CN217738171U

CN217738171U - Rotary displacement sensor structure

Info

Publication number: CN217738171U
Application number: CN202221003576.XU
Authority: CN
Inventors: 沈敏敏; 张宇; 马诚杰; 王城程
Original assignee: Yisheng Scientific Instrument Jiaxing Co ltd
Current assignee: Yisheng Scientific Instrument Jiaxing Co ltd
Priority date: 2022-04-26
Filing date: 2022-04-26
Publication date: 2022-11-04
Anticipated expiration: 2032-04-26

Abstract

The utility model discloses a rotary displacement sensor structure, which aims to solve the problems that the prior rotary angle measurement adopts a circular grating encoder, and because the rotary table of a piezoelectric ceramic rotary motor has small size, the grating encoder has a complex structure and can not be flexibly assembled and can not work in an ultrahigh vacuum environment, the rotary displacement sensor structure comprises a fixed base with an opening at the middle part of the upper end and a piezoelectric ceramic rotary motor arranged in the opening position of the fixed base, wherein the output end of the piezoelectric ceramic rotary motor extends to the outer cavity of the fixed base and is provided with a rotary table board through a fixing bolt; the top end of the fixed base is provided with an annular groove, a rotary displacement sensor is arranged in the annular groove, and the rotary displacement sensor comprises an electric brush part fixed at the bottom end of the rotary table top and a resistance part arranged in the annular groove and matched with the electric brush part. The utility model discloses be particularly useful for the accurate measurement of rotation angle offset, have higher social use value and application prospect.

Description

Rotary displacement sensor structure

Technical Field

The utility model relates to a sensor technical field, concretely relates to rotary displacement sensor structure.

Background

The precision of the prior piezoelectric ceramic motor reaches the nanometer level, has the advantages of small size, large output acting force, direct drive, no return difference and the like, and has two versions of linear type and rotary type. The piezoelectric ceramic rotating motor can be widely used in occasions with extremely high requirements on high-speed dynamic performance and positioning accuracy, the angular displacement of each step of angular rotation is about one ten-thousandth of radian, and extremely small angular deflection is difficult to measure by means of conventional methods.

The existing rotation angle measurement generally adopts a circular grating encoder which mainly comprises a reading head and a grating code disc, when a rotating platform rotates, the reading head and the grating code disc move relatively, an optical signal is replaced by the reading head to be an electric signal and is output to an acquisition system to calculate the angle offset, the rotating platform of the piezoelectric ceramic rotating motor is small in size, the structure of the grating encoder is complex and cannot be flexibly assembled, meanwhile, the grating encoder cannot work in an ultrahigh vacuum environment, the price is high, and the purchase cost can also be increased. To this end, we propose a rotary displacement sensor structure.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve or at least alleviate the problem that exists among the prior art.

The utility model provides a rotary displacement sensor structure, which comprises a fixed base with an opening at the middle part of the upper end and a piezoelectric ceramic rotary motor arranged in the opening position of the fixed base, wherein the output end of the piezoelectric ceramic rotary motor extends to the outer cavity of the fixed base and is provided with a rotary table board through a fixed bolt;

the rotary displacement sensor comprises an electric brush part fixed at the bottom end of the rotary table top and a resistor part arranged in the annular groove and matched with the electric brush part to determine the angle offset of the rotary table top through partial pressure change.

Optionally, the resistor part comprises an alumina substrate fixed on the bottom of the annular groove, and a linear carbon film resistor and a zero resistance carbon film resistor which are nested on the alumina substrate, wherein the linear carbon film resistor and the zero resistance carbon film resistor are in an unclosed annular structure, two ends of the linear carbon film resistor are respectively connected with a first bonding pad and a third bonding pad, and one end of the zero resistance carbon film resistor is connected with a second bonding pad;

the first bonding pad and the third bonding pad are respectively connected with two ends of a constant voltage source through first connecting wires, and the first bonding pad and the second bonding pad are respectively connected with two ends of a voltmeter through second connecting wires.

Optionally, the brush part comprises a brush body fixed at the bottom end of the rotary table top and provided with a first support leg and a second support leg, the second support leg is in contact with the linear carbon film resistor, and the first support leg is in contact with the zero-resistance carbon film resistor.

Optionally, an insulating gasket is disposed between the brush body and the rotating table.

Optionally, a wire leading-out hole for leading out the first connection wire and the second connection wire is started on the fixing base.

Optionally, the outer ends of the first connecting wire and the second connecting wire are sleeved with a metal shielding net for preventing external signal interference.

Optionally, the brush body is made of flexible beryllium copper.

The utility model discloses mainly possess following beneficial effect:

1. the utility model discloses a unable adjustment base, piezoceramics rotating electrical machines and table surface wholly by the preparation of nonmagnetic material such as titanium, anaerobic copper, can work under 4k-373 k's high temperature and low temperature interval environment, cooperation rotary displacement sensor's setting, rotational positioning precision is high, good adaptation in piezoelectricity revolving stage size, angular offset measurement can reach milliradian rank, and small, and the cost is low, more is fit for super high vacuum and utmost point low temperature environment.

2. The utility model discloses during the actual work, the brush body is fixed and is rotated along with rotating the mesa bottom, the second landing leg and the first landing leg of the brush body fall on linear carbon film resistance and zero resistance value carbon film resistance respectively, when rotating the mesa and driving the brush body and rotate, first pad, resistance value between second pad and the third pad becomes can change, and then make the partial pressure between first pad and the second pad also can change, thereby confirm the angle offset who rotates the mesa through the partial pressure between voltmeter accurate measurement first pad and the second pad.

Drawings

The above features, technical features, advantages and modes of realisation of a rotary displacement sensor structure will be further described in the following, in a clearly understandable manner, with reference to the accompanying drawings, which illustrate preferred embodiments.

FIG. 1 is a schematic view of the three-dimensional mounting structure of the present invention;

FIG. 2 is an exploded view of the three-dimensional mounting structure of the present invention;

fig. 3 is a top view of the structure of the present invention;

fig. 4 is a schematic perspective view of the present invention;

fig. 5 is a schematic diagram of the partial pressure test of the present invention.

In the figure: the rotary table comprises a fixed base 10, an annular groove 101, a piezoelectric ceramic rotary motor 20, a rotary table top 30, a fixing bolt 40, a rotary displacement sensor 50, an alumina substrate 501, a linear carbon film resistor 502, a zero-resistance carbon film resistor 503, a brush body 504, a first leg 505, a second leg 506, a first bonding pad 507, a second bonding pad 508, a third bonding pad 509 and a lead wire leading-out hole 510.

Detailed Description

The invention will be further described with reference to the following figures 1-4 and examples:

example 1

The utility model provides a rotary displacement sensor structure, referring to the attached figures 1-4, comprising a fixed base 10 with an opening at the middle part of the upper end and a piezoelectric ceramic rotary motor 20 arranged in the opening position of the fixed base 10, wherein the output end of the piezoelectric ceramic rotary motor 20 extends to the outer cavity of the fixed base 10 and is provided with a rotary table-board 30 through a fixed bolt 40;

in this embodiment, as shown in fig. 2 to 4, an annular groove 101 is formed at the top end of the fixing base 10, and a rotary displacement sensor 50 for detecting the angular offset of the rotary table top 30 is disposed in the annular groove 101, where the rotary displacement sensor 50 includes an electric brush portion fixed at the bottom end of the rotary table top 30, and a resistor portion disposed in the annular groove 101 and matched with the electric brush portion to determine the angular offset of the rotary table top 30 through a partial pressure change;

in this embodiment, the fixing base 10, the piezoelectric ceramic rotary motor 20, and the rotary table 30 are made of nonmagnetic materials such as titanium and oxygen-free copper, and can work in the high-temperature and low-temperature range environment of 4k-373k, and the rotary displacement sensor 50 is matched, so that the rotary positioning precision is high, the rotary positioning device is well adapted to the size of the piezoelectric rotary table, the angular deviation measurement can reach the milliradian level, and the rotary positioning device is small in size, low in manufacturing cost, and more suitable for ultrahigh vacuum and extremely low-temperature environments.

In this embodiment, as shown in fig. 3-4, the resistor portion includes an alumina substrate 501 fixed on the bottom of the annular groove 101, and a linear carbon film resistor 502 and a zero resistance carbon film resistor 503 nested on the alumina substrate 501, wherein the linear carbon film resistor 502 and the zero resistance carbon film resistor 503 are in an unclosed annular structure, two ends of the linear carbon film resistor 502 are respectively connected with a first pad 507 and a third pad 509, and one end of the zero resistance carbon film resistor 503 is connected with a second pad 508;

the first pad 507 and the third pad 509 are respectively connected to two ends of a constant voltage source through a first connecting wire, in this embodiment, the constant voltage source is selected to be 5V, and the first pad 507 and the second pad 508 are respectively connected to two ends of a voltmeter through a second connecting wire;

the electric brush part comprises an electric brush body 504 which is fixed at the bottom end of the rotating table board 30 and is provided with a first supporting leg 505 and a second supporting leg 506, the electric brush body 504 is made of flexible beryllium copper, an insulating gasket is arranged between the electric brush body 504 and the rotating table board 30, the second supporting leg 506 is in contact with the linear carbon film resistor 502, and the first supporting leg 505 is in contact with the zero-resistance carbon film resistor 503;

in this embodiment, the resistance of the linear carbon film resistor 502 increases linearly with the increase in length, and the entire resistance of the zero-resistance carbon film resistor 503 is approximately 0 regardless of the length; in actual work, the brush body 504 made of flexible beryllium copper is fixed at the bottom end of the rotary table board 30 and rotates with the rotary table board 30, the second leg 506 and the first leg 505 of the brush respectively fall on the linear carbon film resistor 502 and the zero resistance carbon film resistor 503, when the rotary table board 30 drives the brush body 504 to rotate, the resistance values among the first pad 507, the second pad 508 and the third pad 509 change, and further the partial voltage between the first pad 507 and the second pad 508 changes, wherein the principle of the partial voltage test refers to fig. 5, so that the angular offset of the rotary table board 30 is determined by accurately measuring the partial voltage between the first pad 507 and the second pad 508 through a voltmeter.

Example 2

The present embodiment is different from embodiment 1 in that, as shown in fig. 2 to 3, a wire drawing hole 510 for drawing out a first connection wire and a second connection wire is started on the fixing base 10; and the outer end sleeves of the first connecting wire and the second connecting wire are provided with metal shielding nets for preventing external signal interference, so that the interference is reduced, and the accuracy of measured data is ensured.

Meanwhile, in the embodiment, in order to increase the precision of the resistance value test, the external power supply adopts the bridge principle to test, and it can be understood that the bridge is a measuring circuit with high sensitivity and accuracy.

It can be understood that the rotary displacement sensor structure of the embodiment can be well adapted to the one-dimensional displacement table and the tilting table, and the applicability of the rotary displacement sensor structure is expanded.

Other undescribed structures refer to example 1.

According to the rotary displacement sensor structure of the present invention, the resistance of the linear carbon film resistor 502 increases linearly with the increase of the length, and the whole resistance of the zero resistance carbon film resistor 503 is approximately 0 regardless of the length; during actual work, the brush body 504 made of flexible beryllium copper is fixed at the bottom end of the rotary table board 30 and rotates with the rotary table board 30, and two support legs of the brush: the second leg 506 and the first leg 505 are respectively placed on the linear carbon film resistor 502 and the zero resistance carbon film resistor 503, when the rotating table 30 drives the electric brush body 504 to rotate, the resistance values among the first pad 507, the second pad 508 and the third pad 509 change, and further the partial pressure between the first pad 507 and the second pad 508 changes, wherein the partial pressure test principle refers to fig. 5, so that the angular offset of the rotating table 30 is determined by accurately measuring the partial pressure between the first pad 507 and the second pad 508 through a voltmeter.

In the description of the present invention, it should be noted that the terms "first", "second" and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present invention, and are not intended to limit the technical solutions of the present invention, and the protection scope of the present invention is not limited thereto, although the present invention is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: those skilled in the art can still make modifications or changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some technical features, within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the embodiments of the present invention, and they should be construed as being included therein. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A rotary displacement sensor structure comprises a fixed base (10) with an opening at the middle part of the upper end and a piezoelectric ceramic rotary motor (20) arranged in the opening position of the fixed base (10), and is characterized in that the output end of the piezoelectric ceramic rotary motor (20) extends to an outer cavity of the fixed base (10) and is provided with a rotary table top (30) through a fixed bolt (40);

annular groove (101) have been seted up on unable adjustment base (10) top, and be equipped with in annular groove (101) and be used for detecting rotary table face (30) angular offset's rotary displacement sensor (50), rotary displacement sensor (50) including be fixed in rotary table face (30) bottom brush portion, set up in annular groove (101) and with brush portion cooperation is in order to confirm rotary table face (30) angular offset's resistance portion through the partial pressure change.

2. A rotary displacement sensor structure as claimed in claim 1, wherein: the resistor part comprises an alumina substrate (501) fixed on the bottom of the annular groove (101), and a linear carbon film resistor (502) and a zero resistance carbon film resistor (503) which are nested and laid on the alumina substrate (501), the linear carbon film resistor (502) and the zero resistance carbon film resistor (503) are in an unclosed annular structure, two ends of the linear carbon film resistor (502) are respectively connected with a first pad (507) and a third pad (509), and one end of the zero resistance carbon film resistor (503) is connected with a second pad (508);

the first bonding pad (507) and the third bonding pad (509) are respectively connected with two ends of a constant voltage source through first connecting wires, and the first bonding pad (507) and the second bonding pad (508) are respectively connected with two ends of a voltmeter through second connecting wires.

3. A rotary displacement transducer structure as claimed in claim 2, wherein: the electric brush part comprises an electric brush body (504) which is fixed at the bottom end of the rotary table surface (30) and is provided with a first supporting leg (505) and a second supporting leg (506), the second supporting leg (506) is in contact with the linear carbon film resistor (502), and the first supporting leg (505) is in contact with the zero-resistance carbon film resistor (503).

4. A rotary displacement transducer structure as claimed in claim 3, wherein: an insulating gasket is arranged between the electric brush body (504) and the rotary table top (30).

5. A rotary displacement sensor structure as claimed in claim 2, wherein: the fixed base (10) is provided with a lead leading-out hole (510) for leading out a first connecting lead and a second connecting lead.

6. A rotary displacement transducer structure as claimed in claim 5, wherein: the outer end sleeves of the first connecting wire and the second connecting wire are provided with metal shielding nets used for preventing external signal interference.

7. A rotary displacement transducer structure as claimed in claim 3, wherein: the electric brush body (504) is made of flexible beryllium copper.