CN217691078U - Constant-temperature liquid supply device of single-chip wet etching machine - Google Patents
Constant-temperature liquid supply device of single-chip wet etching machine Download PDFInfo
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- CN217691078U CN217691078U CN202221292326.2U CN202221292326U CN217691078U CN 217691078 U CN217691078 U CN 217691078U CN 202221292326 U CN202221292326 U CN 202221292326U CN 217691078 U CN217691078 U CN 217691078U
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Abstract
The utility model discloses a monolithic wet etching machine's constant temperature supplies liquid device, including the reservoir, be provided with the circulatory outlet on the reservoir, circulation entry and decompression circulation entry, be connected with the circulating line who takes the circulating pump between circulatory outlet and the circulatory inlet, install temperature sensor in the reservoir and carry out the heating device that heats to the interior liquid medicine of reservoir, be provided with the liquid outlet on the reservoir, the liquid outlet communicates with the liquid outlet pipeline one end of taking out the liquid pump, the other end of liquid outlet pipeline is linked together with feed liquor pipeline and decompression circulating line respectively, the other end of feed liquor pipeline and the shower head intercommunication in monolithic wet etching machine's the sculpture intracavity, decompression circulation entry intercommunication on the other end of decompression circulating line and the reservoir, be provided with first control valve and second control valve on feed liquor pipeline and the decompression circulating line respectively, this constant temperature supplies liquid device not only can realize the constant temperature liquid, and can avoid the liquid medicine temperature in the sculpture waiting process pipeline to be less than the requirement temperature.
Description
Technical Field
The utility model relates to a liquid device is supplied to the constant temperature, especially relates to a liquid device is supplied to constant temperature of monolithic wet etching machine.
Background
The single-chip wet etching machine is an etching device used in the semiconductor production process, a silicon chip is placed in an etching cavity to rotate, then the upper surface of the silicon chip is sprayed by using an etched liquid medicine to complete etching, and a liquid supply device is a set of device for supplying the liquid medicine to the etching cavity to spray.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the technical problem that will solve is: the constant-temperature liquid supply device of the single-chip wet etching machine not only can realize constant-temperature liquid supply, but also can avoid the temperature of liquid medicine in a pipeline from being lower than the required temperature in the etching waiting process, and solves the problem that the temperature in a liquid supply pipeline can be reduced in the gap process of the previous etching.
In order to solve the technical problem, the technical scheme of the utility model is that: the utility model provides a monolithic wet process etching machine's constant temperature supplies liquid device, including the reservoir, be provided with the circulation outlet on the reservoir, circulation inlet and decompression circulation inlet, be connected with the circulating line who takes the circulating pump between circulation outlet and the circulation inlet, install temperature sensor in the reservoir and carry out the heating device who heats to liquid medicine in the reservoir, be provided with the liquid outlet on the reservoir, the liquid outlet communicates with the liquid outlet pipe one end of taking out the liquid pump, the other end of liquid outlet pipe is linked together with confession liquid pipeline and decompression circulating line respectively, the other end of confession liquid pipeline communicates with the shower head in the sculpture intracavity of monolithic wet process etching machine, decompression circulating line's the other end and the decompression circulation inlet on the reservoir communicate, be provided with first control valve and second control valve on confession liquid pipeline and the decompression circulating line respectively.
As a preferred scheme, a three-way control valve is arranged on the liquid supply pipeline, two interfaces of the three-way control valve are connected to the liquid supply pipeline, the other interface of the three-way control valve is connected with an auxiliary circulation pipeline, and the auxiliary circulation pipeline is communicated with the liquid storage tank.
As a preferable scheme, a filter is arranged on the liquid outlet pipeline.
Preferably, the circulation inlet is provided with a pipe section in the tank, which extends into the liquid medicine, and the end part of the pipe section in the tank is provided with a liquid outlet stirring head.
As a preferable scheme, a pressure gauge is arranged on the upstream of the spray header on the liquid supply pipeline, and a liquid level sensor is arranged on the liquid storage tank.
Preferably, the first control valve and the second control valve are both pneumatic control valves, and a control air path of the first control valve and a control air path of the second control valve are respectively provided with a first electromagnetic valve and a second electromagnetic valve.
As a preferable scheme, a return pipeline is arranged between the bottom of the etching cavity and the liquid storage tank.
After the technical scheme is adopted, the utility model discloses an effect is: the constant-temperature liquid supply device comprises a liquid storage tank, wherein a circulation outlet, a circulation inlet and a decompression circulation inlet are arranged on the liquid storage tank, a circulation pipeline with a circulation pump is connected between the circulation outlet and the circulation inlet, a temperature sensor and a heating device for heating liquid medicine in the liquid storage tank are installed in the liquid storage tank, a liquid outlet is arranged on the liquid storage tank, the liquid outlet is communicated with one end of a liquid outlet pipeline with a liquid outlet pump, the other end of the liquid outlet pipeline is respectively communicated with the liquid supply pipeline and the decompression circulation pipeline, the other end of the liquid supply pipeline is communicated with a spray head in an etching cavity of the single-chip wet etching machine, the other end of the decompression circulation pipeline is communicated with the decompression circulation inlet on the liquid storage tank, a first control valve and a second control valve are respectively arranged on the liquid supply pipeline and the decompression circulation pipeline, therefore, the constant-temperature liquid supply device utilizes the circulation pump on the circulation pipeline to circulate the liquid medicine in the liquid storage tank, the liquid medicine is mixed more uniformly, meanwhile, the liquid can be supplied to the spray head during working, when the spray head is closed, the first control valve is closed, the second control valve is opened, the liquid supply device can enable the liquid medicine to circularly enter the liquid storage tank to enter the liquid storage tank through the decompression circulation pipeline and avoid the liquid storage tank from being started and stopped frequently.
And because the liquid supply pipeline is provided with the three-way control valve, two interfaces of the three-way control valve are connected to the liquid supply pipeline, the other interface is connected with the auxiliary circulating pipeline, the auxiliary circulating pipeline is communicated with the liquid storage tank, when the etching machine is restarted after being stopped for a long time, the liquid medicine can flow back to the liquid storage tank through the first control valve and the liquid supply pipeline under the action of the auxiliary circulating pipeline, so that the liquid medicine temperature of the pipeline between the first control valve and the spray header is further prevented from being too low, a test piece is not needed to be etched, the etching process can be directly carried out, and the efficiency is higher.
And because the liquid outlet pipeline is provided with the filter, the filter can effectively filter solids in the liquid storage tank, the blockage of the spray header is avoided, and the stability of the etching process is also ensured.
And because the circulating inlet is provided with the pipe section in the tank extending into the liquid medicine, and the end part of the pipe section in the tank is provided with the liquid outlet stirring head, the liquid outlet stirring head can increase the stirring force and improve the stirring effect.
And because a backflow pipeline is arranged between the bottom of the etching cavity and the liquid storage tank, the backflow pipeline can conveniently collect the liquid medicine in the etching cavity and then backflow the liquid medicine into the liquid storage tank for reuse.
Drawings
The present invention will be further explained with reference to the drawings and examples.
Fig. 1 is a schematic structural diagram of an embodiment of the present invention;
in the drawings: 1. a liquid storage tank; 2. a circulation pipe; 3. a temperature sensor; 4. a heating device; 5. a liquid outlet pipe; 6. a liquid supply conduit; 7. a pressure reducing circulation line; 8. etching the cavity; 9. a shower head; 10. a first control valve; 11. a second control valve; 12. an auxiliary circulation pipe; 13. a filter; 14. a liquid outlet stirring head; 15. a liquid level sensor; 16. a first solenoid valve; 17. a second solenoid valve; 18. a return line; 19. a circulation pump; 20. a liquid outlet pump.
Detailed Description
The present invention will be described in further detail with reference to the following examples.
As shown in fig. 1, a constant temperature liquid supply device of a single-chip wet etching machine comprises a liquid storage tank 1, a circulation outlet, a circulation inlet and a decompression circulation inlet are arranged on the liquid storage tank 1, a circulation pipeline 2 with a circulation pump 19 is connected between the circulation outlet and the circulation inlet, a temperature sensor 3 and a heating device 4 for heating liquid medicine in the liquid storage tank 1 are installed in the liquid storage tank 1, a liquid outlet is arranged on the liquid storage tank 1 and is communicated with one end of a liquid outlet pipe 5 with a liquid outlet pump 20, the other end of the liquid outlet pipe 5 is respectively communicated with a liquid supply pipeline 6 and a decompression circulation pipeline 7, the other end of the liquid supply pipeline 6 is communicated with a spray head 9 in an etching cavity 8 of the single-chip wet etching machine, the other end of the decompression circulation pipeline 7 is communicated with the decompression circulation inlet on the liquid storage tank 1, and a first control valve 10 and a second control valve 11 are respectively arranged on the liquid supply pipeline 6 and the decompression circulation pipeline 7.
In this embodiment, a three-way control valve is disposed on the liquid supply pipeline 6, two interfaces of the three-way control valve are connected to the liquid supply pipeline 6, the other interface is connected to an auxiliary circulation pipeline 12, the auxiliary circulation pipeline 12 is communicated with the liquid storage tank 1, a filter 13 is disposed on the liquid outlet pipe 5, an in-tank pipe section extending into the liquid medicine is disposed on the circulation inlet, a liquid outlet stirring head 14 is disposed at an end of the in-tank pipe section, a pressure gauge is disposed on the liquid supply pipeline 6 and located at the upstream of the spray head 9, a liquid level sensor 15 is disposed on the liquid storage tank 1, and a return pipeline 18 is disposed between the bottom of the etching chamber 8 and the liquid storage tank 1.
In this embodiment, the first control valve 10 and the second control valve 11 are both pneumatic control valves, and the control gas paths of the first control valve 10 and the second control valve 11 are respectively provided with a first electromagnetic valve 16 and a second electromagnetic valve 17.
When the constant-temperature liquid supply device is used, the circulating pump 19 on the circulating pipeline 2 is utilized to circulate liquid medicine, the liquid medicine in the liquid storage tank 1 is mixed more uniformly, the temperature is kept constant, when the spray header 9 works, the first control valve 10 is opened, the second control valve 11 is closed, liquid is supplied to the spray header 9 through the liquid supply pipeline 6, the liquid in the etching cavity 8 after spraying flows back to the liquid storage tank 1 through the backflow pipeline 18, the repeated utilization is achieved, when the spray header 9 is closed, the first control valve 10 is closed, the second control valve 11 is opened, at the moment, the liquid medicine can circularly enter the liquid storage tank 1 through the decompression circulating pipeline 7 and the decompression circulating inlet, on one hand, the liquid pump 20 does not need to be started or stopped frequently, on the other hand, the liquid medicine in the pipeline can also circulate all the time, and the temperature of the liquid medicine in the pipeline is kept. When the etching machine is started after being stopped for a long time, the liquid medicine flows back to the liquid storage tank 1 through the liquid outlet pipe 5, the first control valve 10, the liquid supply pipe 6 and the auxiliary circulating pipe 12, so that the liquid medicine temperature of the pipe between the first control valve 10 and the spray header 9 is further prevented from being too low, and the etching process can be directly carried out.
In the working process, the temperature sensor 3 monitors the temperature change in the liquid storage tank 1 at any time, and when the temperature is reduced, the liquid medicine in the liquid storage tank 1 can be heated by the heating device 4 in time.
The above embodiments are merely descriptions of the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention, and all modifications and changes made by the technical solutions of the present invention should fall within the protection scope defined by the claims of the present invention without departing from the spirit of the present invention.
Claims (7)
1. The utility model provides a monolithic wet etching machine's constant temperature supplies liquid device, includes the reservoir, its characterized in that: be provided with the circulation outlet on the reservoir, circulation inlet and decompression circulation entry, be connected with the circulating line who takes the circulating pump between circulation outlet and the circulation entry, install temperature sensor in the reservoir and carry out the heating device who heats to liquid medicine in the reservoir, be provided with the liquid outlet on the reservoir, the liquid outlet communicates with the liquid outlet pipe one end of taking out the liquid pump, and the other end of liquid outlet pipe is linked together with liquid supply pipe and decompression circulating line respectively, liquid supply pipe's the other end and the shower head intercommunication in the sculpture intracavity of monolithic wet etching machine, decompression circulating line's the other end and the decompression circulation entry intercommunication on the reservoir, be provided with first control valve and second control valve on liquid supply pipe and the decompression circulating line respectively.
2. The constant-temperature liquid supply device of the single-chip wet etching machine as claimed in claim 1, wherein: and a three-way control valve is arranged on the liquid supply pipeline, two interfaces of the three-way control valve are connected to the liquid supply pipeline, the other interface of the three-way control valve is connected with an auxiliary circulating pipeline, and the auxiliary circulating pipeline is communicated with the liquid storage tank.
3. The constant-temperature liquid supply device of the single-wafer wet etching machine as claimed in claim 2, wherein: and a filter is arranged on the liquid outlet pipeline.
4. The constant-temperature liquid supply device of the single-wafer wet etching machine as claimed in claim 3, wherein: the circulating inlet is provided with a pipe section in the tank, which extends into the liquid medicine, and the end part of the pipe section in the tank is provided with a liquid outlet stirring head.
5. The constant-temperature liquid supply device of the single-chip wet etching machine as claimed in claim 4, wherein: and a pressure gauge is arranged on the upper stream of the spray header on the liquid supply pipeline, and a liquid level sensor is arranged on the liquid storage tank.
6. The constant-temperature liquid supply device of the single-chip wet etching machine as claimed in claim 5, wherein: the first control valve and the second control valve are both pneumatic control valves, and a control gas circuit of the first control valve and a control gas circuit of the second control valve are respectively provided with a first electromagnetic valve and a second electromagnetic valve.
7. The constant-temperature liquid supply device of the single-wafer wet etching machine as claimed in claim 6, wherein: and a backflow pipeline is arranged between the bottom of the etching cavity and the liquid storage tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221292326.2U CN217691078U (en) | 2022-05-26 | 2022-05-26 | Constant-temperature liquid supply device of single-chip wet etching machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221292326.2U CN217691078U (en) | 2022-05-26 | 2022-05-26 | Constant-temperature liquid supply device of single-chip wet etching machine |
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| CN217691078U true CN217691078U (en) | 2022-10-28 |
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| CN202221292326.2U Active CN217691078U (en) | 2022-05-26 | 2022-05-26 | Constant-temperature liquid supply device of single-chip wet etching machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118649948A (en) * | 2024-08-14 | 2024-09-17 | 苏州智程半导体科技股份有限公司 | Fluid heating and filtering device |
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2022
- 2022-05-26 CN CN202221292326.2U patent/CN217691078U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118649948A (en) * | 2024-08-14 | 2024-09-17 | 苏州智程半导体科技股份有限公司 | Fluid heating and filtering device |
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