CN217765250U - Laser beam parameter measuring device - Google Patents

Laser beam parameter measuring device Download PDF

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CN217765250U
CN217765250U CN202221443803.0U CN202221443803U CN217765250U CN 217765250 U CN217765250 U CN 217765250U CN 202221443803 U CN202221443803 U CN 202221443803U CN 217765250 U CN217765250 U CN 217765250U
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laser
connecting plate
light beam
assembly
light
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王健
吕锋
李靖
李子涵
张汉青
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Wuhan Huaray Precision Laser Co ltd
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Wuhan Huaray Precision Laser Co ltd
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Abstract

The utility model provides a laser beam parameter measurement device, comprising a base plate and a slide rail, sliding connection has first connecting plate and second connecting plate on the slide rail, be equipped with facula determine module on the first connecting plate, be equipped with light beam focus subassembly on the second connecting plate in proper order, light beam transmission assembly, laser power determine module and laser pulse determine module, light beam transmission assembly, the equal perpendicular slide rail axis of light beam entry of laser power determine module and laser pulse determine module just is located the slide rail axis homonymy, light beam transmission assembly's light beam export is towards facula determine module one side. The measuring device integrates the light spot detection assembly, the light beam focusing assembly, the light beam transmission assembly, the laser power measuring assembly and the laser pulse measuring assembly, can perform qualitative and quantitative measurement on light spot quality, laser power and laser pulse, has the advantages of good measurement consistency, simplicity in operation and accurate measurement data, and provides a precondition for automatic integration in the later stage.

Description

Laser beam parameter measuring device
Technical Field
The utility model belongs to the technical field of laser parameter measurement, concretely relates to laser beam parameter measurement device.
Background
The laser beam parameter measurement is a key process for verifying the qualification of the laser light source, and is applied to the processes of laser light source manufacturing, finished product inspection and client inspection.
Different parameters of the current measuring laser beam are measured by different instruments and equipment respectively through different jigs, each measuring condition cannot be matched with the previous measuring condition, the measuring consistency is poor, the artificial influence factor is large, and qualitative and quantitative measurement cannot be carried out; meanwhile, the measuring platform is poor in shock resistance, and great uncertainty is brought to the light beam measurement of the precision laser.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a laser beam parameter measurement device can solve the partial defect that exists among the prior art at least.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a laser beam parameter measurement device, includes the bottom plate and sets up the slide rail on the bottom plate, sliding connection has first connecting plate and second connecting plate on the slide rail, be provided with facula determine module on the first connecting plate, light beam focus subassembly, light beam transmission subassembly, laser power measure module and laser pulse determine module have set gradually on the second connecting plate, light beam transmission subassembly, laser power measure module and laser pulse determine module's the equal perpendicular slide rail axis of light beam entry just is located slide rail axis homonymy and arranges, light beam transmission subassembly's light beam export is towards facula determine module one side.
Furthermore, the laser beam parameter measuring device further comprises an anti-seismic lifting assembly, and the bottom plate is fixed at the lifting movable end of the anti-seismic lifting assembly.
Furthermore, antidetonation lifting unit includes lower plate, elevating platform and lift connecting rod, the elevating platform is installed on the lower plate, bottom plate fixed mounting is in the elevating platform upper surface, the lift connecting rod has many, the vertical fixation is in lower plate both ends, the both ends sliding connection of bottom plate is on the lift connecting rod.
Furthermore, the light spot detection assembly comprises a one-dimensional adjusting table and a laser light spot measuring instrument, the one-dimensional adjusting table is mounted on the first connecting plate, the adjusting direction of the one-dimensional adjusting table is along the axial direction of the sliding rail, and the laser light spot measuring instrument is fixedly mounted on the one-dimensional adjusting table.
Furthermore, the light beam focusing assembly comprises an adjusting mirror frame and a focusing lens, the focusing lens is installed in the adjusting mirror frame, a plurality of adjusting screws used for adjusting the vertical pitching motion of the adjusting mirror frame are arranged on the adjusting mirror frame, the adjusting mirror frame is connected to the second connecting plate through a sliding pin transfer block in a sliding mode, and the sliding direction of the adjusting mirror frame is perpendicular to the axis direction of the sliding rail.
Further, the light beam transmission assembly comprises a light element fixing shell, an optical wedge and a plurality of attenuation pieces, the light element fixing shell is installed on the second connecting plate through a connecting block, a light beam inlet is formed in one side wall of the light element fixing shell, the optical wedge and the attenuation pieces are arranged on a light beam transmission line inside the light element fixing shell, the optical wedge and the light beam inlet of the light element fixing shell are arranged in an inclined mode of 45 degrees, the attenuation pieces are arranged at equal intervals along the axis of the sliding rail, and the central shaft of the attenuation pieces is perpendicular to the axis of the sliding rail.
Furthermore, the laser power measurement component comprises a laser power meter, the laser power meter is installed on the second connecting plate through a connecting block, and the direction of a light beam inlet of the laser power meter is perpendicular to the direction of the axis of the sliding rail.
Furthermore, the laser pulse measuring component comprises a laser beam diffuse reflection box and a laser pulse measuring instrument, the laser beam diffuse reflection box is installed on the second connecting plate through a connecting block, the beam inlet direction of the laser beam diffuse reflection box is perpendicular to the axis direction of the sliding rail, the laser pulse measuring instrument is connected onto the second connecting plate through an adapter plate, and the laser pulse measuring instrument is located on a transmission line of a beam outlet of the laser beam diffuse reflection box.
Furthermore, all be equipped with the set screw on first connecting plate and the second connecting plate for the position is fixed after first connecting plate and the second connecting plate slide.
Furthermore, a handle for pushing the second connecting plate to slide is arranged at the end part, close to the laser pulse measuring assembly, of the second connecting plate.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model provides a laser beam parameter measurement device integrates facula determine module, light beam focus subassembly, light beam transmission assembly, laser power measurement subassembly and laser pulse measurement subassembly to the integration, can detect the facula quality, laser power measurement, laser pulse measurement all carries out qualitative, quantitative measurement, and contain the same measuring condition function of memory among the integrated device after the integration, and can effectively judge whether the inspection measuring condition changes, effectively avoid the uncertain factor that exists among the measuring process.
The present invention will be described in further detail with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic structural diagram of the laser beam parameter measuring device of the present invention;
fig. 2 is a schematic structural view of the shock-resistant lifting assembly in the laser beam parameter measuring device of the present invention;
FIG. 3 is a schematic structural diagram of a light spot detection assembly in the laser beam parameter measuring device of the present invention;
fig. 4 is a schematic structural diagram of a beam focusing assembly in the laser beam parameter measuring device of the present invention;
fig. 5 is a schematic structural diagram of a light beam transmission assembly in the laser beam parameter measuring device of the present invention;
fig. 6 is a schematic structural diagram of a laser power measuring assembly in the laser beam parameter measuring device of the present invention;
fig. 7 is a schematic structural diagram of a laser pulse measuring assembly in the laser beam parameter measuring device of the present invention.
Description of reference numerals: 1. a light spot detection assembly; 2. a base plate; 3. a slide rail; 4. a beam focusing assembly; 5. a fixing screw; 6. a light beam transmission component; 7. a laser power measurement component; 8. a laser pulse measurement assembly; 9. a handle; 10. a first connecting plate; 11. a seismic hoist assembly; 12. a second connecting plate; 13. connecting blocks; 14. an adapter plate; 15. a lower base plate; 16. a lifting platform; 17. a lifting connecting rod; 18. a one-dimensional adjusting table; 19. a laser spot measuring instrument; 20. adjusting the spectacle frame; 21. a focusing lens; 22. adjusting screws; 23. sliding the pin adapter block; 24. an optical element fixing housing; 25. an attenuation sheet; 26. an optical wedge; 27. a laser power meter; 28. a laser beam diffuse reflection box; 29. laser pulse measuring instrument.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, are not to be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected" and "connected" should be interpreted broadly, and may be, for example, a fixed connection, a detachable connection, an interference connection or an integral connection; the specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; in the description of the present invention, the meaning of "a plurality" or "a plurality" is two or more unless otherwise stated.
As shown in fig. 1, this embodiment provides a laser beam parameter measurement device, include bottom plate 2 and set up the slide rail 3 on bottom plate 2, sliding connection has first connecting plate 10 and second connecting plate 12 on slide rail 3, be provided with facula detection component 1 on the first connecting plate 10, light beam focusing component 4, light beam transmission component 6, laser power measurement component 7 and laser pulse measurement component 8 have set gradually on the second connecting plate 12, light beam transmission component 6, laser power measurement component 7 and laser pulse measurement component 8's the equal perpendicular slide rail 3 axis of light beam entry just is located slide rail 3 axis homonymy and arranges, the light beam export of light beam transmission component 6 is towards facula detection component 1 one side. According to the laser beam parameter measuring device of the embodiment, the first connecting plate 10 and the second connecting plate 12 are slid to corresponding positions to measure according to the measurement requirements of different parameters (namely laser spot quality, laser power and laser pulse), so that qualitative and quantitative measurement of the laser spot quality, the laser power and the laser pulse can be realized; for example, when the laser spot quality is measured, the first connecting plate 10 can be slid to drive the spot detection assembly 1 to a designed position, and the second connecting plate 12 can be slid to drive the light beam focusing assembly 4 and the light beam transmission assembly 6 to corresponding measuring positions, so that the measurement of the original light spot, the divergence angle, the focused light spot and the rayleigh light spot is realized; when the laser power is measured, the second connecting plate 12 can be slid to drive the laser power measuring component 7 to a corresponding measuring position for measurement; when the laser pulse measurement is performed, the second connecting plate 12 can be slid to drive the laser pulse measurement assembly 8 to a corresponding measurement position for measurement. The laser beam parameter measuring device integrates the light spot detecting component 1, the light beam focusing component 4, the light beam transmission component 6, the laser power measuring component 7 and the laser pulse measuring component 8, can perform qualitative and quantitative measurement on light spot quality detection, laser power measurement and laser pulse measurement, and the integrated device has the function of memorizing the same measuring condition, can effectively judge whether the measuring condition is changed or not, and effectively avoids uncertain factors existing in the measuring process.
Optimize above-mentioned technical scheme, above-mentioned laser beam parameter measurement device still includes antidetonation lifting unit 11, bottom plate 2 is fixed in the lift expansion end of antidetonation lifting unit 11, can adjust facula detecting component 1, light beam focusing component 4, light beam transmission subassembly 6, laser power measuring component 7 and laser pulse measuring component 8's on the bottom plate 2 height through antidetonation lifting unit 11 to adapt to the parameter measurement of different product light-emitting heights. Specifically, as shown in fig. 1 and 2, the anti-seismic lifting assembly 11 includes a lower base plate 15, a lifting table 16 and lifting connecting rods 17, the lifting table 16 is fixed to the optical platform through the lower base plate 15 to maintain the stability of the lifting table 16, the base plate 2 is fixedly mounted on the upper surface of the lifting table 16, the lifting connecting rods 17 are multiple and are vertically fixed at two ends of the lower base plate 15, and two ends of the base plate 2 are slidably connected to the lifting connecting rods 17; through the lift of elevating platform 16, drive bottom plate 2 along the up-and-down motion of lift connecting rod 17 to adjustable each measuring equipment's height still can effectively detect whether there is deformation in bottom plate 2 through the motion of bottom plate 2 simultaneously, whether vertical lift improves measuring accuracy.
As for a specific embodiment of the light spot detection assembly 1, as shown in fig. 3, the light spot detection assembly 1 includes a one-dimensional adjusting table 18 and a laser light spot measuring instrument 19, the one-dimensional adjusting table 18 is mounted on the first connecting plate 10, an adjusting direction of the one-dimensional adjusting table 18 is along an axial direction of the slide rail 3, and is used for finely adjusting a measuring position of the laser light spot measuring instrument 19, and the laser light spot measuring instrument 19 is fixedly mounted on the one-dimensional adjusting table 18.
As for a specific embodiment of the light beam focusing assembly 4, as shown in fig. 4, the light beam focusing assembly 4 includes an adjusting frame 20 and a focusing lens 21, the focusing lens 21 is installed in the adjusting frame 20, a plurality of adjusting screws 22 for adjusting the up-and-down pitching motion of the adjusting frame 20 are arranged on the adjusting frame 20, the adjusting frame 20 is slidably connected to the second connecting plate 12 through a sliding pin joint block 23, and the sliding direction of the adjusting frame 20 is perpendicular to the axial direction of the sliding rail 3.
As for a specific embodiment of the light beam transmission assembly 6, as shown in fig. 5, the light beam transmission assembly 6 includes an optical element fixing housing 24, an optical wedge 26 and a plurality of attenuation plates 25, the optical element fixing housing 24 is mounted on the second connecting plate 12 through the connecting block 13, a side wall of the optical element fixing housing 24 is provided with a light beam inlet, the optical wedge 26 and the attenuation plates 25 are disposed on a light beam transmission line inside the optical element fixing housing 24, the optical wedge 26 and the light beam inlet of the optical element fixing housing 24 are arranged in an inclined manner at 45 °, the plurality of attenuation plates 25 are arranged at equal intervals along an axis of the slide rail 3, and a central axis of the attenuation plate 25 is perpendicular to an axis of the slide rail 3.
When original light spots are measured, the second connecting plate 12 is moved to drive the light beam transmission assembly 6 to a designated position and fixed, laser is emitted to the optical wedge 26 in the light element fixing shell 24 through a light beam inlet of the light beam transmission assembly 6 at the moment, the optical wedge 26 reflects weak energy light beams to the attenuation sheet 25 at an angle of 45 degrees, the number and the type of the attenuation sheets 25 added are different according to different energy light beams, and the attenuation sheets are increased or decreased according to actual conditions; the adjustment frame 20 of the beam focusing assembly 4 is then slid on the second connecting plate 12 away from the path of the light beam by means of the sliding pin junction block 23 and the light is transmittedThe laser spot measuring instrument 19 of the spot detecting assembly 1 slides to a specific position L 1 At this time, the spot size d is measured 1 Ovality e 1 Then, the laser spot measuring instrument 19 of the spot detecting assembly 1 is slid to a specific position L 2 To measure the spot size d 2 Ovality e 2 Calculating the divergence angle
Figure 911877DEST_PATH_IMAGE002
Moving the second connecting plate 12 to drive the light beam focusing assembly 4 to a specific position L 1 Fixing, adjusting the up, down, bending and pitching of the lens frame 20 by the adjusting screw 22 on the lens frame 20, making the laser beam pass through the focusing lens 21 and then irradiate to the center of the laser spot measuring instrument 19, observing the test software, sliding the laser spot measuring instrument 19 to the minimum spot size d f Recording ovality e 3 At this time, the current position L of the laser spot measuring instrument 19 3 Observing the test software, and then sliding the laser spot measuring instrument 19 forward to the spot size
Figure 891334DEST_PATH_IMAGE004
d f Record ovality e 4 At this time, the current position L of the laser spot measuring instrument 19 4 The laser spot measuring instrument 19 is slid backward to the spot size
Figure 936651DEST_PATH_IMAGE004
d f Record ovality e 5 The current position L of the laser spot measuring instrument 19 5
For one specific embodiment of the laser power measuring assembly 7, as shown in fig. 6, the laser power measuring assembly 7 comprises a laser power meter 27, the laser power meter 27 is mounted on the second connecting plate 12 through a connecting block 13, and the beam inlet direction of the laser power meter 27 is arranged perpendicular to the axial direction of the slide rail 3. When the laser power is measured, the second connecting plate 12 is moved to drive the laser power meter 27 to a specified position and fixed, a laser beam is emitted into the laser power meter 27, and the laser power meter 27 converts the signal into an electric signal through thermal induction and transmits the electric signal to the processor to read the laser power information.
As for a specific embodiment of the laser pulse measuring assembly 8, as shown in fig. 7, the laser pulse measuring assembly 8 includes a laser beam diffuse reflection box 28 and a laser pulse measuring instrument 29, the laser beam diffuse reflection box 28 is mounted on the second connecting plate 12 through a connecting block 13, a beam inlet direction of the laser beam diffuse reflection box 28 is perpendicular to an axial direction of the slide rail 3, the laser pulse measuring instrument 29 is connected to the second connecting plate 12 through an adapter plate 14, and the laser pulse measuring instrument 29 is located on a transmission line of a beam outlet of the laser beam diffuse reflection box 28. When measuring the laser pulse, the second connecting plate 12 is moved to drive the laser pulse measuring component 8 to the designated position and fixed, the laser beam is firstly reflected to the laser pulse measuring instrument 29 through the laser beam diffuse reflection box 28 by 45 degrees, and the laser pulse measuring instrument 29 converts the optical signal into an electrical signal and transmits the electrical signal to the oscilloscope to read the pulse width.
In the above measurement process, in order to ensure the stability of the measurement, the first connecting plate 10 and the second connecting plate 12 need to be fixed after moving to the designated position, in this embodiment, the fixing screws 5 are respectively disposed on the first connecting plate 10 and the second connecting plate 12, the fixing screws 5 vertically penetrate through the connecting plates, and the fixing screws 5 are screwed during the fixing, so that the lower ends of the fixing screws 5 are abutted and locked on the bottom plate 2, thereby realizing the position fixing of the first connecting plate 10 and the second connecting plate 12 after sliding.
In addition, in order to facilitate the sliding of the second connecting plate 12, a handle 9 for pushing the second connecting plate 12 to slide may be provided at an end of the second connecting plate 12 close to the laser pulse measuring assembly 8.
To sum up, the utility model provides a this kind of laser beam parameter measurement device integrates facula determine module, light beam focus subassembly, light beam transmission subassembly, laser power measurement subassembly and laser pulse determine module to the integration, can all carry out qualitative, quantitative measurement to facula quality detection, laser power measurement, laser pulse measure, and contain the same measuring condition function of memory in the integrated device after the integration to can effectively judge whether the inspection measuring condition transform, effectively avoid the uncertain factor that exists in the measurement process.
The above examples are merely illustrative of the present invention and do not limit the scope of the present invention, and all designs identical or similar to the present invention are within the scope of the present invention.

Claims (10)

1. A laser beam parameter measurement device is characterized in that: the light beam transmission device comprises a bottom plate and a sliding rail arranged on the bottom plate, wherein a first connecting plate and a second connecting plate are connected to the sliding rail in a sliding mode, a light spot detection assembly is arranged on the first connecting plate, a light beam focusing assembly, a light beam transmission assembly, a laser power measurement assembly and a laser pulse measurement assembly are sequentially arranged on the second connecting plate, light beam inlets of the light beam transmission assembly, the laser power measurement assembly and the laser pulse measurement assembly are perpendicular to the sliding rail axis, the light beam outlets of the light beam transmission assembly face to one side of the light spot detection assembly.
2. The laser beam parameter measuring device of claim 1, wherein: still include antidetonation lifting unit, the bottom plate is fixed in antidetonation lifting unit's lift expansion end.
3. The laser beam parameter measuring device of claim 2, wherein: the anti-seismic lifting assembly comprises a lower base plate, a lifting platform and lifting connecting rods, wherein the lifting platform is installed on the lower base plate, the base plate is fixedly installed on the upper surface of the lifting platform, the lifting connecting rods are multiple and are vertically fixed at two ends of the lower base plate, and two ends of the base plate are slidably connected onto the lifting connecting rods.
4. The laser beam parameter measuring device of claim 1, wherein: the light spot detection assembly comprises a one-dimensional adjusting table and a laser light spot measuring instrument, the one-dimensional adjusting table is mounted on the first connecting plate, the adjusting direction of the one-dimensional adjusting table is along the axial direction of the sliding rail, and the laser light spot measuring instrument is fixedly mounted on the one-dimensional adjusting table.
5. The laser beam parameter measuring device of claim 1, wherein: the light beam focusing assembly comprises an adjusting mirror frame and a focusing lens, the focusing lens is installed in the adjusting mirror frame, a plurality of adjusting screws used for adjusting the vertical pitching motion of the adjusting mirror frame are arranged on the adjusting mirror frame, the adjusting mirror frame is connected to the second connecting plate in a sliding mode through a sliding pin adapter block, and the sliding direction of the adjusting mirror frame is perpendicular to the axis direction of the sliding rail.
6. The laser beam parameter measuring device of claim 1, wherein: the light beam transmission assembly comprises a light element fixing shell, an optical wedge and a plurality of attenuation pieces, the light element fixing shell is installed on the second connecting plate through a connecting block, a light beam inlet is formed in one side wall of the light element fixing shell, the optical wedge and the attenuation pieces are arranged on a light beam transmission line inside the light element fixing shell, the optical wedge and the light beam inlet of the light element fixing shell are arranged in an inclined mode of 45 degrees and are arranged at intervals along the axis of the sliding rail, and the central shaft of the attenuation pieces is perpendicular to the axis of the sliding rail.
7. The laser beam parameter measuring device of claim 1, wherein: the laser power measurement assembly comprises a laser power meter, the laser power meter is installed on the second connecting plate through a connecting block, and the direction of a light beam inlet of the laser power meter is perpendicular to the axis direction of the sliding rail.
8. The laser beam parameter measuring device of claim 1, wherein: the laser pulse measuring assembly comprises a laser beam diffuse reflection box and a laser pulse measuring instrument, the laser beam diffuse reflection box is installed on the second connecting plate through a connecting block, the beam inlet direction of the laser beam diffuse reflection box is perpendicular to the axis direction of the sliding rail, the laser pulse measuring instrument is connected to the second connecting plate through an adapter plate, and the laser pulse measuring instrument is located on a transmission line of a beam outlet of the laser beam diffuse reflection box.
9. The laser beam parameter measuring device of claim 1, wherein: and fixing screws are arranged on the first connecting plate and the second connecting plate and used for fixing the positions of the first connecting plate and the second connecting plate after sliding.
10. The laser beam parameter measuring device of claim 1, wherein: and a handle for pushing the second connecting plate to slide is arranged at the end part, close to the laser pulse measuring assembly, of the second connecting plate.
CN202221443803.0U 2022-06-10 2022-06-10 Laser beam parameter measuring device Active CN217765250U (en)

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CN202221443803.0U CN217765250U (en) 2022-06-10 2022-06-10 Laser beam parameter measuring device

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Application Number Priority Date Filing Date Title
CN202221443803.0U CN217765250U (en) 2022-06-10 2022-06-10 Laser beam parameter measuring device

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