CN217691054U - Radio frequency isolating ring - Google Patents
Radio frequency isolating ring Download PDFInfo
- Publication number
- CN217691054U CN217691054U CN202123426469.6U CN202123426469U CN217691054U CN 217691054 U CN217691054 U CN 217691054U CN 202123426469 U CN202123426469 U CN 202123426469U CN 217691054 U CN217691054 U CN 217691054U
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- CN
- China
- Prior art keywords
- ring
- radio frequency
- chamfer
- upper plate
- outer ring
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- 239000007921 spray Substances 0.000 claims abstract description 17
- 238000002955 isolation Methods 0.000 claims description 23
- 239000011248 coating agent Substances 0.000 claims description 14
- 238000000576 coating method Methods 0.000 claims description 14
- 238000007789 sealing Methods 0.000 claims description 6
- 239000004696 Poly ether ether ketone Substances 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 5
- 229920002530 polyetherether ketone Polymers 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- -1 polytetrafluoroethylene Polymers 0.000 claims description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 4
- 239000004962 Polyamide-imide Substances 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 3
- 239000004734 Polyphenylene sulfide Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 229920002312 polyamide-imide Polymers 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 229920000069 polyphenylene sulfide Polymers 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 5
- 239000002245 particle Substances 0.000 abstract description 2
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Coating By Spraying Or Casting (AREA)
Abstract
The utility model provides a radio frequency isolating ring sets up between shower nozzle upper plate and upper cover plate, include: a ring body including an annular surface, an inner ring surface, and an outer ring surface that contact the nozzle upper plate; an inner ring chamfer is arranged between the annular surface and the inner ring surface, and an outer ring chamfer is arranged between the annular surface and the outer ring surface; a chamfer space is formed between the chamfer surfaces of the inner ring chamfer and the outer ring chamfer and the surface of the spray head upper plate so as to compensate external force deformation and thermal expansion deformation generated by the spray head upper plate at the position of the outer ring surface and the position of the inner ring surface, and the damage of the radio frequency isolating ring caused by the fact that the radio frequency isolating ring is extruded by the spray head upper plate is favorably avoided; meanwhile, the inner ring chamfer can prevent particles generated by friction between the edge of the ring body and the upper plate of the spray nozzle from influencing the process stability in the reaction cavity.
Description
Technical Field
The utility model relates to a semiconductor field especially relates to a radio frequency isolating ring.
Background
In semiconductor processing, it is often necessary to ionize a gas containing atoms of a film component by radio frequency to locally form a plasma. Therefore, the radio frequency isolation ring arranged between the upper spray head plate and the upper cover is needed to isolate the upper spray head plate and the upper cover, so that radio frequency is input from an input end, namely the upper high-temperature spray head plate, and is transmitted to the spray plate through the outer surface of the upper spray head plate, and meanwhile, the heating plate is grounded, so that an alternating electric field is formed between the spray plate and the heating plate. Then the water is transmitted out from the accessory at the lower end of the heating plate and returns to the radio frequency matcher through the corrugated pipe, the cavity, the upper cover and the shielding cover.
In the prior semiconductor device, the radio frequency isolation ring is often damaged by extrusion due to external force generated by assembly and thermal expansion between parts at high temperature.
Therefore, there is a need to develop a new rf isolation ring to avoid the above problems of the prior art.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a radio frequency isolating ring, can with the shower nozzle upper plate between reserve some spaces with the deformation that the in-process of compensation shower nozzle upper plate produced at the exogenic action and thermal expansion to avoid the collision to cause the damage.
In order to achieve the above object, the present invention provides a radio frequency isolation ring comprising: the annular body comprises an annular surface, an inner ring surface and an outer ring surface which are in contact with the nozzle upper plate; an inner ring chamfer is arranged between the annular surface and the inner ring surface, and an outer ring chamfer is arranged between the annular surface and the outer ring surface; and a chamfer space is formed between the chamfer surfaces of the inner ring chamfer and the outer ring chamfer and the surface of the spray head upper plate so as to compensate the deformation of the spray head upper plate at the position of the outer ring surface and the position of the inner ring surface caused by external force and thermal expansion.
The utility model provides a radio frequency isolating ring's beneficial effect lies in: the inner ring chamfer and the outer ring chamfer are arranged on the radio frequency isolation ring, so that a certain chamfer space is formed between the radio frequency isolation ring and the upper nozzle plate to compensate the deformation of the upper nozzle plate at the inner ring chamfer position and the outer ring chamfer position, and the damage of the radio frequency isolation ring caused by the fact that the upper nozzle plate extrudes the radio frequency isolation ring is favorably avoided; meanwhile, the inner ring chamfer can prevent particles generated by friction between the edge of the ring body and the upper plate of the spray nozzle from influencing the process stability in the reaction cavity.
Optionally, the inner ring chamfer or the outer ring chamfer ranges from 5 ° to 80 °.
Optionally, the ring body is made of any one of ceramic, polyphenylene sulfide, polyether ether ketone, polytetrafluoroethylene, polyimide or polyamide imide.
Optionally, a coating is arranged on the surface of the ring body, and the coating material is a heat-resistant non-metallic material within the temperature range of 100-250 ℃. The beneficial effects are that: the friction force of the contact position of the radio frequency isolation ring and the upper plate of the spray head is reduced, and the tensile stress of the radio frequency isolation ring is reduced.
Optionally, the non-metallic material is any one or more of polytetrafluoroethylene and polyetheretherketone.
Optionally, the coating is located outside the sealing region of the ring body. The beneficial effects are that: and a sealing rubber ring is arranged between the radio frequency isolating ring and the upper plate of the spray head, and the coating is arranged on the outer side of the sealing rubber ring, so that the coating material is prevented from influencing the process stability in the cavity.
Optionally, the ring body includes an inner bore, which is a stepped bore. The beneficial effects are that: the radio frequency isolation ring is convenient to assemble and position with the upper cover plate.
Optionally, the diameter of the hole section of the inner hole is gradually reduced in a direction close to the upper plate of the nozzle.
Optionally, a fillet is arranged between the surfaces of the hole sections of the stepped holes.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the radio frequency isolation ring of the present invention;
FIG. 2 is a schematic diagram of a partial cross-sectional structure of the RF isolation ring shown in FIG. 1;
FIG. 3 is a schematic view of an assembly structure of the RF isolation ring shown in FIG. 1;
FIG. 4 is a schematic view of the deformation position and direction of the upper plate of the showerhead shown in FIG. 3;
fig. 5 is a schematic view of the coating position of the rf isolator ring shown in fig. 1.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention. Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. As used herein, the word "comprising" and similar words are intended to mean that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items.
In order to solve the problems existing in the prior art, the embodiment of the utility model provides a radio frequency isolating ring.
Fig. 1 is a schematic structural diagram of an embodiment of the radio frequency isolation ring of the present invention; FIG. 2 is a schematic diagram of a partial cross-sectional structure of the RF isolation ring shown in FIG. 1; FIG. 3 is a schematic view of an assembly structure of the RF isolation ring shown in FIG. 1; FIG. 4 is a schematic view of the deformed position and orientation of the upper plate of the sprinkler head shown in FIG. 3;
in some embodiments of the present invention, referring to fig. 1 to 4, the radio frequency isolation ring 1 is disposed between the upper plate 2 and the upper cover plate 3 of the nozzle, the radio frequency isolation ring 1 includes: a ring body 10, the ring body 10 including an annular surface 11, an inner ring surface 12, and an outer ring surface 13 which are in contact with the nozzle upper plate 2; an inner ring chamfer 14 is arranged between the annular surface 11 and the inner ring surface 12, and an outer ring chamfer 15 is arranged between the annular surface 11 and the outer ring surface 13; and a chamfer space is formed between the chamfer surfaces of the inner ring chamfer 14 and the outer ring chamfer 15 and the surface of the upper nozzle plate 2. Taking one side of the radio frequency isolation ring 1 as an example, the upper nozzle plate 2 is fixed by a screw 21 and is influenced by the pretightening force of the screw, the upper nozzle plate 2 deforms at the position of the outer ring surface 13 along the direction of the drawing A, the upper nozzle plate 2 deforms at the position of the inner ring surface 12 along the direction of the drawing B under the atmospheric pressure, and the upper nozzle plate 2 deforms at the positions of the outer ring surface 13 and the inner ring surface 12 after being heated and expanded.
The utility model discloses some embodiments, according to the temperature range of shower nozzle upper plate 2 is 100 ℃ to 250 ℃, the scope of inner circle chamfer 14 or outer lane chamfer 15 is 5-80.
In some embodiments of the present invention, the inner ring chamfer 14 or the outer ring chamfer 15 has a chamfer size of 5 °, 15 °, 25 °, 35 °, 45 °, 55 °, 65 °, 75 ° or 80 °, which is favorable for selecting the temperature of the upper plate of the nozzle according to different process conditions.
In some embodiments of the present invention, the ring body 10 is made of ceramic, polyphenylene sulfide, polyetheretherketone, polytetrafluoroethylene, polyimide, or polyamide imide.
In some embodiments of the present invention, the ring body 10 is made of ceramic.
In some embodiments of the present invention, the surface of the ring body 10 is provided with a coating, and the coating is made of a non-metallic material that is heat-resistant within a range of 100-250 ℃.
In some embodiments of the present invention, the non-metallic material is one or more of teflon and polyetheretherketone.
Fig. 5 is a schematic view of the coating position of the rf isolation ring shown in fig. 1.
In some embodiments of the present invention, referring to fig. 5, the radio frequency isolation ring 1 and be provided with the sealed rubber ring between the shower nozzle upper plate 2, the sealed rubber ring is set up in the sealing area 17 of ring body 10, the coating is located the sealing area 17 of ring body 10 is regional 18 for the coating in the outside at ring body 10 center.
In some embodiments of the present invention, referring to fig. 1 and 2, the ring body 10 includes an inner hole 19, and the inner hole 19 is a stepped hole.
In some embodiments, referring to fig. 2, the diameter of the hole section of the inner hole 19 is gradually reduced in the direction close to the upper plate 2 of the nozzle.
In some embodiments of the present invention, referring to fig. 2, a fillet is provided between the surfaces of the hole sections of the stepped holes.
Although the embodiments of the present invention have been described in detail hereinabove, it is apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it is to be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the appended claims. Moreover, the invention as described herein is capable of other embodiments and of being practiced or of being carried out in various ways.
Claims (8)
1. The utility model provides a radio frequency isolating ring, sets up between shower nozzle upper plate and upper cover plate, its characterized in that includes:
a ring body including an annular surface, an inner ring surface, and an outer ring surface that contact the nozzle upper plate;
an inner ring chamfer is arranged between the annular surface and the inner ring surface, and an outer ring chamfer is arranged between the annular surface and the outer ring surface;
and a chamfer space is formed between the chamfer surfaces of the inner and outer ring chamfers and the surface of the spray head upper plate so as to compensate external force deformation and thermal expansion deformation generated at the outer ring surface position and the inner ring surface position of the spray head upper plate.
2. The radio frequency isolator ring of claim 1, wherein the inner ring chamfer or the outer ring chamfer ranges from 5-80 °.
3. The radio frequency isolation ring of claim 1, wherein the ring body is made of any one of ceramic, polyphenylene sulfide, polyetheretherketone, polytetrafluoroethylene, polyimide, and polyamide imide.
4. The radio frequency isolator ring according to claim 1, wherein a coating is provided on the surface of the ring body, and the coating material is a non-metallic material resistant to heat within a range of 100-250 ℃.
5. The radio frequency isolator ring of claim 4, wherein said coating is located outside of said ring body sealing area.
6. The radio frequency isolator ring of claim 1, wherein the ring body includes an inner bore, the inner bore being a stepped bore.
7. The radio frequency isolator ring of claim 6, wherein the bore section diameter of the inner bore decreases in a direction toward the showerhead upper plate.
8. The radio frequency isolator ring of claim 7, wherein fillets are disposed between surfaces of the bore segments of the stepped bore.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123426469.6U CN217691054U (en) | 2021-12-31 | 2021-12-31 | Radio frequency isolating ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123426469.6U CN217691054U (en) | 2021-12-31 | 2021-12-31 | Radio frequency isolating ring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217691054U true CN217691054U (en) | 2022-10-28 |
Family
ID=83726410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123426469.6U Active CN217691054U (en) | 2021-12-31 | 2021-12-31 | Radio frequency isolating ring |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217691054U (en) |
-
2021
- 2021-12-31 CN CN202123426469.6U patent/CN217691054U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |