CN217687505U - Stable beam splitting device of laser beam and laser power meter calibration device - Google Patents

Stable beam splitting device of laser beam and laser power meter calibration device Download PDF

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CN217687505U
CN217687505U CN202221206498.3U CN202221206498U CN217687505U CN 217687505 U CN217687505 U CN 217687505U CN 202221206498 U CN202221206498 U CN 202221206498U CN 217687505 U CN217687505 U CN 217687505U
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polarization beam
beam splitter
polarization
power meter
laser
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王善忠
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Edinburgh Nanjing Opto Electronic Equipment Co ltd
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Edinburgh Nanjing Opto Electronic Equipment Co ltd
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Abstract

The utility model discloses a stable beam splitting device of laser beam and a device calibrated by a laser power meter, which comprises a first polarization beam splitter, a second polarization beam splitter, a first reflector, a first polarization beam combiner, a third polarization beam splitter, a second reflector and a second polarization beam combiner; along the propagation direction of the light path, the first polarization beam splitter, the second polarization beam splitter, the first reflective mirror and the first polarization beam combiner are sequentially arranged, the first polarization beam splitter, the second reflective mirror and the second polarization beam combiner are sequentially arranged, the first polarization beam splitter, the third polarization beam splitter and the first polarization beam combiner are sequentially arranged, and the first polarization beam splitter, the third polarization beam splitter and the second polarization beam combiner are sequentially arranged. The device can stably and accurately split the laser beams of various energy levels; meanwhile, the purposes of calibrating and monitoring the high-power laser power meter by using the high-power optical fiber laser beam are achieved.

Description

Stable beam splitting device of laser beam and laser power meter calibration device
Technical Field
The utility model relates to a stable beam split device of laser beam and device that laser power meter markd belongs to the laser beam split and the laser power meter technical field who marks.
Background
High-power fiber lasers with output powers of tens of watts, hundreds of watts, thousands of watts or even tens of thousands of watts have been produced in large scale and applied to industrial production practices, and the output powers of the high-power fiber lasers which have penetrated all industries of industrial production must be measured and monitored frequently by using laser power meters.
In order to ensure accurate measurement and monitoring of the output power of the laser, the power meters used in the industrial production field must be periodically calibrated and numerically corrected, which requires the development of a high-precision and stable calibration device for the laser power meter.
The calibration of laser power of thousands of watts or even tens of thousands of watts firstly requires a stable high-power fiber laser light source with instrument level, but high-power fiber lasers with stable physical parameters and meeting the use requirements of test instruments do not exist. Because the polarization direction of the laser beam output by the high-power fiber laser is randomly changed and uncertain, most of the beam splitters suitable for splitting the high-power laser are dielectric film beam splitters, and the dielectric film beam splitters are polarization-dependent, the power of the split laser beam has serious randomness and uncertainty, which brings great difficulty to the development of a test instrument of the high-power laser, and the calibration of a power meter by using the high-power fiber laser cannot be realized. Until now, no effective scheme can stably and reliably split the fiber laser with random polarization, and no relevant report about the application of the fiber laser with random polarization to the calibration of a high-power laser power meter exists.
SUMMERY OF THE UTILITY MODEL
The utility model provides a laser beam's stable beam split device and laser power meter demarcation's device can be with the stable, accurate beam split of the laser beam of each energy rank, can become the random high power optic fibre laser beam of polarization direction into complete controllable laser source, has realized utilizing high power optic fibre laser beam to carry out the purpose that high power laser power meter markd and the on-the-spot monitoring.
For solving the technical problem, the utility model discloses the technical scheme who adopts as follows:
a stable splitting method of a laser beam comprises the following steps:
1) Dividing the laser beam It into a first beam Ia and a second beam Ib, wherein It, ia and Ib respectively represent the light intensity of the corresponding beams, it = Ia + Ib;
2) Splitting the first light beam Ia into a first A light beam n% Ia and a first B light beam (100-n)% Ia; splitting the second light beam Ib into a second A light beam n% Ib and a second B light beam (100-n)% Ib;
3) Combining the first A light beam n% Ia and the second A light beam n% Ib to obtain n% It; combining the first B beam (100-n)% Ia and the second B beam (100-n)% Ib to obtain (100-n)% It; stable splitting of the laser beam is achieved.
In step 1), due to the randomness of the polarization direction of the light output by the fiber laser itself, the intensities of the two separated beams are different, and the intensities of the two separated beams also change with the change of the polarization direction of the laser, and fluctuate, sometimes the intensity of the first beam Ia is a little, sometimes the intensity of the second beam Ib is a little. That is, although the laser power output from the fiber laser may be relatively stable, the intensity of the two split beams is at a volt and uncertain due to the uncertainty of the polarization direction. For this purpose, in step 2-3), the first beam Ia and the second beam Ib are split according to the ratio of n (1-n), respectively, n% of laser power is extracted from the two beams, respectively, and the remaining (1-n)% of light energy is extracted, the first beam n% Ia and the second beam n% Ib are combined to be n% of the whole laser beam, and the first beam (100-n)% Ia and the second beam (100-n)% Ib are combined to be (1-n)% Ib of the whole laser beam, so that the splitting accuracy is fundamentally ensured, and the problem of inaccurate splitting caused by randomness, uncertainty and the like of the polarization direction of light is fundamentally avoided.
The method realizes the accurate light splitting of the fiber laser with unstable polarization. The influence on light splitting due to uncertainty and randomness of the polarization state of the fiber laser is eliminated, and the laser beam can be split accurately in real time according to a specific proportion no matter how the polarization direction of the fiber laser changes.
In order to reduce the cost, in step 1), the laser beam It is expanded and then divided into a first beam Ia and a second beam Ib. The purpose of beam expansion is to reduce the power density of the laser beam to reduce the quality requirements for subsequent optical components.
For convenience of arrangement, in step 1), the laser beam It is divided into a first beam Ia and a second beam Ib which are perpendicular to each other; in step 2), the first light beam Ia is divided into a first A light beam n% Ia and a first B light beam (100-n)% Ia which are perpendicular to each other; the second light beam Ib is split into a second a light beam n% Ib and a second B light beam (100-n)% Ib perpendicular to each other.
The method for calibrating the laser power meter by using the stable light splitting method of the laser beam comprises the following steps:
firstly, detecting n% It by using a sampling laser power meter, detecting (100-n)% It by using a standard laser power meter (namely, detecting n% It by using the sampling laser power meter and detecting (100-n)% It by using the standard laser power meter are carried out simultaneously, and the following similar expressions have similar meanings), fitting the obtained reading of the sampling laser power meter and the reading of the standard laser power meter, and obtaining a functional relation f1 between the reading of the sampling laser power meter and the reading of the standard laser power meter;
secondly, detecting n% It by using a sampling laser power meter, detecting (100-n)% It by using a laser power meter to be detected, fitting the obtained reading of the sampling laser power meter and the reading of the laser power meter to be detected, and obtaining a functional relation f2 between the reading of the sampling laser power meter and the reading of the laser power meter to be detected;
and finally, converting the f1 and the f2 to obtain a functional relation f3 between the reading of the laser power meter to be tested and the reading of the standard laser power meter, and calibrating the standard laser power meter by using the functional relation f 3. In practical application, the reading value of the standard laser power meter can be inverted according to any reading value of the laser power meter to be measured.
A stable beam splitting device for laser beams comprises a first polarization beam splitter, a second polarization beam splitter, a first reflective mirror, a first polarization beam combiner, a third polarization beam splitter, a second reflective mirror and a second polarization beam combiner;
the first polarization beam splitter, the second polarization beam splitter, the first reflector and the first polarization beam combiner are sequentially arranged along the transmission direction of the reflection light path of the first polarization beam splitter and the transmission light path of the second polarization beam splitter;
the first polarization beam splitter, the second reflector and the second polarization beam combiner are sequentially arranged along the transmission direction of the reflection light path of the first polarization beam splitter and the reflection light path of the second polarization beam splitter;
the first polarization beam splitter, the third polarization beam splitter and the first polarization beam combiner are sequentially arranged along the transmission direction of a transmission light path of the first polarization beam splitter and the transmission direction of a reflection light path of the third polarization beam splitter;
the first polarization beam splitter, the third polarization beam splitter and the second polarization beam combiner are sequentially arranged along the transmission direction of the transmission light path of the first polarization beam splitter and the transmission light path of the third polarization beam splitter.
In order to reduce the cost, the stable beam splitting device for the laser beam further comprises a beam expanding lens, and the beam expanding lens is arranged at the upstream of the first polarization beam splitter along the propagation direction of the light path. The direction from upstream to downstream coincides with the optical path propagation direction.
The beam splitting ratios of the second polarizing beam splitter and the third polarizing beam splitter are the same.
The spectral ratio of the first polarization beam splitter is 1. Of course, other splitting ratios may be used.
The light splitting method of the stable light splitting device by utilizing the laser beam comprises the following steps:
1) A laser beam It emitted by the high-power fiber laser is divided into a first beam Ia and a second beam Ib which are perpendicular to each other by a first polarization beam splitter, wherein the It, ia and Ib respectively represent the light intensity of the corresponding beams, and It = Ia + Ib;
2) The first light beam Ia is divided into a first A light beam n% Ia and a first B light beam (100-n)% Ia which are perpendicular to each other after passing through a third polarization beam splitter; the second light beam Ib passes through a second polarization beam splitter and is divided into a second A light beam n% Ib and a second B light beam (100-n)% Ib which are perpendicular to each other;
3) The first A light beam n% Ia and the second A light beam n% Ib reflected by the first reflector are combined by a first polarization beam combining mirror to obtain n% (Ia + Ib) = n% It; and (5) combining the first B light beam (100-n)% Ia and the second B light beam (100-n)% Ib reflected by the second reflector by using a second polarization beam combining mirror to obtain (100-n)% (Ia + Ib) = (100-n)% It, and thus stable light splitting of the laser light beam is completed.
Preferably, in step 1), the laser beam It emitted by the high-power fiber laser is expanded by the beam expander, and then is split into the first beam Ia and the second beam Ib perpendicular to each other by the first polarization beam splitter.
Generally, any physical quantity is a function of time and is subject to fluctuating changes over time. The output power of fiber lasers is no exception. If the reading of the standard laser power meter is directly tested by using the fiber laser, and then the reading of the laser power meter to be tested is tested, because the time of two measurements is different, an error is introduced due to the fluctuation of the laser output power, and therefore, the calibration operation of the power meter cannot be simply carried out by comparing two measurement values; previously, our solution divides a randomly polarized fiber laser into a certain proportion of two beams, one of which is the sampling beam n% It and the other is the measurement beam (100-n)% It. The numerical values of the sampling light beams and the measuring light beams are read simultaneously by adopting a synchronous double-sampling mode, and the time fluctuation error of laser output is eliminated.
A device for applying an industrial-grade fiber laser to laser power meter calibration comprises a first polarization beam splitter, a second polarization beam splitter, a first reflector, a first polarization beam combiner, a third polarization beam splitter, a second reflector, a second polarization beam combiner, a first laser power meter and a second laser power meter; the first laser power meter is a sampling laser power meter, and the second laser power meter is a laser power meter to be measured or a standard laser power meter;
the first polarization beam splitter, the second polarization beam splitter, the first reflector, the first polarization beam combiner and the first laser power meter are sequentially arranged along the transmission direction of the reflection light path of the first polarization beam splitter and the transmission light path of the second polarization beam splitter;
the first polarization beam splitter, the second reflector, the second polarization beam combiner and the second laser power meter are sequentially arranged along the transmission direction of the reflection light path of the first polarization beam splitter and the reflection light path of the second polarization beam splitter;
the first polarization spectroscope, the third polarization spectroscope, the first polarization beam combiner and the first laser power meter are sequentially arranged along the transmission direction of a transmission light path of the first polarization spectroscope and the transmission direction of a reflection light path of the third polarization spectroscope;
the first polarization spectroscope, the third polarization spectroscope, the second polarization beam combiner and the second laser power meter are sequentially arranged along the transmission direction of the transmission light path of the first polarization spectroscope and the transmission light path of the third polarization spectroscope.
The splitting ratios of the second polarization beam splitter and the third polarization beam splitter are the same.
In order to reduce the cost, the device also comprises a beam expander, and the beam expander is arranged at the upstream of the first polarization beam splitter along the propagation direction of the optical path.
The sampling laser power meter is arranged on the sampling light path, and the laser power meter to be tested or the standard laser power meter is arranged on the testing light path, so that the power of two paths of lasers can be read simultaneously, and the change of reading difference of the two paths caused by time is eliminated.
In order to facilitate reading, the device for applying the industrial fiber laser to laser power meter calibration further comprises a sampler, and the first laser power meter and the second laser power meter are both connected with the sampler and transmit data to the sampler at the same time.
The method for calibrating the laser power meter by using the device for applying the industrial-grade fiber laser to calibration of the laser power meter comprises the following steps:
1) Dividing a laser beam of the high-power fiber laser into a first beam Ia and a second beam Ib which are perpendicular to each other through an It first polarization beam splitter, wherein It, ia and Ib respectively represent the light intensity of the corresponding beams, and It = Ia + Ib;
2) The first light beam Ia is divided into a first A light beam n% Ia and a first B light beam (100-n)% Ia which are perpendicular to each other after passing through a third polarization beam splitter; the second light beam Ib passes through a second polarization beam splitter and is divided into a second A light beam n% Ib and a second B light beam (100-n)% Ib which are perpendicular to each other;
3) The first light beam n% Ia and the second light beam n% Ib reflected by the first reflector are combined by the first polarization beam combining mirror to obtain n% (Ia + Ib) = n% It, and the n% (Ia + Ib) = n% It is detected by the first laser power meter; the first B light beam (100-n)% Ia and the second B light beam (100-n)% Ib reflected by the second reflector are combined by the second polarization beam combiner to obtain (100-n)% (Ia + Ib) = (100-n)% It, and the (100-n)% It is detected by a second laser power meter, the first laser power meter is a sampling laser power meter, the second laser power meter is a laser power meter to be detected or a standard laser power meter, and the specific process is as follows:
firstly, a standard laser power meter is installed, the reading of the sampling laser power meter and the reading of the standard laser power meter are obtained simultaneously by a double-sampling method, and a functional relation f1 between the reading of the sampling laser power meter and the reading of the standard laser power meter is obtained by fitting;
secondly, replacing the standard laser power meter with a laser power meter to be tested, simultaneously obtaining the reading of the sampling laser power meter and the reading of the laser power meter to be tested by a double-sampling method, and fitting to obtain a functional relation f2 between the reading of the sampling laser power meter and the reading of the laser power meter to be tested;
and finally, converting f1 and f2 to obtain a functional relation f3 between the reading of the laser power meter to be measured and the reading of the standard laser power meter, and calibrating the standard laser power meter by using the f 3. In practical application, the reading value of the standard laser power meter can be inverted according to any reading value of the laser power meter to be measured.
In the step 1), the laser beam It is expanded and then divided into the first beam Ia and the second beam Ib. The purpose of beam expansion is to reduce the power density of the laser beam to reduce the quality requirements on subsequent optical components.
In the step 3), the readings of the first laser power meter (sampling laser power meter) and the second laser power meter (laser power meter to be measured or standard laser power meter) are simultaneously read through the sampler.
In the above step 3), no matter how unstable the relative intensities of the two separated beams Ia and Ib are due to uncertainty of laser polarization, the optical power detected by the first laser power meter is n% of the total laser output power, which is determined; and the optical power detected by the second laser power meter is (100-n)% of the total power of the laser output, which is also a determined value.
The laser output power changes with time and sometimes shows large fluctuation, and the precision of the measuring instrument is also influenced.
The high power values for different types of lasers are defined differently. High power is generally considered to be a fiber laser power greater than 100W.
The technology not mentioned in the present invention refers to the prior art.
The utility model discloses stable beam split method and device of laser beam can be with the laser beam of each energy rank stable, divide beam accurately, including the random high power optic fibre laser beam of polarization direction, thoroughly eliminated because of high power optic fibre laser beam because of polarization direction random etc. and the problem that is difficult to divide intensity according to accurate proportion beam split that leads to; the method realizes the purposes of calibrating and monitoring the high-power laser power meter on site by using the high-power optical fiber laser beam, and further eliminates the time fluctuation error of laser output by adopting a method of simultaneously reading the numerical values of the sampling beam and the measuring beam.
Drawings
Fig. 1 is a diagram of the optical path structure of the present invention applying an industrial fiber laser to the calibration of a laser power meter (in the dashed line frame, the optical path structure part of a stable beam splitting device for laser beams is shown in the figure);
fig. 2 is a schematic structural diagram of the device for applying the industrial-grade fiber laser to calibration of the laser power meter according to the present invention;
FIG. 3 is a functional relationship f1 between the reading of the sampling laser power meter and the reading of the standard laser power meter in example 2;
FIG. 4 is a functional relationship f2 between the reading of the sampling laser power meter and the reading of the laser power meter to be measured in example 2;
fig. 5 is a functional relationship f3 between the reading of the laser power meter to be measured and the reading of the standard laser power meter in embodiment 2;
in the figure, 1 is a first polarization beam splitter, 2 is a second polarization beam splitter, 3 is a first reflective mirror, 4 is a first polarization beam combiner, 5 is a third polarization beam splitter, 6 is a second reflective mirror, 7 is a second polarization beam combiner, 8 is a first laser power meter, 9 is a second laser power meter, 10 is a high-power fiber laser, 11 is a beam expander, 12 is a stable beam splitting device of a laser beam, and 13 is a sampler.
Detailed Description
For better understanding of the present invention, the following embodiments are provided to further explain the content of the present invention, but the present invention is not limited to the following embodiments.
Example 1
As shown in fig. 1, a stable splitting device for laser beams includes a beam expander, a first polarization beam splitter, a second polarization beam splitter, a first reflective mirror, a first polarization beam combiner, a third polarization beam splitter, a second reflective mirror, and a second polarization beam combiner, where splitting ratios of the second polarization beam splitter and the third polarization beam splitter are the same;
the beam expander and the first polarization beam splitter are sequentially arranged along the direction of the light path;
the first polarization beam splitter, the second polarization beam splitter, the first reflector and the first polarization beam combiner are sequentially arranged along the transmission direction of the reflection light path of the first polarization beam splitter and the transmission light path of the second polarization beam splitter;
the first polarization beam splitter, the second reflector and the second polarization beam combiner are sequentially arranged along the transmission direction of the reflection light path of the first polarization beam splitter and the reflection light path of the second polarization beam splitter;
the first polarization beam splitter, the third polarization beam splitter and the first polarization beam combiner are sequentially arranged along the transmission direction of the transmission light path of the first polarization beam splitter and the transmission direction of the reflection light path of the third polarization beam splitter;
the first polarization beam splitter, the third polarization beam splitter and the second polarization beam combiner are sequentially arranged along the transmission direction of the transmission light path of the first polarization beam splitter and the transmission light path of the third polarization beam splitter.
The light splitting method using the stable light splitting device for laser beams is characterized in that: the method comprises the following steps:
1) A laser beam It emitted by the high-power fiber laser is expanded by a beam expander, and then is divided into a first beam Ia and a second beam Ib which are perpendicular to each other by a first polarization beam splitter (the splitting ratio is 50%:50%, or 40%:60%, 30%:70%, 20%:80% or other proportions in practice), wherein the first beam Ia and the second beam Ib are both pure linear polarized light, in this example, as shown in fig. 1, the first beam Ia faces to the right, the second beam Ib faces to the upper, wherein It, ia and Ib respectively represent the light intensity of the corresponding beam, and It = Ia + Ib; due to the randomness of the polarization direction of the light output by the fiber laser, although the laser power output from the high-power fiber laser may be relatively stable, even if the splitting ratio of the first polarization beam splitter is 50%:50%, the intensities of the two beams of light of the first light beam Ia and the second light beam Ib obtained are also different;
2) The first light beam Ia is divided into a first light beam a n% Ia and a first light beam B (100-n)% Ia which are perpendicular to each other by a third polarization beam splitter (the splitting ratio is n%: 100-n)%, in this example, n is 0.1, and n can be 0.5, 2, 5 or other values through practice); the second light beam Ib is divided into a second A light beam n% Ib and a second B light beam (100-n)% Ib after passing through a second polarization spectroscope (the splitting ratio is the same as that of the third polarization spectroscope, and n is also 0.1 in the example);
3) The first a light beam n% Ia and the second a light beam n% Ib reflected by the first mirror are combined by the first polarization beam combining mirror, resulting in n% (Ia + Ib) = n% It, in this example 0.1% It; the first B light beam (100-n)% Ia and the second B light beam (100-n)% Ib reflected by the second mirror are combined by the second polarization combining mirror, resulting in (100-n)% (Ia + Ib) = (100-n)% It, in this example 99.9%.
The method realizes the accurate light splitting of the fiber laser with unstable polarization. The influence on light splitting due to uncertainty and randomness of the polarization state of the fiber laser is eliminated, and the laser beam can be always split accurately in real time according to a specific proportion no matter how the polarization direction of the fiber laser changes.
Example 2
As shown in fig. 1, a device for applying an industrial-grade fiber laser to laser power meter calibration includes a beam expander, a first polarization beam splitter, a second polarization beam splitter, a first reflective mirror, a first polarization beam combiner, a third polarization beam splitter, a second reflective mirror, a second polarization beam combiner, a first laser power meter, and a second laser power meter; the splitting proportion of the second polarizing beam splitter and the third polarizing beam splitter is the same; the first laser power meter is a sampling laser power meter, and the second laser power meter is a laser power meter to be tested or a standard laser power meter; the beam expander and the first polarization beam splitter are sequentially arranged along the propagation direction of the light path;
the first polarization beam splitter, the second polarization beam splitter, the first reflector, the first polarization beam combiner and the first laser power meter are sequentially arranged along the transmission direction of the reflection light path of the first polarization beam splitter and the transmission light path of the second polarization beam splitter;
the first polarization beam splitter, the second reflector, the second polarization beam combiner and the second laser power meter are sequentially arranged along the transmission direction of the reflection light path of the first polarization beam splitter and the reflection light path of the second polarization beam splitter;
the first polarization spectroscope, the third polarization spectroscope, the first polarization beam combiner and the first laser power meter are sequentially arranged along the transmission direction of a transmission light path of the first polarization spectroscope and the transmission direction of a reflection light path of the third polarization spectroscope;
the first polarization spectroscope, the third polarization spectroscope, the second polarization beam combiner and the second laser power meter are sequentially arranged along the transmission direction of the transmission light path of the first polarization spectroscope and the transmission light path of the third polarization spectroscope.
To facilitate simultaneous reading, as shown in fig. 2, the first laser power meter and the second laser power meter are both connected to the sampler and transmit the detected data to the sampler simultaneously.
The method for calibrating the laser power meter by using the device for applying the industrial-grade fiber laser to calibration of the laser power meter comprises the following steps:
1) A laser beam It emitted by a high-power fiber laser (2000W) is expanded by a beam expander, and then is divided into a first beam Ia and a second beam Ib which are perpendicular to each other by a first polarization beam splitter (the splitting ratio is 50%:50%, and may be other proportions such as 40%:60%, 30%:70%, 20%:80% and the like by practice), wherein the first beam Ia and the second beam Ib are both pure linear polarized light, in this example, as shown in fig. 1, the first beam Ia is directed to the right, the second beam Ib is directed upwards, wherein It, ia and Ib respectively represent the light intensity of the corresponding beam, and It = Ia + Ib; due to the randomness of the polarization direction of the light output by the fiber laser, although the laser power output by the high-power fiber laser may be relatively stable, even if the splitting ratio of the first polarization beam splitter is 50%:50%, the intensities of the two beams of light of the first light beam Ia and the second light beam Ib obtained are different;
2) The first light beam Ia is divided into a first A light beam n% Ia and a first B light beam (100-n)% Ia which are perpendicular to each other after passing through a third polarization beam splitter (the splitting ratio is n%: 100-n)%, in the example, n is 0.1, and n can be 0.5, 2, 5 and other values in practice); the second light beam Ib is divided into a second A light beam n% Ib and a second B light beam (100-n)% Ib after passing through a second polarization spectroscope (the splitting ratio is the same as that of the third polarization spectroscope, and n is also 0.1 in the example);
3) The first A light beam n% Ia and the second A light beam n% Ib reflected by the first reflector are combined by the first polarization beam combining mirror to obtain n% (Ia + Ib) = n% It, and the n% (Ia + Ib) = n% It is detected by the first laser power meter, which is 0.1% It in the example; the first B light beam (100-n)% Ia and the second B light beam (100-n)% Ib reflected by the second mirror are combined by the second polarization combining mirror, resulting in (100-n)% (Ia + Ib) = (100-n)% It, in this case 99.9%;
no matter how unstable the relative intensity of the two separated beams Ia and Ib is due to uncertainty of laser polarization, the optical power detected by the first laser power meter is n% of the total power of the laser output, which is determined; the optical power detected by the second laser power meter is (100-n)% of the total laser output power, and is also a determined value;
generally, any physical quantity is a function of time and fluctuates with time. The output power of the fiber laser is no exception. If the reading of the standard laser power meter is directly tested by the fiber laser, and then the reading of the laser power meter to be tested is tested, because the time of the two measurements is different, errors are introduced due to the fluctuation of the laser output power, and therefore, the calibration operation of the power meter cannot be simply carried out by comparing the two measurement values; the polarization-randomized fiber laser is split into two beams of light of a certain ratio, one of which is a sampling beam n% It and the other of which is a measuring beam (100-n)% It. The method comprises the following steps of simultaneously reading numerical values of a sampling light beam and a measuring light beam in a synchronous double-sampling mode, and eliminating time fluctuation errors of laser output, wherein the specific calibration process comprises the following steps:
firstly, a standard laser power meter is installed, the sampling laser power meter and the standard laser power meter are both connected with a sampler, detected data are simultaneously transmitted to the sampler, namely, the reading of the sampling laser power meter and the reading of the standard laser power meter are simultaneously obtained, and a functional relation f1 between the reading of the sampling laser power meter and the reading of the standard laser power meter is obtained through fitting, as shown in fig. 3;
secondly, replacing the standard laser power meter with a laser power meter to be tested, connecting the sampling laser power meter and the laser power meter to be tested with the sampler, simultaneously transmitting the detected data to the sampler, namely simultaneously obtaining the reading of the sampling laser power meter and the reading of the laser power meter to be tested, and fitting to obtain a functional relation f2 between the reading of the sampling laser power meter and the reading of the laser power meter to be tested, as shown in fig. 4;
and finally, converting the f1 and the f2 to obtain a functional relation f3 between the reading of the laser power meter to be tested and the reading of the standard laser power meter, and calibrating the standard laser power meter by using the f3 as shown in fig. 5.
The accuracy of the light splitting reaches 100%, the high-power laser with random polarization directions is accurately calibrated by accurately splitting the industrial high-power fiber laser, in the embodiment, the used standard laser power meter is Pronto-3k, the reference laser power meter is UP50M-50W-W9-D0, and the device and the method are verified to be used for calibration, so that the accuracy of the standard laser power meter is not reduced.

Claims (9)

1. A stable beam splitting device of a laser beam is characterized in that: the device comprises a first polarized beam splitter (1), a second polarized beam splitter (2), a first reflective mirror (3), a first polarized beam combiner (4), a third polarized beam splitter (5), a second reflective mirror (6) and a second polarized beam combiner (7);
the first polarization beam splitter (1), the second polarization beam splitter (2), the first reflective mirror (3) and the first polarization beam combiner (4) are sequentially arranged along the transmission direction of the reflection light path of the first polarization beam splitter (1) and the transmission light path of the second polarization beam splitter (2);
the first polarization beam splitter (1), the second polarization beam splitter (2), the second reflective mirror (6) and the second polarization beam combiner (7) are sequentially arranged along the transmission direction of the reflection light path of the first polarization beam splitter (1) and the reflection light path of the second polarization beam splitter (2);
the first polarization beam splitter (1), the third polarization beam splitter (5) and the first polarization beam combiner (4) are sequentially arranged along the transmission direction of a transmission light path of the first polarization beam splitter (1) and a reflection light path of the third polarization beam splitter (5);
the first polarization beam splitter (1), the third polarization beam splitter (5) and the second polarization beam combiner (7) are sequentially arranged along the transmission direction of the transmission light path of the first polarization beam splitter (1) and the transmission light path of the third polarization beam splitter (5).
2. The apparatus for stable splitting of a laser beam according to claim 1, wherein: the polarization beam splitter further comprises a beam expander (11), and the beam expander (11) is arranged at the upstream of the first polarization beam splitter (1) along the propagation direction of the light path.
3. The stabilized splitting apparatus for a laser beam according to claim 1 or 2, wherein: the splitting proportion of the second polarization beam splitter (2) and the third polarization beam splitter (5) is the same.
4. The stabilized splitting apparatus for a laser beam according to claim 1 or 2, wherein: the splitting ratio of the first polarization beam splitter (1) is 1.
5. The utility model provides a device that is applied to laser power meter demarcation with industrial grade fiber laser which characterized in that: the device comprises a first polarization beam splitter (1), a second polarization beam splitter (2), a first reflective mirror (3), a first polarization beam combiner (4), a third polarization beam splitter (5), a second reflective mirror (6), a second polarization beam combiner (7), a first laser power meter (8) and a second laser power meter (9); the first laser power meter (8) is a sampling laser power meter, and the second laser power meter (9) is a laser power meter to be tested or a standard laser power meter;
along the transmission direction of the reflection light path of the first polarization spectroscope (1) and the transmission light path of the second polarization spectroscope (2), the first polarization spectroscope (1), the second polarization spectroscope (2), the first reflective mirror (3), the first polarization beam combining mirror (4) and the first laser power meter (8) are arranged in sequence;
along the transmission direction of the reflection light path of the first polarization spectroscope (1) and the reflection light path of the second polarization spectroscope (2), the first polarization spectroscope (1), the second polarization spectroscope (2), the second reflective mirror (6), the second polarization beam combiner (7) and the second laser power meter (9) are arranged in sequence;
the first polarization beam splitter (1), the third polarization beam splitter (5), the first polarization beam combiner (4) and the first laser power meter (8) are sequentially arranged along the transmission direction of a transmission light path of the first polarization beam splitter (1) and the transmission direction of a reflection light path of the third polarization beam splitter (5);
along the transmission direction of the transmission light path of the first polarization spectroscope (1) and the transmission light path of the third polarization spectroscope (5), the first polarization spectroscope (1), the third polarization spectroscope (5), the second polarization beam combiner (7) and the second laser power meter (9) are arranged in sequence.
6. The apparatus for applying industrial grade fiber laser for laser power meter calibration as claimed in claim 5, wherein: the sampler (13) is further included, and the first laser power meter (8) and the second laser power meter (9) are connected with the sampler (13) and simultaneously transmit data to the sampler (13).
7. The apparatus for applying industrial grade fiber laser for laser power meter calibration as claimed in claim 5 or 6, wherein: the polarization beam splitter further comprises a beam expander (11), and the beam expander (11) is arranged at the upstream of the first polarization beam splitter (1) along the propagation direction of the light path.
8. The apparatus for applying industrial grade fiber laser to laser power meter calibration as claimed in claim 5 or 6, wherein: the splitting proportion of the second polarization beam splitter (2) and the third polarization beam splitter (5) is the same.
9. The apparatus for applying industrial grade fiber laser for laser power meter calibration as claimed in claim 5 or 6, wherein: the splitting ratio of the first polarization beam splitter (1) is 1.
CN202221206498.3U 2022-05-19 2022-05-19 Stable beam splitting device of laser beam and laser power meter calibration device Active CN217687505U (en)

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CN202221206498.3U CN217687505U (en) 2022-05-19 2022-05-19 Stable beam splitting device of laser beam and laser power meter calibration device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221206498.3U CN217687505U (en) 2022-05-19 2022-05-19 Stable beam splitting device of laser beam and laser power meter calibration device

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