CN217757630U

CN217757630U - Composite device of chromium target and copper back plate for sputtering coating

Info

Publication number: CN217757630U
Application number: CN202221329305.3U
Authority: CN
Inventors: 李启凤; 王俊; 宋兵
Original assignee: Shenzhen Canyuan Metal Materials Co ltd
Current assignee: Shenzhen Canyuan Metal Materials Co ltd
Priority date: 2022-05-31
Filing date: 2022-05-31
Publication date: 2022-11-08
Anticipated expiration: 2032-05-31

Abstract

The utility model relates to a sputter target technical field just discloses a composite set of chromium target and copper backplate for sputter coating, which comprises a plate body, the top of plate body is provided with the target body, the equal fixedly connected with connecting block in bottom of the target body left and right sides, the first T-shaped piece of left side fixedly connected with at plate body top, the right side of first T-shaped piece is supported with the left side of target body and is held. This composite set of chromium target and copper backplate for sputter coating, the left end through the kelly shifts out to the right in the slot according to the briquetting from T shape, make and press the spring force recovery and promote T shape and press briquetting rebound, make the horizontally push away the slope of frame, exert effect through the restoring force of second spring, make and stimulate second T-shaped piece and move to the right, and first spring force makes target left side connecting block follow first T-shaped piece and move out to the right of orientation down, make the bottom separation of two connecting blocks final and two T-shaped pieces, thereby be convenient for the quick dismantlement of target on the copper backplate.

Description

Composite device of chromium target and copper back plate for sputtering coating

Technical Field

The utility model relates to a sputter target technical field specifically is a composite set of chromium target and copper backplate for sputter coating.

Background

The sputtering target mainly comprises a target blank, a back plate and the like, wherein the target blank is a target bombarded by high-speed ion beams and belongs to the core part of the sputtering target. In the sputtering coating process, after the target material is hit by ions, atoms on the surface of the target material are sputtered and deposited on the substrate to form an electronic film, and since high-purity metals are generally soft, the sputtering target needs to be mounted on a special machine to complete the sputtering process. The inside of the machine is in an environment of high pressure and high vacuum, and therefore the backing plate is mainly used for holding the sputtering target material and is required to have good electrical and thermal conductivity.

At present, the target and the copper back plate are mostly welded together, when the target is damaged, the copper back plate cannot be used continuously, the target on the copper back plate is difficult to disassemble due to the welding mode of the target and the copper back plate, and the target and the copper back plate are not convenient to install and operate, so that a chromium target and copper back plate composite device for sputtering coating, which is simple and convenient to disassemble and assemble, needs to be designed.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model provides a not enough to prior art, the utility model provides a composite set of chromium target and copper backplate for sputter coating film possesses advantages such as the installation effect is good and easy dismounting, and is more difficult when having solved target and copper backplate welded mode and having dismantled, and target and the not convenient enough problem of copper backplate installation operation.

(II) technical scheme

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a composite set of chromium target and copper backplate for sputter coating, the package rubbing board body, the top of plate body is provided with the target body, the equal fixedly connected with connecting block in bottom of the target body left and right sides, the first T-shaped piece of left side fixedly connected with at plate body top, the right side of first T-shaped piece is supported with the left side of target body, the right side sliding connection at plate body top has the second T-shaped piece, the left side of second T-shaped piece is supported with the right side of target body, two the top of connecting block respectively with the bottom swing joint of first T-shaped piece and second T-shaped piece, the top on second T-shaped piece right side articulates there is the frame that pushes away, the right-hand member that pushes away the frame rotates and is connected with T-shaped and presses the briquetting, the rear side fixedly connected with of T-shaped press briquetting bottom presses the spring, press the bottom of spring and the right side fixed connection at plate body top, the right side activity of plate body is pegged graft and is had the kelly, the slot has been seted up on the right side of T-shaped press briquetting, the left end of kelly and the inside activity pegging graft of slot.

Preferably, the bottom of the right side of the first T-shaped block is fixedly connected with a first spring, the right end of the first spring is fixedly connected with a push block, the right side of the push block is abutted against the left side of the left connecting block, and the target on the plate body can be conveniently mounted and dismounted under the telescopic action of the first spring.

Preferably, the right side of the top of the plate body is fixedly connected with a fixing block, the left side of the fixing block is fixedly connected with a second spring, the left end of the second spring is fixedly connected with the bottom of the right side of the second T-shaped block, and the second T-shaped block moves leftwards or rightwards under the telescopic action of the second spring, so that the target on the plate body can be conveniently mounted and dismounted.

Preferably, the left side fixedly connected with telescopic bar of fixed block, the left end of telescopic bar and the bottom fixed connection on second T-shaped piece right side can lead to the side-to-side movement of second T-shaped piece through the telescopic action of telescopic bar, make the side-to-side movement of second T-shaped piece more horizontal stability.

Preferably, the right side at plate body top is seted up flutedly, the bottom of T shape is pressed the briquetting and is pegged graft with the inside activity of recess, presses the bottom of briquetting and the cooperation of pegging graft in the recess on plate body top right side through the T shape, makes the T shape press the briquetting reciprocate more vertical stable.

Preferably, the left side fixedly connected with third spring of kelly, the left end of third spring and the right side fixed connection of plate body, the pulling kelly makes its left end shift out from the slot, makes third spring elasticity resume and promote T shape press block rebound, the right side of the second T-shaped piece of being convenient for moves the operation that resets to the dismantlement operation of target on the plate body of being convenient for.

Compared with the prior art, the utility model provides a composite set of chromium target and copper backplate for sputter coating possesses following beneficial effect:

1. this set composite of chromium target and copper backplate for sputter coating, push away the frame through the setting, the T shape is pressed the briquetting, press the spring, kelly and ejector pad, stimulate the kelly right, make the left end of kelly shift out to the right in the slot of pressing the briquetting from the T shape, make and press spring force recovery and promote T shape and press briquetting rebound, make the horizontally push away the slope of frame, restoring force through the second spring acts on, make and stimulate second T-shaped piece and remove to the right, and first spring force makes target left side connecting block follow the right side of direction shift out under the first T-shaped piece, make the bottom separation of two connecting blocks and two T-shaped pieces finally, can follow the plate body with the target and demolish, thereby be convenient for the quick dismantlement of target on the copper backplate.

2. This set composite of chromium target and copper backplate for sputter coating, through setting up first T-shaped piece and second T-shaped piece, place the target on the plate body, press the T-shaped according to the briquetting again, make the right-hand member that pushes away the frame remove downwards, make the left end that pushes away the frame promote the second T-shaped piece left, the connecting block that makes the target both sides is located the below of first T-shaped piece and second T-shaped piece respectively, because kelly left end top is the inclined plane, make the T-shaped according to pushing down the briquetting and promote the kelly and move to the right after moving down, through the recovery effect of third spring, make the left end of kelly finally press the slot on briquetting right side with the T-shaped and peg graft, make target fixed mounting on the plate body, thereby be convenient for the installation operation of target on the copper backplate.

Drawings

FIG. 1 is a sectional view of the present invention;

FIG. 2 is an enlarged view of the structure A of FIG. 1 according to the present invention;

fig. 3 is an enlarged view of a structure B in fig. 1 according to the present invention.

Wherein: 1. a plate body; 2. a target material body; 3. connecting blocks; 4. a first T-shaped block; 5. a second T-shaped block; 6. pushing the frame; 7. a T-shaped pressing block; 8. a pressing spring; 9. a clamping rod; 10. a slot; 11. a first spring; 12. a push block; 13. a fixed block; 14. a second spring; 15. a telescopic bar; 16. a groove; 17. and a third spring.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

Referring to fig. 1-3, a composite device of a chromium target and a copper back plate for sputter coating comprises a plate body 1, a target body 2 is arranged on the top of the plate body 1, connecting blocks 3 are fixedly connected to the bottoms of the left and right sides of the target body 2, a first T-shaped block 4 is fixedly connected to the left side of the top of the plate body 1, the right side of the first T-shaped block 4 abuts against the left side of the target body 2, a first spring 11 is fixedly connected to the bottom of the right side of the first T-shaped block 4, a push block 12 is fixedly connected to the right end of the first spring 11, the right side of the push block 12 abuts against the left side of the left connecting block 3, a second T-shaped block 5 is slidably connected to the right side of the top of the plate body 1, the left side of the second T-shaped block 5 abuts against the right side of the target body 2, the tops of the two connecting blocks 3 are movably connected with the bottoms of the first T4 and the second T5 respectively, the first T-shaped block 4 and the second T-shaped block 5 are arranged, the target material is placed on the plate body 1, the T-shaped pressing block 7 is pressed, the right end of the pushing frame 6 moves downwards, the left end of the pushing frame 6 pushes the second T-shaped block 5 leftwards, the connecting blocks 3 on two sides of the target material are respectively positioned below the first T-shaped block 4 and the second T-shaped block 5, the top of the left end of the clamping rod 9 is an inclined plane, the clamping rod 9 is pushed to move rightwards when the T-shaped pressing block 7 moves downwards, the left end of the clamping rod 9 is finally inserted into the slot 10 on the right side of the T-shaped pressing block 7 through the recovery action of a third spring 17, the target material is fixedly installed on the plate body 1, so that the target material is conveniently installed and operated on the copper back plate, the right side of the top of the plate body 1 is fixedly connected with a fixing block 13, the left side of the fixing block 13 is fixedly connected with a second spring 14, the left end of the second spring 14 is fixedly connected with the bottom on the right side of the second T-shaped block 5, the left side of the fixing block 13 is fixedly connected with a telescopic strip 15, the left end of the telescopic bar 15 is fixedly connected with the bottom of the right side of the second T-shaped block 5.

The top on the right side of the second T-shaped block 5 is hinged with a pushing frame 6, the right end of the pushing frame 6 is rotatably connected with a T-shaped pressing block 7, the rear side of the bottom of the T-shaped pressing block 7 is fixedly connected with a pressing spring 8, the bottom of the pressing spring 8 is fixedly connected with the right side of the top of the plate body 1, the right side of the top of the plate body 1 is provided with a groove 16, the bottom of the T-shaped pressing block 7 is movably inserted into the groove 16, the right side of the plate body 1 is movably inserted with a clamping rod 9, the left side of the clamping rod 9 is fixedly connected with a third spring 17, the left end of the third spring 17 is fixedly connected with the right side of the plate body 1, the right side of the T-shaped pressing block 7 is provided with a slot 10, the left end of the clamping rod 9 is movably inserted into the slot 10, the pushing frame 6 is arranged, the T-shaped pressing block 7, the pressing spring 8, the clamping rod 9 and the pushing block 12 are pulled rightwards, the left end of the clamping rod 9 is moved out from the slot 10 of the T-shaped pressing block 7 from the slot 10, so that the spring 8 can restore the elasticity and push the T-shaped pressing block 7 to move upwards, the horizontal pushing frame 6 to enable the horizontal pushing block 5 to move out, the second T-shaped block to move out, and the target to be detached from the left side of the first T-shaped block 3, and the target material can be detached from the target material, and the target material detaching block 3, and the target material detaching block can be detached from the target material detaching block 3.

When in use, the clamping rod 9 is pulled rightwards, the left end of the clamping rod 9 is moved out rightwards from the slot 10 of the T-shaped pressing block 7, the elastic force of the pressing spring 8 is recovered and pushes the T-shaped pressing block 7 to move upwards, the horizontal pushing frame 6 is inclined, the second T-shaped block 5 is pulled to move rightwards under the action of the recovery force of the second spring 14, the left connecting block 3 of the target material is moved out rightwards from the lower part of the first T-shaped block 4 by the elastic force of the first spring 11, the two connecting blocks 3 are finally separated from the bottoms of the two T-shaped blocks, the damaged target material can be detached from the plate body 1, then a new target material is placed on the plate body 1, the T-shaped pressing block 7 is pressed, and the right end of the pushing frame 6 moves downwards, the left end that the messenger pushed away frame 6 promotes second T-shaped block 5 left, make connecting block 3 of target both sides be located the below of first T-shaped block 4 and second T-shaped block 5 respectively, because kelly 9 left end top is the inclined plane, make T-shaped press the briquetting 7 to promote kelly 9 and move to the right when moving down, through the recovery effect of third spring 17, make the left end of kelly 9 finally press the slot 10 on right side of briquetting 7 with T-shaped and peg graft in, make target fixed mounting on plate body 1, this composite set of chromium target and copper backplate for sputter coating, can split between target and the copper backplate, welded fixed mode has been replaced, thereby be convenient for the composite mounting between chromium target and the copper backplate.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a set composite of chromium target and copper backplate for sputter coating, includes plate body (1), its characterized in that: the novel plate comprises a plate body (1), wherein a target body (2) is arranged at the top of the plate body (1), connecting blocks (3) are fixedly connected to the bottoms of the left side and the right side of the target body (2), a first T-shaped block (4) is fixedly connected to the left side of the top of the plate body (1), the right side of the first T-shaped block (4) is abutted to the left side of the target body (2), a second T-shaped block (5) is slidably connected to the right side of the top of the plate body (1), the left side of the second T-shaped block (5) is abutted to the right side of the target body (2), the top of each connecting block (3) is respectively movably connected to the bottoms of the first T-shaped block (4) and the second T-shaped block (5), a pushing frame (6) is hinged to the top of the right side of the second T-shaped block (5), a T-shaped block (7) is rotatably connected to the right end of the pushing frame (6), a pressing spring (8) is fixedly connected to the rear side of the bottom of the T-shaped block (7), the bottom of the pressing spring (8) is fixedly connected to the right side of the plate body (1), a clamping rod (9) is inserted into the right side of the plate body (1), a clamping rod (9), and a left inserting rod (10) is inserted into a left inserting slot (10) is arranged in the inserting groove (10).

2. The device of claim 1, wherein the device comprises: the bottom fixedly connected with first spring (11) on first T-shaped piece (4) right side, the right-hand member fixedly connected with ejector pad (12) of first spring (11), the right side of ejector pad (12) and the left side of left side connecting block (3) are held against.

3. The device of claim 1, wherein the device comprises: the right side of plate body (1) top fixedly connected with fixed block (13), the left side fixedly connected with second spring (14) of fixed block (13), the left end and the bottom fixed connection on second T-shaped piece (5) right side of second spring (14).

4. The device of claim 3, wherein the device comprises: the left side fixedly connected with telescopic bar (15) of fixed block (13), the bottom fixed connection on left end and second T-shaped piece (5) right side of telescopic bar (15).

5. The device of claim 1, wherein the device comprises: the right side of the top of the plate body (1) is provided with a groove (16), and the bottom of the T-shaped pressing block (7) is movably inserted into the groove (16).

6. The device of claim 1, wherein the device comprises: the left side fixedly connected with third spring (17) of kelly (9), the left end of third spring (17) and the right side fixed connection of plate body (1).