A kind of high efficient gas and liquid mixer
Technical field
The utility model relates to the water-treatment technology fields of photovoltaic manufacture, more particularly to a kind of high efficient gas and liquid mixer.
Background technique
With the development of super large-scale integration, the requirement to the cleanliness and surface state of silicon chip surface is higher and higher.
Ozone is unstable gas, and there is strong corrosivity and oxidisability can be met more using the ultra-clean water cleaning silicon chip of ozone
The requirement of stringent silicon chip surface cleanliness and large-diameter silicon wafer technique, and greatly reduce the pollution to environment.
Ozone Water used in photovoltaic industry is mainly made of ejector at present, and it is low to adopt this method mixing efficiency, meeting
There is bubble generation, and is unable to accurately control mixed consistency of ozone water.
Utility model content
In order to overcome the above problem, the utility model provides a kind of high efficient gas and liquid mixer.
The technical solution of the utility model is to provide a kind of high efficient gas and liquid mixer comprising tempering tank and to control gas
Body enters the Gas Control Module of the tempering tank.The tempering tank includes upper connecting cylinder and lower connecting cylinder, the upper connecting cylinder
It is detachably connected with the lower connecting cylinder.The Gas Control Module is connected to the tempering tank, the Gas Control Module
Including gas delivery tube, pressure regulator valve, U-shaped branch pipe, straight branch pipe, two the first pneumatic operated valves, the second pneumatic operated valve, outer branch pipe and unidirectional
Valve, the pressure regulator valve are set in gas delivery tube, and the U-shaped branch pipe is connected to the side of gas delivery tube, the straight branch
Tube side-by-side is set between U-shaped branch pipe, and described two first pneumatic operated valves are set on U-shaped branch pipe, the second pneumatic operated valve setting
In the bottom of straight branch pipe, one end of the outer branch pipe is connected to wherein one end of U-shaped branch pipe, and the check valve is set to described
The other end of outer branch pipe.The air inlet passed in and out in the Gas Control Module for ozone gas is provided at the top of the tempering tank
Mouthful and enter the inlet in the tempering tank for liquid, be provided with mixing filler material in the tempering tank, enter to make
Ozone gas inside to the tempering tank, which is sufficiently mixed with liquid and is dissolved into liquid internal, forms ozone mixed liquor, institute
The bottom for stating tempering tank is provided with the liquid outlet exported for the ozone mixed liquor after processing.
Further, the air inlet connects the gas delivery tube.
Further, the tempering tank further includes upper terminal pad and lower terminal pad, and the upper terminal pad is set on described
The bottom of connecting cylinder, the lower terminal pad are set to the top of the lower connecting cylinder, the upper connecting cylinder and the lower connecting cylinder
It is detachably connected by the upper terminal pad and the lower terminal pad.
Further, it is spirally connected between the upper terminal pad and the lower terminal pad by screw group.
Compared with prior art, a kind of high efficient gas and liquid mixer of the utility model includes tempering tank and gas control mould
Block, Gas Control Module can accurately control gas according to process requirements and enter tempering tank, and prevent liquid reflux to gas piping
In;Include mixing filler material in tempering tank, the ozone gas entered inside tempering tank can be made sufficiently to be mixed with liquid
It closes, and is dissolved into liquid internal and forms ozone mixed liquor.The utility model mixing efficiency is high, accurately controls mixed ozone
Water concentration, it is not easy to generate bubble, keep making technology more stable, and liquid reflux can be prevented to gas piping, guarantee equipment
Safe operation;Meanwhile design is rationally, and leakproofness, safety are good, the operation is stable.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of tempering tank in the high efficient gas and liquid mixer of an embodiment of the present invention;
Fig. 2 is the structural schematic diagram of the Gas Control Module in the high efficient gas and liquid mixer of an embodiment of the present invention.
Specific embodiment
In order to be easy to understand the technical means, creative features, achievement of purpose, and effectiveness of the utility model, under
In conjunction with specific embodiments, the utility model is further described in face.
Incorporated by reference to referring to Fig. 1 and Fig. 2, a kind of high efficient gas and liquid mixer of the utility model comprising tempering tank and gas
Control module 2.In the present embodiment, tempering tank includes upper connecting cylinder 1 and lower connecting cylinder 10.
Preferably, the bottom of upper connecting cylinder 1 is provided with terminal pad 11, and the top of lower connecting cylinder 10 is provided with lower terminal pad
12, it is screwed between upper terminal pad 11 and lower terminal pad 12 by screw group 13, upper connecting cylinder 1 and lower connecting cylinder 10 pass through upper connection
Being detachably connected for disk 11 and lower terminal pad 12, it is easy to disassemble, it is convenient that tempering tank inside is cleaned.
Include mixing filler material (not shown) in tempering tank, the ozone gas entered inside tempering tank can be made abundant
It is mixed with liquid, and is dissolved into liquid internal and forms ozone mixed liquor.
With continued reference to Fig. 2, tempering tank is connected with Gas Control Module 2, and Gas Control Module 2 includes gas delivery tube
21, be provided with pressure regulator valve 22 in gas delivery tube 21, the side of gas delivery tube 21 is connected with U-shaped branch pipe 23, U-shaped branch pipe 23 it
Between be arranged side by side and have a straight branch pipe 25, there are two the first pneumatic operated valves 24, the bottom of straight branch pipe 25 to be arranged for setting on U-shaped branch pipe 23
There is the second pneumatic operated valve 26, wherein one end of U-shaped branch pipe 23 is connected to one end of outer branch pipe 27, and the other end of outer branch pipe 27 is provided with
Check valve 28.
In practical applications, it is provided with air inlet 14 at the top of tempering tank, controls mould to gas for ozone gas disengaging
In block 2, air inlet 14 connects gas delivery tube 21, and inlet 16 is provided at the top of tempering tank and is entered for solution, tempering tank
Bottom be provided with output of the liquid outlet 17 for the Ozone Water after processing.
A kind of high efficient gas and liquid mixer of the utility model includes tempering tank and Gas Control Module, Gas Control Module
Gas can be accurately controlled according to process requirements and enter tempering tank, and prevent liquid reflux into gas piping;Include in tempering tank
There is mixing filler material, the ozone gas entered inside tempering tank can be made sufficiently to be mixed with liquid, and be dissolved into liquid
Inside forms ozone mixed liquor.The utility model mixing efficiency is high, accurately controls mixed consistency of ozone water, it is not easy to produce
Anger bubble, keeps making technology more stable, and liquid reflux can be prevented to gas piping, guarantees equipment safety operation;Meanwhile if
Rationally, and leakproofness, safety are good, the operation is stable for meter.
Above embodiments are only the one such embodiment of the utility model, and the description thereof is more specific and detailed, but simultaneously
Therefore it cannot be interpreted as that a limitation on the scope of the patent of the present invention.It should be pointed out that for the ordinary skill of this field
For personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these belong to this
The protection scope of utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.