CN217737592U - Refrigerating system with cold volume uninstallation function - Google Patents

Abstract

The utility model discloses a refrigerating system with cold volume uninstallation function, the cold mode of unloading to current refrigerating system can cause the compressor temperature to rise, lead to the problem of the overheated shut down of compressor, the utility model provides a following technical scheme, including the evaporimeter, condenser and refrigeration circuit, refrigeration circuit is including the flow path that steps up and step down the flow path, the condenser is connected with the evaporimeter through the flow path that steps up and step down the flow path respectively, be provided with the compressor in the step down flow path, set up first interface in the step down flow path between the entry end of compressor and the exit end of evaporimeter, set up the second interface in the flow path that steps up, first interface and second interface communicate jointly and unload the cold return circuit, it unloads the cold expansion valve to be provided with in the cold circuit to unload, it is connected with the both ends of condenser to unload the cold return circuit. When the cold quantity is too high, the redundant refrigerant is opened through the cold unloading expansion valve, and then enters the condenser to absorb heat, so that the redundant cold quantity is released into the condenser.

Description

Refrigerating system with cold volume uninstallation function

Technical Field

The utility model relates to a wafer processing refrigerating system field, more specifically say, it relates to a refrigerating system with cold volume uninstallation function.

Background

The semiconductor wafer needs to accurately control the environmental temperature in the processing and manufacturing process, and because the heat loads generated when abnormal period fluctuation exists in different working machines or production processes are different, the use state under extreme working conditions needs to be considered in the design of the temperature control system, a certain margin is usually reserved in the heat load calculation, and the cold quantity is larger than the actual requirement when the temperature control system is used under normal working conditions, and at the moment, the redundant cold quantity needs to be unloaded to ensure that the temperature fluctuation is within the allowable range.

When the current refrigeration system normally operates, the low-temperature low-pressure gas-liquid mixed refrigerant absorbs heat of cooling circulation liquid in the evaporator, boils and evaporates to become a low-temperature low-pressure gas refrigerant, then the low-temperature low-pressure gas refrigerant passes through the gas-liquid separator, enters the compressor, is compressed into a high-temperature high-pressure gas refrigerant, then enters the condenser, releases heat to the plant water side, becomes a medium-temperature high-pressure liquid refrigerant, is throttled and depressurized, then becomes a low-temperature low-pressure gas-liquid mixed refrigerant, enters the plate heat exchanger again to boil and evaporate heat of the cooling circulation liquid, and completes recirculation.

When the output cold load of the system exceeds the actual requirement, in order to ensure that the temperature fluctuation of the circulating liquid is within the allowable range, the redundant cold energy needs to be unloaded, and part of high-temperature and high-pressure gaseous refrigerant directly enters the evaporator to increase the evaporation pressure so as to increase the evaporation temperature, thereby achieving the aim of unloading the redundant cold energy.

However, the refrigeration unloading method for unloading the high-temperature and high-pressure exhaust gas into the evaporator causes the temperature of the suction side of the compressor to rise, and finally causes the exhaust temperature of the compressor to rise, thereby causing the protective shutdown of the compressor due to the overhigh exhaust temperature. Therefore, there is room for improvement in this way of cooling.

SUMMERY OF THE UTILITY MODEL

Not enough to prior art exists, the utility model aims to provide a refrigerating system with cold volume uninstallation function has the advantage of the influence of having avoided the compressor exhaust high temperature to cause.

In order to achieve the above purpose, the utility model provides a following technical scheme:

the utility model provides a refrigerating system with cold volume uninstallation function, including the evaporimeter, condenser and refrigeration return circuit, the refrigeration return circuit includes pressure boost flow path and step-down flow path, the condenser is connected with the evaporimeter through pressure boost flow path and step-down flow path respectively, be provided with the compressor in the step-down flow path, set up first interface in the step-down flow path between the exit end of the entry end of compressor and evaporimeter, set up the second interface in the pressure boost flow path, first interface and second interface communicate the cold circuit of unloading jointly, be provided with the cold expansion valve of unloading in the cold circuit of unloading, the cold circuit of unloading is connected with the both ends of condenser.

By adopting the technical scheme, the cold discharge loop and the cold discharge expansion valve are arranged, when the cold output is too high, the cold discharge expansion valve is opened, excessive refrigerant can flow into the condenser to absorb the heat of the condenser, so that the cold quantity of the refrigerating system is reduced, the control on the cold output of the refrigerating system is realized, and meanwhile, after the cold quantity is released to the condenser, the heat dissipation capacity of the condenser of the refrigerating system is greatly improved, the refrigerating efficiency of the refrigerating system is more efficient, the energy input is reduced, and the energy conservation and emission reduction are realized.

Further, a liquid viewing window for detecting a state of the refrigerant is provided in the pressure increasing flow path.

By adopting the technical scheme, the liquid viewing window is arranged in the boosting flow path, so that the working personnel can find the abnormal state of the refrigerant in the pipeline at the first time, the overhauling work of the refrigerating system can be carried out by the working personnel at the first time, and the loss is prevented from being further enlarged.

Furthermore, a drying filter for filtering moisture in the refrigerant is arranged in the boosting flow path.

By adopting the technical scheme, the drying filter is arranged in the boosting flow path, so that impurities and moisture in the refrigerant can be filtered, the operation of the refrigeration system is more stable, and the internal pipeline of the refrigeration system is prevented from being frozen.

Further, a refrigeration expansion valve for controlling the flow rate of the refrigerant is provided in the pressure-increasing flow path.

By adopting the technical scheme, the flow of the refrigerant in the boosting flow path can be controlled by arranging the refrigeration expansion valve, so that the output cold quantity of the refrigeration system is further controlled, the cold unloading effect is better, and the control effect of the output cold quantity of the refrigeration system is better.

Further, a high-pressure sensor for detecting the pressure in the pipeline is arranged in the pressure reduction flow path.

By adopting the technical scheme, the pressure change in the pressure reduction flow path can be detected conveniently at the first time, the workers can find the fault and overhaul conveniently at the first time, the economic loss can be further reduced conveniently, and the fault can be prevented from being enlarged.

Further, the condenser comprises a cooling water tank for containing cooling water, and a plurality of plate type heat exchangers connected with the refrigeration loop and the cold unloading loop and used for enhancing the heat exchange efficiency of the refrigerant are arranged in the cooling water tank.

By adopting the technical scheme, the condenser has good cooling effect, can prevent the refrigerant from stably rising in a large quantity, and is beneficial to keeping the refrigerating efficiency of the refrigerating system stable.

Furthermore, the cooling water tank is connected with a circulating water path, and a circulating water pump for providing power is arranged in the circulating water path.

Adopt above-mentioned technical scheme, can keep the cooling water in the cooling water tank to keep low temperature through the circulation water route, help further improving the cooling efficiency of condenser.

To sum up, the utility model discloses following beneficial effect has:

1. the refrigeration system has high efficiency in a refrigeration capacity unloading mode, and the compressor can not be overheated and shut down due to the fact that the temperature of the compressor is greatly increased;

2. the refrigeration system has high refrigeration efficiency, and the refrigeration efficiency does not change greatly along with the running time;

3. the refrigeration system is not easy to break down, and when the fault happens, a worker can conveniently find and check the fault at the first time.

Drawings

Fig. 1 is a schematic view of a two-dimensional pipeline of a refrigeration system with a cooling capacity unloading function according to the present invention.

In the figure: 1. a pressure-increasing flow path; 2. a depressurization flow path; 3. a cold discharge loop; 4. a compressor; 5. An evaporator; 6. a condenser; 7. a refrigeration expansion valve; 8. unloading the cold expansion valve; 9. drying the filter; 10. a liquid viewing lens; 11. a high pressure sensor; 12. a cooling water tank; 13. a plate heat exchanger; 14. a circulating waterway; 15. a circulating water pump; 16. a second interface; 17. a first interface.

Detailed Description

The present invention will be described in detail with reference to the accompanying drawings and embodiments.

The specific embodiments are only for explaining the present invention, and it is not a limitation to the present invention, and those skilled in the art can make modifications to the embodiments without inventive contribution as required after reading the present specification, but all the embodiments are protected by patent law within the scope of the claims of the present invention.

A refrigeration system with a cold unloading function, referring to fig. 1, comprises an evaporator 5, a condenser 6 and a refrigeration loop, wherein the refrigeration loop comprises a pressure increasing flow path 1 and a pressure reducing flow path 2, the condenser 6 is respectively connected with the evaporator 5 through the pressure increasing flow path 1 and the pressure reducing flow path 2, a compressor 4 is arranged in the pressure reducing flow path 2, a first interface 17 is arranged in the pressure reducing flow path 2 between the inlet end of the compressor 4 and the outlet end of the evaporator 5, a second interface 16 is arranged in the pressure increasing flow path 1, the first interface 17 and the second interface 16 are jointly communicated with a cold unloading loop 3, a cold unloading expansion valve 8 is arranged in the cold unloading loop 3, and the cold unloading loop 3 is connected with two ends of the condenser 6.

In particular, with reference to fig. 1, the condenser 6 comprises a cooling water tank 12, in which cooling water tank 12 two plate heat exchangers 13 are arranged, one 13 of which is arranged in the refrigeration circuit and the other 13 of which is arranged in the cold discharge circuit 3. The cooling water tank 12 is filled with cooling water, the cooling water tank 12 is connected to a circulation water path 14, and a circulation water pump 15 for controlling the flow of the cooling water is provided in the circulation water path 14.

Referring to fig. 1, the refrigeration circuit is composed of a pressure-increasing flow path 1 and a pressure-decreasing flow path 2, and the refrigerant in the pipeline flows in the refrigeration circuit to participate in the refrigeration operation. The pressure-increasing flow path 1 is provided with a refrigeration expansion valve 7 for controlling the flow rate of the refrigerant entering the evaporator 5, and the refrigerant can submit the flow rate of the refrigerant entering the evaporator 5 through the refrigeration expansion valve 7 so as to change the heat absorption capacity of the evaporator 5.

Referring to fig. 1, a dry filter 9 is provided in the pressure-increasing flow path 1 at a position near the outlet of the condenser 6, and water in the cooling water tank 12, which may permeate into the pipe, can be effectively removed by the dry filter 9, thereby preventing the entire refrigeration circuit from malfunctioning. The boosting flow path 1 is also provided with a liquid viewing lens 10 for observing the condition of the refrigerant in the pipeline, so that the abnormality of the refrigerant can be found at the first time, and the fault can be eliminated quickly.

Referring to fig. 1, in the pressure reducing flow path 2, a high pressure sensor 11 is disposed at a position close to the outlet of the compressor 4, and the arrangement of the high pressure sensor 11 can effectively detect the flow path operating condition of the pressure reducing flow path 2, thereby facilitating the discovery of a fault at the first time and facilitating the reduction of economic loss caused by the fault.

The working process and principle of the embodiment are as follows:

when the cold output of the refrigerating system is too large and the cold unloading is needed, the cold unloading expansion valve 8 is opened, and the opening degrees of the refrigerating expansion valve 7 and the cold unloading expansion valve 8 are adjusted in real time according to the calculated cold output capacity of the system and the calculated value of the process control symbol, so that the flow of the refrigerant entering the evaporator 5 and the flow of the refrigerant in the cold unloading loop 3 are adjusted. At this time, the surplus part of the refrigerant enters the condenser 6 through the cold unloading loop 3 to absorb the heat emitted by the refrigerant in the refrigerating loop, so that the surplus cold is released into the cooling water tank 12. The cold discharging mode can not cause the temperature rise of the suction side of the compressor 4, and avoids the automatic stop of the compressor 4 caused by the overheating of the compressor 4 due to the overhigh exhaust temperature of the compressor 4.

It is above only the utility model discloses a preferred embodiment, the utility model discloses a scope of protection not only limits in above-mentioned embodiment, and the fan belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims (7)

1. A refrigeration system with a cold capacity unloading function, comprising an evaporator (5), a condenser (6) and a refrigeration circuit, characterized in that: the refrigeration circuit comprises a boosting flow path (1) and a pressure reducing flow path (2), the condenser (6) is connected with the evaporator (5) through the boosting flow path (1) and the pressure reducing flow path (2) respectively, a compressor (4) is arranged in the pressure reducing flow path (2), a first interface (17) is arranged in the pressure reducing flow path (2) between the inlet end of the compressor (4) and the outlet end of the evaporator (5), a second interface (16) is arranged in the boosting flow path (1), the first interface (17) and the second interface (16) are communicated with the cold unloading circuit (3) together, a cold unloading expansion valve (8) is arranged in the cold unloading circuit (3), and the cold unloading circuit (3) is connected with two ends of the condenser (6).

2. A refrigeration system with refrigeration unloading function according to claim 1, characterized in that: and a liquid viewing window for detecting the state of the refrigerant is arranged in the boosting flow path (1).

3. A refrigeration system with refrigeration unloading function according to claim 1, characterized in that: the pressure boosting flow path (1) is provided with a drying filter (9) for filtering moisture in the refrigerant.

4. A refrigeration system with refrigeration unloading function according to claim 1, characterized in that: and a refrigeration expansion valve (7) for controlling the flow of the refrigerant is arranged in the boosting flow path (1).

5. A refrigeration system with refrigeration unloading function according to claim 1, characterized in that: and a high-pressure sensor (11) for detecting the pressure in the pipeline is arranged in the pressure reduction flow path (2).

6. A refrigeration system with refrigeration unloading function according to claim 1, characterized in that: the condenser (6) comprises a cooling water tank (12) used for containing cooling water, and a plurality of plate type heat exchangers (13) which are connected with the refrigeration loop and the cold unloading loop (3) and used for enhancing the heat exchange efficiency of the refrigerant are arranged in the cooling water tank (12).

7. A refrigeration system with refrigeration unloading function according to claim 6, characterized in that: the cooling water tank (12) is connected with a circulating water path (14), and a circulating water pump (15) for providing power is arranged in the circulating water path (14).

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