CN217774959U

CN217774959U - Cleaning device and exposure apparatus

Info

Publication number: CN217774959U
Application number: CN202221875901.1U
Authority: CN
Inventors: 蔡智祥
Original assignee: LG Display Optoelectronics Technology China Co Ltd
Current assignee: LG Display Optoelectronics Technology China Co Ltd
Priority date: 2022-07-19
Filing date: 2022-07-19
Publication date: 2022-11-11
Anticipated expiration: 2032-07-19

Abstract

The utility model discloses a cleaning device and exposure equipment, wherein, cleaning device is used for clean mask plate, and cleaning device includes device body and jet-propelled subassembly, and this internal clean chamber that sets up of device, clean chamber are used for holding the mask plate, and the jet-propelled subassembly sets up at clean intracavity, and the jet-propelled subassembly includes the shower nozzle, and cold air source and hot gas source are connected respectively to the shower nozzle to make the shower nozzle can spray cold air current and hot gas flow to the surface of mask plate in turn. Through set up jet-propelled subassembly at clean intracavity to jet-propelled subassembly's shower nozzle can spray hot air flow and cold air current to the mask plate in turn, so that the foreign matter drops from the surface of mask plate, and the foreign matter that drops can be taken away from the mask plate surface by the air current, thereby realizes the cleanness of this cleaning device mask plate, and clean effectually. The cleaning device does not need to use a large amount of water solution to wash the mask plate, saves water resources and reduces cleaning cost. In addition, the surface of the mask plate can not be damaged by the airflow, and the photoetching effect of the mask plate on the display panel is ensured.

Description

Cleaning device and exposure equipment

Technical Field

The utility model relates to a cleaning device technical field especially relates to a cleaning device and exposure equipment.

Background

In the manufacturing process of the display panel, the display panel needs to be subjected to photolithography processing by using exposure equipment. In the photoetching process, the display panel needs to be shielded by a mask plate in the exposure equipment so as to form a set pattern on the display panel. After the mask plate is used in exposure equipment for a period of time, foreign matters can be adsorbed on the mask plate, and the foreign matters can influence the photoetching effect of the display panel. Therefore, in order to ensure the photolithography effect of the exposure apparatus on the display panel, the mask plate needs to be cleaned to remove the foreign substances.

At present, as shown in fig. 1, the mask 1' needs to be removed from the exposure apparatus and then transferred to a cleaning machine for cleaning. The cleaning machine comprises a cleaning chamber 2', a rolling brush 3' and a spray pipe 4 'are arranged in the cleaning chamber 2', the spray pipe 4 'sprays water solution to the mask plate 1', meanwhile, the rolling brush 3 'cleans the surface of the mask plate, and the mask plate 1' is placed in exposure equipment after cleaning is finished. The prior art has the following defects: 1. the surface of the mask plate 1' is easily damaged in the process of brushing the surface of the mask plate 1' by the rolling brush 3', so that the exposure quality of the display panel is influenced; 2. in order to ensure the cleaning effect of the mask plate 1', the spray pipe 4' needs to spray a large amount of water solution, thereby causing water resource waste and high cleaning cost.

SUMMERY OF THE UTILITY MODEL

The utility model discloses an aim at: the cleaning device is simple in structure and good in cleaning effect on the mask plate.

The utility model discloses another aim at: the exposure equipment is simple in structure and good in photoetching effect.

In order to achieve the purpose, the utility model adopts the following technical proposal:

the first aspect provides a cleaning device for clean mask plate, cleaning device include device body and jet-propelled subassembly, this internal clean chamber that sets up of device, clean chamber is used for holding the mask plate, jet-propelled subassembly sets up clean intracavity, jet-propelled subassembly includes the shower nozzle, cold air source and hot gas source are connected respectively to the shower nozzle, so that the shower nozzle can to the surface of mask plate sprays cold air stream and hot gas flow in turn.

As a cleaning device's an preferred scheme, jet-propelled subassembly still includes jet-propelled pipe and three-way valve, the air conditioning source is including refrigeration spare and air feed spare, the hot gas source include with the heating member with the air feed spare, the air feed spare be used for to the heating member with refrigeration spare provides gas, refrigeration spare is used for the cooling gas is in order to form the cold gas stream, the heating member is used for the heating gas is in order to form the hot gas stream, jet-propelled pipe passes through the three-way valve respectively with refrigeration spare with heating member intercommunication, jet-propelled pipe is kept away from the one end setting of three-way valve the shower nozzle.

As a preferred embodiment of the cleaning device, the cooling member and the heating member share one air supply member.

As a preferable mode of the cleaning device, the gas injection assembly further includes a gas pulse generator disposed between the gas injection pipe and the three-way valve, the gas pulse generator being configured to convert the hot gas flow or the cold gas flow into a pulse gas flow.

As a preferred scheme of the cleaning device, the cleaning device further comprises a foreign matter recovery assembly, the foreign matter recovery assembly comprises a recovery table, a recovery hopper and a recovery box, the recovery table is located below the mask plate, the recovery table penetrates through a plurality of through holes along the thickness direction of the recovery table, one end of the recovery hopper is sleeved outside the side wall of the recovery table, and the other end of the recovery hopper is communicated with the recovery box.

As a preferable scheme of the cleaning device, the recycling hopper is made of soft materials.

As a cleaning device's a preferred scheme, the shower nozzle is followed the length or the width direction removal of mask plate, foreign matter recovery unit still includes slide rail and slider, the slide rail sets up on the inside wall in clean chamber, just the length of slide rail is followed the moving direction of shower nozzle extends, the slider sets up on the lateral wall of recovery platform, the slider slides and sets up on the slide rail.

As a preferable mode of the cleaning device, a guide plate is provided along a peripheral portion of the recovery stage, and the guide plate is inclined upward away from a center of the recovery stage.

As a preferable scheme of the cleaning device, the cleaning device further includes a plurality of air ducts, all the air ducts are arranged at intervals at the top of the cleaning chamber, and the air ducts spray air toward the recovery platform, so that the foreign matters floating in the cleaning chamber fall onto the recovery platform.

In a second aspect, an exposure apparatus is provided, which includes a housing and the above cleaning device, the cleaning device being disposed in the housing.

The beneficial effects of the utility model are that: through setting up jet-propelled subassembly in clean intracavity, jet-propelled subassembly's shower nozzle is connected with cold air supply and steam source respectively, so that the shower nozzle can spray hot air flow and cold air current in turn to the surface of mask plate, take place the inflation when the foreign matter on the mask plate receives the hot air flow, take place the shrink when the foreign matter on the mask plate receives the cold air current, the foreign matter is at expend with heat and contract with cold two kinds of state switching-over in-process, it drops from the surface of mask plate very easily, the foreign matter that drops can be taken away from the mask plate surface by the air current, thereby realize this cleaning device to the clean function of mask plate, and clean effectual. The cleaning device does not need to use a large amount of water solution to wash the mask plate, saves water resources, reduces cleaning cost, does not need to remove the mask from the exposure equipment, and improves the cleaning efficiency of the mask plate. In addition, the surface of the mask plate can not be damaged by the airflow, and the exposure effect of the mask plate on the display panel is ensured.

Drawings

The present invention will be described in further detail with reference to the accompanying drawings and examples.

Fig. 1 is a schematic structural view of a conventional cleaning machine.

Fig. 2 is a schematic structural diagram of a first viewing angle of the cleaning device according to the embodiment of the present invention.

FIG. 3 is a schematic structural view of a second viewing angle of the cleaning device according to an embodiment of the present invention

In fig. 1:

1', a mask plate; 2', a cleaning chamber; 3', rolling and brushing; 4' and a spray pipe.

In fig. 2 and 3:

100. a mask plate;

1. a device body; 11. cleaning the cavity; 2. a gas injection assembly; 21. a spray head; 22. a three-way valve; 23. a refrigeration member; 24. a heating element; 25. a gas supply member; 26. a gas pulse generator; 27. a gas ejector tube; 3. a foreign matter recovery assembly; 31. a recovery stage; 311. a through hole; 32. a recovery hopper; 33. a recycling bin; 34. a slide rail; 35. a slider; 36. a guide plate; 4. an air duct; 5. a robot arm.

Detailed Description

The advantages and features of the present invention and the methods of accomplishing the same will become apparent with reference to the following detailed description of the embodiments taken in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and the embodiments are provided only to accomplish the disclosure of the present invention and to enable those skilled in the art to sufficiently understand the scope of the present invention, and the present invention is limited only by the scope of the claims. Like reference numerals denote like constituent elements throughout the specification.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

As shown in fig. 2 and 3, the utility model discloses a cleaning device is used for clean mask plate 100, and it includes device body 1 and jet-propelled subassembly 2, and device body 1 is provided with clean chamber 11, and clean chamber 11 is used for holding mask plate 100, and jet-propelled subassembly 2 sets up in clean chamber 11, and jet-propelled subassembly 2 includes shower nozzle 21, and cold air source and hot air source are connected respectively to shower nozzle 21 to make shower nozzle 21 can spray cold air stream and hot gas flow to mask plate 100's surface in turn. Through set up jet-propelled subassembly 2 in clean chamber 11, jet-propelled subassembly 2's shower nozzle 21 is connected with cold air source and steam source respectively, so that shower nozzle 21 can spray hot air flow and cold air current to mask plate 100's surface in turn, take place the inflation when the foreign matter on mask plate 100 receives the hot air flow, take place the shrink when mask plate 100's foreign matter receives the cold air current, the foreign matter is in expend with heat and contract with cold two kinds of state switching process, very easily drop from mask plate 100's surface, the foreign matter that drops can be taken away from mask plate 100 surface by the air current, thereby realize this cleaning device to mask plate 100's clean function, and clean effectual. The cleaning device does not need to use a large amount of water solution to wash the mask plate 100, saves water resources, reduces cleaning cost, does not need to remove the mask from the exposure equipment, and improves the cleaning efficiency of the mask plate 100. In addition, the surface of the mask plate 100 is not damaged by the airflow, and the exposure effect of the mask plate 100 on the display panel is ensured.

In this embodiment, still be provided with the chamber of depositing that is used for depositing mask plate 100 in the device body 1, deposit chamber and clean chamber 11 intercommunication, the mask plate 100 that has adsorbed the foreign matter can be deposited the intracavity in leaving, be provided with manipulator 5 in the clean chamber 11, manipulator 5 can snatch mask plate 100 from depositing the chamber, and snatch mask plate 100 to clean chamber 11 in, thereby shower nozzle 21 sprays cold air current and hot gas flow in turn to mask plate 100 and gets rid of the foreign matter, mask plate 100 cleans the completion after, manipulator 5 sends mask plate 100 out outside clean chamber 11 again.

In this embodiment, jet-propelled subassembly 2 is provided with two sets ofly, and two sets of jet-propelled subassembly 2 are located the relative both sides face of mask plate 100 respectively, clean simultaneously through two sets of jet-propelled subassembly 2 to the upper and lower two sides of mask plate 100 to improve this cleaning device's clean efficiency. In other embodiments, the air injection assembly 2 may be provided with three, four or more groups, which is not limited to this embodiment.

In this embodiment, as shown in fig. 2, the gas injection assembly 2 further includes a gas injection pipe 27 and a three-way valve 22, the cold gas source includes a refrigerating element 23 and a gas supply element 25, the hot gas source includes a heating element 24 and a gas supply element 25, the gas supply element 25 is used for supplying gas to the heating element 24 and the refrigerating element 23, the refrigerating element 23 is used for cooling gas to form cold gas flow, the heating element 24 is used for heating gas to form hot gas flow, the gas injection pipe 27 is respectively communicated with the refrigerating element 23 and the heating element 24 through the three-way valve 22, and a spray head 21 is arranged at one end of the gas injection pipe 27 far away from the three-way valve 22. The gas supply member 25 supplies gas to the refrigerating member 23 and the heating member 24, the gas can be cooled by the refrigerating member 23 to become cold gas flow, the heating member 24 heats the gas to become hot gas flow, then the hot gas flow and the cold gas flow are controlled by the three-way valve 22 to alternately enter the gas injection pipe 27, and finally the gas flow is sprayed to the mask plate 100 through the gas injection pipe 27. It will be appreciated that the three-way valve 22 has two inlets and one outlet, wherein the cooling element 23 is connected to one of the inlets via an air pipe, the heating element 24 is connected to the other inlet via an air pipe, the gas injection pipe 27 is connected to the outlet, and a valve block is disposed in the three-way valve 22 and selectively blocks one of the inlets so that the gas injection assembly 2 can only inject one of the hot and cold gas streams.

In the present embodiment, the cooling element 23 and the heating element 24 share one air supply element 25 in each set of air injection assemblies 2, so as to reduce the cost of the cleaning device.

In other embodiments, two gas supply members 25 are provided for each set of gas injection modules 2, and the two gas supply members 25 respectively supply gas to the heating member 24 and the cooling member 23. Of course, it is also possible to share one air supply element 25 for both heating elements 24 and cooling elements 23 of the two sets of air injection assemblies 2.

Preferably, the three-way valve 22 is a three-way solenoid valve, which can be electrically connected to the controller, and sends a signal to the three-way solenoid valve through the controller, so as to control one of the hot air flow and the cold air flow to enter the air injection pipe 27, i.e. control the valve block to block one of the air inlets. In addition, the three-way solenoid valve also allows for the advance setting of the time interval for the hot and cold gas streams to enter the gas lances 27.

Specifically, the gas injection assembly 2 further comprises a gas pulse generator 26, the gas pulse generator 26 is arranged between the gas injection pipe 27 and the three-way valve 22, the gas pulse generator 26 is used for converting hot air flow or cold air flow into pulse air flow, and the pulse air flow generates high-frequency oscillation gas on the surface of the mask plate 100, so that cracks between foreign matters and the mask plate 100 are further enlarged to separate the foreign matters, and the cleaning effect of the cleaning device is improved.

Preferably, the nozzle 21 is a pressurized nozzle, which can increase the pressure of the air flow, and the high-pressure air flow can increase the strong shearing force, so that the air can take away the foreign matters and keep away from the mask 100.

The foreign matter still stays in clean chamber 11 after breaking away from mask plate 100, drops again to mask plate 100 under the effect of avoiding the foreign matter air current on, is provided with foreign matter recovery module 3 in clean chamber 11, retrieves the foreign matter through foreign matter recovery module 3. Specifically, the foreign matter recovery assembly 3 includes a recovery platform 31, a recovery bucket 32 and a recovery box 33, the recovery platform 31 is located below the mask plate 100, the recovery platform 31 is provided with a plurality of through holes 311 along the thickness direction thereof, one end of the recovery bucket 32 is sleeved outside the side wall of the recovery platform 31, and the other end is communicated with the recovery box 33. The foreign matters floating in the cleaning chamber 11 fall on the recovery stage 31 by their own weight, then enter the recovery bucket 32 through the through-hole 311, and finally fall into the recovery tank 33 along the recovery bucket 32. After the foreign matters enter the recycling box 33, the foreign matters cannot fall onto the mask plate 100 under the action of the air flow, so that the mask plate 100 is prevented from being repeatedly cleaned by the cleaning device, and the cleaning efficiency of the cleaning device is improved.

The recycling bin 32 is preferably made of a soft material to provide some flexibility to the recycling bin 32 to facilitate installation of the recycling bin 32. In other embodiments, the dump bucket 32 may be made of a rigid material.

Alternatively, the soft material is rubber, and the rubber material has elasticity so that the recovery bucket 32 does not restrict the movement of the recovery table 31.

In order to improve the cleaning quality of the mask plate 100, the spray head 21 can move along the length or width direction of the mask plate 100, so that the spray head 21 can move to a specified position to remove foreign matters, the foreign matter recovery assembly 3 further comprises a slide rail 34 and a slide block 35, the slide rail 34 is arranged on the inner side wall of the cleaning cavity 11, the length of the slide rail 34 extends along the moving direction of the spray head 21, the slide block 35 is arranged on the side wall of the recovery platform 31, and the slide block 35 is arranged on the slide rail 34 in a sliding manner. The recovery platform 31 can move along the horizontal direction under the action of the sliding blocks 35 and the sliding rails 34, the flexibility of the recovery platform 31 is improved, a worker can move the recovery platform 31 to a proper position so as to recover foreign matters conveniently by observing the positions of the foreign matters falling from the mask plate 100 or the positions of the spray heads 21, and therefore the recovery efficiency of the foreign matters is improved.

In order to further improve the foreign matter collecting efficiency, guide plates 36 are provided along the periphery of the collecting table 31, and the guide plates 36 are inclined upward away from the center of the collecting table 31. In the embodiment, the guide plate 36 expands towards the periphery of the recovery stage 31 to form a guide portion, which is similar to a trumpet shape, that is, the area of one end of the guide portion far away from the recovery stage 31 is larger than the area of the recovery stage 31, and the guide plate 36 is arranged in an inclined manner, so that the foreign matters can fall onto the recovery stage 31 along the inclined surface of the guide plate 36 to enter the through holes 311, thereby improving the recovery effect of the foreign matter recovery assembly 3.

In one embodiment, a plurality of guide plates 36 are provided, the plurality of guide plates 36 are distributed at intervals along the periphery of the recovery platform 31, and the plurality of guide plates 36 guide and recover the foreign matters at different positions, so that the recovery effect of the foreign matter recovery assembly 3 can be improved.

In this embodiment, the cleaning device further includes a plurality of air ducts 4, all the air ducts 4 are disposed at the top of the cleaning chamber 11 at intervals, and the air ducts 4 eject air toward the recycling table 31, so that the foreign matters floating in the cleaning chamber 11 fall onto the recycling table 31. It is understood that, after the foreign matter is blown off the mask plate 100 by the air flow, some foreign matter having a small volume may float in the cleaning chamber 11, and if the foreign matter waits for a long time to automatically fall onto the recovery table 31, the cleaning efficiency of the cleaning apparatus for the mask plate 100 may be affected. This embodiment is through setting up a plurality of 4 tuber pipes, and a plurality of 4 tuber pipes are jet-propelled towards recovery platform 31 for the foreign matter receives the effect of atmospheric pressure to sink and drop to recovery platform 31 on. Wherein, all the air pipes 4 are externally connected with an air compressor, so that the air pipes 4 of the air compressor case can convey high-pressure gas, and then the high-pressure gas is sprayed to the recovery platform 31 through the air pipes 4.

Preferably, the recovery tank 33 is detachably disposed in the cleaning chamber 11 so that a worker can take out the foreign materials of the recovery tank 33.

The utility model discloses still disclose an exposure equipment, including the cleaning device of casing and the arbitrary implementation of the aforesaid, cleaning device sets up in the casing. This cleaning device sprays hot air current and cold air current to mask plate 100 in turn through jet-propelled subassembly 2, thereby the foreign matter lets the foreign matter break away from mask plate 100 in the influence that the surface of mask plate 100 received expend with heat and contract with cold to guarantee mask plate 100's cleanliness, and then guarantee exposure equipment to display panel's exposure effect.

Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but may be manufactured in various forms, and those skilled in the art will understand that the present invention may be embodied in other specific forms without changing the technical spirit or essential features of the invention. It should therefore be understood that the above-described embodiments are illustrative in all respects and not restrictive.

Claims

1. The utility model provides a cleaning device for clean mask plate, includes the device body, this internal clean chamber that sets up of device, clean chamber is used for holding mask plate, its characterized in that still includes jet-propelled subassembly, jet-propelled subassembly sets up clean intracavity, jet-propelled subassembly includes the shower nozzle, cold air source and hot gas source are connected respectively to the shower nozzle, so that the shower nozzle can to mask plate's surface sprays cold air stream and hot gas flow in turn.

2. The cleaning device of claim 1, wherein the gas injection assembly further comprises a gas injection pipe and a three-way valve, the cold gas source comprises a refrigerating element and a gas supply element, the hot gas source comprises a heating element and the gas supply element, the gas supply element is used for supplying gas to the heating element and the refrigerating element, the refrigerating element is used for cooling the gas to form the cold gas flow, the heating element is used for heating the gas to form the hot gas flow, the gas injection pipe is communicated with the refrigerating element and the heating element through the three-way valve respectively, and one end of the gas injection pipe away from the three-way valve is provided with the spray head.

3. The cleaning apparatus defined in claim 2, wherein the cooling member and the heating member share one of the air supply members.

4. The cleaning apparatus of claim 2, wherein the gas injection assembly further comprises a gas pulser disposed between the gas injection tube and the three-way valve, the gas pulser for converting the hot or cold gas stream into a pulsed gas stream.

5. The cleaning device according to any one of claims 1 to 4, further comprising a foreign matter recovery assembly, wherein the foreign matter recovery assembly comprises a recovery table, a recovery bucket and a recovery box, the recovery table is located below the mask plate, a plurality of through holes are arranged in the recovery table in a penetrating mode along the thickness direction of the recovery table, one end of the recovery bucket is sleeved outside the side wall of the recovery table, and the other end of the recovery bucket is communicated with the recovery box.

6. The cleaning apparatus defined in claim 5, wherein the recovery hopper is made of a soft material.

7. The cleaning device according to claim 6, wherein the nozzle moves along the length direction or the width direction of the mask plate, the foreign matter recovery assembly further comprises a slide rail and a slide block, the slide rail is arranged on the inner side wall of the cleaning cavity, the length of the slide rail extends along the moving direction of the nozzle, the slide block is arranged on the side wall of the recovery table, and the slide block is slidably arranged on the slide rail.

8. The cleaning apparatus as claimed in claim 5, wherein guide plates are provided along a periphery of the recovery stage, the guide plates being inclined upward away from a center of the recovery stage.

9. The cleaning apparatus as claimed in claim 5, further comprising a plurality of air ducts, all of which are provided at intervals at the top of the cleaning chamber, the air ducts injecting air toward the recovery stage to drop foreign matters floating in the cleaning chamber onto the recovery stage.

10. An exposure apparatus comprising a housing, characterized by further comprising a cleaning device according to any one of claims 1 to 9, the cleaning device being provided within the housing.