CN217738984U - Fabry-Perot structure coupling cavity sensing chip based on optical vernier effect - Google Patents
Fabry-Perot structure coupling cavity sensing chip based on optical vernier effect Download PDFInfo
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Abstract
The utility model belongs to the technical field of optical sensor, specifically be a fabry perot structure coupling cavity sensing chip based on optics vernier effect. The sensing chip of the utility model comprises three plane reflectors and two square quartz microtubes; a sensing cavity is formed between the two plane reflectors and the two square quartz microtubes; the middle plane reflector and the lower plane reflector form a reference cavity; the square quartz microtube is of a hollow structure, two ends of the square quartz microtube are open, and the square quartz microtube can be combined with a micro-fluidic hollow system; the utility model discloses can carry out 20-40 times's enlargies with the sensitivity of traditional fabry perot resonant cavity sensor chip, avoid traditional fabry perot resonant cavity sensor to the demand of high-quality factor, can realize the detection to the chemical biological reagent of ultralow trace concentration, super small physical quantity; the method has the advantages of convenient manufacture of the coupling cavity with the Fabry-Perot structure, simple operation and lower overall design cost.
Description
Technical Field
The utility model belongs to the technical field of optical sensor, concretely relates to fabry perot structure coupling cavity sensing chip.
Background
Optical sensor technology generally has the advantages of rapid real-time detection, non-destructive and strong anti-electromagnetic interference capability, and is widely applied to sensing of physical parameters, chemistry and biomolecules. The Fabry-Perot structure coupling cavity based on the optical sensing technology has the advantage that due to the optical vernier effect, the sensitivity of the coupling cavity is greatly amplified. The extremely high sensitivity enables weak signal changes to be effectively resolved by the coupling cavity, so that the method is widely applied to detection of various chemical and biological molecules.
In general, a Fabry-perot resonator (FP) consists of two planar mirrors that remain highly parallel, wherein photons satisfying the resonance condition are confined in the cavity due to specular reflection, forming a stable standing wave field. However, when the fabry perot resonator is manufactured, the two plane mirrors cannot be guaranteed to be highly parallel, so that extra optical loss is introduced, the quality factor of the resonator is sharply reduced, and the resolution of the resonator is reduced. In order to overcome the above problems, the coupling cavity based on the fabry perot structure is widely applied to the detection of weak signals due to its extremely high sensing sensitivity. The Fabry-Perot structure coupling cavity is formed by combining three planar reflectors into two cavities. Typically one cavity is used as the sensing cavity and the other cavity is used as the reference cavity, and the cavity lengths of the two cavities are close. Due to the small difference of the cavity length between the two Fabry Perot resonant cavities, the finally output spectrum is the superposition of the resonant modes of the two resonant cavities, similar to a vernier effect, an envelope is finally formed in the transmission spectrum, and the detection of the object to be detected is carried out by monitoring the envelope movement. Furthermore, the parallelism requirements between the planar mirrors in the cavity are not very high due to the extremely high sensitivity.
A common fabry perot structure coupling cavity is based on an optical fiber structure, i.e. three reflecting surfaces are made in the optical fiber, thereby generating an optical vernier effect. The fabry perot structure coupling cavity based on the optical fiber structure generally has extremely high sensitivity and high resolution, and is widely used for sensing various physical parameters, chemical and biological molecules. Although the fabry perot structure coupling cavity based on the optical fiber has the advantage of easy integration, the complex manufacturing process and the fragile and fragile optical fiber structure limit the practical application in the optical sensor detection technology field.
Disclosure of Invention
The utility model aims at providing a fabry perot structure coupling cavity sensing chip that has high sensitivity, low detection limit, no mark sensing.
The utility model provides a Fabry Perot structure coupling cavity sensing chip, which is based on the optical vernier effect technology, and the structure of the Fabry Perot structure coupling cavity sensing chip is shown in figure 1; the device comprises three plane reflectors and two square quartz microtubes, wherein the three plane reflectors are square and have the same size; the three plane reflectors consist of a quartz substrate and a reflecting film plated on the quartz substrate; the three plane reflectors are arranged in parallel in an upper layer, a middle layer and a lower layer; the reflecting films of the upper plane reflecting mirror and the middle plane reflecting mirror face to each other, the two square quartz microtubes are consistent in size, are arranged between the upper plane reflecting mirror and the middle plane reflecting mirror and are positioned at the edges of the two plane reflecting mirrors; the two plane reflectors are respectively bonded with the upper surface and the lower surface of the two square quartz microtubes, so that a sensing cavity is formed between the two plane reflectors and the two square quartz microtubes; the reflecting film side of the lower plane reflecting mirror is bonded with the quartz substrate of the middle plane reflecting mirror to form a reference cavity; the square quartz microtube is of a hollow structure, two ends of the square quartz microtube are provided with openings, and the square quartz microtube can be combined with a micro-fluidic hollow system; the square quartz microtube is used as a gasket between two plane reflectors in the sensing cavity and also provides a microfluidic channel for conveying an analyte to be detected; the quartz substrate of the middle plane mirror is used as a gasket between the two plane mirrors in the reference cavity.
The utility model discloses in, the quantity of plane mirror is three, and the reflectivity scope of every speculum is 50% -100%.
In the utility model, the surface reflection film of the plane reflector is a metal film with specific reflectivity, such as a gold film, a silver film and the like plated on a quartz substrate with the thickness of 30-50nm, so that the reflectivity range of the plane reflector is 50-100%, and the reflector on any two sides can form a Fabry Perot resonant cavity; or a plurality of dielectric films with high and low refractive index materials which are periodically arranged in a crossed way, for example, 11 to 31 layers of high and low refractive index materials are sequentially deposited on a quartz substrate, so that the reflectivity range of the reflector is 50 to 100 percent, and the two random reflectors can form a Fabry Perot resonant cavity.
The utility model discloses in, bonding between square quartz microtube and plane mirror, plane mirror and the plane mirror adopts the ultraviolet glue bonding.
In the utility model, the substrate of the plane reflector is a transparent quartz plate with a thickness of 200-1000 μm.
In the present invention, the height of the square quartz microtube is not more than 1mm, and usually can be 0.2-1mm, and the height of the square quartz microtube is close to the thickness of the quartz substrate of the middle plane reflector, for example, the difference is not more than 0.02mm.
Fabry parlo structure coupling chamber sensor chip, based on the optical vernier effect in the coupling chamber, realize carrying out 20-40 times effective enlargies to sensor chip's sensitivity, can be used to detect ultralow concentration, micro target detection thing solution.
Fabry Parlo structure coupling cavity sensor chip, according to the refracting index of target detection thing along with the characteristic that solution concentration changes, accessible optical means realizes the real-time quick detection to target detection thing concentration (chemical molecule, biomolecule).
The utility model discloses still provide detection device based on above-mentioned sensor chip, see that fig. 3 shows, include: the optical vernier effect based Fabry-Perot structure coupling cavity sensing device comprises a supercontinuum light source, a single-mode optical fiber, a beam collimator, a beam splitter, a focusing objective, a Fabry-Perot structure coupling cavity sensing chip based on an optical vernier effect, a focusing objective or a lens, a spectrum analyzer and a computer which are connected in sequence to form a sensing light path; in addition, the imaging device also comprises a focusing objective lens or a lens and a CCD imaging device which are sequentially connected with the beam splitter to form an imaging light path; wherein:
a supercontinuum light source for emitting broadband detection light; transmitting, by a single mode optical fiber, output broadband detection light of the light source to a beam collimator; the beam collimator is used for collimating divergent light output by the single-mode optical fiber into parallel light; the beam splitter is used for transmitting the image formed by the focusing objective lens to the CCD imaging device; the focusing objective is used for coupling the collimated parallel light into the Fabry-Perot structure coupling cavity sensing chip, and is also used for collecting the output light of the sensing chip and imaging the sensing chip; the Fabry-Perot structure coupling cavity sensing chip based on the optical vernier effect is a Fabry-Perot structure coupling cavity consisting of three plane reflectors and two square quartz microtubes, wherein the square quartz microtubes are hollow structures, openings are formed in two ends of the square quartz microtubes, one ends of the square quartz microtubes are connected with a special microfluidic system, and the microfluidic system comprises a Teflon tube, an injection pump, an injector, a test tube and the like; the other end is connected with an analyte to be detected through a Teflon tube; the large-core optical fiber bundle fully collects the spectral signals output by the focusing objective and transmits the spectral signals to the spectrum analyzer; the spectrum analyzer receives the output optical signal, converts the output optical signal into an electric signal and transmits the electric signal to a computer; the computer is used for displaying the emergent spectrum signal collected by the spectrum analyzer and analyzing and storing the data; the CCD imaging device is used for imaging the Fabry Perot structure coupling cavity sensing chip; the microfluidic system comprises a syringe pump, an injector and a Teflon tube and is used for pumping the analyte to be detected into the square quartz microtube; a cuvette for storing an analyte to be detected.
The utility model provides an above-mentioned detection device, its operation flow includes: starting a super-continuum spectrum light source to emit detection light; coupling the focused light spot into the coupling cavity by using a focusing objective lens; adjusting the square quartz microtube of the sensing chip to a focusing light spot area by using a CCD imaging system and a five-dimensional adjusting frame; the method comprises the following steps of (1) pumping an analyte to be detected into a square quartz microtube by using a microfluidic system (comprising a syringe pump, an injector, a Teflon tube, a test tube and the like), wherein the microfluidic system is connected with one port of the square quartz microtube, and the other port of the square quartz microtube is connected with the test tube filled with the analyte to be detected through the Teflon tube; and collecting signals by using a spectrum analyzer, and displaying and storing data in real time by using a computer.
The technical principle of the utility model is that: three plane reflectors and two square quartz microtubes are assembled into a Fabry-Perot structure coupling cavity with an optical vernier effect, wherein the cavity length of the two cavities is close to each other, so that the effective amplification of 20-40 substrates can be realized for the sensitivity of a sensing chip, and the amplification formula factor can be written as follows:
wherein, FSR 1 And FSR 2 The free spectral ranges of the sensing and reference cavities, respectively, and the magnitude of the spectral FSR is related to the cavity length. It can be found from equation (1) that the closer the cavity lengths of the two cavities are, the larger the amplification factor is, but at the same time, the resolution of the envelope is also reduced, and therefore, the amplification factor of the coupling cavity is typically 1-2 orders of magnitude.
The utility model discloses in, because the chamber length size of two chambeies (refer to chamber and sensing chamber) is close, therefore output spectrum is the stack of two resonant cavity resonance spectra separately, is similar to vernier effect, finally forms the envelope in the spectrum. The envelope has extremely high sensitivity which is at least one order of magnitude higher than that of the conventional Fabry Perot resonant cavity sensor, so that the detection capability of the sensing chip for weak signals is enhanced.
The utility model has the characteristics of as follows:
(1) The utility model is significantly different from the common optical fiber Fabry Perot structure coupling cavity; in the utility model, three plane reflectors constitute a coupling cavity of Fabry-Perot structure, wherein a square quartz microtube is integrated in the middle of the sensing cavity, and the middle of the reference cavity is a quartz substrate of the plane reflector, and the lengths of the square quartz microtube and the quartz substrate of the plane reflector are close to each other, so that the sensitivity of the sensing chip can be amplified by high times;
(2) The utility model provides a Fabry-Perot structure coupling cavity sensing chip, which overcomes the complex preparation process and fragile structure of the traditional optical fiber Fabry-Perot structure coupling cavity, greatly improves the structural stability of the sensing chip and reduces the manufacturing cost;
(3) The square quartz microtube integrated in the utility model is a microfluidic channel, so that an analyte transmission channel does not need to be additionally manufactured;
(4) The Fabry-Perot structure coupling cavity sensing chip provided by the utility model overcomes the requirement of the traditional Fabry-Perot structure resonant cavity sensor on the extremely high parallelism of the mirror surface due to the extremely high sensitivity;
(5) The biomolecule detection mechanism realized by the utility model is that the specific combination between biomolecules leads to larger refractive index change, the process does not need to mark the biomolecules, and does not need to modify chemical molecules inside the square quartz microtube, thereby reducing the complexity of biomolecule detection;
(6) The fabry perot structure coupling cavity sensing chip provided by the utility model can realize the detection of biochemical molecules (protein, DNA, chemical gas, bacterial virus) with ultralow concentration and trace volume and weak physical quantity (temperature, pressure and refractive index) signals due to the extremely high sensitivity of the sensor;
(7) The sensing chip provided by the utility model is simple to manufacture, easy to operate and can be repeatedly used;
(8) The utility model provides a sensing chip test method is simple, and is not high to test system's requirement, the in-service use of being convenient for.
Drawings
Fig. 1 is a structural diagram of a fabry perot structure coupled cavity sensing chip of the present invention.
Fig. 2 is a diagram of a theoretically calculated transmission spectrum of a coupled cavity sensing chip based on the fabry perot structure of the present invention.
Fig. 3 is a diagram of a detection system based on the fabry perot structure coupled cavity sensing chip of the present invention.
Fig. 4 is a diagram of transmission spectrum of experimental test based on the fabry perot structure coupled cavity sensor chip of the present invention.
Fig. 5 is a diagram showing the sensitivity test result of the coupled cavity sensing chip based on the fabry perot structure of the present invention.
Reference numbers in the figures: 1 is a quartz plate substrate with an upper reflector and a lower reflector; 2 is a middle layer reflector quartz plate substrate; 3 is a reflecting film; 4 is a square quartz microtube; 5 is a super-continuum spectrum light source; 6 is a beam collimator; 7 is a beam splitter; 8 is a focusing objective lens; 9 is a Fabry Perot structure coupling cavity sensing chip; 10 is a focusing objective lens; 11 is a focusing objective lens or lens; 12 is a spectrum analyzer; 13 is a computer; 14 is a focusing objective or lens; 15 is CCD imaging device; 16 is a micro-fluidic system, and 17 is a sensing optical path; and 18 is an imaging optical path.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples, but the present invention is not limited to these examples.
Example 1
In this embodiment, the optical vernier effect-based fabry perot structure coupled cavity sensing chip (see fig. 1) specifically includes: three planar reflectors plated with specific reflecting films and a Fabry-Perot structure coupling cavity consisting of two square quartz microtubes; wherein the reflectivity range of the plane reflector is 50-100%, and the thickness of the quartz plate substrate is 200-1000 μm; the height of the square quartz microtubes is not more than 1mm, the height of the square quartz microtubes is close to the thickness of a quartz plate of a substrate of the plane mirror, and openings are formed in two ends of each square quartz microtube and can be combined with a microfluidic system; the square quartz microtube and the surface of the reflector plated with the reflecting film are bonded through ultraviolet glue; the sensing cavity in the coupling cavity is formed by bonding the lower surface of a square quartz microtube with the surface plated with the reflecting film in the middle plane reflecting mirror, and bonding the upper surface of the square quartz microtube with the surface plated with the reflecting film of the upper plane reflecting mirror; the reference cavity in the coupling cavity is formed by bonding the surface of the middle plane reflector without the reflecting film with the surface of the bottom plane reflector plated with the film.
In the device, the preparation method of the Fabry Perot structure coupling cavity sensing chip comprises the following steps:
(1) Selecting two sections of square quartz microtubes, uniformly coating a layer of ultraviolet glue on the lower surface of the microtubes, horizontally laying the microtubes on the film-coated surface of the intermediate layer plane reflector, and bonding the microtubes by using the ultraviolet glue;
(2) Uniformly coating a layer of ultraviolet glue on the upper surface of the square quartz microtube, laying the coating surface of the top plane reflector on the upper surface of the square quartz microtube and bonding the coating surface by using the ultraviolet glue;
(3) And uniformly coating a layer of ultraviolet glue on the quartz basal surface of the intermediate layer plane reflector, and bonding the surface of the bottom layer plane reflector plated with the reflecting film with the quartz basal surface.
In the device, when light is incident on the sensing chip, part of the light enters the coupling cavity of the Fabry-Perot structure through the mirror surface, wherein the light meeting the requirement that the light of the sensing cavity and the light of the reference cavity respectively generate stable resonance in the two cavities, and finally, an output spectrum is the superposition of transmission spectra of the two resonant cavities; because the respective cavity lengths of the two cavities have slight difference, the two finally output transmission spectrums are similar to a vernier effect when being superposed to form an envelope; when the concentration of liquid in the sensing cavity changes, the corresponding refractive index of the liquid is also changed, and finally the resonance mode of the sensing cavity moves, and the resonance mode shows envelope movement in a transmission spectrum, so that the sensing of analytes (chemical molecules and biological molecules) with specific concentration can be realized by monitoring the size of the peak value of the envelope wave.
Example 2
In this embodiment, theoretical analysis of the fabry perot structure coupled cavity sensor chip is performed based on the parameters of embodiment 1. Based on the coupling mode of the double-Fabry Perot resonant cavity, the normalized amplitude transmission coefficient of the final Fabry Perot structure coupling cavity can be derived as follows:
wherein r is 2 To refer to the amplitude reflection coefficient of the cavity, it can be written as:
wherein, t 2 To refer to the amplitude transmission coefficient of the cavity, it can be written as:
in the above formula, R 1 、R 2 And R 3 The reflectivities of the three plane reflectors are respectively; t is 1 、T 2 And T 3 The transmittances of the three plane mirrors respectively; l is 1 And L 2 The height of the square quartz microtube and the thickness of the middle plane reflector quartz substrate are respectively set; alpha is alpha 1 And alpha 2 Loss factors introduced by absorption, scattering and the like in the sensing cavity and the reference cavity respectively; phi 1 (v) and Φ 2 (v) is the phase difference introduced after light is reflected back and forth once between the sensing cavity and the reference cavity, which can be written as:
wherein upsilon is the frequency of incident light, c is the speed of light in vacuum, and n 1 And n 2 The effective refractive indices of the media in the sensing and reference cavities, respectively.
By combining the formulas (1) - (4), the output transmission spectrum of the coupling cavity of the fabry perot structure can be obtained, as shown in fig. 2, as the concentration of the analyte to be detected in the square quartz microtube changes, the envelope in the corresponding transmission spectrum generates larger wavelength shift.
Example 3
In this embodiment, based on the parameters of embodiment 1, the sensitivity of the transmittance spectrum and the bulk refractive index of the sensor chip is tested, and the specific process is as follows: combining the prepared Fabry Perot structure coupling cavity sensing chip with a microfluidic technology, namely combining one end of a square quartz microtube with an injector and an injection pump through a Teflon tube to realize the extraction of liquid to be detected; the other end of the square quartz microtube is combined with the liquid to be measured through a Teflon tube.
In the present apparatus, a test system is shown in fig. 3. Starting a super-continuum spectrum light source to emit detection light; after passing through the optical fiber collimator, the light beams are collimated into parallel light and sequentially pass through the beam splitter and the focusing objective lens, the parallel light beams are focused into small light spots and are effectively coupled to a square quartz microtube area of the coupling cavity of the Fabry-Perot structure by combining a CCD imaging device; the transmission spectrum of the fabry perot structure coupling cavity is collected by the focusing objective lens and further collimated into parallel light to be transmitted to a lens or the focusing objective lens at the far end, the transmission spectrum is finally analyzed by the spectrum analyzer and displayed in a computer, and the transmission spectrum of the fabry perot structure coupling cavity tested in an experiment is shown in fig. 4.
In the device, based on the above test method, dimethyl sulfoxide (DMSO) solutions with concentrations of 0 to 5% are respectively introduced into the square quartz microtubes, and the movement of the envelope is observed in real time by a computer, as shown in fig. 4. As the concentration of the dmso solution increased, the corresponding envelope peak was red-shifted. By extracting and fitting the envelope peak value, the sensitivity of the coupling cavity of the Fabry-Perot structure is 3835nm/RIU, and as shown in FIG. 5, compared with the conventional Fabry-Perot resonant cavity, the amplification factor of the sensitivity is 20 times.
Claims (7)
1. A Fabry-Perot structure coupling cavity sensing chip based on an optical vernier effect is characterized by comprising three plane reflectors and two square quartz microtubes; wherein, the three plane reflectors are square and have the same size; the three plane reflectors consist of a quartz substrate and a reflecting film plated on the quartz substrate; the three plane reflectors are arranged in parallel in an upper layer, a middle layer and a lower layer; the reflecting films of the upper plane reflecting mirror and the middle plane reflecting mirror face to each other, the two square quartz microtubes are consistent in size, are arranged between the upper plane reflecting mirror and the middle plane reflecting mirror and are positioned at the edges of the two plane reflecting mirrors; the two plane reflectors are respectively bonded with the upper surface and the lower surface of the two square quartz microtubes, so that a sensing cavity is formed between the two plane reflectors and the two square quartz microtubes; the reflecting film side of the lower plane reflecting mirror is bonded with the quartz substrate of the middle plane reflecting mirror to form a reference cavity; the square quartz microtube is of a hollow structure, and two ends of the square quartz microtube are provided with openings and can be combined with a micro-fluidic hollow system; the square quartz microtube is used as a gasket between two plane reflectors in the sensing cavity and also provides a microfluidic channel for conveying an analyte to be detected; the quartz substrate of the middle plane reflector is used as a gasket between the two plane reflectors in the reference cavity.
2. The fabry perot structure coupled cavity sensing chip of claim 1, wherein the reflectivity of the planar mirror ranges from 50% to 100%.
3. The fabry perot structure coupling cavity sensing chip of claim 1, wherein the surface reflection film of the planar mirror is a metal film with a specific reflectivity, or a dielectric film with multiple layers of high and low refractive index materials arranged alternately periodically, so that the reflectivity of the mirror ranges from 50% to 100%, thereby ensuring that any two mirrors form a fabry perot resonant cavity.
4. The fabry perot structure coupling cavity sensing chip of claim 1, wherein ultraviolet glue bonding layers are arranged between the square quartz microtube and the plane reflector and between the plane reflector and the plane reflector.
5. The fabry perot structure coupling cavity sensing chip of claim 1, wherein the planar mirror substrate is a light-transmissive quartz plate with a thickness of 200-1000 μm.
6. The fabry perot structure coupled cavity sensing chip of claim 1, wherein the height of the square quartz microtube is not more than 1mm, and the height of the square quartz microtube is close to the thickness of the quartz substrate of the middle plane reflector.
7. A detection device based on a Fabry-Perot structure coupled cavity sensing chip as claimed in any one of claims 1 to 6, comprising: the optical vernier effect based Fabry-Perot cavity sensing device comprises a supercontinuum light source, a single-mode optical fiber, a beam collimator, a beam splitter, a focusing objective, a Fabry-Perot structure coupling cavity sensing chip based on an optical vernier effect, a focusing objective or a lens, a spectrum analyzer and a computer which are connected in sequence to form a sensing light path; in addition, the imaging device also comprises a focusing objective lens or a lens and a CCD imaging device which are sequentially connected with the beam splitter to form an imaging light path; wherein:
the super-continuum spectrum light source is used for emitting broadband detection light;
the single mode fiber transmits the output broadband detection light of the light source to a beam collimator;
the beam collimator is used for collimating divergent light output by the single-mode optical fiber into parallel light;
the beam splitter is used for transmitting the image formed by the focusing objective lens to the CCD imaging device;
the focusing objective is used for coupling the collimated parallel light into a Fabry-Perot structure coupling cavity sensing chip, and is also used for collecting output light of the sensing chip and imaging the sensing chip;
in the Fabry Perot structure coupling cavity sensing chip, two ends of a square quartz micropipe are opened, one end of the square quartz micropipe is connected with a micro-fluidic system, and the other end of the square quartz micropipe is connected with an analyte to be detected through a Teflon tube; the large-core optical fiber bundle fully collects the spectral signals output by the focusing objective and transmits the spectral signals to the spectrum analyzer;
the spectrum analyzer receives the output optical signal, converts the output optical signal into an electric signal and transmits the electric signal to a computer;
the computer is used for displaying the emergent spectrum signal collected by the spectrum analyzer and analyzing and storing the data;
the CCD imaging device is used for imaging the Fabry Perot structure coupling cavity sensing chip;
the micro-fluidic system comprises a syringe pump, a syringe and a Teflon tube and is used for pumping the analyte to be detected into the square quartz microtube.
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