CN217768346U

CN217768346U - Anti-corrosion sealing clamp for silicon wafer

Info

Publication number: CN217768346U
Application number: CN202221682035.4U
Authority: CN
Inventors: 程足捷; 周涛
Original assignee: Shenyang Xinxin Microelectronics Technology Co ltd
Current assignee: Shenyang Xinxin Microelectronics Technology Co ltd
Priority date: 2022-07-02
Filing date: 2022-07-02
Publication date: 2022-11-08
Anticipated expiration: 2032-07-02

Abstract

The utility model relates to an anchor clamps field of making discloses an anticorrosion sealing jig for silicon wafer, the movable type remote vision training experiment table comprises a table top, the bottom equidistance of mesa is provided with the spout, spout inside wall fixedly connected with motor, the equal fixedly connected with second threaded rod of motor-drive end, the equal threaded connection of second threaded rod has the slider, the equal fixedly connected with fixing base in bottom of slider, the equal electric telescopic handle of fixedly connected with in bottom middle part of fixing base, the medial extremity fixedly connected with accessory plate of extension board, the top of the equal threaded connection of accessory plate inside has first threaded rod and first threaded rod rotates the bottom middle part of connection at splint. The utility model discloses in, drive mesa lapse and seal box coincidence through the cylinder, process in the seal box, the sealing washer plays sealed effect, and the surface of accessory plate and splint all is scribbled the asphalt paint, can separate oxygen and water, prevents that anchor clamps from being corroded, influences the operation.

Description

Anti-corrosion sealing clamp for silicon wafer

Technical Field

The utility model relates to an anchor clamps field of making especially relates to an anticorrosion sealing fixture for silicon wafer.

Background

The fixture is used for fixing the processing object to make the processing object occupy the correct position in the machine manufacturing process so as to receive construction or detection, and can be used for quickly, conveniently and safely installing a workpiece. Various clamps have been widely applied to various mechanical equipment, improve work efficiency, reduce the use limitation, bring the convenience for the user.

In many products, when operations such as welding or marking are required, a clamp is generally required to clamp the products and then the operations can be performed. However, most of the existing clamps are specially manufactured for a product of a certain specification, so that the application range of the clamp is too small, when a product of another specification needs to be clamped, only one clamp can be manufactured again, the cost is increased, the clamp is poor in fixation in the using process and easy to loosen or generate errors in the operation process, the efficiency is low, the existing sealing clamp is too simple in sealing treatment, and the sealing importance is neglected.

Disclosure of Invention

The utility model aims at solving the defects in the prior art and providing an anti-corrosion sealing clamp for a silicon wafer.

In order to achieve the above purpose, the utility model adopts the following technical scheme: the utility model provides an anticorrosion sealing fixture for silicon wafer, includes the mesa, the bottom equidistance of mesa is provided with three spout, the equal fixedly connected with motor of spout inside wall one end, the equal fixedly connected with second threaded rod of motor drive end, the equal threaded connection of second threaded rod middle part external diameter has the slider, the equal fixedly connected with fixing base in bottom of slider, the first electric telescopic handle of the equal fixedly connected with in bottom middle part of fixing base, the equal fixedly connected with extension plate in bottom one side of first electric telescopic handle, the equal fixedly connected with accessory plate of downside of the medial extremity of extension plate, the top of the equal threaded connection of accessory plate first threaded rod and first threaded rod rotates the bottom middle part of connection at splint, the bottom fixedly connected with bull stick of first threaded rod.

As a further description of the above technical solution:

the surfaces of the auxiliary plate and the clamping plate are coated with asphalt paint.

As a further description of the above technical solution:

the middle of the bottom end of the extension plate is fixedly connected with a rubber pad.

As a further description of the above technical solution:

the sealing box is arranged at the position right below the table board, supporting plates are fixedly connected to one sides of the table board and the sealing box, and the inner ends of the supporting plates are fixedly connected to two ends of the air cylinder respectively.

As a further description of the above technical solution:

the top end of the sealing box is fixedly connected with a sealing ring.

As a further description of the above technical solution:

the bottom middle part fixedly connected with second electric telescopic handle of mesa, second electric telescopic handle's bottom fixedly connected with sucking disc.

As a further description of the above technical solution:

the shapes of the sliding groove and the sliding block are both T-shaped.

The utility model discloses following beneficial effect has:

1. the utility model discloses in, at first put into the sucking disc with silicon wafer, fix through the sucking disc, also can play absorbing effect in the course of working, then can carry out the regulation of a height through second electric telescopic handle, when adjusting suitable height, motor in the spout drives the second threaded rod and rotates, the slider also removes simultaneously, can adapt to various not unidimensional silicon wafer, when adjusting suitable distance, first electric telescopic handle drives the extension board and carries out the regulation of height, keep on a height with the sucking disc, splint rotate through first threaded rod, step up the object, it is not hard up to prevent in the course of working, influence the precision of object processing.

2. The utility model discloses in, after adjusting the size of anchor clamps, drive the mesa lapse and seal box coincidence through the cylinder, process in the seal box, the sealing washer plays sealed effect, prevents that the air of outside from entering into the inside of seal box, raises the mesa through the cylinder after processing is accomplished, takes out silicon wafer, and the asphalt paint has all been scribbled on the surface of accessory plate and splint, can separate oxygen and water, prevents that anchor clamps from being corroded, influences the operation.

Drawings

Fig. 1 is a perspective view of an anti-corrosion sealing fixture for silicon wafers according to the present invention;

fig. 2 is an expanded view of an anti-corrosion sealing jig for silicon wafers according to the present invention;

fig. 3 is a detailed view of an anti-corrosion sealing jig for silicon wafers according to the present invention;

FIG. 4 is an enlarged view of the point A of FIG. 2 illustrating an anti-corrosion sealing fixture for silicon wafers according to the present invention;

fig. 5 is an enlarged view of a chute of an anti-corrosion sealing fixture for silicon wafers according to the present invention.

Illustration of the drawings:

1. a table top; 2. a fixed seat; 3. a first electric telescopic rod; 4. an extension plate; 5. a slider; 6. a chute; 7. a second electric telescopic rod; 8. a suction cup; 9. an auxiliary plate; 10. a splint; 11. a rubber pad; 12. a first threaded rod; 13. a rotating rod; 14. a support plate; 15. a cylinder; 16. a sealing box; 17. a motor; 18. a second threaded rod; 19. and (5) sealing rings.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance, and furthermore, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.

Referring to fig. 1-3, the present invention provides an embodiment: the utility model provides an anticorrosion sealing fixture for silicon wafer, the movable type silicon wafer processing device comprises a table top 1, the bottom equidistance of mesa 1 is provided with three spout 6, the equal fixedly connected with motor 17 of 6 inside wall one end of spout, the equal fixedly connected with second threaded rod 18 of motor 17 drive end, the equal threaded connection of second threaded rod 18 middle part external diameter has slider 5, the equal fixedly connected with fixing base 2 in bottom of slider 5, can adapt to various not unidimensional silicon wafers, can adjust suitable distance, the equal fixedly connected with first electric telescopic handle 3 in bottom middle part of fixing base 2, can carry out a height's regulation, the equal fixedly connected with extension plate 4 in bottom one side of first electric telescopic handle 3, the equal fixedly connected with subplate 9 of downside of the medial extremity of extension plate 4, the equal threaded connection has first threaded rod 12 and the top of first threaded rod 12 rotates the bottom middle part of splint 10 in inside of subplate 9, the bottom fixedly connected with bull stick 13 of first threaded rod 12 tightens the object, prevent not hard up in the course of processing, influence the precision of object processing, after adjusting the size of anchor clamps, drive mesa 1 to move down through cylinder 15 and coincide with seal box 16, processing, the sealed box 16 in the threaded rod, play the sealed box of sealed air sealing ring 19, prevent that the sealed box from getting into the sealed air of mesa outside of silicon wafer from getting out the processing, the cylinder 15 takes out the sealed off, take out the sealed processing of taking out the outside of the mesa 1.

The surfaces of the auxiliary plate 9 and the clamping plate 10 are coated with asphalt paint, oxygen and water can be isolated, the clamp is prevented from being corroded, operation is influenced, the bottom middle part of the extension plate 4 is provided with a rubber pad 11, the object surface is prevented from being damaged in the process of clamping the object, a sealing box 16 is arranged under the table top 1, the table top 1 and the sealing box 16 are provided with supporting plates 14, the inner ends of the supporting plates 14 are fixedly connected to two ends of a cylinder 15 respectively, the top end of the sealing box 16 is fixedly connected with a sealing ring 19, outside air is prevented from entering the sealing box 16, the bottom middle part of the table top 1 is fixedly connected with a second electric telescopic rod 7, the bottom end of the second electric telescopic rod 7 is fixedly connected with a sucker 8, the fixing is carried out through the sucker 8, the shock absorption effect can also be achieved in the machining process, and the shapes of the sliding groove 6 and the sliding block 5 are all set to be T-shaped.

The working principle is as follows: firstly, silicon wafers are placed into a sucker 8, the silicon wafers are fixed through the sucker 8, the shock absorption effect can be achieved in the processing process, then the height adjustment can be achieved through a second electric telescopic rod 7, when the height adjustment is achieved to be proper, a motor 17 in a sliding groove 6 drives a second threaded rod 18 to rotate, a sliding block 5 also moves simultaneously, the silicon wafers can adapt to various sizes of the silicon wafers, when the proper distance is achieved, a first electric telescopic rod 3 drives an extension plate 4 to achieve height adjustment, the height adjustment is kept at the same height with the sucker 8, a clamping plate 10 rotates through a first threaded rod 12 to tighten an object, looseness in the processing process is prevented, the object processing precision is influenced, after the size of the clamp is adjusted, a table board 1 is driven to move downwards through an air cylinder 15 to coincide with a sealing box 16 and is processed in the sealing box 16, a sealing ring 19 plays a sealing effect, outside air is prevented from entering the inside the sealing box 16, the table board 1 is lifted through the air cylinder 15 after the processing is completed, the auxiliary wafers are taken out, the surfaces of the silicon wafers 9 and the clamping plate 10 are coated with asphalt paint, oxygen-free paint, the clamp can prevent corrosion of the clamp and water corrosion, and water corrosion of the clamp can be prevented from affecting the clamp operation.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions on some technical features, and any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of the present invention.

Claims

1. An anti-corrosion sealing clamp for silicon wafers comprises a table top (1), and is characterized in that: the utility model discloses a table top, including mesa (1), the equal fixedly connected with motor (17) of bottom equidistance of mesa (1), spout (6) inside wall one end, the equal fixedly connected with second threaded rod (18) of motor (17) drive end, the equal threaded connection of second threaded rod (18) middle part external diameter has slider (5), the equal fixedly connected with fixing base (2) in bottom of slider (5), the equal fixedly connected with first electric telescopic handle (3) in bottom middle part of fixing base (2), the equal fixedly connected with extension board (4) in bottom one side of first electric telescopic handle (3), the equal fixedly connected with accessory plate (9) of downside of the medial extremity of extension board (4), the top of the equal threaded connection of accessory plate (9) inside has first threaded rod (12) and first threaded rod (12) rotates the bottom middle part of connecting at splint (10), the bottom fixedly connected with bull stick (13) of first threaded rod (12).

2. The anti-corrosion sealing clamp for silicon wafers according to claim 1, characterized in that: the surfaces of the auxiliary plate (9) and the clamping plate (10) are coated with asphalt paint.

3. The corrosion protection sealing clamp for silicon wafers according to claim 1, wherein: the middle part of the bottom end of the extension plate (4) is fixedly connected with a rubber pad (11).

4. The corrosion protection sealing clamp for silicon wafers according to claim 1, wherein: a sealing box (16) is arranged right below the table top (1), supporting plates (14) are fixedly connected to one sides of the table top (1) and the sealing box (16), and the inner ends of the supporting plates (14) are fixedly connected to two ends of the air cylinder (15) respectively.

5. The corrosion protection sealing clamp for silicon wafers according to claim 4, wherein: the top end of the sealing box (16) is fixedly connected with a sealing ring (19).

6. The corrosion protection sealing clamp for silicon wafers according to claim 1, wherein: the bottom middle part fixedly connected with second electric telescopic handle (7) of mesa (1), the bottom fixedly connected with sucking disc (8) of second electric telescopic handle (7).

7. The anti-corrosion sealing clamp for silicon wafers according to claim 1, characterized in that: the sliding groove (6) and the sliding block (5) are both T-shaped.