CN217781322U - Gas circuit impurity removing device and crystal pulling system - Google Patents
Gas circuit impurity removing device and crystal pulling system Download PDFInfo
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- CN217781322U CN217781322U CN202221125458.6U CN202221125458U CN217781322U CN 217781322 U CN217781322 U CN 217781322U CN 202221125458 U CN202221125458 U CN 202221125458U CN 217781322 U CN217781322 U CN 217781322U
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Abstract
The utility model discloses a gas circuit impurity removing device and a crystal pulling system, wherein the gas circuit impurity removing device comprises an exhaust pipeline, an air exhaust pipeline, a cooling pipeline, a sealing plate, a flexible telescopic piece and a stirring rotary rod; the air exhaust pipeline is communicated with the exhaust pipeline, and an included angle is formed between the axial extension direction of the air exhaust pipeline and the axial extension direction of the exhaust pipeline; one end of the cooling pipeline is communicated with the exhaust pipeline, and the axial extension direction of the cooling pipeline is consistent with that of the exhaust pipeline; the sealing plate is arranged at the other end of the cooling pipeline and used for sealing; the flexible telescopic piece is positioned outside the cooling pipeline, one end of the flexible telescopic piece is connected with the sealing plate, and the other end of the flexible telescopic piece is connected with the magnetic fluid; one end of the stirring rotating rod is positioned in the exhaust pipeline and used for breaking away oxides, and the other end of the stirring rotating rod penetrates through the sealing plate, the flexible telescopic piece and the magnetic fluid and then is connected with the driving piece. The utility model discloses can in time clear up the oxide in the pipeline, guarantee that exhaust duct and air exhaust duct are unobstructed, increase crystal pulling operation cycle, reduce the crystal pulling cost.
Description
Technical Field
The utility model belongs to the technical field of the crystal pulling, concretely relates to miscellaneous device and crystal pulling system are arranged to gas circuit.
Background
During the growth of single crystal silicon by the Czochralski method, a large amount of oxide is produced. Because the oxide is continuously accumulated in the air extraction pipeline in the crystal growth period, the air extraction pipeline is blocked, and the air exhaust is not smooth. The growth atmosphere environment of the crystal is damaged, so that the crystal cannot grow continuously and only can stop generating, and the economic loss of productivity is caused.
SUMMERY OF THE UTILITY MODEL
To the problem, the utility model provides a miscellaneous device is arranged to gas circuit and crystal pulling system can in time clear up the oxide among the air exhaust duct, guarantees that air exhaust duct is unobstructed, increases crystal pulling operation cycle, reduces the crystal pulling cost.
In order to realize the technical purpose, reach above-mentioned technological effect, the utility model discloses a following technical scheme realizes:
in a first aspect, the utility model provides a miscellaneous device is arranged to gas circuit, include:
an exhaust duct;
the air exhaust pipeline is communicated with the exhaust pipeline, and an included angle is formed between the axial extension direction of the air exhaust pipeline and the axial extension direction of the exhaust pipeline;
one end of the cooling pipeline is communicated with the exhaust pipeline, and the axial extension direction of the cooling pipeline is consistent with that of the exhaust pipeline;
the sealing plate is arranged at the other end of the cooling pipeline and used for sealing;
the flexible telescopic piece is positioned outside the cooling pipeline, one end of the flexible telescopic piece is connected with the sealing plate, and the other end of the flexible telescopic piece is connected with the magnetic fluid;
and one end of the stirring rotating rod is positioned in the exhaust pipeline and used for breaking away oxides, and the other end of the stirring rotating rod penetrates through the sealing plate, the flexible telescopic piece and the magnetic fluid and then is connected with the driving piece.
Optionally, a silicon leakage monitoring plate is arranged in the cooling pipeline, and a thermosensitive element is arranged on the silicon leakage monitoring plate and used for monitoring the temperature in the cooling pipeline in real time.
Optionally, the installation angle of the silicon leakage monitoring plate is 0 ° to 45 °, and the silicon leakage monitoring plate is connected to the sealing plate through an adjusting member.
Optionally, a through hole for the stirring rotating rod to pass through is formed in the silicon leakage monitoring plate, the through hole and the center position of the silicon leakage monitoring plate are in an offset state, and the diameter of the stirring rotating rod is smaller than that of the through hole.
Optionally, the difference in diameter between the stirring rotating rod and the through hole is 1-1.5mm.
Optionally, the end of the stirring rotating rod, which is positioned in the exhaust pipeline, is provided with a temperature sensing material, and the temperature sensing material is used for providing a temperature change analysis of 200-500 degrees.
Optionally, the stirring rotating rod comprises a first section, a second section and a third section which are sequentially arranged, the first section and the third section are parallel to each other, an included angle is formed between the second section and the first section, and a gap is formed between the first section and the inner wall of the exhaust pipeline.
Optionally, a box body is arranged at the joint of the magnetic fluid and the stirring rotating rod, and the box body is located above the sealing plate and used for preventing oxides in the exhaust pipeline from entering the magnetic fluid.
Optionally, the length of the cooling pipeline is smaller than that of the exhaust pipeline, and the length of the cooling pipeline is 0.6-1.5m.
In a second aspect, the present invention provides a crystal pulling system, comprising:
the furnace cover, the middle furnace barrel and the furnace bottom are arranged in sequence, and a first accommodating space is formed by the furnace cover, the middle furnace barrel and the furnace bottom;
the upper heat-insulating cylinder, the middle heat-insulating cylinder, the lower heat-insulating cylinder and the furnace bottom heat-insulating felt are sequentially arranged to form a second accommodating space positioned in the first accommodating space, and the furnace bottom heat-insulating felt is connected with the furnace bottom;
the crucible supporting piece is arranged in the second accommodating space;
a crucible connected to the crucible support;
a silicon liquid located within the crucible;
in the air path impurity removing device of any one of the first aspect, the exhaust duct is communicated with the second accommodating space.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model provides a miscellaneous device is arranged to gas circuit and crystal pulling system utilizes the rotatory oxide that destroys the crystal growth in-process on the pipe wall of rotatory puddler, ensures that the pipeline can not be blockked up by the oxide to the oxide impurity that will break away is in time taken away through air exhaust pipeline, guarantees that the pipeline is unobstructed, increases the operation cycle of pulling a crystal, reduces the cost of pulling a crystal.
The utility model discloses add the cooling tube way, increased exhaust duct's length for the oxide has sufficient temperature gradient in the formation process, lets it fully crystallize under different temperatures for the oxide.
The utility model provides a flexible extensible member can realize flexible displacement, supports to stir the rotary rod about all-round no dead angle clearance generate various impurity.
When high-temperature silicon liquid enters the pipeline and flows through the silicon leakage monitoring plate, the high-temperature silicon liquid can be detected by the thermosensitive element arranged on the silicon leakage monitoring plate, and then the alarm is triggered to send out a danger alarm, so that the potential safety hazard can be timely stopped and eliminated, and the situation can be prevented from being continuously expanded.
The utility model provides a leak the installation angle of silicon monitoring board can set up to 0to 45, can discharge the bold oxide from the pipeline smoothly.
The stirring rotary rod of the utility model is wound with the temperature sensing material, and the stirring rotary rod is disassembled after the operation period is finished, and the state change is observed, so that the analysis of the temperature change of 200-500 degrees can be provided.
Drawings
In order that the present disclosure may be more readily and clearly understood, reference is now made to the following detailed description of the present disclosure taken in conjunction with the accompanying drawings, in which:
fig. 1 is a schematic structural view of a gas circuit impurity removing device according to an embodiment of the present invention;
fig. 2 is one of the schematic views illustrating the installation of the silicon leakage monitoring plate and the stirring rotating rod according to an embodiment of the present invention;
fig. 3 is a second schematic view illustrating the installation of the silicon leakage monitoring plate and the stirring rotating rod according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a crystal pulling system in accordance with one embodiment of the present invention;
wherein: 1-furnace cover, 2-middle furnace barrel, 3-furnace bottom, 4-upper heat preservation barrel, 5-middle heat preservation barrel, 6-lower heat preservation barrel, 7-furnace bottom heat preservation felt, 8-crucible supporting piece, 9-silicon liquid, 10-crystal bar, 11-exhaust pipeline, 12-exhaust pipeline, 13-cooling pipeline, 14-sealing plate, 15-magnetic fluid, 16-stirring rotating rod, 17-silicon leakage monitoring plate, 18-box body, 19-flexible telescopic piece, 20-rotating motor and 21-water cooling heat shield heat preservation body.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the scope of the invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of the description of the present invention, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The following description is made in detail for the purpose of illustrating the principles of the present invention and in conjunction with the accompanying drawings.
Example 1
The embodiment provides an air path impurity removing device, as shown in fig. 1, which includes an exhaust duct 11, an air exhaust duct 12, a cooling duct 13, a sealing plate 14, a flexible expansion piece 19, and a stirring rotating rod 16;
the air extraction pipeline 12 is communicated with the exhaust pipeline 11, and an included angle is formed between the axial extension direction of the air extraction pipeline and the axial extension direction of the exhaust pipeline 11; in a specific implementation process, preferably, the axial extension directions of the exhaust pipeline 12 and the exhaust pipeline 11 are perpendicular to each other, so as to clean oxides in the pipelines in time and ensure that the exhaust pipeline 11 and the exhaust pipeline 12 are unobstructed;
one end of the cooling pipeline 13 is communicated with the exhaust pipeline 11, and the axial extension direction of the cooling pipeline is consistent with the axial extension direction of the exhaust pipeline 11, so that the exhaust pipeline 11 is extended, and the oxide has enough temperature gradient in the forming process and is fully crystallized into the oxide at different temperatures;
the sealing plate 14 is arranged at the other end of the cooling pipeline 13 and used for sealing;
the flexible telescopic piece 19 is positioned outside the cooling pipeline 13, one end of the flexible telescopic piece is connected with the sealing plate 14, and the other end of the flexible telescopic piece is connected with the magnetic fluid 15; the structure of the magnetic fluid 15 is the prior art, mainly comprises a vessel and a magnetic fluid medium arranged in the vessel, is a mature rotating mechanical sealing part and is used for realizing the sealing between two rotating bodies; in a specific implementation process, the flexible expansion piece 19 can be a corrugated pipe, and the expansion displacement function of the flexible expansion piece 19 can support the stirring rotating rod 16 to clean various impurities generated in the process of no dead angle in all directions from top to bottom and from left to right;
one end of the stirring rotating rod 16 is positioned in the exhaust pipeline 11 and is used for removing oxides, and the other end of the stirring rotating rod passes through the sealing plate 14, the flexible telescopic piece 19 and the magnetic fluid 15 and then is connected with the driving piece; the stirring rotating rod 16 is used for rotationally damaging oxides (such as hard carbon silicon compounds) in the crystal growth process, breaking the rule of continuous growth of the oxides, and avoiding blockage of the exhaust pipeline 11.
In a specific embodiment of this embodiment, be equipped with hourglass silicon monitoring board 17 in the cooling tube 13, leak and be equipped with heat-sensitive element (not shown in the figure) on the silicon monitoring board 17 for temperature in the real-time supervision pipeline, just flow through hourglass silicon monitoring board 17 in the high temperature silicon liquid gets into the pipeline, can be monitored by the heat-sensitive element that sets up on leaking silicon monitoring board 17, and then trigger the alarm and send danger alarm, accomplish in time the loss stopping, eliminate the potential safety hazard, prevent that its incident from continuing to enlarge. The heat sensitive elements exhibit different colors for different temperatures or a change in the scale. In the actual installation process, the angle of the silicon leakage monitoring plate 17 is adjustable within the range of 0-45 degrees and is connected with the sealing plate 4 through an adjusting piece (such as an adjusting bolt), fig. 2 shows the silicon leakage monitoring plate under two different installation angles, one of the two installation angles is 0 degree, the other installation angle is 45 degrees, the silicon leakage monitoring plate is used for pumping away large oxides falling down along a pipeline in time, specifically, the air flow in the pipeline moves, one side of the pipeline is 11torr, the other side of the pipeline is lower than 10torr, so that the pressure difference is generated in the pipeline, the air flow movement occurs, impurities fall down, and the impurities can be taken away along with the air flow movement. In a specific implementation process, the silicon leakage monitoring plate 17 is made of a medium with a heat conduction function, such as a steel plate.
In a specific embodiment of this embodiment, as shown in fig. 3-4, the silicon leakage monitoring plate 17 is provided with a through hole for passing the stirring rotating rod 16 therethrough, the through hole is offset from the center of the silicon leakage monitoring plate 17, and the diameter of the stirring rotating rod 16 is smaller than that of the through hole. Preferably, the diameter difference between the stirring rotating rod 16 and the through hole is 1mm-1.5mm, which is used to ensure that the two do not rub during the movement.
In a specific embodiment of this embodiment, a box 18 is provided at the connection between the magnetic fluid 15 and the stirring rotating rod 16, and the box 18 is located above the sealing plate 14 for preventing the oxides in the exhaust duct 11 from entering the magnetic fluid 15.
In a specific embodiment of this embodiment, the driving member is a rotating motor 20, which can realize automatic impurity removal. In other embodiments of this embodiment, the driving member may also be other devices or apparatuses capable of realizing rotational driving.
In a specific implementation manner of this embodiment, the stirring rotating rod 16 includes a first section, a second section, and a third section that are sequentially disposed, where the first section and the third section are parallel to each other, an included angle exists between the second section and the first section, and an included angle exists between the second section and the third section, and a gap exists between the first section and an inner wall of the exhaust duct 11. The stirring rotating rod 16 in this embodiment is used for scraping and dropping the hard silicon compound attached to the inner wall of the exhaust duct 11.
In a specific embodiment of this embodiment, the length of the cooling pipe 13 is smaller than the length of the exhaust pipe 11, and generally, the length of the cooling pipe 13 itself is set to be 0.6-1.5m, so that the oxide has a sufficient temperature gradient in the formation process, and is sufficiently crystallized into the oxide at different temperatures.
The working process of the gas circuit impurity removing device in the embodiment is as follows:
various silicon compounds and high-temperature argon gas generated by the crystal pulling system are discharged along the exhaust pipe 11 and are pumped away through the exhaust pipeline 12, the cooling pipeline 13 has enough space to carry out forced cooling crystallization on the high-temperature gas and impurities, the generation of solid compounds is accelerated, the heat is slowed down and is continuously transmitted to the sealing plate 14, the silicon leakage monitoring plate 17 generates temperature change when silicon liquid flows through, a temperature element is triggered to alarm, personnel can be effectively reminded of the occurrence of accidents, the prevention is made, and the accidents are prevented from being continuously expanded; the displacement function of the flexible telescopic piece 19 supports the stirring rotating rod 16 to carry out omnibearing cleaning of agglomerated hard impurities, the stirring rotating rod 16 is wound with a temperature sensor material, and the stirring rotating rod can be taken out for observation after being discharged from a furnace to provide temperature data; the magnetic fluid 15 can provide a rotary seal and transmit power during the whole operation process. The box body 18 is used for isolating and protecting fine impurities falling from the exhaust pipeline 11 from entering the magnetic fluid 15, so that the magnetic fluid is prevented from being stuck; the rotating motor 20 converts the electric energy into power potential energy, and continuously provides the power potential energy for the stirring rotating rod 16.
Example 2
The utility model discloses in provide a crystal pulling system, as shown in fig. 4, include:
the furnace cover 1, the middle furnace barrel 2 and the furnace bottom 3 are arranged in sequence, and a first accommodating space is formed by the furnace cover, the middle furnace barrel and the furnace bottom;
an upper heat-insulating cylinder 4, a middle heat-insulating cylinder 5, a lower heat-insulating cylinder 6 and a furnace bottom heat-insulating felt 7 are sequentially arranged to form a second accommodating space positioned in the first accommodating space, and the furnace bottom heat-insulating felt 7 is connected with the furnace bottom 3;
the water-cooling heat shield heat insulation body 21 is arranged in the second accommodating space and is connected with the upper heat insulation cylinder 4;
a crucible support 8 disposed in the second receiving space;
a crucible connected to the crucible support 8;
a silicon liquid 9 located within the crucible;
a crystal bar 10 formed by drawing silicon liquid;
in the air path impurity removing device according to any one of embodiment 1, the exhaust duct 11 is communicated with the second accommodating space.
The working process of the crystal pulling system in the embodiment specifically comprises the following steps:
a sealed single crystal pulling furnace is formed by a furnace cover 1, a middle furnace barrel 2, a furnace bottom 3, an upper heat preservation barrel 4, a middle heat preservation barrel 5, a lower heat preservation barrel 6, a furnace bottom heat preservation felt 7, a crucible supporting piece 8, silicon liquid 9 and a crystal rod 10.
An exhaust pipe 11 is arranged at the bottom of the furnace bottom 3;
the exhaust pipe 11 is used for exhausting various silicon compounds and high-temperature argon gas generated in the single crystal pulling furnace, and impurities generated in the single crystal pulling furnace are pumped away by the exhaust pipeline 12; the cooling pipeline 13 has enough space to perform forced cooling crystallization on passing high-temperature gas and impurities, so that the generation of solid compounds is accelerated, the heat is slowed down to be continuously transmitted to the sealing plate 14, the temperature change can be generated when silicon liquid flows through the silicon leakage monitoring plate 17, the temperature element is triggered to alarm, personnel can be effectively reminded of the occurrence of accidents, the prevention is made, and the accidents are prevented from being continuously expanded; the displacement function of the flexible telescopic piece 19 supports the stirring rotating rod 16 to carry out omnibearing cleaning of agglomerated hard impurities, the stirring rotating rod 16 is wound with a temperature sensor material, and the stirring rotating rod can be taken out for observation after being discharged from a furnace to provide temperature data; the magnetic fluid 15 provides a rotary seal and power transmission effect throughout the operation. The box body 18 is used for isolating and protecting fine impurities falling from the exhaust pipeline 11 from entering the magnetic fluid 15, so that the magnetic fluid is prevented from being stuck; the rotating motor 20 converts the electric energy into power potential energy, and continuously provides the power potential energy for the stirring rotating rod 16.
The foregoing shows and describes the basic principles and principal features of the invention, together with the advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. The utility model provides a miscellaneous device is arranged to gas circuit which characterized in that includes:
an exhaust duct;
the air exhaust pipeline is communicated with the exhaust pipeline, and an included angle is formed between the axial extension direction of the air exhaust pipeline and the axial extension direction of the exhaust pipeline;
one end of the cooling pipeline is communicated with the exhaust pipeline, and the axial extension direction of the cooling pipeline is consistent with that of the exhaust pipeline;
the sealing plate is arranged at the other end of the cooling pipeline and used for sealing;
the flexible telescopic piece is positioned outside the cooling pipeline, one end of the flexible telescopic piece is connected with the sealing plate, and the other end of the flexible telescopic piece is connected with the magnetic fluid;
and one end of the stirring rotating rod is positioned in the exhaust pipeline and used for breaking away oxides, and the other end of the stirring rotating rod penetrates through the sealing plate, the flexible telescopic piece and the magnetic fluid and then is connected with the driving piece.
2. The gas path impurity removing device according to claim 1, wherein: the cooling pipeline is internally provided with a silicon leakage monitoring plate, and the silicon leakage monitoring plate is provided with a thermosensitive element and is used for monitoring the temperature in the cooling pipeline in real time.
3. The gas path impurity removing device according to claim 2, wherein: the installation angle of the silicon leakage monitoring plate is 0-45 degrees, and the silicon leakage monitoring plate is connected with the sealing plate through an adjusting piece.
4. The gas path impurity removing device according to claim 2, wherein: be equipped with the perforating hole that is used for supplying the stirring rotary rod to pass on the silicon leakage monitoring board, the perforating hole is in the bias state with the central point of silicon leakage monitoring board, the diameter of stirring rotary rod is less than the diameter of perforating hole.
5. The gas path impurity removing device according to claim 4, wherein: the diameter difference between the stirring rotating rod and the through hole is 1-1.5mm.
6. The gas path impurity removing device according to claim 1, wherein: and a temperature sensing material is arranged at the end part of the stirring rotating rod, which is positioned in the exhaust pipeline, and is used for providing a temperature change analysis of 200-500 degrees.
7. The gas circuit impurity removing device according to claim 1, wherein: the stirring rotating rod comprises a first section, a second section and a third section which are sequentially arranged, the first section and the third section are parallel to each other, an included angle is formed between the second section and the first section as well as between the second section and the third section, and a gap is formed between the first section and the inner wall of the exhaust pipeline.
8. The gas path impurity removing device according to claim 1, wherein: and a box body is arranged at the joint of the magnetic fluid and the stirring rotary rod, is positioned above the sealing plate and is used for preventing oxides in the exhaust pipeline from entering the magnetic fluid.
9. The gas circuit impurity removing device according to claim 1, wherein: the length of the cooling pipeline is less than that of the exhaust pipeline, and the length of the cooling pipeline is 0.6-1.5m.
10. A crystal pulling system, comprising:
the furnace cover, the middle furnace barrel and the furnace bottom are arranged in sequence, and a first accommodating space is formed by the furnace cover, the middle furnace barrel and the furnace bottom;
the upper heat-insulating cylinder, the middle heat-insulating cylinder, the lower heat-insulating cylinder and the furnace bottom heat-insulating felt are sequentially arranged to form a second accommodating space positioned in the first accommodating space, and the furnace bottom heat-insulating felt is connected with the furnace bottom;
the crucible supporting piece is arranged in the second accommodating space;
a crucible connected to the crucible support;
a silicon liquid located within the crucible;
the gas circuit impurity removal device of any one of claims 1-9, wherein the exhaust conduit is in communication with the second receiving space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221125458.6U CN217781322U (en) | 2022-05-12 | 2022-05-12 | Gas circuit impurity removing device and crystal pulling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221125458.6U CN217781322U (en) | 2022-05-12 | 2022-05-12 | Gas circuit impurity removing device and crystal pulling system |
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| Publication Number | Publication Date |
|---|---|
| CN217781322U true CN217781322U (en) | 2022-11-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221125458.6U Active CN217781322U (en) | 2022-05-12 | 2022-05-12 | Gas circuit impurity removing device and crystal pulling system |
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| CN (1) | CN217781322U (en) |
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- 2022-05-12 CN CN202221125458.6U patent/CN217781322U/en active Active
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