CN104250846A - Single crystal furnace cooling system - Google Patents
Single crystal furnace cooling system Download PDFInfo
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- CN104250846A CN104250846A CN201310269128.3A CN201310269128A CN104250846A CN 104250846 A CN104250846 A CN 104250846A CN 201310269128 A CN201310269128 A CN 201310269128A CN 104250846 A CN104250846 A CN 104250846A
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- cooling
- single crystal
- furnace body
- furnace
- heater
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Abstract
The invention relates to the technical field of single crystal furnaces, and relates to a single crystal furnace cooling system capable of cooling a single crystal furnace and having alarm function; the single crystal furnace cooling system comprises a furnace body, the furnace body is provided with a cooling interlayer, a cooling pipe with a liquid inlet end and a liquid outlet end is arranged in the cooling interlayer, the liquid inlet end of the cooling pipe is connected with a conveying pump, the liquid outlet end is connected to a recovery tank, and the cooling pipe surrounds spirally around the furnace body. A detector is used for real-time detection of the outer wall of the furnace body, the detection result is transmitted to a controller, and the controller controls the conveying pump to work according to the detection results of the detector so as to ensure the temperature of the furnace body is always maintained within a certain range, so that the working temperature of the furnace body is ensured, and the service life of the furnace body is prolonged.
Description
Technical field
The present invention relates to single crystal growing furnace technical field, be specifically related to a kind ofly to cool single crystal growing furnace and there is the cooling system of single crystal furnace of warning function.
Background technology
Single crystal growing furnace is a kind of in inert gas environment, with graphite heater by polycrystalline material fusings such as polysilicons, with the equipment of Grown by CZ Method dislocation-free monocrystalline.When single crystal growing furnace works, temperature in stove is very high, need to cool it, high temperature in its stove can cause damage to body of heater, thus needs to cool body of heater, and existing cooling structure is most is interlayer cooling, its cooling performance is bad, the temperature of body of heater can not be known immediately simultaneously, can not cool, affect the work-ing life of single crystal growing furnace to body of heater.
Summary of the invention
For above-mentioned technical problem, the invention provides a kind of cooling system of single crystal furnace, its good cooling results, while, can be detected in real time to the temperature of body of heater, cooled, extend the work-ing life of single crystal growing furnace by the temperature detected to body of heater.
Realize technical scheme of the present invention as follows:
Cooling system of single crystal furnace, comprise body of heater, described body of heater is provided with cooling sandwith layer, is provided with the cooling duct with liquid feeding end, outlet end in cooling sandwith layer, the liquid feeding end of cooling duct connects transferpump, outlet end connects a pond for recovering, and described cooling duct spiral surrounding is around body of heater.Transferpump cools body of heater in spiral cooling tube road.
Packing material is had between space in described cooling duct and cooling sandwith layer.Packing material can transmit the temperature of cooling fluid preferably, better cools body of heater.
Described furnace body outer wall is provided with the detector detected furnace body temperature, and detector connects a controller, and described controller is connected with above-mentioned transferpump.Detector can detect in real time the outside wall temperature of body of heater and detected result be passed to controller, and controller controls transferpump in cooling duct according to the result that detector detects, and cools body of heater.
Described controller also connects a temperature buzzer.When the furnace body temperature that detector detects is higher than the value set, controller will send signal to warning howler and report to the police.
Have employed such scheme, detector detects in real time to furnace body outer wall, detected result is passed to controller, the output control transferpump that controller detects according to detector carries out work, thus ensure that the temperature of body of heater remains in certain scope, thus ensure body of heater working temperature, extend body of heater work-ing life.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
In figure, 1 is body of heater, and 2 is cooling sandwith layer, and 3 is cooling duct, and 4 is pond for recovering, and 5 is transferpump, and 6 is detector, and 7 is controller, and 8 is temperature buzzer.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is further described.
Shown in Figure 1, cooling system of single crystal furnace, comprise body of heater 1, body of heater 1 is provided with cooling sandwith layer 2, the cooling duct 3 with liquid feeding end, outlet end is provided with in cooling sandwith layer, the liquid feeding end of cooling duct 3 connects the output terminal of transferpump 5 through interlayer, outlet end connects a pond for recovering 4, and cooling duct 3 spiral surrounding is around body of heater.Packing material is had between space in cooling duct and cooling sandwith layer.Furnace body outer wall is provided with the detector 6 detected furnace body temperature, and detector 6 connects a controller 7, and controller 7 is connected with above-mentioned transferpump.Detector detects in real time to furnace body outer wall, detected result is passed to controller, and the output control transferpump that controller detects according to detector carries out work, thus ensures that the temperature of body of heater remains in certain scope, thus ensure body of heater working temperature, extend body of heater work-ing life.Controller also connects a temperature buzzer 8, and when the furnace body temperature that detector detects is higher than the value set, controller will send signal to warning howler and report to the police.
Claims (4)
1. cooling system of single crystal furnace, comprise body of heater, it is characterized in that: described body of heater is provided with cooling sandwith layer, the cooling duct with liquid feeding end, outlet end is provided with in cooling sandwith layer, the liquid feeding end of cooling duct connects transferpump, outlet end connects a pond for recovering, and described cooling duct spiral surrounding is around body of heater.
2. cooling system of single crystal furnace according to claim 1, is characterized in that: have packing material between the space in described cooling duct and cooling sandwith layer.
3. cooling system of single crystal furnace according to claim 1, is characterized in that: described furnace body outer wall is provided with the detector detected furnace body temperature, and detector connects a controller, and described controller is connected with above-mentioned transferpump.
4. cooling system of single crystal furnace according to claim 3, is characterized in that: described controller also connects a temperature buzzer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310269128.3A CN104250846A (en) | 2013-06-30 | 2013-06-30 | Single crystal furnace cooling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310269128.3A CN104250846A (en) | 2013-06-30 | 2013-06-30 | Single crystal furnace cooling system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104250846A true CN104250846A (en) | 2014-12-31 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310269128.3A Pending CN104250846A (en) | 2013-06-30 | 2013-06-30 | Single crystal furnace cooling system |
Country Status (1)
| Country | Link |
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| CN (1) | CN104250846A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105441644A (en) * | 2015-12-29 | 2016-03-30 | 重庆市环岛机械制造有限公司 | Annealing furnace utilizing waste heat of castings for annealing treatment |
| CN106191354A (en) * | 2016-08-27 | 2016-12-07 | 明光瑞尔非金属材料有限公司 | The blast furnace lining structure of a kind of heat insulating and sealing and production technology thereof |
| CN106839647A (en) * | 2017-01-13 | 2017-06-13 | 许昌天戈硅业科技有限公司 | A kind of cooling device of the cooling water in sapphire production |
| CN108842143A (en) * | 2018-07-09 | 2018-11-20 | 上海新昇半导体科技有限公司 | Epitaxial furnace cooling system and cooling means |
| CN114395796A (en) * | 2021-12-13 | 2022-04-26 | 青海高景太阳能科技有限公司 | Single crystal furnace capable of intelligently controlling water flow |
-
2013
- 2013-06-30 CN CN201310269128.3A patent/CN104250846A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105441644A (en) * | 2015-12-29 | 2016-03-30 | 重庆市环岛机械制造有限公司 | Annealing furnace utilizing waste heat of castings for annealing treatment |
| CN105441644B (en) * | 2015-12-29 | 2017-09-01 | 重庆市环岛机械制造有限公司 | The annealing furnace made annealing treatment using the waste heat of casting |
| CN106191354A (en) * | 2016-08-27 | 2016-12-07 | 明光瑞尔非金属材料有限公司 | The blast furnace lining structure of a kind of heat insulating and sealing and production technology thereof |
| CN106839647A (en) * | 2017-01-13 | 2017-06-13 | 许昌天戈硅业科技有限公司 | A kind of cooling device of the cooling water in sapphire production |
| CN108842143A (en) * | 2018-07-09 | 2018-11-20 | 上海新昇半导体科技有限公司 | Epitaxial furnace cooling system and cooling means |
| CN114395796A (en) * | 2021-12-13 | 2022-04-26 | 青海高景太阳能科技有限公司 | Single crystal furnace capable of intelligently controlling water flow |
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Legal Events
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| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20141231 |