CN217542863U - Micro-bubble integrated forming method Brilparo structure resonant cavity sensing chip - Google Patents
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Abstract
The utility model belongs to the technical field of optical sensing detects, specifically be a microbubble integrated into one piece formula fabry perot structure resonant cavity sensing chip. The utility model discloses optical sensing chip includes: two plane reflectors, a quartz micro-tube with hollow micro-bubbles in the middle and two square quartz tubes; the two plane reflectors are arranged in parallel up and down, and the two square quartz tubes are arranged on the left side and the right side of the two plane reflectors to ensure that the two plane reflectors are kept highly parallel; the hollow quartz micro-bubble is arranged between the two plane reflectors, and two ends of the hollow quartz micro-bubble are fixedly bonded with the plane reflectors to form a micro-bubble integrated forming type Fabry-Perot structure resonant cavity sensing chip; the surface of the plane reflector is plated with a metal film or a dielectric film with specific reflectivity. The utility model discloses based on the lens effect of microbubble, make sensor chip possess high sensitivity, low mode volume and high quality factor's characteristic, the natural miniflow passageway of integration simultaneously realizes low concentration chemical molecule or no mark biomolecule sensing.
Description
Technical Field
The utility model belongs to the technical field of optical sensor, concretely relates to fabry perot structure resonant cavity sensing chip.
Background
Optical detection techniques are often used for sensing physical parameters, biological or chemical samples, and sensors based on optical detection techniques generally have the advantages of fast response, protection from electromagnetic interference of the surrounding environment, high sensitivity, and the like, and are widely applied to different fields. The Fabry-Perot resonant cavity based on the optical detection technology can realize optical amplification of weak signals due to high quality factors, extremely small mode volumes and strong interaction between light and substances caused by the cavity, and is widely applied to detection of chemical molecules and biological molecules.
In general, a Fabry-perot resonator (FP) consists of two mirrors kept highly parallel, wherein light satisfying the resonance condition is confined in the cavity due to specular reflection, thereby forming a stable standing wave. The higher the reflectivity of the plane mirror is, the more times light is reflected, which results in the stronger coherent superposition effect of the optical field in the cavity, the narrower the optical mode output by the resonant cavity, and the higher the sensing resolution. The existing fabry perot cavity can be divided into an optical fiber fabry perot cavity and a plane reflector fabry perot cavity according to different structures. Although the optical fiber fabry perot cavity has the advantages of being easy to manufacture and integrate, the optical fiber fabry perot cavity generally has a lower quality factor and a larger mode line width due to lower reflectivity and coupling efficiency of an optical fiber end face, so that the detection capability of a weak signal is limited. Compared with an optical fiber Fabry Perot cavity, the cavity mirror of the plane reflector Fabry Perot cavity can realize high reflectivity, so that the plane reflector Fabry Perot cavity is ensured to have high quality factors and extremely small mode spectrum line widths, and has a lower detection limit.
The plane reflector Fabry-Perot cavity sensor can be divided into an active cavity and a passive cavity according to whether a substance to be detected has a fluorescent mark or not. For an active cavity, an analyte with a fluorescent label is mainly placed in the cavity, and a fluorescent signal is converted into a laser signal through optical gain amplification, so that the sensing resolution is improved. However, the detection of fluorescently labeled molecules requires specific treatment or modification of the analyte in advance, increasing the complexity and cost of analyte detection. Fluorescent marker molecules also have an effect on the activity of biomolecules. In addition, the fluorescent molecule requires a specific wavelength of pump light for excitation, which results in its use only in a specific wavelength band, limiting its practical application. Passive cavities can effectively solve the above problems, but it is often difficult to achieve high efficiency coupling of incident light. In addition, non-parallel aligned cavity mirrors can introduce multiple reflection losses, resulting in a dramatic drop in the quality factor of the microcavity. Thus, the broadened resonant modes can reduce the detection limit of the sensor. Due to the lack of lateral mode confinement, the fabry perot cavity has a large mode volume and a small optical energy density, resulting in a decrease in the intensity of the light and material interaction.
In addition, the conventional biomolecule detection technology requires specific modification of molecules on the surface of the resonant cavity, which increases the complexity of the sensor and introduces additional uncertain factors, thereby making biomolecule detection based on the optical microcavity structure difficult to be applied to practice.
Disclosure of Invention
An object of the utility model is to provide a can enough keep high quality factor, low mode volume, high sensitivity, no mark sensing, can avoid the microbubble integrated forming method fabry perot structure resonant cavity sensor chip of the surface modification technology complicated in biomolecule testing process again.
The utility model provides a micro-bubble integrated forming method Fabry-Perot structure resonant cavity sensing chip, the structure of which is shown in figure 1; the method comprises the following steps: two plane reflectors, one or more quartz micro-tubes and two square quartz tubes, wherein the middle parts of the two plane reflectors are provided with hollow micro-bubbles with different numbers; the two plane reflectors are arranged in parallel up and down, and the two square quartz tubes are same in height and are arranged at the edges of the left side and the right side of the two plane reflectors in parallel; the two plane reflectors are respectively bonded and fixed with the upper and lower surfaces of the two square quartz tubes, and the two plane reflectors are ensured to be highly parallel; the hollow quartz micro-bubble of the micro-tube is arranged between the two plane reflectors and in the middle of the two square quartz tubes, the upper surface and the lower surface of the hollow quartz micro-bubble are respectively kept parallel to the two plane reflectors, and the two ends of the micro-tube are bonded and fixed with the plane reflectors to form a micro-bubble integrated forming type Brillouin structure resonant cavity sensing chip;
the plane reflector takes a quartz plate as a substrate, and the surface of the plane reflector is respectively plated with a metal film with specific reflectivity or a plurality of layers of medium films with high and low refractive indexes which are periodically and crossly arranged.
The reflection wave band of the plane reflector is from near ultraviolet light to mid-infrared light.
The square quartz tube is bonded with the plane reflector, and the two ends of the microtube are bonded with the plane reflector by ultraviolet glue.
Wherein, the port of the microtube prepared with the hollow structure quartz microbubbles can be combined with a microfluidic system.
In the utility model, the height of the square quartz tube is 100-1000 μm, and the height of the square quartz tube is slightly larger than the diameter of the micro-bubble.
In the utility model, the diameter of the quartz micro-bubble is 100-1000 μm, and the wall thickness is 5-15 μm.
In the present invention, the hollow microbubbles prepared on the quartz microtubes have an elliptical shape, and the number of the hollow microbubbles is at least 3, for example, 3 to 5.
The utility model discloses in, quartz microtube both ends have the opening, can combine with micro-fluidic system.
In the utility model, the surface of one side of the plane reflector is plated with a metal film or a dielectric film with specific reflectivity, wherein the reflectivity is 80-100%.
In the utility model, the plane reflector substrate is a transparent quartz plate with a thickness of 300-500 μm.
The sensor chip of the utility model can be used for detecting physical parameters, chemical molecules (including gas and liquid) and other analytes. During specific detection, the concentration of chemical molecules is rapidly detected in real time through an optical means according to the characteristic that the refractive index of a detection object changes along with the concentration, so that the function of rapidly detecting chemical solution in real time is realized.
The sensor of the utility model can be used for detecting analytes such as biomolecules. During detection, the concentration of the biomolecule is detected in real time by an optical means according to the change characteristic of the refractive index caused by specific binding of the biomolecule to be detected (specific binding of the probe protein and the corresponding antibody protein), so as to realize the specific detection function of the unmarked biomolecule.
The utility model provides a sensing chip, its preparation flow is:
(1) Selecting a section of quartz micro-tube, and preparing at least three quartz micro-bubbles with the diameter close to that of the quartz micro-tube by a melting blowing mode;
(2) Uniformly coating a layer of ultraviolet glue on the lower surface of a square quartz tube, and horizontally laying the ultraviolet glue on the surface of a plane reflector, wherein the surface of the plane reflector plated with a reflecting film is bonded with the square tube by using the ultraviolet glue;
(3) Adjusting the micro-bubbles to be parallel to the plane reflector by using a five-dimensional adjusting frame, and fixing two ends of the micro-bubbles on the surface of the plane reflector;
(4) And coating a layer of ultraviolet glue on the upper surface of the square quartz tube, and laying the other reflector on the upper surface of the square quartz tube, wherein the surface of the reflector plated with the reflecting film is bonded with the square tube.
The utility model discloses an above-mentioned sensor chip can be used to detecting system such as biomolecule, and it is shown with reference to fig. 3, and this detecting system includes: the device comprises a tunable laser (or a super-continuum spectrum light source) 5, a beam collimator 6, a beam splitter 7, a focusing objective 8, a micro-bubble integrated forming type Fabry-Perot structure resonant cavity sensing chip 9, a focusing objective 10, a focusing objective or lens 11 and a photoelectric detector (or a spectrum analyzer) 12 which are connected in sequence to form a sensing optical path; the device also comprises a focusing objective lens or lens 13 and a CCD imaging device 14 which are sequentially connected with the beam splitter 7 to form an imaging light path; wherein:
a tunable laser (or supercontinuum light source) 5 is used for emitting detection laser; transmitting the output laser light of the laser to a beam collimator 6 by a single mode fiber; the beam collimator is used for collimating the divergent laser output by the optical fiber into parallel light; the beam splitter 7 is used for transmitting the image formed by the focusing objective lens to the CCD imaging device; the focusing objective lens 8 is used for coupling collimated laser to a micro-bubble integrated forming type Fabry-Perot structure resonant cavity sensing chip 9, and is also used for collecting output light of the sensing chip and imaging the sensing chip; two ends of each quartz microbubble in the resonant cavity sensing chip 9 with the microbubble integrated forming method are provided with openings, one end of each quartz microbubble is connected with a micro-fluidic system such as an injector, an injection pump and the like through a Teflon tube, and the other end of each quartz microbubble is connected with an analyte to be detected through the Teflon tube; the output optical signal collected by the focusing objective lens 10 is fully collected by the large-core optical fiber bundle and is transmitted to a photoelectric detector (or a spectrum analyzer) 12; the photodetector (or spectrum analyzer) 12 receives the output optical signal, converts the output optical signal into an electrical signal and transmits the electrical signal to the oscilloscope (or directly analyzes the output spectrum); the oscilloscope is used for displaying the emergent spectral signals collected by the photoelectric detector; the CCD imaging device 14 is used for imaging the microbubble integrated Fabry-Perot structure resonant cavity sensing chip; the microfluidic system comprises an injection pump, an injector and a Teflon tube and is used for pumping the analyte to be detected into the quartz microbubbles; the test tube is used for storing the analyte to be detected.
The detection process of the detection system comprises the steps of starting a tunable laser (or a super-continuum spectrum light source) and emitting detection laser; coupling incident laser to a micro-bubble area of the sensing chip by using a CCD imaging system and a five-dimensional adjusting frame; the method comprises the following steps of (1) pumping an analyte to be detected into microbubbles by using a micro-fluidic system (comprising an injection pump, an injector and a Teflon tube), wherein one end of the micro-fluidic system is connected with one port of the quartz microbubbles, and the other port of the quartz microbubbles is connected with a test tube filled with the analyte to be detected through the Teflon tube; the signal is collected by a photoelectric detector (or a spectrum analyzer) and displayed and the data is stored by an oscilloscope.
The utility model discloses the technical principle who realizes does: the upper surface and the lower surface of the plane reflector and the square tube are bonded, the parallelism of the two plane reflectors is guaranteed, extra optical loss caused by the fact that the two plane reflectors cannot be parallel to each other is further reduced through the integrated micro-bubbles, and meanwhile a micro-flow channel is naturally integrated.
The utility model discloses in, because the lens effect of cavity microbubble self, with the optical axis position of the effective restraint of intracavity light field in the microbubble region, the mode volume that reduces resonant mode that not only can be very big, increase light energy density, can also effectually overcome because the extra optical loss of the unable assurance highly parallel introduction of two-sided speculum, increase the quality factor of this sensor chip, because high quality factor and high sensitivity, the detectability of this sensor chip to weak signal has been strengthened, make its quality factor (quality factor = Q sensitivity) be higher than an order of magnitude of traditional fabry perot resonant cavity sensor at least.
The utility model has the characteristics of as follows:
(1) The utility model discloses with the important difference of conventional fabry perot resonant cavity sensor. In the utility model, the quartz micro-bubble is integrated in the conventional Fabry Perot resonant cavity, and due to the lens effect of the quartz micro-bubble, the mode volume of the resonant mode is reduced, the strength of the interaction of optical substances is enhanced, and the quality factor of the Fabry Perot resonant cavity is greatly improved;
(2) The utility model provides a microbubble integrated forming method Fabry-Perot structure resonant cavity sensing chip, which overcomes the extra optical loss caused by the fact that two plane reflectors can not keep highly parallel, and greatly improves the quality factor of the sensing chip;
(3) The quartz microbubbles integrated in the utility model are a microflow channel, so that an analyte transmission channel does not need to be additionally manufactured;
(4) The biomolecule detection mechanism realized by the utility model is that the specific combination between biomolecules leads to larger refractive index change, the process does not need to mark the biomolecules, and does not need to modify chemical molecules inside quartz microbubbles, thereby reducing the complexity of biomolecule detection;
(5) The utility model provides a microbubble integrated forming method fabry perot structure resonant cavity sensing chip, because the sensor has high quality factor, can realize the detection to the biochemical molecule (protein, DNA, chemical gas, bacterial virus) of ultra-low concentration, trace volume, weak physical quantity (temperature, pressure, refracting index) signal;
(6) The sensing chip provided by the utility model can adopt different optical sensing wave bands according to the actual detection reagent requirements;
(7) The sensing chip provided by the utility model has simple preparation method, easy operation and repeated use;
(8) The utility model discloses in the sensor chip test method that provides simple, and not high to test system's requirement, the practical application of being convenient for.
Drawings
Fig. 1 is a structural diagram of a resonant cavity sensing chip with a microbubble integrated fabry perot structure according to the present invention.
Fig. 2 is a schematic diagram of a preparation method of a resonant cavity sensing chip based on the micro-bubble aggregation forming method fabry perot structure of the present invention.
Fig. 3 is a schematic diagram of a detection system based on the micro-bubble aggregation forming method fabry perot structure resonant cavity sensing chip of the present invention.
Fig. 4 is a diagram of a transmission spectrum of a resonant cavity sensing chip based on the micro-bubble aggregation forming method fabry perot structure of the present invention.
Fig. 5 is an enlarged view based on fig. 4.
Fig. 6 is a graphical representation of the sensitivity test result of the resonant cavity sensing chip based on the micro-bubble aggregation forming method fabry perot structure of the present invention.
Reference numbers in the figures: 1 is a quartz plate substrate; 2 is a reflecting film of a specific wave band; 3 is quartz microbubble; 4 is a square quartz tube; 5 is a tunable laser (or a super-continuum spectrum light source); 6 is a beam collimator; 7 is a beam splitter; 8 is a focusing objective lens; 9 is a microbubble integrated Fabry Perot structure resonant cavity sensing chip; 10 is a focusing objective lens; 11 is a focusing objective lens or lens; 12 is a photoelectric detector (or a spectrum analyzer); 13 is a focusing objective or lens; 14 is a CCD imaging device; 15 is a sensing optical path; and 16 is an imaging optical path.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples, but the present invention is not limited to these examples.
Example 1
In this embodiment, a resonant cavity sensing chip (see fig. 1) with a micro-bubble integrated forming method and a fabry perot structure specifically includes: two plane reflectors plated with specific waveband reflecting films, the reflectivity of the reflectors is 90%, and the thickness of the quartz plate substrate 1 is 500 micrometers; the height of the square quartz tube 4 is 320 mu m, and the height of the square quartz tube is close to the diameter of the micro-bubble; a microtube 3 prepared with quartz microbubbles having a diameter of 300 μm and a wall thickness of 10 μm, the microtube having openings at both ends; the square quartz tube and the surface of the plane reflector plated with the film are bonded through ultraviolet glue; two ends of the microtube prepared with the quartz microbubbles are fixed in the middle of the plane reflector through ultraviolet glue.
In the present apparatus, a method for preparing a resonant cavity sensing chip with a micro-bubble aggregation forming method fabry perot structure is shown in fig. 2, and includes:
(1) Selecting a section of quartz microtube, and preparing one or more microbubbles with the diameter close to the size of the microbubble by a melting blowing mode;
(2) Uniformly coating a layer of ultraviolet glue on the lower surface of a square quartz tube, and horizontally laying the ultraviolet glue on the surface of a plane reflector, wherein the surface of the plane reflector plated with a reflecting film is bonded with the square quartz tube by using the ultraviolet glue, as shown in fig. 2 (b);
(3) Adjusting the quartz micro-bubble to be parallel to the plane mirror by using a five-dimensional adjusting frame, and fixing two ends of the quartz micro-bubble on the surface of the plane mirror, as shown in fig. 2 (c);
(4) A layer of ultraviolet glue is coated on the upper surface of the square quartz tube, and another reflector is laid on the upper surface of the square quartz tube, wherein the side of the reflector plated with the reflecting film is bonded with the square tube, as shown in fig. 2 (d).
In the device, when laser is incident on the sensing chip, part of the laser can enter the Fabry-Perot cavity through the mirror surface, and only light which simultaneously meets the cavity resonance condition and light which is transmitted in the direction parallel to the optical axis can generate interference and have long phase due to the reflection of the two plane reflectors, so that stable resonance is formed; for light that cannot satisfy the resonance condition, the final output light is 0 due to interference cancellation; for light with a certain included angle with the optical axis direction, the light is reflected out of the cavity for multiple times by the mirror surface and cannot form resonance. The resonance conditions of the fabry perot cavity are:
wherein,nis the effective index of refraction within the cavity,Lthe length of the cavity is taken as the length of the cavity,mis a longitudinal modulus, is a positive integer,λis the resonant wavelength. As can be seen from equation 1, when the refractive index is increasednWhen the change occurs, the resonant wavelength of the cavity correspondingly changes for the same longitudinal modulus. For chemical liquids with different concentrations, the refractive index of the chemical liquids generally changes with the change of the concentration, so that when the chemical liquids with different concentrations are introduced into the microbubbles, the wavelength of the resonance mode correspondingly moves, and the analyte solution with specific concentration can be tested by detecting the movement of the wavelength, thereby realizing chemical molecule sensing.
Example 2
In this embodiment, based on the parameters of embodiment 1, the transmission spectrum test of the sensor chip is performed, and the specific process is as follows: combining the micro-bubble integrated forming method Brilparo structure resonant cavity sensing chip prepared in the embodiment 1 with a microfluidic technology, namely combining one port of a micro-tube with micro-bubbles with an injector and an injection pump through a Teflon tube to realize the extraction of liquid to be detected; the other end of the micro-tube with the micro-bubbles is combined with the liquid to be detected through a Teflon tube.
In the present apparatus, a test system is shown in fig. 3. Starting a tunable laser (or a super-continuum spectrum light source) to emit incident laser; after being collimated by a collimator, incident laser firstly passes through a beam splitter, then is focused on the surface of a sensing chip by using a focusing objective lens, and is coupled to a microbubble region of the sensing chip by using a CCD imaging system and a five-dimensional adjusting frame; the micro-fluidic system (comprising an injection pump, an injector and a Teflon tube) is used for pumping the analyte to be detected into the micro-bubbles; the transmission spectrum of the Fabry-Perot structure resonant cavity sensing chip with the micro-bubble aggregation forming method is shown in FIG. 4. According to formula 1 in example 1, wavelengths satisfying the resonance condition produce stable oscillation, showing sharp peaks in the transmission spectrum; meanwhile, the resonant wavelengths are different for different longitudinal moduli, so that a series of approximately periodically arranged wave peaks are finally formed in the transmission spectrum. The distance between two adjacent resonant modes is the Free Spectral Range (FSR), which can be written as:
as shown in fig. 4, the free spectral range of the transmission spectrum of the test sensor chip is 1.71 nm. FIG. 5 is an enlarged view of FIG. 4, the quality factor of the sensor chip is 10 by Lorentzian fitting of resonance modes in the spectrum 5 . The quality factor of the resonant cavity is related to the spectral line width of the resonant mode, and can be written as:
where Δ λ is the full width at half maximum of the spectrum of the resonant mode. Through the formula 3, the larger the quality factor of the sensing chip is, the narrower the spectral line width of the resonance mode is, the higher the corresponding resolution of the sensor is, and the easier the detection of the weak signal is.
Example 3
In this embodiment, the sensitivity of the sensor chip is tested based on the parameters of the sensor chip in embodiment 1 and the test system and the test method in embodiment 2. The specific process is as follows: based on the test system of example 2, dimethyl sulfoxide (DMSO) solutions with concentrations of 0-1% were respectively introduced into the microbubbles, and the shift of the resonance mode in the spectrum was observed in real time using an oscilloscope, as shown in fig. 6 (a). As the concentration of the dmso solution increased, the corresponding resonant wavelength red-shifted. The peak value of the resonance mode was extracted to obtain a curve showing the variation of the resonance wavelength with the refractive index as shown in fig. 6 (b), and the sensitivity of the sensor chip was found to be 594 nm/RIU by linear fitting.
In the device, specificity detection of biomolecules can be realized while avoiding a complicated surface chemical modification process. Specific binding of biomolecules (specific binding of probe proteins and corresponding antibody proteins) can cause a large refractive index change of a corresponding biomolecule solution, and as the concentration of the probe proteins changes, the refractive index of the solution changes, so that the resonance wavelength is red-shifted. The probe protein concentration can be detected by detecting the shift of the resonance wavelength.
Claims (6)
1. A micro-bubble integrated forming method Fabry-Perot structure resonant cavity sensing chip is characterized by comprising: two plane reflectors, one or more quartz micro-tubes and two square quartz tubes, wherein the middle parts of the two plane reflectors are provided with hollow micro-bubbles with different numbers; the two plane reflectors are arranged in parallel up and down, and the two square quartz tubes are same in height and are arranged at the edges of the left side and the right side of the two plane reflectors in parallel; the two plane reflectors are respectively bonded and fixed with the upper and lower surfaces of the two square quartz tubes, and the two reflectors are ensured to be parallel; the hollow quartz microbubbles of the microtubes are arranged between the two plane reflectors and in the middle of the two square quartz tubes, the upper surface and the lower surface of the hollow quartz microbubbles are respectively kept parallel to the two plane reflectors, and the two ends of the microtubes are bonded and fixed with the plane reflectors to form a microbubble integrated forming type Fabry-Perot structure resonant cavity sensing chip;
the plane reflector takes a quartz plate as a substrate, and the surface of the plane reflector is respectively plated with a metal film with specific reflectivity or a plurality of layers of medium films with high and low refractive indexes which are periodically and crossly arranged.
2. The sensing chip of claim 1, wherein the reflection band of the plane mirror is from near ultraviolet light to mid-infrared light.
3. The micro-bubble aggregation molding Bripajo structure resonant cavity sensing chip as recited in claim 1, wherein the square quartz tube has a height of 100-1000 μm.
4. The resonant cavity sensing chip with the micro-bubble integrated forming method Bripaul structure as claimed in claim 1, wherein the diameter of the quartz micro-bubble is not more than 100-1000 μm, and the wall thickness is not more than 5-15 μm.
5. The resonant cavity sensing chip with the micro-bubble integrated forming method Bripaul structure as claimed in claim 1, wherein the hollow micro-bubbles prepared on the quartz microtube are elliptical in shape and 3-5 in number.
6. The resonant cavity sensing chip with the micro-bubble aggregation forming method Brilparo structure as recited in claim 1, wherein a metal film or a dielectric film is coated on a single-side surface of the plane mirror, and the reflectivity ranges from 80% to 100%.
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