CN217687609U - Pressure sensor - Google Patents

Abstract

A pressure sensor comprises a base material, an upper electrode with a plurality of upper sub-electrodes, a pressure sensing layer, a lower electrode with a plurality of lower sub-electrodes and an output end. The substrate is internally provided with a cavity. The upper electrode is attached to the upper wall of the cavity and electrically connected with the output end. The lower electrode is attached to the lower wall of the cavity, and the pressure sensing layer is arranged between the upper electrode and the lower electrode. And the pressure sensing layer is configured to contact and be conducted with one of the lower electrode or the upper electrode when the substrate is stressed. The utility model provides a pressure sensor, lower floor's electrode include a plurality of lower floor's sub-electrode, have improved area of contact's rate of change, and then have improved pressure sensor's sensitivity.

Description

Pressure sensor

Technical Field

The utility model relates to a sensor technical field particularly, relates to a pressure sensor.

Background

The pressure sensor is a device or apparatus capable of sensing pressure signals and converting the pressure signals into electrical signals according to a certain rule.

In the work of the existing pressure sensor, when the pressure sensor receives the action of external force, the electrode layer and the pressure sensing layer inside the pressure sensor can deform, so that the electrode layer is in contact with the pressure sensing layer and is conducted, the size of the contact surface changes along with the change of the pressure borne by the pressure sensor, and the size of the contact area determines the current output by the pressure sensor.

When the existing pressure sensor receives external pressure, the contact area between the electrode layer and the pressure sensing layer is not changed greatly, so that the magnitude of the output current is not changed greatly. That is, the sensitivity of the pressure sensor is not high enough due to the insufficient rate of change of the contact area, and the capability of capturing the pressure signal is not high enough. Such a pressure sensor can meet common functional requirements. However, in some usage scenarios with high requirements on sensitivity, the capturing capability of the pressure signal change cannot meet the usage requirements.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a pressure sensor, it can solve the not high problem of present traditional pressure sensor sensitivity.

The utility model provides a pair of pressure sensor, including the substrate, have a plurality of upper electrode, the forced induction layer of upper electrode, have lower floor's electrode and the output of a plurality of lower floor's sub-electrode. The substrate is internally provided with a cavity. The upper electrode is attached to the upper wall of the cavity and electrically connected with the output end. The lower electrode is attached to the lower wall of the cavity, and the pressure sensing layer is arranged between the upper electrode and the lower electrode. And the pressure sensing layer is configured to contact and conduct with one of the lower electrode or the upper electrode when the substrate is stressed.

When the substrate is subjected to external pressure, the upper electrode, the pressure sensing layer and the lower electrode in the cavity are in contact, and the contact area is changed along with the change of the pressure. And compare in traditional pressure sensor, its lower floor's electrode is a whole, the utility model provides a pressure sensor's lower floor's electrode includes a plurality of lower floor's sub-electrodes, and the area of contact on its each sub-electrode and forced induction layer can change along with the change of pressure, and the lower floor's electrode that comprises a plurality of lower floor's sub-electrodes compares in a traditional monoblock electrode, and area of contact's rate of change is higher for the resistance change rate is higher, thereby the rate of change of the electric current of pressure sensor output is higher, and the range of electric current change is bigger, has finally improved pressure sensor's sensitivity.

Optionally, wherein the pressure sensing layer is attached to one of the upper electrode and the lower electrode.

Above-mentioned pressure sensor, when pressure sensor does not receive external pressure, when upper electrode and lower floor's electrode resume deformation along with the substrate, with the forced induction layer attached to upper electrode or lower floor's electrode for the forced induction layer resumes deformation more easily, and then makes pressure sensor's performance more stable.

Optionally, wherein the pressure sensing layer is attached to the lower electrode.

Above-mentioned pressure sensor, when faults such as contact failure appear in upper electrode and output, because the forced induction layer is attached to lower electrode, consequently avoided upper electrode and output electricity to be connected the place and sheltered from, the investigation and the processing of the trouble of being convenient for.

Optionally, wherein the pressure sensing layer is raised by the lower sub-electrodes.

Above-mentioned pressure sensor, when pressure sensor received external pressure, except that the structure of a plurality of sub-electrodes of lower floor has improved the area rate of change with the forced induction layer contact surface, a plurality of archs that the forced induction layer was jacked out also make the forced induction layer with the area rate of change of upper electrode contact surface. Thereby, the rate of change of the resistance of the pressure sensor is further improved. That is, the sensitivity of the pressure sensor is further improved.

Optionally, the upper sub-electrodes and the lower sub-electrodes are arranged in an array, and the arrangement direction of the upper sub-electrodes is not consistent with the arrangement direction of the lower sub-electrodes.

When the pressure sensor is subjected to external pressure, the upper electrode layer, the pressure sensing layer and the lower electrode layer are contacted, the pressure sensing layer can only conduct electricity in the vertical direction, and the arrangement direction of the upper electrode layer is crossed with the arrangement direction of the lower electrode layer, so that one upper sub-electrode is conducted in the vertical direction by the pressure sensing layer, current is transmitted to one end of the lower electrode layer, and the other end of the lower electrode transmits the current to the other upper sub-electrode through the pressure sensing layer to form a current path. As the pressure applied to the pressure sensor increases, the number of the lower sub-electrodes in contact with the pressure sensing layer increases, which means that the more current branches are formed, the larger the current finally outputted becomes. Compared with the traditional pressure sensor with the lower electrode being a whole, the pressure sensor designed according to the principle has the advantages that the current change is more sensitive, and the sensitivity of the pressure sensor is improved.

Optionally, the several lower sub-electrodes are strip electrodes.

Based on the principle described in the previous embodiment, the pressure sensor is designed with a plurality of lower sub-electrodes as relatively thinner strip-shaped electrodes, so that a greater number of more dense strip-shaped electrodes can be arranged in the pressure sensor, which is equivalent to that the scales of the graduated scale become denser. Therefore, the accuracy, i.e., the sensitivity, of the pressure sensor is further improved.

Optionally, the arrangement direction of the upper sub-electrodes is perpendicular to the arrangement direction of the lower sub-electrodes.

The pressure sensor is also based on the principle described in the previous embodiment, and when the arrangement direction of the upper sub-electrodes is perpendicular to the arrangement direction of the lower sub-electrodes, the change rate of the output current of the pressure sensor is the largest, that is, the sensitivity of the pressure sensor is the highest.

Optionally, wherein the upper electrode and the lower electrode are made of conductive metal materials.

The pressure sensor adopts the conductive metal material as the manufacturing material of the upper electrode and the lower electrode, and has low cost, good mechanical durability and stable chemical property.

Optionally, wherein the substrate comprises an upper substrate and a lower substrate. The upper substrate and the lower substrate are oppositely arranged, and the cavity is formed between the upper substrate and the lower substrate. The upper electrode is attached to the inner side of the upper substrate. The lower electrode is attached to the inner side of the lower substrate.

Above-mentioned pressure sensor adopts relative upper strata substrate and the substrate of lower floor that sets up to replace integrated into one piece's substrate, in the in-process of manufacturing, can install earlier with spare parts such as inside upper electrode, forced induction layer and lower floor electrode and accomplish the back, merges upper strata substrate and substrate of lower floor again. Compared with an integrally formed base material, the pressure sensor provided by the embodiment is more convenient to assemble when internal parts are installed in the cavity of the base material.

Optionally, wherein the substrate further comprises a separator layer. The spacer layer is arranged between the upper substrate and the lower substrate, and the cavity is formed between the inner side of the upper substrate and the inner side of the lower substrate.

In the pressure sensor, the spacer layer is arranged between the upper substrate and the lower substrate in a padding way, so that a space for installing internal parts is formed between the upper substrate and the lower substrate. Therefore, the technical effect can be realized by designing the upper layer base material and the lower layer base material into simple flat plates, and the manufacturing process of the pressure sensor is simplified.

The utility model provides a pressure sensor through a plurality of sub-electrodes of lower floor, has improved area of contact's rate of change, and then has improved pressure sensor's sensitivity. Furthermore, the lower sub-electrode is designed into a strip electrode, and the arrangement direction of the lower sub-electrode is perpendicular to that of the upper sub-electrode, so that the sensitivity of the pressure sensor is further improved. Meanwhile, the base material adopts the structure of the upper layer base material and the lower layer base material which are oppositely arranged and the gasket layer which is arranged in the base material, so that the manufacturing process of the pressure sensor is simplified.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on these drawings without inventive efforts.

FIG. 1 is a schematic diagram of a conventional pressure sensor;

FIG. 2 is a schematic diagram of a conventional pressure sensor;

fig. 3 is a schematic structural diagram of a pressure sensor according to an embodiment of the present invention;

fig. 4 is a working schematic diagram of a pressure sensor provided by the embodiment of the present invention;

fig. 5 is a state diagram of the pressure sensor according to the embodiment of the present invention when the internal components are stressed.

An icon: 100. a conventional pressure sensor; 300. a pressure sensor; 310. a substrate; 311. an upper substrate; 312. a lower substrate; 313. a separator layer; 320. an upper electrode; 321. an upper sub-electrode; 330. a pressure-sensitive layer; 340. a lower electrode; 341. and a lower sub-electrode.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.

Referring to fig. 1, fig. 1 shows a schematic structural diagram of a conventional pressure sensor 100, where the conventional pressure sensor 100 includes an upper electrode 320, a pressure sensing layer 330 and a lower electrode 340, which are arranged from top to bottom, however, the conventional pressure sensor 100 can meet common functional requirements. However, in some usage scenarios with high requirements on sensitivity, the capturing capability of the pressure signal change cannot meet the usage requirements. The specific reason is analyzed as follows.

Referring to fig. 2, fig. 2 shows the working principle of the conventional pressure sensor 100, when the conventional pressure sensor 100 is subjected to an external pressure, the upper electrode 320, the pressure sensing layer 330 and the lower electrode 340 are in contact with each other. The current flows in from the right end of the upper electrode 320 and is transmitted to the right end of the lower electrode 340 through the pressure sensing layer 330 which can only conduct electricity up and down, the current is transmitted from the right end of the lower electrode 340 to the left end of the lower electrode 340 by the lower electrode 340, and the current is transmitted to the left end of the upper electrode layer through the pressure sensing layer 330 by the left end of the lower electrode 340. The conventional pressure sensor 100 determines the magnitude of the pressure according to the magnitude of the output current signal. The current changes with the area change among the contact surfaces of the upper electrode 320, the pressure-sensitive layer 330 and the lower electrode 340.

Because the change rate of the contact area among the upper electrode 320, the pressure sensing layer 330 and the lower electrode 340 of the conventional pressure sensor 100 is not high enough, when the upper electrode 320, the pressure sensing layer 330 and the lower electrode 340 are in contact, the resistivity of a formed conduction circuit is not high enough, and the change of the current output by the pressure sensor along with the pressure is not obvious enough.

Therefore, the embodiment of the present invention provides a pressure sensor 300, wherein the lower layer electrode 340 includes a plurality of lower layer sub-electrodes 341 to improve the change rate of the contact area, and further improve the sensitivity of the pressure sensor 300. Specifically, please refer to the embodiments and drawings provided by the present invention.

Referring to fig. 3 and fig. 4, fig. 3 shows a schematic structural diagram of a pressure sensor 300 provided by an embodiment of the present invention, and fig. 4 shows a working principle of the pressure sensor 300 provided by the embodiment of the present invention. The pressure sensor 300 includes a substrate 310, an upper electrode 320 having a plurality of upper sub-electrodes 321, a pressure sensing layer 330, a lower electrode 340 having a plurality of lower sub-electrodes 341, and an output terminal. The substrate 310 has a cavity therein. The upper electrode 320 is attached to the upper wall of the cavity and electrically connected to the output terminal. The lower electrode 340 is attached to the lower wall of the chamber, and the pressure-sensitive layer 330 is disposed between the upper electrode 320 and the lower electrode 340. And the pressure-sensitive layer 330 is configured to contact and conduct with one of the lower electrode 340 or the upper electrode 320 when the substrate 310 is stressed.

In the above embodiment, when the substrate 310 is subjected to an external pressure, the upper electrode 320, the pressure-sensitive layer 330 and the lower electrode 340 in the cavity are in contact with each other, and the contact area changes with the change of the pressure. And compare in traditional pressure sensor 300, its lower floor electrode 340 is a whole, the utility model provides a pressure sensor 300's lower floor electrode 340 includes a plurality of sub-electrodes 341 of lower floor, and the area of contact of its each sub-electrode and forced induction layer 330 can change along with the change of pressure, and lower floor electrode 340 that constitutes by a plurality of sub-electrodes 341 of lower floor compares in traditional monoblock electrode, and area of contact's rate of change is higher, make the rate of change of resistance higher, thereby the rate of change of the electric current of pressure sensor output is higher, and the range of current change is bigger, has finally improved pressure sensor 300's sensitivity.

With continued reference to fig. 3, in one embodiment, the pressure-sensitive layer 330 is attached to one of the upper electrode 320 and the lower electrode 340.

In the above embodiment, when the pressure sensor 300 is not subjected to an external pressure, and the upper electrode 320 and the lower electrode 340 are deformed along with the substrate 310, the pressure sensing layer 330 is attached to the upper electrode 320 or the lower electrode 340, so that the pressure sensing layer 330 is deformed more easily, and the performance of the pressure sensor 300 is more stable.

With continued reference to fig. 3, in one embodiment, the pressure-sensitive layer 330 is attached to the lower electrode 340.

In the above embodiment, when the upper electrode 320 and the output terminal have a failure such as poor contact, the pressure sensing layer 330 is attached to the lower electrode 340, so that the electrical connection between the upper electrode 320 and the output terminal is prevented from being blocked, and the failure is conveniently checked and processed.

Referring to fig. 3, in one embodiment, the pressure-sensitive layer 330 is formed by a plurality of lower sub-electrodes 341 with a plurality of protrusions.

In the above embodiment, when the pressure sensor 300 is subjected to an external pressure, in addition to the structure of the lower sub-electrodes 341 improving the area change rate of the contact surface with the pressure sensing layer 330, the raised protrusions of the pressure sensing layer 330 also enable the area change rate of the contact surface between the pressure sensing layer 330 and the upper electrode 320. Thus, the rate of change in resistance of the pressure sensor 300 is further improved. That is, the sensitivity of the pressure sensor 300 is further improved.

Referring to fig. 4, in an embodiment, the upper sub-electrodes 321 and the lower sub-electrodes 341 are arranged in rows, and the arrangement direction of the upper sub-electrodes 321 is different from the arrangement direction of the lower sub-electrodes 341.

In the above embodiment, when the pressure sensor 300 is subjected to an external pressure, the upper electrode layer, the pressure sensing layer 330 and the lower electrode 340 are in contact with each other, because the pressure sensing layer 330 can only conduct electricity in the "up-down" direction, and the arrangement direction of the upper electrode 320 is crossed with the arrangement direction of the lower electrode 340, one of the upper sub-electrodes 321 is conducted in the "up-down" direction by the pressure sensing layer 330, so as to transmit the current to one end of the lower electrode 340, and the other end of the lower electrode 340 transmits the current to the other upper sub-electrode 321 through the pressure sensing layer 330, thereby forming a current path. As the pressure applied to the pressure sensor 300 increases, the number of the lower sub-electrodes 341 contacting the pressure sensing layer 330 increases, which corresponds to that the more current branches are formed, and the larger the current finally outputted. Compared with the conventional pressure sensor 300 in which the lower electrode 340 is a whole, the pressure sensor 300 designed by the principle has the advantage that the current change is more sensitive, so that the sensitivity of the pressure sensor 300 is improved.

With reference to fig. 3 and fig. 4, in one embodiment, the lower sub-electrodes 341 are stripe electrodes.

In the above embodiment, based on the principle described in the previous embodiment, the lower sub-electrodes 341 are designed to be relatively thinner strip-shaped electrodes, so that a greater number of strip-shaped electrodes can be arranged in the pressure sensor 300, which means that the scales of the scale become denser. Therefore, the accuracy, i.e., the sensitivity, of the pressure sensor 300 is further improved.

Referring to fig. 4, in an embodiment, the arrangement direction of the upper sub-electrodes 321 is perpendicular to the arrangement direction of the lower sub-electrodes 341.

In the above embodiment, also based on the principle described in the previous embodiment, when the arrangement direction of the plurality of upper sub-electrodes 321 and the arrangement direction of the plurality of lower sub-electrodes 341 are perpendicular to each other, the rate of change of the output current of the pressure sensor 300 is the largest, that is, the sensitivity of the pressure sensor 300 is the highest.

In one embodiment, the upper electrode 320 and the lower electrode 340 are made of a conductive metal material.

The pressure sensor 300 uses a conductive metal material as a material for manufacturing the upper electrode 320 and the lower electrode 340, and has low cost, good mechanical durability, and stable chemical properties.

Referring to fig. 3, in one embodiment, the substrate 310 includes an upper substrate 311 and a lower substrate 311. The upper substrate 311 and the lower substrate 311 are disposed opposite to each other, and a cavity is formed between the upper substrate 311 and the lower substrate 311. The upper electrode 320 is attached to the inner side of the upper substrate 311. The lower electrode 340 is attached to the inner side of the lower substrate 311.

In the above embodiment, the upper substrate 311 and the lower substrate 311 are disposed oppositely to replace the integrally formed substrate 310, and in the manufacturing process, the internal upper electrode 320, the pressure sensing layer 330, the lower electrode 340 and other components are first mounted, and then the upper substrate 311 and the lower substrate 311 are combined. Compared to the integrated substrate 310, the pressure sensor 300 of the present embodiment is more convenient to assemble when the internal components are installed in the cavity of the substrate 310.

With continued reference to fig. 3, in one embodiment, the substrate 310 further includes a spacer layer 313. The spacer layer 313 is disposed between the upper substrate 311 and the lower substrate 311, and forms a cavity between the inner side of the upper substrate 311 and the inner side of the lower substrate 311.

In the above embodiment, the spacer layer 313 is interposed between the upper substrate 311 and the lower substrate 311 such that a space for mounting internal components is formed between the upper substrate 311 and the lower substrate 311. Thus, the upper substrate 311 and the lower substrate 311 are both designed to have a simple flat plate shape, thereby achieving a technical effect and simplifying the manufacturing process of the pressure sensor 300.

The working principle of the pressure sensor 300 provided by the embodiment of the present invention will be further explained with reference to fig. 4 and 5.

Referring to fig. 4, the current flows in from the upper sub-electrode 321 on the right side, the pressure-sensitive layer 330 transmits the current in the upper sub-electrode 321 on the right side to the right end of the lower sub-electrode 341, the current is transmitted from the right end of the lower sub-electrode 341 to the left end of the lower sub-electrode 341, the pressure-sensitive layer 330 transmits the current in the lower sub-electrode 341 on the left end to the upper sub-electrode 321 on the left end, and the current flows out from the upper sub-electrode 321 on the left end. It can be seen from fig. 4 that each of the lower sub-electrodes 341 is a current branch. Therefore, how many current branches determine the magnitude of the current.

Referring to fig. 5, fig. 5 shows a state of internal components of a pressure sensor 300 according to an embodiment of the present invention when a force is applied. When the pressure sensor 300 is subjected to an external pressure, the upper sub-electrode 321 is in an arc shape and contacts the pressure sensing layer 330. As the pressure increases, the base area of the upper electrode 320 and the pressure-sensitive layer 330 increases. In the contact area of the pressure-sensitive layer 330 and the upper sub-electrode 321, the lower sub-electrode 341 in contact with the pressure-sensitive layer 330 forms a current branch of the current path in fig. 4. The higher the pressure, the more current branches naturally, the higher the current. The pressure can be determined by those skilled in the art according to the corresponding relationship between the current and the pressure. Therefore, the pressure sensor 300 designed based on the above principle has higher sensitivity.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A pressure sensor is characterized by comprising a base material, an upper electrode with a plurality of upper sub-electrodes, a pressure sensing layer, a lower electrode with a plurality of lower sub-electrodes and an output end, wherein the upper electrode is provided with a plurality of upper sub-electrodes;

a cavity is formed in the base material;

the upper layer electrode is attached to the upper wall of the cavity and is electrically connected with the output end;

the lower electrode is attached to the lower wall of the cavity;

the pressure induction layer is arranged between the upper electrode and the lower electrode; and

the pressure sensing layer is configured to contact and conduct with one of the lower electrode or the upper electrode when the substrate is stressed.

2. The pressure sensor of claim 1, wherein the pressure sensing layer is attached to one of the upper and lower electrodes.

3. The pressure sensor of claim 1, wherein the pressure sensing layer is attached to the lower electrode.

4. The pressure sensor of claim 3, wherein the pressure sensing layer is raised by a plurality of bumps by the plurality of lower sub-electrodes.

5. The pressure sensor according to claim 1, wherein the upper sub-electrodes and the lower sub-electrodes are arranged in an array, and the arrangement direction of the plurality of upper sub-electrodes is different from the arrangement direction of the plurality of lower sub-electrodes.

6. The pressure sensor of claim 5, wherein the plurality of lower sub-electrodes are strip electrodes.

7. The pressure sensor according to claim 1, wherein the arrangement direction of the plurality of upper sub-electrodes is perpendicular to the arrangement direction of the plurality of lower sub-electrodes.

8. The pressure sensor of claim 1, wherein the upper and lower electrodes are comprised of a conductive metal material.

9. The pressure sensor of claim 1, wherein the substrate comprises an upper substrate and a lower substrate;

the upper-layer base material and the lower-layer base material are oppositely arranged, and the cavity is formed between the upper-layer base material and the lower-layer base material;

the upper electrode is attached to the inner side of the upper substrate;

the lower electrode is attached to the inner side of the lower substrate.

10. The pressure sensor of claim 9, wherein the substrate further comprises a spacer layer;

the spacer layer is arranged between the upper-layer base material and the lower-layer base material, and the cavity is formed between the inner side of the upper-layer base material and the inner side of the lower-layer base material.

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