CN217687354U

CN217687354U - Silicon epitaxial furnace cooling water flow early warning device

Info

Publication number: CN217687354U
Application number: CN202221534623.3U
Authority: CN
Inventors: 张文; 章瑜; 顾广安
Original assignee: WAFER WORKS EPITAXIAL CORP
Current assignee: WAFER WORKS EPITAXIAL CORP
Priority date: 2022-06-17
Filing date: 2022-06-17
Publication date: 2022-10-28
Anticipated expiration: 2032-06-17

Abstract

The utility model discloses a silicon epitaxial furnace cooling water flow early warning device, including control module, flow sensor and early warning circuit, flow sensor is used for detecting the cooling water yield and changes it into signal of telecommunication and send its characterized in that to control module: the control module comprises a main control unit and two electromagnetic relays, coils of the two relays are positioned in the control module, and the main control unit controls the on-off of the coils according to the received cooling water quantity signals; the contact groups of the electromagnetic relay are positioned in the early warning circuit, the two contact groups are also connected in series, the early warning circuit is provided with an alarm unit, and when the two contact groups are both connected, the alarm unit sends out an alarm signal; the two electromagnetic relays comprise at least one time delay relay. When the equipment runs, if the detector is in a flash-off state, the relation feedback signal of the delay relay cannot be interrupted, the equipment cannot be alarmed and stopped, and the phenomenon of false alarm of cooling water flow is successfully improved.

Description

Silicon epitaxial furnace cooling water flow early warning device

Technical Field

The utility model relates to a LPE3061 board cooling water flow control technical field, concretely relates to silicon epitaxial furnace cooling water flow early warning device.

Background

At present, the LPE361 extension equipment adopts a cooling mode in the running process of the equipment, and a water pump is operated to generate water flow to cool a reaction cavity of the equipment. As the epitaxial process is required to be 1000-1100 ℃, the reaction temperature is high, the cooling water is very important, and the equipment needs to monitor the flow of the cooling water in real time to ensure the temperature stability of the reaction cavity. In the operation process of the equipment, the cooling water flow alarm is stopped, but when an engineer goes to check on site, the cooling water flow of the equipment is normal, and the condition of too low flow does not occur.

In order to improve the cooling water flow alarming phenomenon, the running state of a cooling water flow detector of a machine table is monitored, the phenomenon of flash of the flow detector is found, and equipment is alarmed to stop when the detector flashes. According to the phenomenon judgment, the water flow alarm is a machine false alarm and needs to be improved and filtered.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to solve the not enough of above-mentioned prior art, provide a silicon epitaxial furnace cooling water flow early warning device.

In order to solve the technical problem, the utility model discloses a technical scheme be: the utility model provides a silicon epitaxial furnace cooling discharge early warning device, includes control module, flow sensor and early warning circuit, flow sensor is used for detecting the cooling water yield and changes it into signal of telecommunication and send control module, its characterized in that: the control module comprises a main control unit and two electromagnetic relays, coils of the two relays are positioned in the control module, and the main control unit controls the on-off of the coils according to the received cooling water quantity signals; the contact groups of the electromagnetic relay are positioned in the early warning circuit, the two contact groups are also connected in series, the early warning circuit is provided with an alarm unit, and when the two contact groups are both connected, the alarm unit sends out an alarm signal; the two electromagnetic relays comprise at least one time delay relay.

Furthermore, control module still includes power module and MOS pipe, power module is used for supplying power for coil, main control unit and MOS pipe, the g utmost point of MOS pipe is connected to the main control unit, and the s utmost point ground connection of MOS pipe, the coil of electromagnetic relay is then connected to the d utmost point.

Furthermore, the time delay switch time of the time delay relay is 5 seconds, the coil of the time delay relay is a power-off time delay coil, and the contact group is a normally closed contact.

The technical scheme shows that the invention has the following advantages: when the equipment runs, if the detector is in a flash-off state, the relation feedback signal of the delay relay cannot be interrupted, the equipment cannot be alarmed and stopped, and the phenomenon of false alarm of cooling water flow is successfully improved.

Drawings

Fig. 1 is a functional schematic diagram of the present invention.

Detailed Description

The following description will specifically explain embodiments of the present invention with reference to the accompanying drawings.

As shown in figure 1, the utility model discloses a silicon epitaxial furnace cooling water flow early warning device includes power module, control module, flow sensor and early warning circuit. The flow sensor is used for detecting the cooling water amount and converting the cooling water amount into an electric signal to be sent to the control module, and a plurality of water flow sensors can be arranged in the cooling water channel to obtain an average value and reduce errors. The control module comprises a main control unit, a high-voltage mos tube and two electromagnetic relays, wherein the mos tube can adopt an NMOS tube, and the high voltage is conducted. The main control unit can adopt an ARM system chip and the like, and outputs a voltage signal to the g pole of the NMOS tube according to the acquired flow signal. The coils of the two relays are located in the control module. The power supply module is used for supplying power to the coil, the main control unit, the MOS tube and other units, the main control unit is connected with the g pole of the MOS tube, the s pole of the MOS tube is grounded, and the d pole is connected with the coil of the electromagnetic relay.

The contact group of the electromagnetic relay is positioned in the early warning circuit, the two contact groups are connected in series, and the early warning circuit is provided with an alarm unit which can be a buzzer or an alarm lamp. When the two contact sets are both connected, the alarm unit sends out an alarm signal; the two electromagnetic relays at least comprise a delay relay, and the delay switching time of the delay relay is 5 seconds.

In this embodiment, the coil is a power-off delay coil, and the contact group is a normally closed contact. When the flow rate of the flow sensor is normally reduced, the voltage of the g pole of the MOS tube of the output value of the main control module is reduced, when the voltage is lower than a threshold value, the MOS tube is closed, the two relays are powered off, the contact is closed, and the alarm gives a normal alarm; when the flow rate of the flow sensor is instantaneously reduced, the voltage of the g pole is reduced, when the flow rate is lower than a threshold value, the MOS tube is closed, the relay coils are all powered off, the contact of the conventional electromagnetic relay is closed, the contact of the delay relay is not closed, and an alarm cannot be given. Thereby filtering the fluctuation signal.

Claims

1. The utility model provides a silicon epitaxial furnace cooling discharge early warning device, includes control module, flow sensor and early warning circuit, flow sensor is used for detecting the cooling water yield and changes it into signal of telecommunication and send control module, its characterized in that: the control module comprises a main control unit and two electromagnetic relays, coils of the two relays are positioned in the control module, and the main control unit controls the on-off of the coils according to the received cooling water quantity signals; the contact groups of the electromagnetic relay are positioned in the early warning circuit, the two contact groups are also connected in series, the early warning circuit is provided with an alarm unit, and when the two contact groups are both connected, the alarm unit sends out an alarm signal; the two electromagnetic relays comprise at least one time delay relay.

2. The silicon epitaxial furnace cooling water flow early warning device of claim 1, characterized in that: the control module further comprises a power supply module and an MOS (metal oxide semiconductor) tube, the power supply module is used for supplying power to the coil, the main control unit and the MOS tube, the main control unit is connected with the g pole of the MOS tube, the s pole of the MOS tube is grounded, and the d pole of the MOS tube is connected with the coil of the electromagnetic relay.

3. The silicon epitaxial furnace cooling water flow early warning device of claim 2, characterized in that: the time delay switch time of the time delay relay is 5 seconds, the coil of the time delay relay is a power-off time delay coil, and the contact group is a normally closed contact.