CN217799717U

CN217799717U - Multi-station workpiece machining device

Info

Publication number: CN217799717U
Application number: CN202222169762.7U
Authority: CN
Inventors: 蔡志国; 江俊龙
Original assignee: Suzhou Weiying Laser Technology Co ltd
Current assignee: Suzhou Weiying Laser Technology Co ltd
Priority date: 2022-08-17
Filing date: 2022-08-17
Publication date: 2022-11-15
Anticipated expiration: 2032-08-17

Abstract

The utility model provides a multistation work piece processingequipment, it includes the device base station, a plurality of work piece microscope carriers, work piece microscope carrier actuating device, positioning device and processing equipment, at least three work piece microscope carrier is circulating reciprocating motion in proper order between different stations, when a work piece microscope carrier is returning stage in-process, positioning device and processing equipment are configured to handle the work piece on other work piece microscope carriers respectively, thereby make positioning device and processing equipment be in continuous operation state in the course of the work, the condition of disconnected shelves does not appear, positioning device and processing equipment's utilization ratio reaches theoretical limit, can show promotion work piece machining efficiency.

Description

Multi-station workpiece machining device

Technical Field

The utility model relates to a photovoltaic processing technology field specifically relates to a multistation work piece processingequipment.

Background

In the existing industrial equipment, along with the improvement of the requirement on the processing fineness of a workpiece, the workpiece can be positioned before processing, for example, solar photovoltaic cell automatic exposure equipment is an equipment system for automatically imaging and exposing the surface of a photovoltaic cell plate through laser based on optical detection. Due to the requirement on high fineness of the exposure pattern, the workpiece needs to be positioned by shooting the workpiece image through the CCD camera, and at the moment, the exposure device is internally provided with the exposure equipment and the positioning shooting equipment at the same time. In the existing equipment, the working processes of the two sets of equipment and the carrying process of the workpiece carrying platform lack efficient cooperation, and the workpiece processing efficiency is low.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a multistation work piece processingequipment.

The utility model provides a multi-station workpiece processing device, which comprises a device base station, a plurality of workpiece loading platforms, workpiece loading platform driving equipment, positioning equipment and processing equipment, wherein the device base station comprises a feeding station, a positioning station, a processing station and a discharging station which are arranged in sequence;

the multi-station workpiece processing device comprises at least three workpiece carrying tables, and the workpiece carrying tables are controlled by the workpiece carrying table driving device to sequentially and circularly reciprocate on the device base table along the station arrangement direction;

the feeding station is used for placing a workpiece on the workpiece carrying platform;

the positioning equipment is configured to position the position of the workpiece on the workpiece carrying platform at the positioning station to acquire workpiece position information;

the processing equipment is configured to process the workpiece at the processing station according to the workpiece position information;

the blanking station is used for outputting the workpiece on the workpiece carrying platform;

in the process that one workpiece carrier returns to the feeding station from the blanking station, the workpiece carrier moves to the positioning station, the positioning device is configured to position the workpiece on the workpiece carrier located at the positioning station, and meanwhile, one workpiece carrier moves to the processing station, and the processing device is configured to process the workpiece on the workpiece carrier located at the processing station.

As a further improvement, the multi-station workpiece machining device comprises a plurality of working areas arranged side by side in the arrangement direction of the stations of the device base station, and each working area is at least provided with one workpiece carrying platform, and each working area is internally provided with a circular reciprocating motion of the workpiece carrying platform along the arrangement direction of the stations.

As a further improvement, the multi-station workpiece processing device further comprises a positioning device driving part, wherein the positioning device driving part controls the positioning device to reciprocate between the working areas.

As a further improvement, the multi-station workpiece processing device further comprises a processing device driving part, wherein the processing device driving part controls the processing device to reciprocate between the working areas.

As a further improvement, the work station driving device is provided with a plurality of work stations arranged in the work area, and the work station driving device is provided with a plurality of work stations arranged in the work area.

As a further improvement, the utility model discloses a one in the workspace, two the work piece microscope carrier sets up with being listed as, work piece microscope carrier drive arrangement control work piece microscope carrier control when the work piece microscope carrier moves along station array direction, control work piece microscope carrier up-and-down staggered movement.

As a further improvement of the present invention, the processing device is one in the working area during the processing of the workpiece, the positioning device is configured to be another in the working area.

As a further improvement of the present invention, the multi-station workpiece processing device comprises two working areas arranged in parallel with the arrangement direction of the stations of the device base station, and two workpiece carrying platforms are respectively arranged in each working area;

in the process that a workpiece carrier returns to the loading station from the unloading station in the working area, the workpiece carrier moves to the positioning station, and the positioning equipment is configured to position the workpiece after moving to the positioning station;

in the same process, in another working area, one workpiece carrying platform moves to the processing station, the processing equipment is configured to process the workpiece on the workpiece carrying platform after moving to the processing station, and meanwhile, one workpiece carrying platform is in a standby state.

As a further improvement of the utility model, the positioning device includes a CCD camera lens group, the CCD camera lens group is configured to be used for the location station is shot the image of work piece on the work piece microscope carrier.

As a further improvement, the multistation workpiece machining device is still including setting up in the first portal frame of location station department, the CCD camera lens group set up in on the first portal frame crossbeam, follow first portal frame crossbeam is in the difference move between the workspace.

As a further improvement of the present invention, the workpiece stage further includes a light source device disposed on the surface thereof, the light source device is configured to emit light toward the CCD camera lens group after being opened.

As a further improvement of the present invention, the processing apparatus includes an exposure camera lens group, the exposure camera lens group is configured to be used for the processing station is right the workpiece is exposed.

As a further improvement, the multistation workpiece machining device is still including erectting the second portal frame of processing station department, the exposure camera lens group set up in on the second portal frame crossbeam, follow the second portal frame crossbeam is in the difference move between the workspace.

As a further improvement of the present invention, the workpiece stage table top is configured to be able to simultaneously place a plurality of workpieces arranged in an array.

As a further improvement of the present invention, the workpiece carrier further includes a vacuum adsorption device, the vacuum adsorption device is configured to open the rear vacuum adsorption and place on the workpiece carrier the workpiece.

As a further improvement, the multi-station workpiece processing device further comprises a feeding arm and a discharging arm, wherein the feeding arm is configured to place the workpiece on the workpiece carrier on the feeding station, and the discharging arm is configured to take the workpiece out of the workpiece carrier on the discharging station.

The utility model has the advantages that: the utility model discloses with at least three work piece microscope carrier at different stations between cyclic reciprocating motion in proper order, when a work piece microscope carrier is returning stage in-process, positioning device and processing equipment are configured to be handled the work piece on other work piece microscope carriers respectively to make positioning device and processing equipment be in continuous operation state in the course of the work, the condition of disconnected shelves does not appear, positioning device and processing equipment's utilization ratio reaches theoretical limit, can show promotion work piece machining efficiency.

Drawings

Fig. 1 is a schematic plan view of a multi-station workpiece processing apparatus according to an embodiment of the present invention.

Fig. 2 is a flowchart (three workpiece stages) of the operation according to an embodiment of the present invention.

Fig. 3 is a left schematic view of a multi-station workpiece processing apparatus according to an embodiment of the present invention.

Fig. 4 is a flowchart (four workpiece stages) of an operation according to an embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer, the following will combine the embodiments of the present invention and the corresponding drawings to clearly and completely describe the technical solutions of the present invention. It is to be understood that the described embodiments are merely exemplary of some, and not necessarily all, embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work all belong to the protection scope of the present invention.

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

For convenience in explanation, the description herein uses terms indicating relative spatial positions, such as "upper," "lower," "rear," "front," and the like, to describe one element or feature's relationship to another element or feature as illustrated in the figures. The spatially relative positional terms may include different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "above" other elements or features would then be oriented "below" or "above" the other elements or features. Thus, the exemplary term "below" can encompass both a spatial orientation of below and above.

As shown in fig. 1, the present embodiment provides a multi-station workpiece processing device, which includes a device base 1, a plurality of workpiece stages 2, a workpiece stage driving device 2a, a positioning device 3, and a processing device 4, and is particularly suitable for processing a photovoltaic cell panel. When the workpiece stage driving device 2a drives the plurality of workpiece stages 2 to move in a parallel and coordinated manner, the positioning device 3 and the processing device 4 seamlessly process the workpieces 5 on the other workpiece stages 2, the device processing efficiency is high, the output intervals of the workpieces 5 can be remarkably shortened, and the structure integration degree of the multi-station workpiece processing device is high.

For convenience of explanation, in the present embodiment, a specific configuration and a work flow of the multi-station work processing apparatus will be specifically described with reference to an exposure apparatus for a photovoltaic cell panel.

The device base 1 comprises a feeding station 11, a positioning station 12, a processing station 13 and a blanking station 14 which are arranged in sequence. The arrangement direction of the table surface station of the device base 1 is defined as the X-axis direction, the width direction of the table surface of the device base 1 perpendicular to the X-axis direction is defined as the Y-axis direction, and the height direction of the device base 1 is defined as the Z-axis direction. The workpiece carrying platform 2 moves to the stations in sequence to carry out corresponding operation.

The feeding station 11 is positioned at the head end of the device base 1, and the workpiece 5 is placed on the workpiece carrier 2 at the feeding station 11. Further, the multi-station workpiece processing device further comprises a feeding arm 6, and the feeding arm 6 is configured to place the workpiece 5 on the workpiece carrier 2 located at the feeding station 11.

The positioning station 12 is located at the rear end of the loading station 11, and the positioning device 3 is configured to position the workpiece 5 on the workpiece carrier 2 at the positioning station 12, so as to obtain position information of the workpiece 5, thereby providing position correction information for subsequent automatic processing of the workpiece 5. Since the workpiece 5 is automatically processed by the preset processing pattern or the preset processing coordinate information, the workpiece 5 is required to be at a standard preset position. However, in the feeding process, positional deviation of the workpiece 5, movement deviation of the workpiece stage 2, and the like cannot be avoided, and therefore, it is necessary to position the actual position of the workpiece 5 first.

The processing station 13 is located at the rear end of the positioning station 12, and the processing equipment 4 is configured to process the workpiece 5 at the processing station 13 according to the position information of the workpiece 5. After acquiring the position information of the workpiece 5, the machining device 4 machines the workpiece 5 by adjusting preset machining pattern information thereof, correcting machining coordinate information, or the like.

The blanking station 14 is positioned at the rear end of the processing station 13 and is used for outputting the processed workpiece 5. Further, the multi-station workpiece processing device further comprises a blanking arm 7, and the blanking arm 7 is configured to place the workpiece 5 on the workpiece carrier 2 located at the feeding station 11.

It should be noted that the different stations described herein are different functional areas divided according to different functional areas of the device base 1, and there may not be any obvious boundary or boundary mark between different stations in the actual device.

Specifically, in the present embodiment, the workpiece 5 is a photovoltaic cell panel, the positioning device 3 includes a CCD camera lens 3a disposed above the positioning station 12, and the processing device 4 is an exposure camera lens 4a disposed above the processing station 13. After the CCD camera lens 3a obtains an image of the photovoltaic cell panel on the workpiece carrying platform 2 through shooting, a processor of the multi-station workpiece processing device calculates the offset distance and the deflection angle of the photovoltaic cell panel relative to a standard position, the position of an exposure pattern is adjusted according to relevant position information, and the exposure camera lens 4a carries out exposure processing on the photovoltaic cell panel based on the corrected exposure pattern.

The utility model discloses an among other embodiments, processing equipment 4 also can be equipment such as laser cutting device for carry out laser cutting to photovoltaic cell board and handle. And, work as the utility model provides a multistation work piece processingequipment is used for other fields, if process the circuit board etc. also can correspond the concrete equipment of adjustment positioning device 3 and processing equipment 4.

Preferably, in the present embodiment, the workpiece stage 2 further includes a light source device provided on a surface thereof, and the light source device is configured to emit light rays to the group of CCD camera lenses 3a after being turned on. Because the photovoltaic cell panel is an opaque silicon wafer, the area of the peripheral edge of the photovoltaic cell panel can be illuminated by the light source, and the light of the area of the photovoltaic cell panel is shielded, so that the CCD camera lens 3a can shoot an image with high contrast difference formed by the area of the photovoltaic cell panel and the peripheral area. In the image shot by the method, the edge contour line of the photovoltaic cell panel is clear and easy to distinguish, so that the edge contour information of the workpiece 5 can be accurately detected and identified in the image to calculate the offset distance and the deflection angle.

Preferably, in the present embodiment, the table top of the workpiece stage 2 is designed to be able to simultaneously place a plurality of workpieces 5 arranged in an array, and correspondingly, the positioning device 3 is provided with a number of CCD camera lenses 3a corresponding to the number of the arranged arrays of the workpieces 5, so that a plurality of workpieces 5 can be simultaneously positioned in one work flow to improve the work efficiency. The feeding arm 6 and the discharging arm 7 comprise sucker devices for sucking the workpieces 5, and the quantity and the arrangement mode of the sucker devices are also corresponding to the arrangement array of the workpieces 5 on the workpiece carrying platform 2, so that the feeding and discharging processes of all the workpieces 5 can be completed through one-time operation.

Preferably, in the present embodiment, workpiece stage 2 further includes a vacuum suction device configured to vacuum-suck workpiece 5 placed on workpiece stage 2 after being opened, thereby firmly fixing workpiece 5, and unloading arm 7 can take out workpiece 5 after the vacuum suction device is closed.

Further, the multi-station workpiece processing device further includes a workpiece stage driving device 2a and at least three workpiece stages 2, and the workpiece stages 2 are controlled by the workpiece stage driving device 2a to reciprocate cyclically on the device base 1 in the station arrangement direction (i.e., the X-axis direction).

In the present embodiment, according to the time required for the workpiece 5 to be at different stations, a complete work flow of the workpiece stage 2 between different stations can be roughly divided into three stages with similar time lengths: a positioning stage, a machining stage and a return stage.

In the positioning stage, the feeding arm 6 places the workpiece 5 on the workpiece carrier 2, and the workpiece carrier 2 moves to the positioning station 12 to position the workpiece 5, and moves to the processing station 13 after the positioning is completed.

In the processing stage, the processing equipment 4 processes the workpiece 5, and after the processing is completed, the workpiece carrier 2 moves to the blanking station 14 for blanking.

In the return phase, the workpiece carrier 2 is moved from the unloading station 14 back to the loading station 11, ready for the next work flow.

When a workpiece carrier 2 is in a return stage, i.e. in the process of returning to the feeding station 11 from the blanking station 14, a workpiece carrier 2 is in a positioning stage, i.e. after being fed, the workpiece carrier moves to the positioning station 12, the positioning device 3 positions the workpiece 5 on the workpiece carrier 2 located at the positioning station 12, meanwhile, a workpiece carrier 2 is in a processing stage, i.e. moves to the processing station 13, and the processing device 4 processes the workpiece 5 on the workpiece carrier 2 located at the processing station 13.

As shown in fig. 2, at least three workpiece stages 2 move in sequence, and are respectively in three different stages, and since the workpiece stages 2 are in an empty state in the return stage, they do not participate in the actual production process. Therefore, by providing at least three workpiece stages 2, it can be ensured that when one workpiece stage 2 is in the process of the return stage, the positioning device 3 and the processing device 4 can respectively process the workpieces 5 on the other workpiece stages 2, so that the positioning device 3 and the processing device 4 are in a continuous working state in the working process, and gear breakage is avoided. The positioning device 3 and the processing device 4 are kept in a full-load working state, so that the working efficiency of the multi-station processing device 4 reaches the theoretical limit.

Further, in the present embodiment, the multi-station workpiece processing apparatus includes a plurality of work areas 1a arranged in parallel in the station arrangement direction of the apparatus base 1, at least one workpiece stage 2 is provided in each work area 1a, and the workpiece stage 2 is cyclically reciprocated in the station arrangement direction in each work area 1 a. During the processing of the workpiece 5 in one working area 1a by the processing device 4, the positioning device 3 is configured to position the workpiece 5 in the other working area 1 a.

In the present embodiment, in consideration of factors such as the mechanical structure between the cost stages 2 and their driving devices, the size of the top surface of the workpiece stages 2, and the like, if at least three workpiece stages 2 are arranged in the same row, it is difficult to arrange the driving devices of the workpiece stages 2 in order to ensure that interference does not occur between the workpiece stages 2 during the reciprocating motion. Therefore, by arranging the plurality of working areas 1a, the workpiece carriers 2 are arranged in parallel, and the positioning and processing are alternately performed in the different working areas 1a, so that the interference generated between the different workpiece carriers 2 in the reciprocating process is avoided.

Further, in the present embodiment, the multi-station workpiece processing apparatus further includes a positioning device 3 driving component and a processing device 4 driving component, the positioning device 3 driving component controls the positioning device 3 to reciprocate between the different working areas 1a, and the processing device 4 driving component controls the processing device 4 to reciprocate between the different working areas 1 a.

The utility model discloses an in other embodiments, also can set up positioning device 3 and processing equipment 4 respectively in the location station 12 of different workplaces 1a and processing station 13 punishment to the time of motion between positioning device 3 and the processing equipment 4 is saved down.

As shown in fig. 3, further, two workpiece stages 2 are respectively disposed in each working area 1a, two workpiece stage driving devices 2a are oppositely disposed in each working area 1a, the workpiece stage driving devices 2a include a rail 2a1 disposed along the X-axis direction and a supporting portion 2a2 movably connected to the workpiece stage 2 along the rail 2a1, and the motor controls the supporting portion 2a2 to move along the rail 2a1, so as to drive the workpiece 5 to circularly reciprocate sequentially along the station arrangement direction. The two workpiece carrying platforms 2 which are arranged oppositely can improve the structural integration degree of the multi-station workpiece processing device under the condition of avoiding interference.

Further, the utility model discloses an in some embodiments, in same workspace 1a, two work piece microscope carriers 2 are with arranging the setting, and supporting part 2a2 still is provided with elevating gear simultaneously, and work piece microscope carrier drive arrangement 2a control work piece microscope carrier 2 can also control work piece microscope carrier 2 and crisscross motion from top to bottom when following the motion of station array direction to further improve multistation work piece processingequipment's structure integration level, reduced its whole volume.

Specifically, in the present embodiment, the multi-station workpiece processing apparatus includes two working areas 1a, namely a first working area 1a1 and a second working area 1a2, arranged in parallel in the station arrangement direction of the apparatus base 1, and the first working area 1a1 and the second working area 1a2 are respectively arranged in the left and right half side regions of the apparatus base 1 along the Y-axis direction. A first workpiece stage 21 and a second workpiece stage 23 are provided in the first work area 1a1, and a third workpiece stage 22 and a fourth workpiece stage 24 are provided in the second work area 1a 2.

The multi-station workpiece processing device further comprises a first portal frame 8 erected at the positioning station 12, and a beam of the first portal frame 8 extends along the Y-axis direction. The CCD camera lens 3a group is arranged on a first portal frame 8 beam downwards and is driven by a driving device of the positioning device 3 to move between the first working area 1a1 and the second working area 1a2 along the first portal frame 8 beam.

The multi-station workpiece processing device further comprises a second portal frame 9 erected at the processing station 13, and a beam of the second portal frame 9 extends along the Y-axis direction. The lens 4a group of the exposure camera is arranged on the beam of the second portal frame 9 downwards, and is driven by the driving device of the processing equipment 4 to move between the first working area 1a1 and the second working area 1a2 along the beam of the second portal frame 9.

As shown in fig. 4, in the present embodiment, one complete work flow for each workpiece stage 2 includes four time intervals of positioning stage, machining stage, returning stage, and waiting for standby. For example, the operation states of four workpiece stages 2 in one period of time may be summarized as:

in the first working area 1a1, the first workpiece carrier 21 is in a return phase, i.e., returning from the blanking station 14 to the loading station 11, and the second workpiece carrier 23 is in a positioning phase, i.e., moving to the positioning station 12, and then the positioning device positions the workpiece 5. In the second work area 1a2, the third workpiece stage 22 is in the processing stage, i.e., moves to the processing station 13, the processing device 4 processes the workpiece 5, and the fourth workpiece stage 24 is on standby.

Through setting up such work flow, positioning device 3 and processing equipment 4 alternate motion between two workplaces 1a, keep continuous operating condition all the time, make the utilization ratio of two equipment reach the biggest, can maximize improvement productivity, improve production efficiency.

The utility model discloses an in other embodiments, also can set up workspace 1a and work piece microscope carrier 2 of other quantity to adjust the spatial position of each part according to the type of work piece 5, positioning device 3 and processing equipment 4, as long as make a work piece microscope carrier 2 in the phase process that returns, positioning device 3 and processing equipment 4 can handle work piece 5 on another work piece 5 work piece microscope carrier 2 respectively simultaneously can.

Next, a description will be given of a one-time complete work flow of the multi-station workpiece processing apparatus in the present embodiment.

First stage

1. In the first work area 1a1, the first workpiece stage 21 is in the positioning stage:

the feeding arm 6 simultaneously sucks a plurality of workpieces 5 to grip on the first workpiece carrier 21, and in the feeding process, the lens 3a group of the CCD camera starts to move towards the positioning station 12 in the first working area 1a 1.

After the loading is completed, the first workpiece carrier 21 starts the vacuum adsorption device, adsorbs and fixes the workpieces 5 arranged in an array, moves towards the positioning station 12 in the first working area 1a1, and starts the light source device arranged on the table top of the workpiece carrier 2 after the workpieces are moved in place. At the same time, the group of CCD camera lenses 3a is also moved to the positioning station 12 in the first working area 1a 1.

The CCD camera lens 3a group photographs the workpiece 5 on the first workpiece stage 21 to position it. During the positioning process, the group of exposure camera lenses 4a starts to move toward the processing station 13 in the first work area 1a 1.

After the positioning is completed, the first workpiece stage 21 moves toward the processing station 13 in the first working area 1a1, and moves to the processing station 13 in the first working area 1a1 in synchronization with the exposure lens group.

2. In the first work area 1a1, the second workpiece stage 23 is in the return phase:

the second workpiece stage 23 that has completed the blanking descends, moves from the blanking station 14 in the first work area 1a1, returns to the loading station 11 in the first work area 1a1, and waits after reaching the loading station 11.

While the first workpiece stage 21 is moving toward the machining station 13 in the first work area 1a1, the second workpiece stage 23 is rising.

3. In the second work area 1a2, the third workpiece stage 22 is in a standby state.

4. In the second working area 1a2, the fourth workpiece carrier 24 is in the processing phase:

the exposure camera lens 4a performs exposure processing on the workpiece 5 on the fourth workpiece stage 24.

After the exposure process is completed, the fourth workpiece stage 24 starts moving toward the blanking station 14, and the vacuum suction device is turned off after being in place.

The feed arm 7 takes out the workpiece 5 on the fourth workpiece stage 24.

Second stage

1. In the first work area 1a1, the first workpiece carrier 21 is in a processing phase:

the exposure camera lens 4a performs exposure processing on the workpiece 5 on the first workpiece stage 21.

After the exposure process is completed, the first workpiece stage 21 starts moving toward the blanking station 14, and the vacuum suction apparatus is turned off after being in place.

The feed arm 7 takes out the workpiece 5 on the fourth workpiece stage 24.

2. In the first work area 1a1, the second workpiece stage 23 is in a standby state.

3. In the second working area 1a2, the third workpiece stage 22 is in the positioning stage:

the feeding arm 6 simultaneously sucks a plurality of workpieces 5 to grip on the third workpiece carrier 22, and in the feeding process, the lens 3a group of the CCD camera starts to move towards the positioning station 12 in the second working area 1a 2.

After the loading is completed, the third workpiece carrier 22 starts the vacuum adsorption device, adsorbs and fixes the workpieces 5 arranged in an array, and moves toward the positioning station 12 in the second working area 1a2, and after the workpieces are moved in place, the light source device arranged on the table top of the workpiece carrier 2 is started. At the same time, the group of CCD camera lenses 3a is also moved to the positioning station 12 in the second working area 1a 2.

The CCD camera lens 3a group photographs the workpiece 5 on the third workpiece stage 22 to position it. During the positioning process, the group of exposure camera lenses 4a starts to move toward the processing station 13 in the second work area 1a 2.

After the positioning is completed, the third workpiece stage 22 moves toward the processing station 13 in the second working area 1a2, and moves to the processing station 13 in the second working area 1a2 in synchronization with the exposure lens group.

4. In the second work area 1a2, the fourth workpiece stage 24 is in the return phase:

the fourth workpiece stage 24 that has completed the blanking descends, moves from the blanking station 14 in the second work area 1a2 back to the loading station 11 in the second work area 1a2, and waits until it reaches the loading station 11.

While the third workpiece stage 22 is moving toward the processing station 13 in the second work area 1a2, the fourth workpiece stage 24 is raised.

The third stage

1. In the first work area 1a1, the first workpiece stage 21 is in the return stage:

the first workpiece stage 21 that has completed the blanking descends, moves from the blanking station 14 in the first work area 1a1, returns to the loading station 11 in the first work area 1a1, and waits after reaching the loading station 11.

While the second workpiece stage 23 is moving toward the processing station 13 in the first work area 1a1, the first workpiece stage 21 is raised.

2. In the first work area 1a1, the second workpiece stage 23 is in the positioning stage:

the feeding arm 6 simultaneously sucks a plurality of workpieces 5 to grip on the second workpiece carrier 23, and in the feeding process, the lens 3a group of the CCD camera starts to move towards the positioning station 12 in the first working area 1a 1.

After the feeding is completed, the second workpiece carrier 23 starts the vacuum adsorption device, adsorbs and fixes the workpieces 5 arranged in an array, moves towards the positioning station 12 in the first working area 1a1, and starts the light source device arranged on the table top of the workpiece carrier 2 after the workpieces are moved in place. At the same time, the group of CCD camera lenses 3a is also moved to the positioning station 12 in the first working area 1a 1.

The CCD camera lens 3a group shoots the workpiece 5 on the second workpiece stage 23 to position the workpiece. During the positioning process, the group of exposure camera lenses 4a starts to move toward the processing station 13 in the first work area 1a 1.

After the positioning is completed, the second workpiece stage 23 moves toward the processing station 13 in the first working area 1a1, and moves to the processing station 13 in the first working area 1a1 in synchronization with the exposure lens group.

3. In the second working area 1a2, the third workpiece stage 22 processing stage:

the exposure camera lens 4a performs exposure processing on the workpiece 5 on the third workpiece stage 22.

After the exposure process is completed, the third workpiece stage 22 starts moving toward the blanking station 14, and the vacuum suction device is turned off after being in place.

The feed arm 7 takes out the workpiece 5 on the third workpiece stage 22.

4. In the second work area 1a2, the fourth workpiece stage 24 is in a standby state.

Fourth stage

1. In the first work area 1a1, the first workpiece stage 21 is in a standby state.

2. In the first working area 1a1, the second workpiece stage 23:

the exposure camera lens 4a performs exposure processing on the workpiece 5 on the second workpiece stage 23.

After the exposure process is completed, the second workpiece stage 23 starts moving toward the blanking station 14, and the vacuum suction apparatus is turned off after being in place.

The feed arm 7 takes out the workpiece 5 on the second workpiece stage 23.

3. In the second work area 1a2, the third workpiece stage 22 is in the return phase:

the third workpiece stage 22 that has completed the blanking descends, moves from the blanking station 14 in the third work area 1a, returns to the loading station 11 in the third work area 1a, and waits until it reaches the loading station 11.

While the fourth workpiece stage 2 is moving toward the processing station 13 in the first work area 1a1, the third workpiece stage 22 is raised.

4. In the second working area 1a2, the fourth workpiece stage 24 is in the positioning stage:

the feeding arm 6 simultaneously sucks a plurality of workpieces 5 to grip on the fourth workpiece carrier 24, and in the feeding process, the lens 3a group of the CCD camera starts to move towards the positioning station 12 in the second working area 1a 2.

After the feeding is completed, the fourth workpiece carrier 24 starts the vacuum adsorption device, adsorbs and fixes the workpieces 5 arranged in an array, moves towards the positioning station 12 in the second working area 1a2, and starts the light source device arranged on the table top of the workpiece carrier 2 after the workpieces are moved in place. At the same time, the group of CCD camera lenses 3a is also moved to the positioning station 12 in the second working area 1a 2.

The CCD camera lens 3a group shoots the workpiece 5 image on the fourth workpiece stage 24 to position the workpiece. During the positioning process, the group of exposure camera lenses 4a starts to move toward the processing station 13 in the second work area 1a 2.

After the positioning is completed, the fourth workpiece stage 24 moves toward the processing station 13 in the second working area 1a2, and moves to the processing station 13 in the second working area 1a2 in synchronization with the exposure lens group.

As described above, the work flow is a complete work flow of the multi-station workpiece processing apparatus in the present embodiment, and the work flow is repeated after the operation is continued.

In the present embodiment, the actual utilization rate of the exposure lens group can reach nearly 100%, and since the time required for exposure is longer than the time required for positioning, the CCD camera lens group 3a can be utilized to the maximum extent while satisfying the synchronization with the exposure processing.

In other embodiments of the present invention, the specific detail steps of each stage can also be adjusted according to the specific number of the work area 1a and the workpiece stage 2, and according to the types of the workpiece 5, the positioning device 3, and the processing device 4.

To sum up, the utility model discloses with at least three work piece microscope carrier at the different stations between cyclic reciprocating motion in proper order, when a work piece microscope carrier is returning the stage in-process, positioning device and processing equipment are configured as and handle the work piece on other work piece microscope carriers respectively to make positioning device and processing equipment be in continuous operation state in the course of the work, the condition of disconnected shelves does not appear, positioning device and processing equipment's utilization ratio reaches theoretical limit, can show promotion work piece machining efficiency.

It should be understood that although the present description refers to embodiments, not every embodiment contains only a single technical solution, and such description is for clarity only, and those skilled in the art should make the description as a whole, and the technical solutions in the embodiments can also be combined appropriately to form other embodiments understood by those skilled in the art.

The above list of details is only for the feasible embodiments of the present invention, and is not intended to limit the scope of the present invention, and all equivalent embodiments or modifications that do not depart from the technical spirit of the present invention are intended to be included within the scope of the present invention.

Claims

1. The utility model provides a multistation work piece processingequipment, includes device base station, a plurality of work piece microscope carriers, work piece microscope carrier drive arrangement, positioning device and processing equipment, its characterized in that:

the device base station comprises a feeding station, a positioning station, a processing station and a discharging station which are sequentially arranged;

the multi-station workpiece processing device comprises at least three workpiece carrying platforms, and the workpiece carrying platforms are controlled by the workpiece carrying platform driving device to sequentially and circularly reciprocate on the device base platform along the station arrangement direction;

and in the process that a workpiece carrier returns to the loading station from the unloading station, the workpiece carrier moves to the positioning station, the positioning device is configured to position the workpiece on the workpiece carrier positioned at the positioning station, meanwhile, the workpiece carrier moves to the processing station, and the processing device is configured to process the workpiece on the workpiece carrier positioned at the processing station.

2. A multi-station workpiece processing apparatus according to claim 1, wherein said multi-station workpiece processing apparatus comprises a plurality of working areas arranged in parallel with a station arrangement direction of said apparatus base, at least one said workpiece carrier being provided in each of said working areas, and said workpiece carrier being cyclically reciprocated in the station arrangement direction in each of said working areas.

3. A multi-station workpiece processing apparatus as claimed in claim 2, further comprising a positioning device drive means which controls the positioning device to reciprocate between different said working zones.

4. A multi-station work processing apparatus according to claim 2, further comprising a processing device driving section which controls said processing device to reciprocate between different said working zones.

5. A multi-station workpiece processing apparatus according to claim 2, wherein two workpiece stages are provided in each of said work areas, and wherein said workpiece stage driving devices of said two workpiece stages are disposed to face each other in each of said work areas, and wherein said two workpiece stages are sequentially reciprocated in a cycle in the direction in which the stations are arranged.

6. A multi-station workpiece processing apparatus according to claim 5, wherein two of said workpiece stages are arranged in the same row in one of said work areas, and said workpiece stage driving means controls said workpiece stages to control the movement of said workpiece stages in the direction of the row of stations while controlling the movement of said workpiece stages to be staggered up and down.

7. A multi-station workpiece processing apparatus as claimed in claim 5, wherein said positioning device is configured to position the workpiece in one of said work zones during processing of the workpiece in the other of said work zones by said processing device.

8. The multi-station workpiece processing device according to claim 5, wherein the multi-station workpiece processing device comprises two working areas which are arranged in parallel in the station arrangement direction of the device base station, and two workpiece carrying platforms are respectively arranged in each working area;

in a working area, when a workpiece carrier returns to the loading station from the unloading station, the workpiece carrier moves to the positioning station, and the positioning device is configured to position the workpiece after moving to the positioning station;

in the same process, in another working area, one workpiece carrier moves to the processing station, the processing equipment is configured to process the workpiece on the workpiece carrier after moving to the processing station, and meanwhile, one workpiece carrier is in a standby state.

9. The multi-station workpiece processing apparatus according to claim 2, wherein the positioning device comprises a CCD camera lens group configured to capture an image of the workpiece on the workpiece stage at the positioning station.

10. The multi-station workpiece processing device according to claim 9, further comprising a first gantry mounted at the positioning station, wherein the CCD camera lens group is mounted on a cross beam of the first gantry and moves between different working areas along the cross beam of the first gantry.

11. The multi-station workpiece processing device of claim 9, wherein the workpiece stage further comprises a light source device disposed on a surface thereof, the light source device being configured to emit light toward the CCD camera lens group after being turned on.

12. A multi-station workpiece processing device according to claim 2, wherein said processing apparatus comprises an exposure camera lens group configured for exposure processing of said workpiece at said processing station.

13. The multi-station workpiece processing device according to claim 12, further comprising a second gantry mounted at the processing station, wherein the exposure camera lens set is disposed on a beam of the second gantry and moves between different working areas along the beam of the second gantry.

14. A multi-station workpiece processing apparatus as claimed in claim 1 wherein the workpiece stage table is configured to enable simultaneous placement of a plurality of workpieces in an array arrangement.

15. The multi-station workpiece processing apparatus according to claim 1, wherein the workpiece stage further comprises a vacuum suction device configured to vacuum-suck the workpiece placed on the workpiece stage after opening.

16. The multi-station workpiece processing apparatus of claim 1, further comprising a loading arm configured to place the workpiece on the workpiece carrier at the loading station and a unloading arm configured to remove the workpiece from the workpiece carrier at the unloading station.