CN217756913U

CN217756913U - Novel zone-melting hydrogenation furnace

Info

Publication number: CN217756913U
Application number: CN202222211367.0U
Authority: CN
Inventors: 董顺
Original assignee: Shenyang Pengcheng Vacuum Technology Co ltd
Current assignee: Shenyang Pengcheng Vacuum Technology Co ltd
Priority date: 2022-08-22
Filing date: 2022-08-22
Publication date: 2022-11-08
Anticipated expiration: 2032-08-22

Abstract

The utility model discloses a novel zone-melting hydrogenation furnace, the on-line screen storage device comprises a rack, the inner chamber bottom of rack is equipped with the mechanical pump, the top of mechanical pump is equipped with the preceding valve, the both sides of preceding valve are equipped with extraction chamber and molecular pump respectively, the top of extraction chamber is equipped with the furnace body, the top of furnace body is equipped with the glass pipe, the left side of furnace body is equipped with the removal track, the top of glass pipe is equipped with the top seal. The utility model relates to a novel zone-melting hydrogenation furnace, to developing and manufacturing in laboratory condition, rational in infrastructure, the glass pipe is on the rack, and the sample heating adopts metal heater to be located the heating of glass outside of tubes portion, and heating element can freely slide on lifting unit, adjusts the heating region, and the diathermanous slit width of heating element structural design adopts ceramic fibre to keep warm, and heat-resisting stainless steel outrigger realizes closed-loop control through thermocouple and PID accuse temperature table. The utility model discloses the structure is reliable, has guaranteed the good sealing performance of equipment.

Description

Novel zone-melting hydrogenation furnace

Technical Field

The utility model relates to a new hydrogenation furnace especially relates to a novel zone-melting hydrogenation furnace.

Background

The zone melting furnace is a key device for preparing semiconductor refrigeration crystal particles, and has the function of processing a smelted non-oriented crystallized material into forward polycrystal through zone melting, the thermoelectric property of the crystal material is determined by the crystallization direction of the forward polycrystal, and the smaller the included angle between the crystallization direction and the axial direction is, the better the thermoelectric property of the crystal material is.

The conventional zone melting furnace generally comprises a furnace chamber, a furnace chamber bracket, a base, a transmission mechanism, a vacuum system, a heating system and the like, has larger volume, high manufacturing cost and structure and price which are not suitable for being used in a laboratory, and is not used in the laboratory at present.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, one of the purposes of the utility model is to provide a novel zone-melting hydrogenation furnace.

The utility model discloses an one of the purpose adopts following technical scheme to realize:

the utility model provides a novel zone-melting hydrogenation furnace, includes the rack, the inner chamber bottom of rack is equipped with the mechanical pump, the top of mechanical pump is equipped with the backing valve, the both sides of backing valve are equipped with extraction chamber and molecular pump respectively, the top of extraction chamber is equipped with the furnace body, the top of furnace body is equipped with the glass pipe, the left side of furnace body is equipped with the removal track, the top of glass pipe is equipped with the top seal.

Further, the pumping chamber is located on the left side of the backing valve, and the molecular pump is located on the right side of the backing valve.

Furthermore, the movable rail is arranged on the left side of the inner cavity of the rack, a sliding block is connected to the left side of the furnace body, and the sliding block is movably connected to the movable rail.

Furthermore, a pumping valve is arranged on the left side of the pumping chamber, and the pumping chamber is matched with the pumping valve.

Furthermore, a gate valve is arranged on the molecular pump, and the molecular pump is matched with the gate valve.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model relates to a novel zone melting hydrogenation furnace, which is developed and manufactured according to laboratory conditions, has a reasonable structure, a glass tube is arranged on a rack, a metal heater is adopted for heating the sample and is positioned outside the glass tube, a heating component can freely slide on a lifting component, and a heating area is adjusted;

2. the utility model relates to a novel zone-melting hydrogenation furnace, the diathermanous slit width of heating element structural design adopts ceramic fibre to keep warm, and closed-loop control is realized through thermocouple and PID temperature-controlled meter to heat-resisting stainless steel outrigger.

The utility model discloses the structure is reliable, has guaranteed the good sealing performance of equipment.

The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention may be implemented according to the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more obvious and understandable, the following preferred embodiments are described in detail with reference to the accompanying drawings.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

The reference numbers in the figures: 1. a mechanical pump; 2. an air extraction chamber; 3. a backing valve; 4. a molecular pump; 5. a furnace body; 6. a moving track; 7. a glass tube; 8. upper sealing; 9. a slider; 10. pumping a valve; 11. a gate valve; 12. a gantry.

Detailed Description

The present invention will be further described with reference to the accompanying drawings and the detailed description, and it should be noted that the embodiments or technical features described below can be arbitrarily combined to form a new embodiment without conflict.

It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Referring to fig. 1, the present invention provides a technical solution: the utility model provides a novel zone-melting hydrogenation furnace, including rack 12, the inner chamber bottom of rack 12 is equipped with mechanical pump 1, mechanical pump 1's top is equipped with preceding valve 3, the both sides of preceding valve 3 are equipped with extraction chamber 2 and molecular pump 4 respectively, extraction chamber 2 is located the left side of preceding valve 3, molecular pump 4 is located the right side of preceding valve 3, the left side of extraction chamber 2 is equipped with extraction valve 10, and extraction chamber 2 and extraction valve 10 match each other, be equipped with slide valve 11 on the molecular pump 4, and molecular pump 4 and slide valve 11 match each other, the top of extraction chamber 2 is equipped with furnace body 5, the top of furnace body 5 is equipped with glass pipe 7, the left side of furnace body 5 is equipped with removal track 6, removal track 6 sets up the inner chamber left side at rack 12, the left side of furnace body 5 is connected with slider 9, slider 9 swing joint is on removal track 6, the top of glass pipe 7 is equipped with upper seal 8.

The working principle is as follows: in the using process, a glass tube 7 is fixed on a rack 12, a sample wafer is firstly loaded, a mechanical pump 1 is started, a side pumping valve 10 is opened in about 15s, when the pressure in a furnace is less than 10Pa, the side pumping valve 10 is closed, a front valve 3 and a molecular pump 4 are opened, when the rotating speed of the molecular pump 4 reaches 5000r/s, a gate valve 11 is opened, when the air pressure reaches 5 x 10 < -4 > Pa, the operation is started, an inflation valve is opened, hydrogen is filled, a furnace body 5 is heated, the furnace body 5 can move on a moving track 6, and an upper seal 8 is arranged on the upper edge of the glass tube 7. When the temperature is raised to 400 ℃, parameters such as the designated temperature, the furnace body stroke, the lifting speed and the like are set according to the materials.

The above embodiments are only preferred embodiments of the present invention, and the protection scope of the present invention cannot be limited thereby, and any insubstantial changes and substitutions made by those skilled in the art based on the present invention are all within the protection scope of the present invention.

Claims

1. A novel zone melting hydrogenation furnace comprises a rack (12) and is characterized in that: the inner chamber bottom of rack (12) is equipped with mechanical pump (1), the top of mechanical pump (1) is equipped with preceding valve (3), the both sides of preceding valve (3) are equipped with extraction chamber (2) and molecular pump (4) respectively, the top of extraction chamber (2) is equipped with furnace body (5), the top of furnace body (5) is equipped with glass pipe (7), the left side of furnace body (5) is equipped with removal track (6), the top of glass pipe (7) is equipped with upper seal (8).

2. The novel zone-melting hydrogenation furnace as claimed in claim 1, characterized in that: the extraction chamber (2) is positioned on the left side of the front-stage valve (3), and the molecular pump (4) is positioned on the right side of the front-stage valve (3).

3. The novel zone melting hydrogenation furnace as claimed in claim 1, characterized in that: the movable rail (6) is arranged on the left side of the inner cavity of the rack (12), the left side of the furnace body (5) is connected with a sliding block (9), and the sliding block (9) is movably connected to the movable rail (6).

4. The novel zone melting hydrogenation furnace as claimed in claim 1, characterized in that: the left side of the air pumping chamber (2) is provided with an air pumping valve (10), and the air pumping chamber (2) is matched with the air pumping valve (10).

5. The novel zone-melting hydrogenation furnace as claimed in claim 1, characterized in that: the molecular pump (4) is provided with a gate valve (11), and the molecular pump (4) is matched with the gate valve (11).