CN217845103U - Tunable wavelength interference three-dimensional shape measuring device - Google Patents
Tunable wavelength interference three-dimensional shape measuring device Download PDFInfo
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Abstract
The utility model relates to a three-dimensional topography measuring device is interfered to tunable wavelength belongs to optics precision detection technical field. The measuring device consists of a tunable laser, a first light splitting device, a reflector, a first beam expanding system, a second beam expanding system, a phase shifting device, a second light splitting device and a camera, and the three-dimensional topography of the surface of the object is measured by the technologies of laser tuning, light field calculation and the like. The utility model discloses measuring device has characteristics such as accommodation width to the roughness of measured surface is wide, range suitability is strong, non-contact, high accuracy, can realize the nondestructive test to the piece that awaits measuring, but wide application in high-precision testing fields such as semiconductor, optics, aerospace.
Description
Technical Field
The utility model belongs to the technical field of optics precision detection, specifically a three-dimensional appearance measuring device is interfered to tunable wavelength.
Background
The high-precision three-dimensional shape measurement technology can be used for testing the shape, deformation and micro-motion amount of products in the fields of optics, semiconductors and confidential machinery, and has important effects in the fields of precision machinery, precision instrument manufacturing, precision optical processing, product detection and the like. With the rapid development of precision manufacturing and processing industries such as semiconductors, chips and the like, the requirements for high-precision detection of the surface three-dimensional surface morphology of various devices are more and more, and the requirements for detection precision are also higher and more, so that a plurality of high-precision detection devices are produced at the same time.
The existing measuring methods are mainly divided into two categories, namely contact measuring methods and non-contact measuring methods. The traditional contact measurement method is represented by a three-coordinate measuring machine and has micrometer-scale measurement accuracy. However, when the object to be measured is a weak rigid or soft material, elastic deformation is caused by contact measurement, measurement errors are introduced, and the high-precision detection requirements of semiconductors, chips and the like cannot be met. Meanwhile, the contact measurement method may scratch the surface of the measured object, and the problem that the contact measurement speed is slow and the automatic measurement is difficult to realize exists, so that the non-contact detection method receives more attention.
The non-contact three-dimensional shape measuring method mainly comprises stereoscopic vision, micro focusing, laser interference and the like. The stereoscopic vision three-dimensional topography measuring technology uses a plurality of imaging lenses and cameras, and maps the mapping points of the same space physical point in different images through the difference between the obtained images shot by different cameras, and establishes the corresponding relation between the characteristic points, thereby obtaining the surface topography of the object. The method has the advantages of high efficiency, proper precision, simple system structure, low cost and the like, but the detection precision can only reach the sub-millimeter magnitude and can not meet the requirement of rapid high-precision three-dimensional detection at the present stage. The microscopic fixed-focus three-dimensional shape measurement technology uses a confocal fixed-focus method to carry out accurate non-contact positioning on each position point on the measured surface, and combines a three-dimensional scanning mode to realize high-precision measurement of the three-dimensional shape of the measured piece. However, as with a three-coordinate measuring instrument, the microscopic fixed-focus three-dimensional shape measurement technology also has the problem of low measurement speed, and cannot meet the requirements of rapid high-precision three-dimensional detection at the present stage. The laser interference surface type detection technology can quickly obtain the surface type of a detected piece, and the measurement precision reaches the nanometer level, but the method is only suitable for smooth surfaces such as mirror surfaces and the like, has limited range and is not suitable for the surface three-dimensional detection of other devices.
In summary, the existing measurement method cannot simultaneously meet the requirements of high-precision, rapid and wide-range non-contact three-dimensional shape measurement, and cannot realize the requirement of high-precision detection of three-dimensional surface shapes of devices with different roughness.
Disclosure of Invention
To the defect of prior art, the utility model provides a three-dimensional appearance measuring device is interfered to tunable wavelength. The measuring device can be used for carrying out wide-range, high-precision and quick detection on the three-dimensional appearance of the surface of an object and the deformation of the object, and can be widely applied to the high-precision detection fields of semiconductors, optics, aerospace and the like.
The utility model discloses a realize through following technical scheme:
the utility model provides a first technical scheme, a three-dimensional appearance measuring device of tunable wavelength interference, including tunable laser, first beam splitting device, speculum, the first system of restrainting, phase shift unit, the second system of restrainting, the second beam splitting device, camera of restrainting;
the first light splitting device is over against a laser emitting port of the tunable laser, the reflector is positioned on a transmission light path of the first light splitting device, the first beam expanding system is positioned on a reflection light path of the reflector, and the sample to be measured is positioned on the transmission light path of the first beam expanding system; the second beam expanding system is positioned on a reflection light path of the first beam expanding system, the phase shifting device is positioned on a transmission light path of the second beam expanding system, the second beam splitting device is positioned at the intersection position of a reflection light path of the tested sample and a phase-shifted light path of the phase shifting device, and the camera is positioned on a beam combining light path of the second beam splitting device.
The measurement principle of the measurement device is as follows: light emitted by the tunable laser is incident on the first beam splitter and then is divided into two paths, wherein one path of light penetrates through the first beam splitter, forms a large-caliber measuring beam after passing through the reflector and the first beam expanding system, irradiates the surface of a measured sample and is reflected by the measured sample to form object light; the other path of the reference beam passes through a second beam expanding system to form a reference beam, the reference beam and the object beam are combined by a second beam splitting device and then interfere with each other, an interference pattern is formed on a photosensitive surface of the camera, and the camera collects information of the interference pattern; changing the wavelength of light beams emitted by the tunable laser to form a plurality of measuring light beams which are respectively irradiated on the surface of the measured sample, and obtaining the phase distribution of the surface of the measured sample by combining a light field diffraction calculation method; a tunable laser is used to generate a series of test beams, two of which are selectedλ i Andλ j are combined to obtain a combined wavelength
Corresponding three-dimensional shape measurement results; and synthesizing a series of three-dimensional shape measurement results corresponding to different combined wavelengths to obtain the three-dimensional shape measurement result of the surface of the measured sample with the expanded measuring range.
Further, the utility model also provides a second technical scheme, a tunable wavelength interferes three-dimensional appearance measuring device, including tunable laser, first beam splitting device, speculum, first beam expanding system, phase shift unit, second beam expanding system, second beam splitting device, camera;
the first light splitting device is over against a laser emitting port of the tunable laser, the reflector is positioned on a transmission light path of the first light splitting device, the first beam expanding system is positioned on a reflection light path of the reflector, and the sample to be measured is positioned on the transmission light path of the first beam expanding system; the phase shifting device is positioned on a reflection light path of the first light splitting device, the second beam expanding system is positioned on a phase-shifted light path of the phase shifting device, the second light splitting device is positioned at the intersection position of the reflection light path of the tested sample and a transmission light path of the second beam expanding system, and the camera is positioned on a beam combination light path of the second light splitting device; the first light splitting device is composed of a first half-wave plate, a polarization light splitting prism and a second half-wave plate, the first half-wave plate is right opposite to a laser emitting port of the tunable laser, the polarization light splitting prism is located on a transmission light path of the first half-wave plate, and the second half-wave plate is located on a reflection light path of the polarization light splitting prism.
Furthermore, the utility model also provides a third technical scheme, a tunable wavelength interferes three-dimensional appearance measuring device, including tunable laser, third beam expanding system, first beam splitting device, speculum, second beam splitting device, third beam splitting device, camera;
the third beam expanding system is over against a laser emitting port of the tunable laser, the first light splitting device is located on a transmission light path of the third beam expanding system, the reflector is located on a reflection light path of the first light splitting device, the second light splitting device is located on the transmission light path of the first light splitting device, the object to be measured is located on the reflection light path of the second light splitting device, the third light splitting device is located at the intersection position of the reflection light path of the object to be measured and the reflection light path of the reflector, and the camera is located on a beam combining light path of the third light splitting device.
Furthermore, the utility model also provides a fourth technical scheme, a tunable wavelength interferes three-dimensional appearance measuring device, including tunable laser, third beam expanding system, first beam splitting device, speculum, second beam splitting device, third beam splitting device, first collecting mirror, second collecting mirror, diaphragm, camera;
the third beam expanding system is over against a laser emitting port of the tunable laser, the first light splitting device is positioned on a transmission light path of the third beam expanding system, the reflector is positioned on a reflection light path of the first light splitting device, and the second collecting mirror is positioned on a reflection light path of the reflector; the second light splitting device is located on a transmission light path of the first light splitting device, the object to be detected is located on a reflection light path of the second light splitting device, the first collecting mirror is located on a reflection light path of the object to be detected, the diaphragm is located at the position of a focal point of the first collecting mirror, the third light splitting device is located at the position of the intersection of the diaphragm transmission light path and the second collecting mirror transmission light path, and the camera is located on a beam combination light path of the third light splitting device.
The utility model discloses measuring device has combined wavelength tunable technique and light field measurement technique, obtains the phase distribution on measured sample surface through the light field measurement technique, produces a plurality of measuring beam through laser tuning technique and realizes the range expansion, finally accomplishes the measurement of object surface three-dimensional morphology. The utility model discloses measuring device can use in the displacement measurement of mirror surface or rough surface object, realizes wide range, high accuracy, the short-term test to object surface three-dimensional morphology and object deformation.
Compared with the prior art, the utility model, measuring device has following innovation point and is showing the advantage:
1) The utility model discloses measuring device proposes wavelength tunable light field measurement technique for the first time, customizes the synthetic wavelength value of arbitrary needs through the size of regulation and control wavelength, and then adjusts the range of system fast to the measuring range that is suitable for the object that awaits measuring, solves fixed wavelength laser and can't compromise the measurement demand of different ranges;
2) The measuring device of the utility model generates a series of different combined wavelengths through the combination of a plurality of rows of different laser wavelengths, and the different combined wavelengths correspond to different measuring ranges and measuring precisions, so that the measuring result combination under different combined wavelengths can simultaneously meet the requirement of wide-range high-precision measurement on the object to be measured;
3) The measuring device of the utility model can meet the measuring requirements of objects to be measured with different surface materials, and has wide application range for measuring the surface roughness;
4) The utility model discloses measuring device has full, non-contact measurement's characteristics when measuring, can realize the nondestructive test to the piece that awaits measuring.
Drawings
Fig. 1 is a schematic structural diagram of a measuring device in embodiment 1 of the present invention.
Fig. 2 is a schematic structural diagram of a first light splitting device in embodiment 1 of the present invention.
Fig. 3 is a schematic structural diagram of a measuring device in embodiment 2 of the present invention.
Fig. 4 is a schematic structural diagram of a measuring device in embodiment 3 of the present invention.
Fig. 5 is a schematic structural diagram of a measuring device in embodiment 4 of the present invention.
In the figure: the device comprises a tunable laser 1, a first beam splitting device 2, a reflecting mirror 3, a first beam expanding system 4, a sample to be measured 5, a second beam expanding system 6, a second beam splitting device 7, a camera 8, a phase shifting device 9, a first half-wave plate 1001, a polarization beam splitting prism 1002, a second half-wave plate 1003, a third beam expanding system 11, a third beam splitting device 12, a first collecting mirror 13, a first diaphragm 14 and a second collecting mirror 15.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and examples.
The utility model discloses use the tunable light field of wavelength to measure the technique, come the synthetic wavelength value of the arbitrary needs of customization through the size of regulation and control wavelength, different combination wavelengths correspond different measuring range and measurement accuracy, consequently can satisfy the wide range high accuracy measurement demand to the object that awaits measuring simultaneously with the measuring result combination under the different combination wavelengths.
Example 1
In the embodiment, the phase of the interference fringe and the optical field are resolved in a four-step motion term mode. As shown in fig. 1, the measuring apparatus in this embodiment is a three-dimensional topography measuring apparatus combining a phase shift interference optical field testing technique, and its structure includes: the device comprises a tunable laser 1, a first light splitting device 2, a reflector 3, a first beam expanding system 4, a second beam expanding system 6, a second light splitting device 7, a camera 8 and a phase shifting device 9; the first light splitting device 2 is over against a laser emitting port of the tunable laser 1, the reflector 3 is positioned on a transmission light path of the first light splitting device 2, the first beam expanding system 4 is positioned on a reflection light path of the reflector 3, and the sample 5 to be measured is positioned on a transmission light path of the first beam expanding system 4; the second beam expanding system 6 is located on the reflection light path of the first beam splitting device 2, the phase shifting device 9 is located on the transmission light path of the second beam expanding system 6, the second beam splitting device 7 is located at the intersection position of the reflection light path of the detected sample 5 and the phase-shifted light path of the phase shifting device 9, and the camera 8 is located on the beam combining light path of the second beam splitting device 7.
In this embodiment, the tunable laser 1 generates measurement laser light, and the measurement laser light is incident on the first optical splitter 2.
In this embodiment, the tunable laser 1 uses a coherent light source, and the wavelength of the outgoing laser can be changed by a laser wavelength tuning technique. In this embodiment, the tunable laser 1 can emit a test laser with a wavelength range of 532-542nm, and the aperture of the light beam is 2mm.
In this embodiment, the first light splitting device 2 and the second light splitting device 7 are the same, and have a caliber of 25.4mm and a transmittance inverse ratio of 1: the beam splitter prism of 1 can split the measuring beam entering the prism into two beams with the same intensity and vertical outgoing direction.
In this embodiment, a measuring beam emitted by the tunable laser 1 is split into two paths by the first beam splitter 2, and a transmitted beam is incident on the reflecting mirror 3. The mirror 3 is used for reflecting light and deflecting the propagation direction of the measuring beam. The transmitted beam is reflected by the mirror 3 and then incident on the first beam expanding system 4.
In this embodiment, the beam expansion magnification of the first beam expansion system 4 is 4X, a large-caliber measuring beam can be formed, and the caliber of the expanded measuring laser beam is 8mm. The system adopts a two-piece structure, and the focal lengths of the lenses are respectively 5mm and 20mm.
In this embodiment, the expanded measuring beam is irradiated on the surface of the sample 5 to be measured, and is reflected by the sample 5 to be measured to form object light.
In this embodiment, the light beam reflected from the first beam splitting device 2 passes through the second beam expanding system 6 to form a reference beam. The second beam expanding system 6 has the same parameters as the first beam expanding system 4, adopts a two-piece structure, the focal lengths of the lenses are respectively 5mm and 20mm, and the beam expanding multiplying power is 4X.
In this embodiment, the reference beam formed by the second beam expanding system 6 enters the phase shifting device 9, and the phase shifting device 9 shifts the phase of the reference beam.
In this embodiment, the object light and the shifted reference beam are combined by the second beam expanding system 6 to form an interference pattern on the photosensitive surface of the camera 8, and the camera 8 collects information of the interference pattern. The second beam expanding system 6 is a flat crystal having an aperture of 30mm and a transmittance of 50%. The camera 8 is used to record the interference pattern, and the camera 8 includes but is not limited to CCD, CMOS, etc.
In this embodiment, the laser beam transmitted by the first beam splitter 2 is finally incident on the camera 8 through the mirror 3, the first beam expanding system 4, the sample 5 to be measured, and the second beam splitter 7, and this part of light may be referred to as object light.
In this embodiment, the laser beam reflected by the first beam splitting device 2 passes through the second beam expanding system 6, the phase shifting device 9, and the second beam splitting device 7, and finally enters the camera 8, and this part of light may be referred to as reference light.
In this embodiment, the first beam splitting device 2 is composed of a first half-wave plate 1001, a polarization beam splitter prism 1002 and a second half-wave plate 1003, as shown in fig. 2, the first half-wave plate 1001 faces the laser emission port of the tunable laser 1, the polarization beam splitter prism 1002 is located on the transmission light path of the first half-wave plate 1001, and the second half-wave plate 1003 is located on the reflection light path of the polarization beam splitter prism 1002; the first light splitting device 2 can split the laser beam emitted by the tunable laser 1 into two paths, adjust the light intensity ratio of the two paths of light (generally 1:5 to 5:1), change the light intensity ratio between the reflected light and the transmitted light by rotating the first half-wave plate 1001, further perform the function of adjusting the light intensity ratio of the object light and the reference light, obtain a high-quality interference pattern, and make the polarization directions of the object light and the reference light consistent by rotating the second half-wave plate 1003, so as to make the two capable of interfering.
In this embodiment, the phase shifter 9 is a micro-motion device made of piezoelectric ceramics, and can shift the phase of the reference light according to the requirements of the wavelength and the number of phase-shifting steps of the test laser, and further extract the light field information from the interferogram by a phase calculation method.
The optical path working principle of the three-dimensional topography measuring device used in this embodiment in combination with the item shifting interference optical field testing technology is as follows:
the tunable laser 1 generates measuring laser, and the measuring laser is changed into two paths after being incident to the first light splitting device 2: the first path of transmitted light is called object light, and irradiates a tested sample 5 after passing through a reflector 3 and a first beam expanding system 4, and the surface reflection measurement laser of the tested sample 5 finally reaches a camera 8 after passing through a second light splitting device 7; the second path of reference beam passes through the second beam expanding system 6 and the phase shifting device 9, is reflected by the second beam splitting device 7, finally reaches the camera 8, forms interference with the object light, and is recorded by the camera.
The three-dimensional topography measuring device used in this embodiment and combined with the phase-shift interference light field testing technique includes the following steps:
s1: placing a tested sample 5 in a test light path;
s2: the tunable laser 1 emits a measuring beam with a wavelength of 532nm, denoted as wavelength λ 1 The phase shift device 9 is driven to form a phase shift interference pattern with a phase difference of 1/4 wavelengthI 11 、I 12 、I 13 、I 14 Combining a light field diffraction calculation method and a phase unwrapping method to obtain the phase distribution phi on the surface of the sample 5 to be measured 1 ；
S3: the tunable laser 1 is driven to change the wavelength of the light beam emitted by the tunable laser, and measuring light beams with wavelengths of 534.845nm and 561.892nm respectively irradiate on the surface of a measured sample 5; simultaneous drive item shifting device9, each wavelength forms a phase-shift interference pattern with the phase difference of 1/4 wavelength, and the corresponding interference pattern is marked asI 21 、I 22 、I 23 、I 24 ，I 31 、I 32 、I 33 、I 34 The optical field is calculated for the interferogram with the same wavelength, and the phase distribution phi of the surface of the tested sample 5 is obtained by combining the optical field diffraction calculation method 2 、φ 3 ；
S4: using formulas
Selecting 532nm and 534.845nm, 532nm and 561.892nm to be combined to obtain corresponding combined wavelength Λ 1 =100μm，Λ 2 =10um; using formulas
To obtain Λ 1 、Λ 2 Corresponding three-dimensional topography measurement h 1 、h 2 ；
S5: synthesizing two combined wavelengths 1 、Λ 2 Corresponding three-dimensional topography measurement h 1 、h 2 Obtaining the measurement result h of the three-dimensional surface topography of the measured sample 5 with expanded measuring range S 。
Example 2
As shown in fig. 3, the measuring apparatus adopted in this embodiment is another three-dimensional topography measuring apparatus combining a phase shift interference optical field testing technique, and its structure includes: the device comprises a tunable laser 1, a first light splitting device 2, a reflecting mirror 3, a first beam expanding system 4, a second beam expanding system 6, a second light splitting device 7, a phase shifting device 9 and a camera 8. Unlike embodiment 2, in the present embodiment, the phase shift device 9 is disposed between the first beam splitting device 2 and the second beam expanding system 6.
Example 3
As shown in fig. 4, the measuring apparatus adopted in this embodiment is a three-dimensional profile measuring apparatus under a single beam expanding system, and the structure thereof includes: the system comprises a tunable laser 1, a third beam expanding system 11, a first light splitting device 2, a reflecting mirror 3, a second light splitting device 7, a third light splitting device 12 and a camera 8;
the third beam expanding system 11 is over against a laser emitting port of the tunable laser 1, the first beam splitting device 2 is located on a transmission light path of the third beam expanding system 11, the reflector 3 is located on a reflection light path of the first beam splitting device 2, the second beam splitting device 7 is located on the transmission light path of the first beam splitting device 2, the object to be measured is located on a reflection light path of the second beam splitting device 7, the third beam splitting device 12 is located at a crossing position of the reflection light path of the object to be measured and the reflection light path of the reflector 3, and the camera 8 is located on a beam combining light path of the third beam splitting device 12.
Example 4
As shown in fig. 5, the measuring apparatus adopted in this embodiment is a three-dimensional profile measuring apparatus combining pinhole filtering, and its structure includes: the device comprises a tunable laser 1, a third beam expanding system 11, a first light splitting device 2, a reflecting mirror 3, a second light splitting device 7, a third light splitting device 12, a first collecting mirror 13, a second collecting mirror 15, a diaphragm 14 and a camera 8; unlike embodiment 3, in the present embodiment, the first collecting mirror 13 is disposed between the second light splitting device 7 and the third light splitting device 12, the diaphragm 14 is disposed at the focal position of the first collecting mirror 13, and the second collecting mirror 15 is disposed between the reflecting mirror 3 and the third light splitting device 12.
Claims (4)
1. A tunable wavelength interference three-dimensional shape measuring device is characterized in that: the phase-shifting laser device comprises a tunable laser, a first light splitting device, a reflector, a first beam expanding system, a phase shifting device, a second beam expanding system, a second light splitting device and a camera;
the first light splitting device is over against a laser emitting port of the tunable laser, the reflector is positioned on a transmission light path of the first light splitting device, the first beam expanding system is positioned on a reflection light path of the reflector, and the sample to be measured is positioned on the transmission light path of the first beam expanding system; the second beam expanding system is positioned on a reflection light path of the first beam expanding system, the phase shifting device is positioned on a transmission light path of the second beam expanding system, the second beam splitting device is positioned at the intersection position of a reflection light path of the tested sample and a phase-shifted light path of the phase shifting device, and the camera is positioned on a beam combining light path of the second beam splitting device.
2. A tunable wavelength interference three-dimensional shape measuring device is characterized in that: the phase-shifting laser device comprises a tunable laser, a first light splitting device, a reflector, a first beam expanding system, a phase shifting device, a second beam expanding system, a second light splitting device and a camera;
the first light splitting device is over against a laser emitting port of the tunable laser, the reflector is positioned on a transmission light path of the first light splitting device, the first beam expanding system is positioned on a reflection light path of the reflector, and the sample to be measured is positioned on the transmission light path of the first beam expanding system; the phase shifting device is positioned on a reflection light path of the first light splitting device, the second beam expanding system is positioned on a phase-shifted light path of the phase shifting device, the second light splitting device is positioned at the intersection position of the reflection light path of the tested sample and a transmission light path of the second beam expanding system, and the camera is positioned on a beam combining light path of the second light splitting device; the first light splitting device is composed of a first half-wave plate, a polarization light splitting prism and a second half-wave plate, the first half-wave plate is right opposite to a laser emission port of the tunable laser, the polarization light splitting prism is located on a transmission light path of the first half-wave plate, and the second half-wave plate is located on a reflection light path of the polarization light splitting prism.
3. A tunable wavelength interference three-dimensional shape measuring device is characterized in that: the device comprises a tunable laser, a third beam expanding system, a first light splitting device, a reflector, a second light splitting device, a third light splitting device and a camera;
the third beam expanding system is over against a laser emitting port of the tunable laser, the first light splitting device is located on a transmission light path of the third beam expanding system, the reflector is located on a reflection light path of the first light splitting device, the second light splitting device is located on the transmission light path of the first light splitting device, the object to be measured is located on the reflection light path of the second light splitting device, the third light splitting device is located at the intersection position of the reflection light path of the object to be measured and the reflection light path of the reflector, and the camera is located on a beam combining light path of the third light splitting device.
4. A tunable wavelength interference three-dimensional shape measuring device is characterized in that: the device comprises a tunable laser, a third beam expanding system, a first light splitting device, a reflector, a second light splitting device, a third light splitting device, a first collecting mirror, a second collecting mirror, a diaphragm and a camera;
the third beam expanding system is over against a laser emitting port of the tunable laser, the first light splitting device is positioned on a transmission light path of the third beam expanding system, the reflector is positioned on a reflection light path of the first light splitting device, and the second collecting mirror is positioned on a reflection light path of the reflector; the second light splitting device is located on a transmission light path of the first light splitting device, the object to be detected is located on a reflection light path of the second light splitting device, the first collecting mirror is located on a reflection light path of the object to be detected, the diaphragm is located at the position of a focal point of the first collecting mirror, the third light splitting device is located at the position of the intersection of the diaphragm transmission light path and the second collecting mirror transmission light path, and the camera is located on a beam combination light path of the third light splitting device.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116045836A (en) * | 2023-04-03 | 2023-05-02 | 成都太科光电技术有限责任公司 | Phi 1200mm extremely large caliber plane optical interference testing device |
| CN116045835A (en) * | 2023-03-31 | 2023-05-02 | 成都太科光电技术有限责任公司 | Ultra-large caliber plane or spherical surface optical interference testing device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116045835A (en) * | 2023-03-31 | 2023-05-02 | 成都太科光电技术有限责任公司 | Ultra-large caliber plane or spherical surface optical interference testing device |
| CN116045835B (en) * | 2023-03-31 | 2023-06-02 | 成都太科光电技术有限责任公司 | Ultra-large caliber plane or spherical surface optical interference testing device |
| CN116045836A (en) * | 2023-04-03 | 2023-05-02 | 成都太科光电技术有限责任公司 | Phi 1200mm extremely large caliber plane optical interference testing device |
| CN116045836B (en) * | 2023-04-03 | 2023-06-02 | 成都太科光电技术有限责任公司 | Phi 1200mm extremely large caliber plane optical interference testing device |
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