CN217809638U

CN217809638U - Magnetic filtering pipe bending mechanism and coating equipment

Info

Publication number: CN217809638U
Application number: CN202221714483.8U
Authority: CN
Inventors: 王俊锋; 袁明; 彭子阳; 周敏; 秦兴耀
Original assignee: Guangdong Ucan Robot Technology Co Ltd
Current assignee: Guangdong Ucan Robot Technology Co Ltd
Priority date: 2022-07-05
Filing date: 2022-07-05
Publication date: 2022-11-15
Anticipated expiration: 2032-07-05

Abstract

The utility model relates to the technical field of vacuum coating equipment, and discloses a magnetic filtering elbow mechanism and coating equipment, which comprises an S-shaped vacuum elbow component, an electromagnetic coil arranged on the outer wall of the S-shaped vacuum elbow component in a circle mode, and a cathode arc target component arranged at one end of the S-shaped vacuum elbow component, wherein the cathode arc target component comprises a fixing component for fixing a target material and an arc striking component for driving the target material to generate arc spots; when the target generates arc spots, sputtering atoms are emitted to the other end of the S-shaped vacuum bent pipe assembly; the S-shaped vacuum bent pipe assembly comprises a first straight pipe, a second straight pipe and an S-shaped bent pipe, wherein two ends of the S-shaped bent pipe are respectively connected with the first straight pipe and the second straight pipe, the first straight pipe is parallel to the second straight pipe, and an inner hole of the first straight pipe and an inner hole of the second straight pipe are not overlapped in a direction parallel to the center line of the first straight pipe. The utility model discloses a magnetic filter return bend mechanism can effectively promote the purity of work piece cladding material.

Description

Magnetic filtering pipe bending mechanism and coating equipment

Technical Field

The utility model relates to a vacuum coating equipment technical field especially relates to a magnetic filter return bend mechanism and coating equipment.

Background

The vacuum coating technology is widely applied to real production life as a technology for generating a specific film layer. Vacuum coating techniques come in three forms, evaporation, sputtering and ion plating.

Magnetron sputtering can be considered as one of the most prominent achievements in coating technology. The method has the advantages of high sputtering rate, low substrate temperature rise, good film-substrate bonding force, stable device performance, convenient operation and control and the like, and becomes a preferred scheme of the coating industrial application field, in particular to the continuous coating occasions with particularly strict requirements on large-area uniformity, such as architectural coated glass, transparent conductive film glass, flexible substrate winding coating and the like. "sputtering" refers to the phenomenon in which energetic particles bombard a solid surface (target) causing solid atoms or molecules to be ejected from the surface. The ejected particles are mostly in an atomic state, and are often referred to as sputtered atoms. The sputtered particles used to bombard the target can be electrons, ions or neutral particles, and because ions are readily accelerated under an electric field to achieve the required kinetic energy, ions are mostly used as the bombarding particles.

The magnetic filtering pipe bending mechanism in the prior art comprises an arc-shaped bent pipe, an arc striking assembly, a target material cooling device and an electromagnetic coil arranged on the outer peripheral surface of the arc-shaped bent pipe, wherein a target material is installed on the target material cooling device, the arc striking assembly is connected with an arc striking circuit, and the arc striking assembly strikes the side wall of the target material to generate arc spots so as to eject charged particles into the arc-shaped bent pipe.

Among the prior art, the bend angle of arc return bend generally is not more than 90, and electrified sputter impurity is difficult to filter better among the sputtering process, and this leads to the arc return bend can't accomplish to more impurity and filters, is unfavorable for promoting the purity of work piece cladding material, also is not favorable to promoting the work piece yield.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a magnetic filtration return bend mechanism and filming equipment to promote the purity of work piece cladding material.

To achieve the purpose, the utility model adopts the following technical proposal:

a magnetic filtering pipe bending mechanism comprises an S-shaped vacuum pipe bending assembly, an electromagnetic coil arranged on the outer wall of the S-shaped vacuum pipe bending assembly in a looping mode, and a cathode arc target assembly arranged at one end of the S-shaped vacuum pipe bending assembly, wherein the cathode arc target assembly comprises a fixing assembly used for fixing a target material and an arc striking assembly used for driving the target material to generate arc spots; when the target generates arc spots, sputtering atoms are emitted to the other end of the S-shaped vacuum bent pipe assembly;

the S-shaped vacuum bent pipe assembly comprises a first straight pipe, a second straight pipe and an S-shaped bent pipe, wherein two ends of the S-shaped bent pipe are respectively connected with the first straight pipe and the second straight pipe, the first straight pipe is parallel to the second straight pipe, and an inner hole of the first straight pipe and an inner hole of the second straight pipe are not overlapped in the direction parallel to the central line of the first straight pipe.

Optionally, a mounting plate is arranged at one end of the first straight pipe, which is far away from the S-shaped bent pipe, and the arc striking assembly and the fixing assembly are both mounted on the mounting plate;

and a filtering assembly is arranged on the inner pipe wall of the second straight pipe, and the filtering assembly comprises a plurality of annular baffles which are arranged at intervals along the direction of the central line of the second straight pipe.

Optionally, a water-cooling cavity parallel to the inner pipe wall of the S-shaped elbow is arranged in the S-shaped elbow, a water inlet communicated with the water-cooling cavity is arranged at one end of the S-shaped elbow close to the second straight pipe, and a water outlet communicated with the water-cooling cavity is arranged at one end of the S-shaped elbow close to the first straight pipe.

Optionally, the electromagnetic coil includes an arc stabilizing coil wound on the outer tube wall of the first straight tube, a focusing coil wound on the outer tube wall of the first straight tube, a filtering coil wound on the outer tube wall of the S-shaped bent tube, and an extraction coil wound on the outer tube wall of the second straight tube;

the focusing coil is arranged between the arc stabilizing coil and the filtering coil.

Optionally, a contamination prevention cover is disposed on an inner tube wall of the first straight tube, and a position of the contamination prevention cover corresponds to a position of the focusing coil.

Optionally, one end of the contamination prevention cover close to the S-shaped bent pipe is provided with an annular guide portion gradually converging toward the center line of the first straight pipe.

Optionally, a liquid cooling device for cooling the target is further arranged on the mounting plate;

the fixing assembly comprises a fixing disc, a cooling inner cavity is formed in the fixing disc, the liquid cooling device is communicated with the cooling inner cavity through a water inlet pipeline, cooling water in the cooling inner cavity is discharged through a water outlet pipeline, and the water outlet pipeline is sleeved on the water inlet pipeline.

Optionally, the filtering assembly includes an installation cylinder, an outer cylinder wall of the installation cylinder is attached to an inner cylinder wall of the second straight pipe, and the annular baffle is fixed on the installation cylinder;

the mounting cylinder is detachably connected with the second straight pipe.

A coating device comprises a vacuum coating cavity, a rotating frame for bearing a workpiece and a magnetic filtering pipe bending mechanism as described in any one of the above items;

the rotating frame is installed in the vacuum coating cavity, and one end, far away from the cathode arc target assembly of the magnetic filtering elbow mechanism, of the S-shaped vacuum elbow assembly of the magnetic filtering elbow mechanism is communicated with the vacuum coating cavity.

Compared with the prior art, the utility model discloses following beneficial effect has:

in this embodiment, the first straight tube and the second straight tube are parallel to each other, and the inner hole of the first straight tube and the inner hole of the second straight tube do not coincide along the projection parallel to the axis direction, and the sputtered atoms excited by the target material must pass through the S-shaped bent tube to be sputtered onto the surface of the workpiece to form a coating, and impurities may collide with the inner tube wall of the S-shaped bent tube during the process of passing through the S-shaped bent tube, so that the amount of the impurities sputtered onto the surface of the workpiece is effectively reduced, and the purity of the coating of the workpiece and the production yield of the workpiece are favorably improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without inventive exercise.

The structure, proportion, size and so on shown in the drawings of the present specification are only used to cooperate with the content disclosed in the specification for the understanding and reading of the people skilled in the art, and are not used to limit the limit conditions of the present invention, so that the present invention does not have the essential significance in the technology, and the modification of any structure, the change of the proportion relation or the adjustment of the size should still fall within the scope that the technical content disclosed in the present invention can cover without affecting the function and the achievable purpose of the present invention.

Fig. 1 is a schematic structural diagram of a magnetic filtering pipe bending mechanism according to an embodiment of the present invention;

fig. 2 is a schematic top view of a magnetic filtering pipe bending mechanism according to an embodiment of the present invention;

FIG. 3 isbase:Sub>A schematic sectional view A-A of the magnetic filter bend mechanism of FIG. 2;

fig. 4 is a schematic structural view of a cathode arc target assembly according to an embodiment of the present invention;

FIG. 5 is a schematic cross-sectional view of the cathode arc target assembly of FIG. 3.

Illustration of the drawings: 1. an S-shaped vacuum bend assembly; 11. a first straight pipe; 12. a second straight pipe; 13. an S-shaped bent pipe; 131. a water-cooled cavity; 132. a water inlet; 133. a water outlet; 2. a fixing component; 21. fixing the disc; 22. cooling the inner cavity; 3. an arc striking assembly; 4. mounting a plate; 5. a filter assembly; 51. an annular baffle; 52. mounting the cylinder; 61. an arc stabilizing coil; 62. a focusing coil; 63. a filter coil; 64. leading out a coil; 7. an anti-contamination cover; 71. an annular guide portion; 8. a liquid cooling device; 81. a water inlet pipe; 82. a water outlet pipeline.

Detailed Description

In order to make the objects, features and advantages of the present invention more obvious and understandable, the drawings in the embodiments of the present invention are combined below to clearly and completely describe the technical solutions in the embodiments of the present invention, and obviously, the embodiments described below are only some embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention. It should be noted that when one component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present.

The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.

Referring to fig. 1 to 5, an embodiment of the present invention provides a magnetic filtering pipe bending mechanism, which can effectively prevent impurities emitted by a cathode arc target assembly from directly sputtering onto a workpiece surface by providing an S-shaped bent pipe 13, and the impurities can impact on an inner pipe wall of the S-shaped bent pipe 13 during a turning process, thereby reducing the amount of the impurities sputtered on the product surface, and facilitating the improvement of the production yield and the plating purity of the product.

The magnetic filtering pipe bending mechanism comprises an S-shaped vacuum pipe bending component 1, an electromagnetic coil arranged on the outer wall of the S-shaped vacuum pipe bending component 1 in a circle mode, and a cathode arc target component arranged at one end of the S-shaped vacuum pipe bending component 1.

The cathode arc target assembly comprises a fixing assembly 2 for fixing the target material and an arc striking assembly 3 for driving the target material to generate arc spots; when the target generates arc spots, sputtering atoms are emitted to the other end of the S-shaped vacuum bent pipe component 1; the charged sputtered atoms travel along the S-shaped vacuum bend assembly at the electromagnetic coil. Because of the mass and charge differences between the impurities and the sputtered atoms, a distinction can be made between the paths of the impurities and the sputtered atoms.

The S-shaped vacuum bent pipe assembly 1 comprises a first straight pipe 11, a second straight pipe 12 and an S-shaped bent pipe 13, wherein two ends of the S-shaped bent pipe 13 are respectively connected with the first straight pipe 11 and the second straight pipe 12, the first straight pipe 11 is parallel to the second straight pipe 12, and an inner hole of the first straight pipe 11 and an inner hole of the second straight pipe 12 are not overlapped in a direction parallel to the central line of the first straight pipe 11, so that impurities cannot be sputtered onto the surface of a product linearly.

It should be added that the target material is doped with impurities, the electric charges of the impurities may be larger or smaller than the electric charges of the sputtering atoms, the sputtering atoms can control the sputtering direction and path under the action of the electromagnetic coil, so that the sputtering accuracy is improved, and the S-shaped bent pipe 13 is arranged to intercept the impurities with larger electric charges and smaller electric charges, so that the impurities can be effectively prevented from being sputtered onto the surface of the product. Specifically, on the premise of reasonably setting the parameters of the electromagnetic coil, the moving path of the sputtered atoms and the moving path of the impurities are different, so that the impurities impact on the pipe wall of the S-shaped bent pipe 13 and cannot be sputtered to the surface of the product, and the plating layer formed on the surface of the product is purer.

Optionally, the end of the first straight pipe 11 away from the S-bend 13 is provided with a mounting plate 4, and the arc striking assembly 3 and the fixing assembly 2 are both mounted on the mounting plate 4.

The inner pipe wall of the second straight pipe 12 is provided with a filter assembly 5, and the filter assembly 5 comprises a plurality of annular baffles 51 arranged at intervals along the direction of the central line of the second straight pipe 12.

Specifically, the annular baffle 51 is arranged, so that impurities of different types can be effectively intercepted, and the impurities are blocked and filtered by the annular baffle 51; in addition, the annular baffle 51 stops and filters impurities rolling off when impacting the S-shaped bent pipe 13, so that the amount of the impurities sputtered onto the surface of the workpiece is reduced, and the purity of the workpiece coating is improved.

Optionally, a water cooling cavity 131 parallel to the inner wall of the S-shaped elbow 13 is disposed in the S-shaped elbow 13, an inlet 132 communicating with the water cooling cavity 131 is disposed at one end of the S-shaped elbow 13 close to the second straight pipe 12, and an outlet 133 communicating with the water cooling cavity 131 is disposed at one end of the S-shaped elbow 13 close to the first straight pipe 11.

It should be noted that, in the process of sputtering target atoms onto the surface of the product, the S-bend 13 is in a high temperature state, so that the water cooling cavity 131 is provided to cool the S-bend 13. Furthermore, as can be seen from fig. 3, the water inlet 132 is disposed at one end of the S-shaped bent pipe 13 close to the second straight pipe 12, so that the flow direction of the cooling water in the water-cooling cavity 131 is towards the first straight pipe 11, which is beneficial to preventing the S-shaped bent pipe 13 from being burnt by high temperature.

Optionally, the electromagnetic coil includes an arc stabilizing coil 61 wound on the outer wall of the first straight pipe 11, a focusing coil 62 wound on the outer wall of the first straight pipe 11, a filter coil 63 wound on the outer wall of the S-shaped bent pipe 13, and an extraction coil 64 wound on the outer wall of the second straight pipe 12.

The focusing coil 62 is disposed between the arc stabilizing coil 61 and the filtering coil 63.

Specifically, the arc stabilizing coil 61 is used to control the size of the generated arc spot; the focusing coil 62 is used for controlling the sputtering atoms by using a magnetic field so as to focus the sputtering atom flow; the filter coil 61 makes a difference in a moving path between the impurity and the sputtered atom by applying a magnetic field, thereby allowing the impurity to be filtered; the extraction coil 64 is used for guiding sputtered atoms to irradiate the workpiece to complete film coating.

Alternatively, the contamination prevention cover 7 is provided on the inner tube wall of the first straight tube 11, and the position of the contamination prevention cover 7 corresponds to the position of the focusing coil 62.

Specifically, a contamination prevention cover is provided to prevent the focusing coil 62 from contaminating the inner tube wall of the first straight tube 11 during the process of focusing the sputter atoms.

Alternatively, the contamination prevention cover 7 is provided with an annular guide portion 71 that gradually converges toward the center line of the first straight pipe 11 at an end close to the S-bend 13. Specifically, the annular guide portion 71 is provided to physically collect the sputtered atoms that are too scattered, so that more sputtered atoms can be ejected from the first straight tube 11 in a predetermined direction.

Optionally, a liquid cooling device 8 for cooling the target is further disposed on the mounting plate 4.

The fixing assembly 2 includes a fixing plate 21, a cooling cavity 22 is formed in the fixing plate 21, the liquid cooling device 8 is communicated with the cooling cavity 22 through a water inlet pipe 81, cooling water in the cooling cavity 22 is discharged through a water outlet pipe 82, and the water outlet pipe 82 is sleeved on the water inlet pipe 81.

Specifically, the liquid cooling device 8 cools the target material, and prevents the fixed disk 21, which is in contact with the target material, from being burnt. The fixed disk 21 is effectively kept stable by the cooling of the cooling water, so that the sputtering process can be continuously and stably performed.

Optionally, the filter assembly 5 includes a mounting cylinder 52, an outer cylinder wall of the mounting cylinder 52 is attached to an inner cylinder wall of the second straight pipe 12, and the annular baffle 51 is fixed to the mounting cylinder 52; mounting cylinder 52 is removably attached to second straight tube 12. Specifically, the filter assembly 5 can be cleaned by removing the filter assembly 5, and then the filter assembly 5 is installed in the second straight pipe 12, so that the cleaning difficulty can be effectively reduced.

Example two

The embodiment provides a coating device which comprises a vacuum coating cavity, a rotating frame used for bearing a workpiece and a magnetic filtering pipe bending mechanism as in the first embodiment.

The rotating frame is arranged in the vacuum coating cavity, and one end of the S-shaped vacuum elbow component 1 of the magnetic filtering elbow mechanism, which is far away from the cathode arc target component of the magnetic filtering elbow mechanism, is communicated with the vacuum coating cavity.

It should be added that the coating equipment may further include other components to make the coating process be performed stably and continuously.

The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims

1. A magnetic filtering pipe bending mechanism is characterized by comprising an S-shaped vacuum pipe bending assembly (1), an electromagnetic coil arranged on the outer wall of the S-shaped vacuum pipe bending assembly (1) in a surrounding mode, and a cathode arc target assembly arranged at one end of the S-shaped vacuum pipe bending assembly (1), wherein the cathode arc target assembly comprises a fixing assembly (2) used for fixing a target material and an arc striking assembly (3) used for driving the target material to generate arc spots; when the target generates arc spots, sputtering atoms are emitted to the other end of the S-shaped vacuum bent pipe assembly (1);

s-shaped vacuum return bend subassembly (1) includes first straight tube (11), second straight tube (12) and S-shaped return bend (13), the both ends of S-shaped return bend (13) are connected respectively first straight tube (11) with second straight tube (12), first straight tube (11) are on a parallel with second straight tube (12), just the hole of first straight tube (11) with the hole of second straight tube (12) is on an edge and is on a parallel with do not overlap in the direction of first straight tube (11) central line.

2. The magnetic filter bend mechanism according to claim 1, wherein an end of the first straight pipe (11) away from the S-shaped bend (13) is provided with a mounting plate (4), and the arc striking assembly (3) and the fixing assembly (2) are mounted on the mounting plate (4);

the inner pipe wall of the second straight pipe (12) is provided with a filtering component (5), and the filtering component (5) comprises a plurality of annular baffles (51) which are arranged at intervals along the direction of the central line of the second straight pipe (12).

3. The magnetic filtering elbow mechanism according to claim 1, wherein a water cooling cavity (131) is arranged in the S-shaped elbow (13) and is parallel to the inner pipe wall of the S-shaped elbow (13), an inlet (132) communicating with the water cooling cavity (131) is arranged at one end of the S-shaped elbow (13) close to the second straight pipe (12), and an outlet (133) communicating with the water cooling cavity (131) is arranged at one end of the S-shaped elbow (13) close to the first straight pipe (11).

4. The magnetic filtering pipe bending mechanism according to claim 1, wherein the electromagnetic coil comprises an arc stabilizing coil (61) wound on the outer wall of the first straight pipe (11), a focusing coil (62) wound on the outer wall of the first straight pipe (11), a filtering coil (63) wound on the outer wall of the S-shaped bent pipe (13), and an extraction coil (64) wound on the outer wall of the second straight pipe (12);

the focusing coil (62) is arranged between the arc stabilizing coil (61) and the filtering coil (63).

5. The magnetic filter elbow mechanism according to claim 4, characterized in that a contamination shield (7) is provided on the inner pipe wall of the first straight pipe (11), and the position of the contamination shield (7) corresponds to the position of the focusing coil (62).

6. The magnetic filter bend mechanism of claim 5, wherein the contamination shield (7) is provided with an annular guide (71) that tapers towards the centerline of the first straight tube (11) at an end near the S-bend (13).

7. The magnetic filter tube bending mechanism according to claim 2, wherein a liquid cooling device (8) for cooling the target material is further disposed on the mounting plate (4);

the fixing component (2) comprises a fixing disc (21), a cooling inner cavity (22) is formed in the fixing disc (21), the liquid cooling device (8) is communicated with the cooling inner cavity (22) through a water inlet pipe (81), the cooling water in the cooling inner cavity (22) is discharged through a water outlet pipe (82), and the water inlet pipe (81) is sleeved with the water outlet pipe (82).

8. The magnetic filter pipe bending mechanism according to claim 2, wherein the filter assembly (5) comprises a mounting cylinder (52), an outer cylinder wall of the mounting cylinder (52) is attached to an inner cylinder wall of the second straight pipe (12), and the annular baffle (51) is fixed on the mounting cylinder (52);

the mounting cylinder (52) is detachably connected with the second straight pipe (12).

9. A coating device, which is characterized by comprising a vacuum coating cavity, a rotating frame for bearing a workpiece and the magnetic filtering pipe bending mechanism according to any one of claims 1 to 8;

the rotating frame is installed in the vacuum coating cavity, and one end, far away from the cathode arc target assembly of the magnetic filtering pipe bending mechanism, of the S-shaped vacuum pipe bending assembly (1) of the magnetic filtering pipe bending mechanism is communicated with the vacuum coating cavity.