CN217788365U - Miniature cyclone suction head - Google Patents
Miniature cyclone suction head Download PDFInfo
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- CN217788365U CN217788365U CN202221289256.5U CN202221289256U CN217788365U CN 217788365 U CN217788365 U CN 217788365U CN 202221289256 U CN202221289256 U CN 202221289256U CN 217788365 U CN217788365 U CN 217788365U
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Abstract
The utility model discloses a miniature cyclone formula suction head belongs to semiconductor packaging technical field, has solved among the prior art microchip direct contact and has picked up the problem that can't guarantee cleanliness factor, required space is great, non-contact picks up and can't be used for microchip. The miniature cyclone suction head comprises an air inlet channel, an air distribution cavity, a cyclone channel and a cyclone cavity which are communicated in sequence, wherein the radial angle between the air outlet direction of the cyclone channel and the cyclone cavity is more than 0 degree and less than or equal to 90 degrees. The micro cyclone suction head can be used for the patch of a micro chip.
Description
Technical Field
The utility model belongs to the technical field of the semiconductor encapsulation, especially, relate to a miniature cyclone suction head.
Background
In hybrid bonding techniques, the pick-up of the chip is usually by direct contact (e.g., front-side direct contact and peripheral direct contact).
The requirement on the surface cleanliness of the chip sucker is difficult to guarantee by a direct front contact mode, and cleaning treatment is needed subsequently, so that the efficiency is low and the cost is high; the direct contact mode at the periphery requires large space between the chips, and the quantity of the chips discharged from the wafer is seriously reduced.
At present, the non-contact method is mainly applied to pick-up and place of larger-sized products (such as ultra-thin wafers, glass jet disks, etc.), and cannot be applied to pick-up and place of micro chips.
SUMMERY OF THE UTILITY MODEL
In view of the above analysis, the utility model aims to provide a miniature cyclone type suction head has solved among the prior art microchip direct contact and has picked up the problem that can't guarantee cleanliness factor, required space is great and non-contact picks up and can't be used for microchip.
The purpose of the utility model is mainly realized through the following technical scheme:
the utility model provides a miniature cyclone formula suction head is including inlet channel, distribution die cavity, cyclone channel and the cyclone die cavity that communicates in proper order, and the direction of giving vent to anger of cyclone channel is greater than 0 and less than or equal to 90 with the radial angle of cyclone die cavity.
Furthermore, the diameter of the micro cyclone suction head is 10-75 mm, and the height is 5-10 mm.
Further, the diameter of the air inlet channel is 0.8-1.3 mm.
Furthermore, the diameter of the gas distribution cavity is 8.5-9.5 mm, and the depth is 1.5-2.5 mm.
Furthermore, the diameter of the cyclone cavity is 5-7 mm, and the depth is 2.0-3.5 mm.
Further, the diameter of the air outlet of the cyclone channel is 0.8-1.3 mm.
Further, the air outlet direction of the cyclone channel is perpendicular to the radial direction of the cyclone cavity.
Further, the number of the cyclone passages is 3 to 6.
Further, the number of the cyclone channels is 4, and the 4 cyclone channels are uniformly and spirally arranged in a divergent mode.
Further, the air outlet directions of two adjacent cyclone channels are vertical.
Compared with the prior art, the utility model discloses can realize one of following beneficial effect at least:
a) The utility model provides a miniature cyclone formula suction head is to microchip, unique cyclone formula suction head's structural design has been carried out, including the inlet channel who communicates in proper order, the distribution die cavity, cyclone channel and cyclone die cavity, cyclone channel's the direction of giving vent to anger is greater than 0 and less than or equal to 90 with cyclone die cavity's radial angle, from the outflow in the space between cyclone die cavity and the microchip, and radial outside quick diffusion along cyclone die cavity, thereby make the gas flow rate increase of microchip top, it is regional to form the vacuum between microchip front and the cyclone die cavity, make microchip remove to being close to cyclone formula suction head direction, realize that microchip's contactless adsorbs and picks up.
B) The utility model provides a miniature cyclone formula suction head, cyclone channel's the direction of giving vent to anger and cyclone cavity's radial perpendicular, like this, the high-speed fluid that flows out from cyclone channel's gas outlet can form the vacuum region in cyclone cavity as far as possible along the high-speed flow of inner wall of cyclone cavity to can further improve the adsorption affinity of cyclone formula suction head and high velocity air's flow stability.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
The drawings, in which like reference numerals refer to like parts throughout, are for the purpose of illustrating particular embodiments only and are not to be considered limiting of the invention.
Fig. 1 is a schematic structural view of a micro cyclonic suction head provided by the present invention, in which a solid line arrow is a flow direction of high-speed gas, and a dotted line arrow is a direction of an adsorption force;
FIG. 2 is a top view of the substrate in the micro-cyclonic nozzle provided by the present invention;
FIG. 3 is a cross-sectional view taken along line A-B of FIG. 2;
FIG. 4 is a cross-sectional view taken along line B-C of FIG. 2;
fig. 5 is the utility model provides a structural schematic diagram of stopper and spacing groove in miniature cyclone formula suction head.
Reference numerals are as follows:
1-an intake passage; 2-distributing a gas cavity; 3-a cyclonic channel; 31-first section; 32-a second segment; 4-cyclone cavity; 5-hooking section; 6-a microchip; 7-a cover body; 8-a substrate; 9-a connecting segment; 10-limiting section.
Detailed Description
The following detailed description of the preferred embodiments of the invention, taken in conjunction with the accompanying drawings, which form a part hereof, and which together with the embodiments of the invention serve to explain the principles of the invention.
The utility model provides a miniature cyclone formula suction head, see figure 1 to figure 5, including inlet channel 1, distribution die cavity 2, cyclone channel 3 and the cyclone die cavity 4 that communicate in proper order, cyclone channel 3's the direction of giving vent to anger is greater than 0 and less than or equal to 90 with the radial angle of cyclone die cavity 4.
When the micro chip sucking head is implemented, an air inlet of the air inlet channel 1 is connected with an air supply unit, the micro chip 6 is arranged at an air outlet of the cyclone cavity 4, high-pressure air flow provided by the air supply unit sequentially passes through the air inlet channel 1, the air distribution cavity 2, the cyclone channel 3 and the cyclone cavity 4, flows out from a gap between the cyclone cavity 4 and the micro chip 6, and quickly diffuses outwards along the radial direction of the cyclone cavity 4, so that the air flow velocity above the micro chip 6 is increased, a vacuum area is formed between the front surface of the micro chip 6 and the cyclone cavity 4, the micro chip 6 moves towards the direction close to the cyclone sucking head, the front surface of the micro chip 6 is subjected to non-contact picking by the micro cyclone sucking head, the micro chip 6 is separated from a blue membrane, the air pressure of the air inlet is 0.15-1 MPa, and non-contact adsorption and picking of the micro chip 6 are realized. Placing the back of the microchip 6 on a contact suction head; the micro cyclone suction head releases the front surface of the micro chip 6, the front surface of the micro chip 6 is contacted with the wafer for pressurizing and pasting, the pressure is 1-1000N, the size of the wafer is 8 inches or 12 inches, pasting from the micro chip 6 to the wafer is completed, and mixed bonding from the micro chip 6 to the wafer is realized.
It should be emphasized that, due to the high velocity of the air flow between the microchip 6 and the cyclonic tip, the microchip 6 does not come into contact with the cyclonic tip, which prevents contamination of the chip surface by the tip during chip pick-up.
In order to enable the microchip 6 to be adsorbed, the diameter of the above-mentioned cyclone tip is 10 to 75mm, for example, 10mm, 25mm, 30mm, 40mm, 55mm or 75mm; the overall height of the cyclonic tip is 5 to 10mm, for example 5mm, 6.5mm, 8mm or 10mm; the diameter of the intake passage 1 is 0.8 to 1.3mm, for example, 0.8mm, 0.9mm, 1.2mm or 1.3mm; the diameter of the gas distribution cavity 2 is 8.5-9.5 mm, such as 8.5mm, 8.8mm, 9.2mm or 9.5mm, and the depth is 1.5-2.5 mm, such as 1.5mm, 1.8mm, 2.0mm, 2.2mm or 2.5mm; the cyclone cavity 4 has a diameter of 5 to 7mm, for example, 5.0mm, 5.8mm, 6.0mm, 6.5mm or 7.0mm, and a depth of 2.0 to 3.5mm, for example, 2.0mm, 2.6mm, 3.1mm or 3.5mm; the diameter of the outlet of the cyclone passage 3 is 0.8 to 1.3mm, for example, 0.8mm, 0.9mm, 1.2mm or 1.3mm.
The micro-cyclonic tip described above is particularly suitable for use, by way of example, in the non-contact pick-up and placement of a microchip 6, the microchip 6 having dimensions (length x width) of 1 to 100mm x 1 to 100mm.
Compared with the prior art, the utility model provides a miniature cyclone formula suction head, to microchip 6, unique cyclone formula suction head's structural design has been carried out, including inlet channel 1 that communicates in proper order, distribution die cavity 2, cyclone channel 3 and cyclone die cavity 4, cyclone channel 3's the direction of giving vent to anger is greater than 0 and less than or equal to 90 with the radial angle of cyclone die cavity 4, from the outflow in the space between cyclone die cavity 4 and microchip 6, and along the radial outside quick diffusion of cyclone die cavity 4, thereby make the gas flow rate of microchip 6 top increase, it is regional to form the vacuum between microchip 6 openly and the cyclone die cavity 4, make microchip 6 to being close to the removal of cyclone formula suction head direction, realize that microchip 6's contactless adsorbs and picks up.
In order to realize the rapid flow of high-speed airflow, the specific arrangement modes of the air inlet channel 1, the air distribution cavity 2, the cyclone channel 3 and the cyclone cavity 4 are as follows: the air inlet channel is arranged along the radial direction of the suction head, the air distribution cavity 2 is arranged at the top end of the suction head, the cyclone channel 3 is arranged at the bottom end of the suction head, and the axis of the air distribution cavity 2 and the axis of the cyclone channel 3 are parallel to the axis of the suction head.
Regarding the structure of the cyclone channel 3, specifically, it includes a first section 31 and a second section 32 communicated with the first section 31, the axis of the first section 31 is parallel to the axis of the suction head, and the angle between the air outlet direction of the second section 32 (i.e. the axis of the second section 32) and the radial direction of the cyclone cavity 4 is greater than 0 ° and less than or equal to 90 °.
In consideration of the adsorption force of the cyclonic nozzle and the flow stability of the high-speed air flow, the angle between the air outlet direction of the cyclonic channel 3 and the radial direction of the cyclonic cavity 4 is 90 degrees, that is, the air outlet direction of the cyclonic channel 3 is perpendicular to the radial direction of the cyclonic cavity 4, so that the high-speed fluid flowing out from the air outlet of the cyclonic channel 3 can flow along the inner wall of the cyclonic cavity 4 at a high speed, and a vacuum area is formed in the cyclonic cavity 4 as much as possible, thereby further improving the adsorption force of the cyclonic nozzle and the flow stability of the high-speed air flow.
Illustratively, the number of the cyclone channels 3 may be 3 to 6, for example, 4 cyclone channels 3 are uniformly and spirally arranged, the direction of the air outlet of two adjacent cyclone channels 3 is perpendicular, and when the high-speed air flows out from the air outlet of the cyclone channel 3, the high-speed fluid can flow into the cyclone cavity 4 along the tangential direction of the inner wall of the cyclone cavity 4, so that the flow resistance of the high-speed fluid can be effectively reduced, the flow speed thereof is ensured, and the diameter of the vacuum region can be further increased.
In order to improve the machinability of the micro cyclone suction head, the micro cyclone suction head further comprises a base body 8 and a cover body 7, the air inlet channel 1, the air distribution cavity 2, the cyclone channel 3 and the air distribution cavity 4 are all arranged on the base body 8, the top end of the air distribution cavity 2 is an open end, and the cover body 7 is arranged on the open end and is in sealing connection with the open end.
It is worth noting that, in the process of adsorbing the microchip by the micro cyclone suction head, the connection interface between the cover 7 and the base 8 is always under the tension generated by high-speed gas, and the cover 7 and the base 8 are hermetically connected only by resistance welding or solder welding, and the separation or air leakage between the cover 7 and the base 8 may occur, therefore, a limit block and a limit groove which are matched with each other are arranged at the connection position between the cover 7 and the base 8, the limit block is fixedly connected with one of the cover 7 and the base 8, and the limit groove is arranged on the other of the cover 7 and the base 8 through the limit block and the limit groove which are matched with each other.
Wherein, to the structure of stopper, particularly, it is including the linkage segment 9 that connects gradually, spacing section 10 and collude section 5, and linkage segment 9, spacing section 10 and collude section 5 all are located the edge of lid 7 and base member 8, and it can be understood that, the shape of spacing groove and the shape of stopper are mutually supported, and the spacing groove is including the spread groove that communicates in proper order, spacing groove and colluding the groove, and linkage segment 9 inserts in the spread groove, and spacing section 10 inserts in the spacing groove, colludes section 5 and inserts in the colluding groove. Through the stopper and the spacing groove of this kind of structure, wherein, spacing section 10 can effectively inject the axial displacement between lid 7 and the base member 8, colludes section 5 and can inject the radial displacement between lid 7 and the base member 8, can guarantee basically through spacing section 10 and colluding mutually supporting of section 5 that lid 7 and base member 8 can not take place relative displacement after seal weld to can reduce the atress of splice, guarantee welded reliability and leakproofness. In addition, it should be noted that, before welding, the cover body 7 and the base body 8 are close to each other in the radial direction, so that the limiting blocks located at the edges are inserted into the limiting grooves, the cover body 7 and the base body 8 can also be positioned, and the welding assembly precision is ensured.
It should be noted that, in order to realize the connection between the limiting block and the limiting groove in advance before the sealing welding, the number of the limiting block and the limiting groove is one.
As the material of the base body 8 and the lid body 7, specifically, stainless steel, aluminum alloy, or copper alloy may be used for both.
Example one
The specific dimensions of the micro-cyclonic tip of this example are as follows:
the whole diameter of miniature cyclone formula suction head is 10mm, and whole height is 8mm, and inlet channel's diameter is 1mm, and the diameter of distribution die cavity is 9mm, and the degree of depth of distribution die cavity is 2mm, and the diameter 6mm of cyclone die cavity, the degree of depth of cyclone die cavity are 3mm, and the quantity of cyclone passageway is 4, and the diameter of cyclone passageway is 1mm.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention should be covered by the present invention.
Claims (10)
1. The miniature cyclone suction head is characterized by comprising an air inlet channel, an air distribution cavity, a cyclone channel and an air cyclone cavity which are communicated in sequence, wherein the radial angle between the air outlet direction of the cyclone channel and the air cyclone cavity is more than 0 degree and less than or equal to 90 degrees.
2. The micro-cyclonic tip of claim 1, wherein the micro-cyclonic tip has a diameter of 10 to 75mm and a height of 5 to 10mm.
3. The micro-cyclonic tip of claim 1 wherein the diameter of the air inlet passage is 0.8 to 1.3mm.
4. The micro cyclonic tip of claim 1 wherein the gas distribution cavity has a diameter of 8.5 to 9.5mm and a depth of 1.5 to 2.5mm.
5. The micro-cyclonic tip of claim 1 wherein the cyclonic cavity has a diameter of 5 to 7mm and a depth of 2.0 to 3.5mm.
6. The micro cyclonic tip as claimed in claim 1, wherein the diameter of the air outlet of the cyclonic passage is 0.8 to 1.3mm.
7. The micro cyclonic suction head of any one of claims 1 to 6 wherein the direction of the air outlet from the cyclonic passage is perpendicular to the radial direction of the cyclonic cavity.
8. The micro cyclonic cleaner head of any one of claims 1 to 6 wherein the number of cyclonic channels is from 3 to 6.
9. The micro cyclonic tip of claim 8 wherein the number of cyclonic passages is 4, the 4 cyclonic passages being in a uniform, helically diverging arrangement.
10. The micro-cyclonic cleaner head of claim 9 wherein the air outlet direction of two adjacent cyclonic channels is perpendicular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221289256.5U CN217788365U (en) | 2022-05-27 | 2022-05-27 | Miniature cyclone suction head |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221289256.5U CN217788365U (en) | 2022-05-27 | 2022-05-27 | Miniature cyclone suction head |
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| Publication Number | Publication Date |
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| CN217788365U true CN217788365U (en) | 2022-11-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202221289256.5U Active CN217788365U (en) | 2022-05-27 | 2022-05-27 | Miniature cyclone suction head |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116553173A (en) * | 2023-05-16 | 2023-08-08 | 华中科技大学 | High-reliability non-contact chip pickup device and online control method |
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2022
- 2022-05-27 CN CN202221289256.5U patent/CN217788365U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116553173A (en) * | 2023-05-16 | 2023-08-08 | 华中科技大学 | High-reliability non-contact chip pickup device and online control method |
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