CN217708645U

CN217708645U - Hoisting mechanical arm

Info

Publication number: CN217708645U
Application number: CN202221209058.3U
Authority: CN
Inventors: 苏宜龙; 陈妙娟
Original assignee: Advanced Micro Fabrication Equipment Inc Shanghai
Current assignee: Advanced Micro Fabrication Equipment Inc Shanghai
Priority date: 2022-05-11
Filing date: 2022-05-11
Publication date: 2022-11-01
Anticipated expiration: 2032-05-11

Abstract

The utility model discloses a hoisting mechanical arm, which is arranged on a plasma etching device; the hoisting mechanical arm comprises a translation device and a hoisting device; one end of the lifting device is connected with one end of the translation device, the other end of the translation device is connected with the plasma etching equipment, and a part to be hoisted is arranged at the other end of the lifting device; the hoisting device drives the part to be hoisted to move in the vertical direction; the translation device drives the part to be hoisted to move on the horizontal plane through the hoisting device. The invention can be arranged on plasma etching equipment, is convenient for dismounting the part to be hoisted and reduces the use risk caused by inconvenient operation.

Description

Hoisting mechanical arm

Technical Field

The utility model relates to an arm technical field, concretely relates to hoist and mount arm.

Background

The existing plasma etching equipment needs to lift a part to be lifted in the using process, a crane needs to be matched for lifting operation through the existing mechanical arm, and the crane can keep the stability of the existing mechanical arm in a load bearing state.

However, since the crane is bulky, in an FAB (semiconductor manufacturing plant), the use of such a tool as an auxiliary device increases the occupied space and the FAB cost, and further, in order to increase the stability of the crane, a counterweight or the like needs to be attached to the crane, which greatly increases the weight of the crane.

SUMMERY OF THE UTILITY MODEL

In order to solve the problem that exists among the above-mentioned technique, the utility model provides a hoist and mount arm can install on plasma etching equipment, is convenient for treat the dismantlement of hoist and mount part, reduces the use risk because of the inconvenient bringing of operation.

The utility model provides a hoist and mount arm, this hoist and mount arm are used for installing on plasma etching equipment, include: a translation device and a hoisting device; one end of the lifting device is connected with one end of the translation device, the other end of the translation device is connected with the plasma etching equipment, and a part to be hoisted is arranged at the other end of the lifting device; the hoisting device drives the part to be hoisted to move in the vertical direction; the translation device enables the part to be hoisted to move on the horizontal plane through the hoisting device.

Optionally, the translation device comprises a first translation arm and a first rotation structure connected to one end of the first translation arm; the other end of the first translation arm is connected with and mounted with the hoisting device, and the first translation arm can rotate on the horizontal plane around the first rotating structure.

Optionally, the translation device further comprises a second translation arm and a second rotation structure connected to one end of the second translation arm; the other end of the second translation arm is fixedly connected with the first rotating structure, and the second translation arm can rotate on a horizontal plane around the second rotating structure.

Optionally, the translation device further includes at least two second translation arms and at least two second rotation structures, which are sequentially arranged; two adjacent second translation arms are connected through the second rotating structure; among the at least two second translation arms, one of the second translation arms at the first lateral end of the translation device is fixedly connected with the first rotating structure, and the other of the second translation arms at the second lateral end of the translation device is connected with the other of the second rotating structures; each of the second translating arms is rotatable in a horizontal plane about a second rotating structure connected thereto.

Optionally, the second translation arm is a hollow structure.

Optionally, a positioning structure is disposed on the first rotating structure and/or the second rotating structure.

Optionally, the hoisting mechanical arm further comprises a base; the translation device is installed on the plasma etching equipment through the base.

Optionally, the second rotating structure is mounted on the plasma etching apparatus through the susceptor.

Optionally, one of the second rotating structures at the second lateral end of the translation device is mounted on the plasma etching apparatus through the susceptor.

Optionally, the hoisting device comprises a support structure, a drum, a rope body, a fixed pulley and a third driving mechanism; one end of the supporting structure is connected with the first translation arm, and the other end of the supporting structure is provided with a fixed pulley; the third driving mechanism is arranged on the first translation arm, and the output end of the third driving mechanism is connected with the drum wheel; one end of the rope body is fixedly wound on the drum wheel, and the other end of the rope body is wound on the fixed pulley and then is connected with a part to be hoisted; and the third driving mechanism drives the drum wheel to rotate to drive the part to be hoisted on the other end of the rope body to ascend or descend.

Optionally, the third driving mechanism is a manual third driving mechanism and/or an electric third driving mechanism.

Optionally, a dust cover is disposed on the third driving mechanism.

Optionally, a self-locking mechanism is arranged on the third driving mechanism.

Optionally, the support structure comprises a plurality of connection frames connected by fasteners.

Optionally, the drum, and/or the fixed pulley, and/or the rope body are of a non-metallic material.

Optionally, the first translation arm, the second translation arm and/or the support structure are aluminum alloy material.

The utility model provides a technical scheme includes following beneficial effect at least:

(1) The hoisting mechanical arm in the utility model is directly installed on the plasma etching equipment, can be directly operated on the plasma etching equipment, can more easily realize the disassembly of the part to be hoisted, does not need the cooperation of multiple persons, reduces the labor cost and reduces the use risk caused by inconvenient operation;

(2) The hoisting mechanical arm in the utility model is directly installed on the plasma etching equipment, and the corresponding hoisting car, the configurator and the like do not need to be matched with the hoisting mechanical arm, so that the physical structure is simplified, and the volume of the hoisting mechanical arm is reduced;

(3) The utility model discloses only need for this hoist and mount arm and plasma etching equipment design be used for the switching support the base, can realize this hoist and mount arm and plasma etching equipment's combination, the hoist and mount arm in the utility model has fine compatibility;

(4) The utility model provides a first translation arm, second translation arm and bearing structure isotructure are the aluminum alloy, and after the hoist and mount arm was used in plasma etching equipment, can not bring metal contaminant such as Fe, ni and Gr for plasma etching equipment, just can not influence plasma etching equipment's normal work yet.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention as claimed.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a schematic structural view of a hoisting mechanical arm of the present invention;

fig. 2 is a schematic structural diagram of a third driving mechanism of the present invention.

Detailed Description

Embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While embodiments of the present invention are illustrated in the accompanying drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in this specification and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and/or" as used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items.

It should be understood that although the terms "first," "second," "third," etc. may be used herein to describe various information, these information should not be limited to these terms. These terms are only used to distinguish one type of information from another. For example, the first information may also be referred to as second information, and similarly, the second information may also be referred to as first information, without departing from the scope of the present invention. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

Fig. 1 is the utility model relates to a structural schematic diagram of hoist and mount arm.

The embodiment of the invention provides a hoisting mechanical arm arranged on plasma etching equipment, which is used for maintaining the existing plasma etching equipment. Technical personnel can directly operate the hoisting mechanical arm on the existing plasma etching equipment, so that the installation and the disassembly of parts to be hoisted can be more easily realized, the cooperation of multiple persons is not needed, the labor cost is reduced, and the use risk caused by the inconvenience in operation is reduced.

Wherein, the part to be hoisted is a part to be installed or a part to be disassembled. The following description will be given by taking the part to be hoisted as the part to be installed:

in the related art, when a part to be mounted is mounted, cooperation of a plurality of persons is required. Specifically, when a member to be mounted is mounted, one to two persons are required to lift the member to be mounted, and one to two persons are also required to control the member to be mounted so that the member to be mounted does not swing; in addition, if there are accessory parts (e.g., electrical wires, optical fibers, water or gas pipes, etc.) on the parts to be mounted that need to be passed through the chamber of the plasma etching apparatus, one or two people are also required to pull the accessory parts out of the chamber.

The lifting mechanical arm in the embodiment of the invention can complete the whole process of mounting the part to be mounted by only one person without cooperation of multiple persons. Specifically, when the component to be mounted is mounted, the component to be mounted is lifted, then the suspension arm (for example, the first translation arm 111 and the second translation arm 113 in fig. 1) of the lifting mechanical arm is rotated, the component to be mounted is moved to the upper side of the target position, the fixed pin on the hinge (for example, the first rotation structure 112 and the second rotation structure 114 in fig. 1) on the lifting mechanical arm is fixed to prevent the lifting mechanical arm from rotating, and the accessory component on the component to be mounted penetrates out of the cavity of the plasma etching apparatus.

Similarly, when the component to be hoisted is the component to be disassembled, the disassembling process of the component to be disassembled is opposite to the assembling process, but the cooperation of multiple persons is also not needed, and the details are not repeated here.

The hoisting mechanical arm can be directly installed on plasma etching equipment, a corresponding sling cart, a configurator and the like do not need to be matched with the hoisting mechanical arm, the physical structure is simplified, and meanwhile, the size of the hoisting mechanical arm is also reduced.

The hoisting mechanical arm has good compatibility and safety, and the combination of the hoisting mechanical arm and the existing plasma etching equipment can be realized only by designing a corresponding switching support structure for the mechanical arm.

The following describes the technical solution of the embodiments of the present invention in detail with reference to the accompanying drawings.

Referring to fig. 1, an embodiment of the present invention provides a hoisting mechanical arm 100, where the hoisting mechanical arm 100 is installed in a plasma etching apparatus; the hoisting mechanical arm 100 comprises a translation device 110 and a hoisting device 120; one end of the lifting device 120 is connected to one end of the translation device 110, the other end of the translation device 110 is connected to a plasma etching apparatus (not shown in the drawings), the lifting structure 200 is installed at the other end of the lifting device 120, and the lifting structure 200 is used for connecting a component to be lifted. The hoisting device 120 drives the part to be hoisted to move in the vertical direction; the translation device 110 drives the component to be hoisted to move on the horizontal plane through the hoisting device 120.

When the translation device 110 and the lifting device 120 are on the same straight line, the lengths of the translation device and the lifting device are the maximum overall length of the lifting mechanical arm 100; the hoisting mechanical arm 100 can pick up and hoist a part to be hoisted at an arbitrary position within a circle having the maximum overall length of the hoisting mechanical arm 100 as a radius.

Preferably, the hoisting structure 200 is a hook or a shackle; the part to be hoisted can be connected more stably through the lifting hook or the lock catch, so that the part is not easy to separate.

In other embodiments, the other end of the hoisting device can also be directly connected with the part to be hoisted, and the hoisting structure of the embodiment is not arranged, so that the structure of the hoisting mechanical arm in the embodiment is simpler, and the cost is lower.

In this embodiment, the translating device 110 includes a first translating arm 111 and a first rotating structure 112 connected to one end of the first translating arm 111; the other end of the first translation arm 111 is connected to the lifting device 120, and the first translation arm 111 can rotate on the horizontal plane around the first rotating structure 112. When the component to be hoisted needs to be moved on the horizontal plane, the first translation arm 111 can be rotated by the first rotating structure 112, so that the component to be hoisted is moved to the target position.

Alternatively, the first rotating structure 112 is a hinge around which the first translating arm 111 can rotate; the translation device 110 further includes a corresponding first driving mechanism, and the first driving mechanism is configured to drive the first translation arm 111 to rotate relative to the hinge, so as to move the component to be hoisted to the target position.

In this embodiment, the translation device 110 further includes a second translation arm 113 and a second rotation structure 114 connected to one end of the second translation arm 113; the other end of the second translation arm 113 is fixedly connected to the first rotation structure 112, and the second translation arm 113 can rotate on a horizontal plane around the second rotation structure 114. When the part to be hoisted needs to be moved relatively accurately on the horizontal plane, the first translation arm 111 and the second translation arm 113 can be rotated by the first rotation structure 112 and the second rotation structure 114, respectively, so that the part to be hoisted can be moved relatively accurately to the target position.

Alternatively, the second rotating structure 114 is a hinge around which the second translating arm 113 can rotate; the translation device 110 further comprises a corresponding second driving mechanism, and the second driving mechanism is configured to drive the second translation arm 113 to rotate around the hinge, so as to move the component to be hoisted to the target position.

In other embodiments, the translation device further comprises at least two second translation arms and at least two second rotation structures, which are sequentially arranged; two adjacent second translation arms are connected through a second rotating structure; of the at least two second translation arms, one of the second translation arms at the first lateral end of the translation device is fixedly connected with the first rotating structure, and the other of the second translation arms at the second lateral end of the translation device is connected with the other of the second rotating structures; each of the second translation arms is rotatable in a horizontal plane about a second rotation structure connected thereto. When the part to be hoisted needs to be moved on the horizontal plane more accurately, the first translation arm and the at least two second translation arms can be rotated through the first rotation structure and the at least two second rotation structures respectively, and then the part to be hoisted can be moved to the target position more accurately.

The translation device adopting the multi-section design can reduce the operation space for hoisting the mechanical arm 100, reduce the use space of the plasma etching equipment and reduce the cost of the plasma etching equipment.

In this embodiment, the first rotating structure 112 and the second rotating structure 114 are respectively provided with a positioning structure. After the part to be hoisted moves to the target position, the first rotating structure 112 and the second rotating structure 114 are respectively fixed by the corresponding positioning structures, so as to stabilize the position of the part to be hoisted on the horizontal plane.

Alternatively, the positioning structures respectively disposed on the first rotating structure 112 and the second rotating structure 114 are fixed pins.

In this embodiment, the hoisting mechanical arm 100 further includes a base 115, the base 115 is disposed below the second rotating mechanism 114, and the base 115 is used for a transfer support between the hoisting mechanical arm 100 and a plasma etching apparatus; the translation device 110 is mounted to the plasma etching apparatus through the susceptor 115.

Specifically, in embodiments where the translation means comprises a second translation arm 113 and a second rotating structure 114, the second rotating structure 114 is mounted to the plasma etching apparatus via a pedestal 115.

In an embodiment where the translation device comprises at least two second translation arms and at least two second rotating structures arranged in sequence, one of the second rotating structures located at the second lateral end of the translation device is mounted on the plasma etching apparatus through the susceptor.

Referring to fig. 1 and fig. 2, in the present embodiment, the lifting device 120 includes a supporting structure 121, a drum 122, a rope 123, a fixed pulley 124, and a third driving mechanism 125; one end of the supporting structure 121 is connected to the first translation arm 111, and the other end is provided with a fixed pulley 124; the third driving mechanism 125 is mounted on the first translation arm 111, and an output end thereof is connected to the drum 122; one end of the rope body 123 is fixedly wound on the drum 122, and the other end is wound on the fixed pulley 124 and then connected with the hoisting structure 200; the third driving mechanism 125 drives the drum 122 to rotate, so as to drive the hoisting structure 200 at the other end of the rope 123 and the component to be hoisted to ascend or descend. When the part to be hoisted needs to be moved in the vertical direction, the drum 122 is driven to rotate by the third driving mechanism 125 or the handwheel, so that the hoisting structure 200 connected with the end of the rope body 123 and the part to be hoisted move to a proper height.

In this embodiment, the third driving mechanism 125 is a manual third driving mechanism and/or an electric third driving mechanism, which is not particularly limited in this embodiment.

In this embodiment, the third driving mechanism 125 is provided with the dust cover 126, which can effectively prevent particulate matters such as dust from being brought to the plasma etching apparatus, and is beneficial to improving the stability of the process in the plasma etching apparatus.

In this embodiment, a self-locking mechanism is disposed on the third driving mechanism 125. After the part to be hoisted moves to a proper height, the third driving mechanism 125 is fixed by the self-locking mechanism, so as to stabilize the height of the part to be hoisted in the vertical direction. Optionally, the self-locking mechanism is a latch.

In this embodiment, the supporting structure 121 includes a plurality of connecting frames 1211 connected by a fixing member 1212. The number of the connecting frame 1211 in this embodiment is not particularly limited, and is only exemplarily illustrated in the specific number shown in fig. 1; specifically, the supporting structure 121 includes two connecting frame bodies 1211, the two connecting frame bodies 1211 are fixedly connected through a fixing member 1212, and the left end of the left connecting frame body 1211 is connected with the first translation arm 111 through the third driving mechanism 125; optionally, the securing member 1212 is a plurality of bolts.

In this embodiment, the drum 122, and/or the fixed pulley 124, and/or the rope 123 are made of non-metal materials, which will not fall off conductive particles, and will not cause the plasma etching apparatus to generate a short circuit risk due to the conductive particles.

Optionally, the drum 122, and/or the crown block 124, and/or the rope 123 is nylon.

In this embodiment, the second translation arm 113 has a hollow structure, so that the weight of the second translation arm 113 can be reduced while the mechanical strength of the second translation arm 113 is maintained.

In this embodiment, the first translation arm 111, the second translation arm 113, and/or the support structure 121 are made of an aluminum alloy material, which does not bring metallic contaminants such as Fe, ni, and Gr to the plasma etching apparatus.

In this embodiment, the first translation arm 111, the second translation arm 113, the support structure 121, and the like are made of aluminum alloy, and the structure is light; specifically, the hoisting mechanical arm 100 has a self-weight of about 15kg and can bear 60kg.

Because the first translation arm 111, the second translation arm 113, the support structure 121 and the like are made of aluminum alloy, after the hoisting mechanical arm 100 is used on the plasma etching equipment, metal pollutants such as Fe, ni and Gr cannot be brought to the plasma etching equipment, and the normal work of the plasma etching equipment cannot be influenced.

The above description is only an example of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, and improvement made within the spirit and scope of the present invention are all included within the protection scope of the present invention.

Claims

1. The utility model provides a hoist and mount arm, its characterized in that, this hoist and mount arm is used for installing on plasma etching equipment, includes: a translation device and a hoisting device; one end of the lifting device is connected with one end of the translation device, the other end of the translation device is connected with the plasma etching equipment, and a part to be hoisted is arranged at the other end of the lifting device; the hoisting device drives the part to be hoisted to move in the vertical direction; the translation device enables the part to be hoisted to move on the horizontal plane through the hoisting device.

2. The hoisting mechanical arm of claim 1, wherein said translating means comprises a first translating arm and a first rotating structure connected to one end of said first translating arm; the other end of the first translation arm is connected with the hoisting device, and the first translation arm can rotate on the horizontal plane around the first rotating structure.

3. The hoisting mechanical arm of claim 2, wherein said translating means further comprises a second translating arm and a second rotating structure connected to one end of said second translating arm; the other end of the second translation arm is fixedly connected with the first rotating structure, and the second translation arm can rotate on a horizontal plane around the second rotating structure.

4. The hoisting mechanical arm according to claim 2, wherein said translation means further comprise at least two second translation arms and at least two second rotation structures arranged in sequence; two adjacent second translation arms are connected through a second rotating structure; among the at least two second translation arms, one of the second translation arms at the first lateral end of the translation device is fixedly connected with the first rotating structure, and the other of the second translation arms at the second lateral end of the translation device is connected with the other of the second rotating structures; each of the second translation arms is rotatable in a horizontal plane about a second rotation structure connected thereto.

5. The lifting mechanical arm as claimed in claim 3 or 4, wherein the second translation arm is a hollow structure.

6. The hoisting mechanical arm according to any one of claims 3 to 4, wherein said first rotating structure and/or said second rotating structure is provided with a positioning structure.

7. The lifting arm of claim 3, wherein the lifting arm further comprises a base; the translation device is arranged on the plasma etching equipment through the base.

8. The lifting arm of claim 7, wherein the second rotational structure is mounted on the plasma etching apparatus via the pedestal.

9. The lifting arm of claim 4, wherein the lifting arm further comprises a base; the translation device is arranged on the plasma etching equipment through the base.

10. The hoist mechanical arm of claim 9, wherein one of the second rotating structures at the second lateral end of the translation device is mounted to a plasma etching apparatus through the base.

11. The hoisting mechanical arm of claim 2, wherein said hoisting device comprises a support structure, a drum, a rope, a fixed pulley, and a third drive mechanism; one end of the supporting structure is connected with the first translation arm, and the other end of the supporting structure is provided with a fixed pulley; the third driving mechanism is arranged on the first translation arm, and the output end of the third driving mechanism is connected with the drum wheel; one end of the rope body is fixedly wound on the drum wheel, and the other end of the rope body is wound on the fixed pulley and then is connected with a part to be hoisted; and the third driving mechanism drives the drum wheel to rotate to drive the part to be hoisted on the other end of the rope body to ascend or descend.

12. The hoisting mechanical arm of claim 11, wherein said third drive mechanism is a manual third drive mechanism and/or an electric third drive mechanism.

13. The hoisting mechanical arm of claim 11, wherein said third drive mechanism is provided with a dust guard.

14. The hoisting mechanical arm of claim 11, wherein said third drive mechanism is provided with a self-locking mechanism.

15. The hoisting mechanical arm of claim 11, wherein said support structure comprises a plurality of connector blocks connected by fasteners.

16. The hoisting mechanical arm of claim 11, wherein said drum, and/or crown block, and/or rope is a non-metallic material.

17. The hoisting mechanical arm of claim 11, wherein the first translating arm, the second translating arm and/or the support structure are aluminum alloy material.