CN217849892U - Sputtering power supply installation cabinet - Google Patents
Sputtering power supply installation cabinet Download PDFInfo
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- CN217849892U CN217849892U CN202221738942.6U CN202221738942U CN217849892U CN 217849892 U CN217849892 U CN 217849892U CN 202221738942 U CN202221738942 U CN 202221738942U CN 217849892 U CN217849892 U CN 217849892U
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- sputtering power
- power supply
- cabinet body
- cabinet
- interlayer
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Abstract
The utility model discloses a sputtering power supply installation cabinet, which comprises a cabinet body and a cabinet door hinged with the cabinet body, wherein a group of interlayer is arranged in the cabinet body, the interlayer is connected with a pair of vertical supporting columns, the interlayer is a supporting beam frame fixedly connected with the inner wall of the cabinet body, the interlayer is provided with a first mounting hole fixedly connected with the bottom surface of a sputtering power supply, the vertical supporting columns are provided with a group of second mounting holes distributed in an array manner, the second mounting holes are fixedly connected with the side surface of the sputtering power supply, and the sputtering power supplies with different specifications are fixedly connected through selecting the second mounting holes with different positions; the internal division board that is equipped with of cabinet, division board are used for installing the first space and the both sides of sputter power with the vertical first space that is used for laying condenser tube of dividing of cabinet internal portion. The utility model forms a three-dimensional frame through the interlayer and the vertical support columns, thereby improving the bearing capacity; the partition plate divides the interior of the cabinet body into a space for installing a sputtering power supply and laying a cooling water pipe, and a placing space of the matching part is provided so as to meet the normal use of the sputtering power supply.
Description
Technical Field
The utility model relates to a regulator cubicle technical field, concretely relates to sputter power installation rack.
Background
In the design and construction of a magnetron sputtering coating production line, a sputtering power supply is a necessary core device, the shapes of the sputtering power supply are generally divided into two types, and one type is an independent electrical cabinet and can be directly installed and fixed. A19-inch server standard design (the bottom installation sizes of sputtering power supplies with different specifications are the same, the side installation sizes are arranged in an equal time mode) according to an EIA (American electronic industry Association) standard is designed to be initially adaptable to a standard 19-inch server cabinet, and field installation is facilitated.
However, the standard 19-inch server cabinet sold in the market at present is matched with the server cabinet only in the accommodating size, and the following three problems exist, so that the server cabinet cannot be used.
1. The weight of a single sputtering power supply is generally over 50kg and is far greater than that of a server. Each cabinet is generally required to be provided with 3-4 sputtering power supplies, and the bearing capacity of a standard 19-inch server cabinet cannot be met; in addition, sputtering power supplies of different specifications are not easy to be assembled and installed.
2. A standard 19 "server rack is typically designed for an indoor server room and does not have the higher sealing and protection level requirements needed for large vehicles or buildings.
3. The normal work of sputter power needs the matching parts such as cooling water, big line footpath input/output cable, and 19 cun server cabinets of standard all can not provide and place the space.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem, the utility model provides a sputtering power supply installation rack.
The utility model adopts the following technical scheme:
the utility model provides a sputtering power supply installation rack, includes the cabinet body and looks articulated cabinet door, the internal a set of interlayer that is equipped with of cabinet, connects a pair of vertical support column near cabinet body opening part on the interlayer, its characterized in that: the interlayer is a supporting beam frame fixedly connected with the inner wall of the cabinet body, the interlayer is provided with first mounting holes fixedly connected with the bottom surface of the sputtering power supply, the vertical supporting columns are provided with a group of second mounting holes distributed in an array manner, the second mounting holes are fixedly connected with the side surface of the sputtering power supply, and the sputtering power supplies with different specifications are fixedly connected by selecting the second mounting holes at different positions; the cabinet is internally provided with a pair of partition plates, and the partition plates vertically divide the interior of the cabinet into a first space for mounting a sputtering power supply and a second space for arranging cooling water pipes on two sides.
Furthermore, the interlayer comprises a pair of first supporting beams, the first supporting beams are respectively and fixedly connected to two opposite side walls of the cabinet body, and a group of pipe clamp mounting holes are formed in the inner side walls of the first supporting beams.
Furthermore, locking heads for penetrating pipelines are respectively arranged on the top walls of the cabinet body corresponding to the first space and the second space.
Furthermore, the interlayer and the vertical support columns are all formed by rectangular pipes and are electrically connected with the cabinet body.
Furthermore, the edge position of the cabinet body opening is provided with a sealing gasket, and the sealing gasket can be in extrusion sealing fit with the cabinet door.
Compared with the prior art, the utility model discloses the beneficial effect of utensil:
1. according to the scheme, the interlayer and the vertical support columns are arranged to form the three-dimensional frame, so that the bearing capacity of the sputtering power supply is improved; the partition plate vertically divides the interior of the cabinet body into a space for installing a sputtering power supply to arrange a cooling water pipe, and a placing space of the matching part is provided so as to meet the normal use of the sputtering power supply.
2. The locking head can seal the penetrating pipeline and is matched with the sealing gasket to improve the sealing performance and the protection grade of the device.
3. The interlayer and the vertical supporting columns are electrically connected with the cabinet body, and the grounding point of the power supply is connected with the cabinet body, so that good grounding and anti-interference performance is provided for the sputtering power supply.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 isbase:Sub>A schematic sectional view A-A of FIG. 1;
fig. 3 is a schematic view of a part of the structure in the direction B in fig. 2.
Description of reference numerals: 1. a cabinet body; 2. a cabinet door; 3. an interlayer; 31. a first support beam; 311. a pipe clamp mounting hole; 32. a second support beam; 33. mounting a beam; 331. a first mounting hole; 4. a vertical support column; 41. a second mounting hole; 5. a partition plate; 6. a first space; 7. a second space; 8. a locking head; 9. and a gasket.
Detailed Description
In order to make the present invention more clearly understood, the following description is made in conjunction with the accompanying drawings, and the specific embodiments described herein are only used for explaining the present invention, and are not used for limiting the present invention.
As shown in fig. 1 and 2, the sputtering power supply installation cabinet comprises a cabinet body 1 and a pair of hinged cabinet doors 2, wherein a rubber gasket 9 is arranged at the edge position of an opening of the cabinet body 1, and the gasket 9 can be in extruded sealing fit with the cabinet doors 2.
An interlayer 3 of a group of supporting beam frame structures is arranged in the cabinet body 1, and the interlayer 3 is a bearing structure of a sputtering power supply and is horizontally arranged in the vertical direction. It includes a pair of first supporting beam 31 and a pair of second supporting beam 32, and first supporting beam 31 is fixed connection respectively on the two relative lateral walls of the cabinet body 1, and one of them second supporting beam 32 fixed connection is at the cabinet body 1 backplate, and another second supporting beam 32 fixed connection is at the opening part of the cabinet body 1, and first, second supporting beam constitutes rectangular frame jointly. A group of mounting beams 33 which are distributed at equal intervals are fixed on the first supporting beam 31, first mounting holes 331 which are matched with mounting fixing points at the bottom end of the sputtering power supply are arranged on the mounting beams 33, and the first mounting holes 331 are through holes and are fixedly connected with the sputtering power supply through bolts.
A pair of vertical support columns 4 are fixedly connected to the second support beam 32 close to the opening of the cabinet body 1, and the vertical support columns 4 are fixedly connected with the interlayer 3 to form a three-dimensional frame structure, so that the overall bearing capacity of the interlayer 3 is improved. Each vertical supporting column 4 is provided with a group of second mounting holes 41 distributed in an array, the second mounting holes 41 are through holes, and the vertical distance between the two holes is 44.45mm or equal division size thereof. Because the vertical spacing of the side fixing points of the sputtering power supplies with different specifications is a multiple of 44.45mm, the second mounting holes 41 at different positions are selected and bolts are inserted into the second mounting holes to adapt to the fixation of the sputtering power supplies with different specifications.
Still be equipped with the division board 5 of two vertical settings in the cabinet body 1, every division board front end is connected with vertical support column 4, the rear end is connected with 1 backplate of the cabinet body, and its upper end is connected with the interlayer at top, the lower extreme is connected with the interlayer of bottom, divide into three space with the 1 inside of the whole cabinet body: the space in the middle is a first space 6 for installing a sputtering power supply, and the spaces on two sides are second spaces 7 for arranging cooling water pipes. The openings of the first space and the second space are in the same direction as the opening of the cabinet body 1.
As shown in fig. 3, a set of pipe clamp mounting holes 311 is provided on the inner side wall of the first support beam 31, and the pipe clamp mounting holes 311 are uniformly distributed along the length direction of the first support beam 31. The pipe clamp mounting holes 311 are fixedly connected with pipe clamps of different specifications through bolts so as to facilitate the arrangement of cooling water pipes. In order to facilitate the penetration of the bolt and the formation of the fixed connection, the pipe clamp mounting hole 311 may be a threaded hole, or a fabrication hole (not shown) for assisting the placement of a nut may be provided near the pipe clamp mounting hole 311.
A group of locking heads 8 for penetrating pipelines are respectively arranged on the top wall of the cabinet body 1 corresponding to the first space and the second space, the locking heads are standard parts in the market and can be matched with locking heads according to cooling pipes and cables with different diameters. The locking head 8 is used as an interface for penetrating into a pipeline, and can play a certain sealing role.
In addition, interlayer 3, vertical support post 4 are the rectangular pipe and constitute, and the rectangular pipe can be for all establishing the pipe fitting in hole all around when satisfying above-mentioned pitch-row requirement, and this type of pipe fitting is easy to purchase on the market to can alleviate the dead weight under its condition that satisfies bearing strength. The rectangular pipe is a galvanized pipe, has lower impedance, and can form stable electric connection with the contact of the cabinet body 1. When the device is installed, the grounding point of the power supply is connected with any position of the cabinet body nearby, and the installation mode can provide good grounding and anti-interference performance for the sputtering power supply.
In general, the utility model improves the bearing capacity of the sputtering power supply and provides the placing space of the matching part to meet the normal use of the sputtering power supply; meanwhile, the sealing performance, the protection level and the anti-interference performance of the device are improved.
The above embodiments of the present invention are merely examples for clearly illustrating the present invention and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And such obvious changes and modifications which fall within the spirit of the invention are deemed to be covered by the present invention.
Claims (5)
1. The utility model provides a sputter power installation rack, includes the cabinet body (1) and looks articulated cabinet door (2), is equipped with a set of interlayer (3) in the cabinet body (1), connects a pair of vertical support column (4) that are close to cabinet body (1) opening part on interlayer (3), its characterized in that: the interlayer (3) is a supporting beam frame fixedly connected with the inner wall of the cabinet body (1), first mounting holes (331) fixedly connected with the bottom surface of the sputtering power supply are formed in the interlayer (3), a group of second mounting holes (41) distributed in an array manner are formed in the vertical supporting columns (4), the second mounting holes (41) are fixedly connected with the side surface of the sputtering power supply, and the sputtering power supplies with different specifications are fixedly connected by selecting the second mounting holes (41) at different positions; the sputtering power supply is characterized in that a pair of partition plates (5) are arranged in the cabinet body (1), and the partition plates vertically divide the interior of the cabinet body (1) into a first space (6) for installing a sputtering power supply and second spaces (7) with two sides for arranging cooling water pipes.
2. The sputtering power supply mounting cabinet of claim 1, wherein: the interlayer (3) comprises a pair of first supporting beams (31), the first supporting beams (31) are respectively and fixedly connected to two opposite side walls of the cabinet body (1), and a group of pipe clamp mounting holes (311) are formed in the inner side wall of each first supporting beam (31).
3. A sputtering power supply mounting cabinet according to claim 2, wherein: the top wall of the cabinet body (1) corresponding to the first space and the second space is respectively provided with a locking head (8) for penetrating a pipeline.
4. A sputtering power supply mounting cabinet according to claim 2, wherein: the interlayer (3) and the vertical supporting columns (4) are all rectangular tubes and are electrically connected with the cabinet body.
5. The sputtering power supply mounting cabinet of claim 1, wherein: the edge position of the opening of the cabinet body (1) is provided with a sealing gasket (9), and the sealing gasket (9) can be in extrusion sealing fit with the cabinet door (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221738942.6U CN217849892U (en) | 2022-07-07 | 2022-07-07 | Sputtering power supply installation cabinet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221738942.6U CN217849892U (en) | 2022-07-07 | 2022-07-07 | Sputtering power supply installation cabinet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217849892U true CN217849892U (en) | 2022-11-18 |
Family
ID=84034595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221738942.6U Active CN217849892U (en) | 2022-07-07 | 2022-07-07 | Sputtering power supply installation cabinet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217849892U (en) |
-
2022
- 2022-07-07 CN CN202221738942.6U patent/CN217849892U/en active Active
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