Chip polishing machine suitable for various thicknesses

Technical Field

The utility model relates to a chip production facility technical field especially relates to a chip polishing machine who is suitable for multiple thickness.

Background

The invention of semiconductor chips was an initiative in the twentieth century, which opened the way to the information age. In recent years, with the rapid development of the domestic semiconductor chip manufacturing industry and the successive commissioning of many world-known semiconductor chip manufacturers in domestic factories, the application of some key technologies in the semiconductor chip manufacturing process has attracted more and more attention, and semiconductor chip polishing has received a high attention as one of the most important processes frequently used in the semiconductor chip manufacturing process and key technologies for maintaining the global and local planarization of semiconductor chips.

Notice No. CN 205310072U discloses a chip burnishing machine, which comprises a fixed frame, install motor and regulating switch on the mount, the mount top sets up the platen, set up the semicircle orifice on the upper platen, the motor is the hollow shaft motor, set up the hollow shaft on the motor drive shaft, the hollow shaft below sets up universal joint, the universal joint bottom sets up the exhaust tube, exhaust tube one end sets up the air extractor, the hollow shaft top sets up the apron, set up the through-hole on the apron, apron and hollow shaft bolted connection, the hollow shaft sets up bolster bearing housing with the upper platen junction, the motor sets up the step with the mount junction. The technical scheme has the following problems:

1. chips with different thicknesses cannot be polished;

2. the polishing solution needs to be repeatedly coated on the polishing cloth, and the working efficiency is reduced. Therefore, we propose a chip polisher suitable for various thicknesses to solve the above problems.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the problem that the prior art can not polish chips with different thicknesses; the polishing solution needs to be repeatedly coated on the polishing cloth, so that the defect of low working efficiency is overcome, and the chip polishing machine suitable for various thicknesses is provided.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a chip polishing machine applicable to various thicknesses comprises a bottom plate, wherein a polishing box is fixedly connected to the top of the bottom plate, a fixing plate is fixedly connected to the top of the bottom plate, a protection box is fixedly connected to one side of the fixing plate,

the polishing device comprises a lifting mechanism arranged in a protective box, wherein a reinforcing plate is fixedly connected to the lifting mechanism, a fixed box is fixedly connected to the bottom of the reinforcing plate, and a placing box for storing polishing solution is fixedly connected to one side of the fixed box;

still including setting up the polishing mechanism who is used for the chip polishing in fixed incasement, be equipped with the fixed establishment who is used for fixed chip in the polishing box, the collection box that is used for collecting the polishing solution is placed at the top of bottom plate, can polish for the chip of different thickness through elevating system, can polish the chip through polishing mechanism, improves work efficiency.

Preferably, the lifting mechanism comprises a first motor, a screw rod and a screw rod nut, one side of the protection box is provided with an elongated hole, the top of the first motor is fixedly connected with the inner wall of the top of the protection box, the top end of the screw rod is fixedly connected with an output shaft of the first motor, the screw rod nut is in threaded connection with the screw rod, the bottom end of the screw rod is rotatably connected with the inner wall of the bottom of the protection box, one side of the reinforcing plate is fixedly connected with one side of the screw rod nut, the screw rod is driven to rotate by the rotation of the output end of the first motor, the screw rod nut is longitudinally moved by the rotation of the screw rod, the reinforcing plate, the fixing box, the second motor, the polishing wheel, the placing box and the output pipe are simultaneously moved longitudinally, so that the longitudinal position of the polishing wheel can be adjusted, and chips with different thicknesses can be conveniently polished.

Preferably, polishing mechanism is including second motor, throwing aureola and concave type ring, the bottom of second motor and the bottom inner wall fixed connection of fixed case, the output of second motor run through fixed case and with the top fixed connection of throwing aureola, the bottom of concave type ring and the top fixed connection of throwing aureola, a plurality of round holes have all been seted up to concave type ring bottom inner wall and throwing aureola bottom, the bottom fixedly connected with square plate of fixed case, square plate one side have been seted up the square hole, the bottom of placing the box is equipped with the output tube, the one end of output tube runs through the square plate and extends to in the concave type ring, and the output of second motor has driven the rotation of throwing aureola and concave type ring, and the polishing solution can flow to the chip through a plurality of round holes when the throwing aureola rotates to polish the chip, improve work efficiency.

Preferably, the fixing mechanism comprises an air pump, a hollow column and an air inlet pipe, one side of the air pump is fixedly connected with one side of the polishing box, the bottom of the hollow column is fixedly connected with the inner wall of the bottom of the polishing box, a plurality of air suction holes are formed in the top of the hollow column, two ends of the air inlet pipe are respectively fixedly connected with one side of the hollow column and the top of the air pump, a liquid discharge pipe is arranged on one side of the polishing box, the other end of the liquid discharge pipe is located above the collecting box, the air in the hollow column can be sucked away through the air inlet pipe by the air pump, then the chip can be sucked onto the hollow column, the chip is fixed, and polishing liquid used for polishing can flow into the polishing box and then flow into the collecting box through the liquid discharge pipe.

Preferably, two recesses have been seted up to one side of fixed plate, the equal fixedly connected with support bar in one side of gusset plate, the equal fixedly connected with slider in one side of two support bars, one side of two sliders respectively with the inner wall sliding connection of two recesses, make the support bar reduce frictional force when removing through recess and slider, remove more smoothly.

Preferably, the material of output tube and fluid-discharge tube is the PPR pipe, the material of placing the box is clear glass, clear glass material, and what the polishing solution is still what can be clearly seen, output tube and fluid-discharge tube are the PPR material, and the PPR material is enough hard can be stereotyped, the environmental protection.

Has the advantages that: the first motor is arranged, the rotation of the output end of the first motor drives the screw rod to rotate, the rotation of the screw rod enables the screw rod nut to move longitudinally, and the longitudinal movement of the reinforcing plate, the fixing box and the polishing wheel is also driven, so that the longitudinal position of the polishing wheel can be adjusted, and chips with different thicknesses can be polished conveniently;

due to the arrangement of the second motor and the polishing liquid, the output end of the second motor drives the polishing wheel and the concave circular ring to rotate, and the polishing liquid can flow onto the chip through the circular holes when the polishing wheel rotates, so that the chip is polished, and the working efficiency is improved;

the utility model discloses it is rational in infrastructure, can polish for the chip of different thickness through elevating system, can polish the chip through polishing the mechanism, improve work efficiency.

Drawings

Fig. 1 is a schematic front view of a chip polishing machine suitable for various thicknesses provided by the present invention;

fig. 2 is a schematic diagram of a lead screw suitable for a chip polishing machine with various thicknesses provided by the present invention;

FIG. 3 is a schematic view of an air extractor suitable for a chip polishing machine with various thicknesses according to the present invention;

fig. 4 is a schematic diagram of a second motor of the chip polishing machine suitable for various thicknesses provided by the present invention.

In the figure: 1. a base plate; 2. a fixing plate; 3. an air extractor; 4. polishing the box; 5. a collection box; 6. a protection box; 7. a first motor; 8. a reinforcing plate; 9. placing a box; 10. a hollow column; 11. an air inlet pipe; 12. a stationary box; 13. a second motor; 14. a polishing wheel; 15. a concave circular ring; 16. an output pipe; 17. a liquid discharge pipe; 18. a screw rod; 19. a feed screw nut; 20. a slider; 21. and (4) a groove.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Example one

Referring to fig. 1-4, a chip polishing machine suitable for various thicknesses comprises a base plate 1, a polishing box 4 fixedly connected to the top of the base plate 1, a fixing plate 2 fixedly connected to the top of the base plate 1, and a protection box 6 fixedly connected to one side of the fixing plate 2, and comprises a lifting mechanism arranged in the protection box 6, wherein a reinforcing plate 8 is fixedly connected to the lifting mechanism, a fixing box 12 is fixedly connected to the bottom of the reinforcing plate 8, and a placing box 9 for storing polishing liquid is fixedly connected to one side of the fixing box 12; still including setting up the polishing mechanism who is used for the chip polishing in fixed case 12, be equipped with the fixed establishment who is used for fixed chip in the polishing box 4, the collection box 5 that is used for collecting the polishing solution is placed at the top of bottom plate 1, can polish for the chip of different thickness through elevating system, can polish the chip through polishing mechanism, improves work efficiency.

Example two

The improvement on the basis of the first embodiment: a chip polishing machine applicable to various thicknesses comprises a base plate 1, a polishing box 4 is fixedly connected to the top of the base plate 1, a fixing plate 2 is fixedly connected to the top of the base plate 1, a protection box 6 is fixedly connected to one side of the fixing plate 2, and the chip polishing machine comprises a lifting mechanism arranged in the protection box 6, wherein the lifting mechanism comprises a first motor 7, a screw rod 18 and a screw rod nut 19, a long hole is formed in one side of the protection box 6, the top of the first motor 7 is fixedly connected with the inner wall of the top of the protection box 6, the top end of the screw rod 18 is fixedly connected with an output shaft of the first motor 7, the screw rod nut 19 is in threaded connection with the screw rod 18, the bottom end of the screw rod 18 is rotatably connected with the inner wall of the bottom of the protection box 6, one side of a reinforcing plate 8 is fixedly connected with one side of the screw rod nut 19, and the rotation of the output end of the first motor 7 drives the screw rod 18 to rotate, the rotation of the screw rod 18 enables a screw rod nut 19 to move longitudinally, and meanwhile drives the reinforcing plate 8, the fixing box 12, the second motor 13, the polishing wheel 14, the placing box 9 and the output pipe 16 to move longitudinally, so that the longitudinal position of the polishing wheel 14 can be adjusted, chips with different thicknesses can be conveniently polished, the reinforcing plate 8 is fixedly connected onto a lifting mechanism, two grooves 21 are formed in one side of the fixing plate 2, supporting strips are fixedly connected to one side of the reinforcing plate 8, sliders 20 are fixedly connected to one sides of the two supporting strips, one sides of the two sliders 20 are respectively connected with the inner walls of the two grooves 21 in a sliding mode, friction force of the supporting strips is reduced during movement through the grooves 21 and the sliders 20, the movement is smoother, the fixing box 12 is fixedly connected to the bottom of the reinforcing plate 8, and the placing box 9 for storing polishing liquid is fixedly connected to one side of the fixing box 12; the polishing device also comprises a polishing mechanism which is arranged in the fixed box 12 and used for polishing the chip, the polishing mechanism comprises a second motor 13, a polishing wheel 14 and a concave ring 15, the bottom of the second motor 13 is fixedly connected with the inner wall at the bottom of the fixed box 12, the output end of the second motor 13 penetrates through the fixed box 12 and is fixedly connected with the top of the polishing wheel 14, the bottom of the concave ring 15 is fixedly connected with the top of the polishing wheel 14, a plurality of round holes are respectively arranged on the inner wall at the bottom of the concave ring 15 and the bottom of the polishing wheel 14, a square plate is fixedly connected with the bottom of the fixed box 12, a square hole is arranged on one side of the square plate, an output pipe 16 is arranged at the bottom of the placing box 9, one end of the output pipe 16 penetrates through the square plate and extends into the concave ring 15, the output end of the second motor 13 drives the polishing wheel 14 and the concave ring 15 to rotate, polishing liquid can flow onto the chip through the plurality of round holes when the polishing wheel 14 rotates, thereby polishing the chip, improving the work efficiency, arranging a fixing mechanism for fixing the chip in the polishing box 4, wherein the fixing mechanism comprises an air pump 3, a hollow column 10 and an air inlet pipe 11, one side of the air pump 3 is fixedly connected with one side of the polishing box 4, the bottom of the hollow column 10 is fixedly connected with the inner wall of the bottom of the polishing box 4, the top of the hollow column 10 is provided with a plurality of air suction holes, the two ends of the air inlet pipe 11 are respectively fixedly connected with one side of the hollow column 10 and the top of the air pump 3, one side of the polishing box 4 is provided with a liquid discharge pipe 17, the output pipe 16 and the liquid discharge pipe 17 are both made of PPR pipes, the placing box 9 is made of transparent glass and transparent glass, the amount of the polishing liquid can be clearly seen, the output pipe 16 and the liquid discharge pipe 17 are made of PPR, the PPR material is hard enough to be shaped and is environment-friendly, the other end of the liquid discharge pipe 17 is positioned above the collecting box 5, the air pump 3 sucks the air in the hollow column 10 through the air inlet pipe 11 and then sucks the chip on the hollow column 10, so that the chip is fixed, the polishing solution used for polishing flows into the polishing box 4 and then flows into the collecting box 5 through the liquid discharge pipe 17, the collecting box 5 for collecting the polishing solution is placed at the top of the bottom plate 1,

the utility model discloses theory of operation: when the polishing machine is to be used, a chip to be polished is placed on the hollow column 10, the air pump 3 is started afterwards, the air pump 3 sucks air in the hollow column 10 through the air inlet pipe 11, the chip is sucked on the hollow column 10 afterwards, the chip is fixed, the first motor 7 is started afterwards, the rotation of the output end of the first motor 7 drives the screw rod 18 to rotate, the screw rod 18 rotates to enable the screw rod nut 19 to move longitudinally, the reinforcing plate 8 is driven simultaneously, the fixing box 12, the second motor 13, the polishing wheel 14, the placing box 9 and the output pipe 16 move longitudinally, so that the longitudinal position of the polishing wheel 14 can be adjusted, the chips with different thicknesses can be polished conveniently, after the polishing wheel 14 is attached to the chip, polishing liquid is poured into the placing box 9, the polishing liquid flows into the concave circular ring 15 through the output pipe 16, the second motor 13 is started afterwards, the output end of the second motor 13 drives the polishing wheel 14 and the concave circular ring 15 to rotate, the polishing wheel 14 can flow onto the chip through a plurality of circular holes when the polishing wheel 14 rotates, thereby, the polishing wheel can collect the polishing liquid flowing into the concave circular ring 15, the polishing liquid in the polishing box, the PPR material can be collected, the PPR material, the environmental protection polishing liquid discharge pipe 17, the environmental protection polishing liquid discharge pipe can be collected, the PPR material, the environmental protection material can be collected, the PPR material for the environmental protection.

However, as is well known to those skilled in the art, the working principle and wiring method of the air pump 3, the first motor 7 and the second motor 13 are common and are conventional means or common knowledge, and thus will not be described herein, and those skilled in the art can make any choice according to their needs or convenience.

Above, only be the embodiment of the preferred of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the design of the present invention, equivalent replacement or change should be included in the protection scope of the present invention.

Claims

1. The utility model provides a be suitable for chip polishing machine of multiple thickness, includes bottom plate (1), top fixedly connected with polishing box (4) of bottom plate (1), top fixedly connected with fixed plate (2) of bottom plate (1), one side fixedly connected with guard box (6) of fixed plate (2), its characterized in that:

the polishing device comprises a lifting mechanism arranged in a protective box (6), wherein a reinforcing plate (8) is fixedly connected to the lifting mechanism, a fixed box (12) is fixedly connected to the bottom of the reinforcing plate (8), and a placing box (9) for storing polishing solution is fixedly connected to one side of the fixed box (12);

the polishing device is characterized by further comprising a polishing mechanism arranged in the fixing box (12) and used for polishing the chip, a fixing mechanism used for fixing the chip is arranged in the polishing box (4), and a collecting box (5) used for collecting polishing liquid is placed at the top of the bottom plate (1).

2. The chip polisher for multiple thicknesses as claimed in claim 1, wherein: elevating system is including first motor (7), lead screw (18) and screw-nut (19), the long type hole has been seted up to one side of guard box (6), the top of first motor (7) and the top inner wall fixed connection of guard box (6), the top of lead screw (18) and the output shaft fixed connection of first motor (7), screw-nut (19) and lead screw (18) threaded connection, the bottom of lead screw (18) is rotated with the bottom inner wall of guard box (6) and is connected, one side of gusset plate (8) and one side fixed connection of screw-nut (19).

3. The chip polisher suitable for multiple thicknesses as set forth in claim 1, wherein: polishing mechanism is including second motor (13), throwing aureola (14) and concave type ring (15), the bottom of second motor (13) and the bottom inner wall fixed connection of fixed case (12), the output of second motor (13) run through fixed case (12) and with the top fixed connection of throwing aureola (14), the bottom of concave type ring (15) and the top fixed connection of throwing aureola (14), a plurality of round holes have all been seted up to concave type ring (15) bottom inner wall and throwing aureola (14) bottom, the bottom fixedly connected with square plate of fixed case (12), the square hole has been seted up to square plate one side, the bottom of placing box (9) is equipped with output tube (16), the one end of output tube (16) runs through the square plate and extends to in the concave type ring (15).

4. The chip polisher for multiple thicknesses as claimed in any one of claims 1-3, wherein: the polishing device is characterized in that the fixing mechanism comprises an air pump (3), a hollow column (10) and an air inlet pipe (11), one side of the air pump (3) is fixedly connected with one side of the polishing box (4), the bottom of the hollow column (10) is fixedly connected with the inner wall of the bottom of the polishing box (4), a plurality of air suction holes are formed in the top of the hollow column (10), two ends of the air inlet pipe (11) are respectively fixedly connected with one side of the hollow column (10) and the top of the air pump (3), a liquid discharge pipe (17) is arranged on one side of the polishing box (4), and the other end of the liquid discharge pipe (17) is located above the collecting box (5).

5. The chip polisher for multiple thicknesses as claimed in claim 1, wherein: two recesses (21) have been seted up to one side of fixed plate (2), the equal fixedly connected with support bar in one side of gusset plate (8), the equal fixedly connected with slider (20) in one side of two support bars, one side of two sliders (20) respectively with the inner wall sliding connection of two recesses (21).

6. The chip polisher suitable for multiple thicknesses as set forth in claim 3, wherein: the material of output tube (16) and fluid-discharge tube (17) is PPR pipe, the material of placing box (9) is clear glass.