CN208805539U - A kind of current detection circuit and polycrystalline silicon reducing furnace - Google Patents
A kind of current detection circuit and polycrystalline silicon reducing furnace Download PDFInfo
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- CN208805539U CN208805539U CN201821614502.3U CN201821614502U CN208805539U CN 208805539 U CN208805539 U CN 208805539U CN 201821614502 U CN201821614502 U CN 201821614502U CN 208805539 U CN208805539 U CN 208805539U
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Abstract
The utility model discloses a kind of current detection circuit and polycrystalline silicon reducing furnaces comprising the first power switch, second source switch, switching group, current sensing device and detection resistance；It is the electrode power supply in reduction furnace that first power switch, which controls the first power supply,；Second source switch control second source is the electrode power supply in reduction furnace；One end of detection resistance leads to the first power switch respectively and second source switch is connect with the first power supply and second source, and the other end is connect with reduction furnace body, and current sensing device detection passes through the electric current of the detection resistance；Each switch in switching group is separately connected the electrode in a reduction furnace, to be individually controlled the first power supply as the power supply of corresponding electrode.Therefore; the electric current that the utility model is detected by current sensing device; it distinguishes the electrode in reduction furnace and is in silicon powder deposit state and silicon rod and reduction furnace inner wall contact condition, to avoid the occurrence of by silicon powder deposit and cause to report the case where shutting down by mistake, guarantee the yield and quality of polysilicon.
Description
Technical field
The utility model relates to production of polysilicon equipment technical fields, in particular to a kind of to be suitable for utilizing improvement Siemens
The current detection circuit of the polycrystalline silicon reducing furnace of method production.
Background technique
In photovoltaic, electronics, microelectronic industry, polysilicon is its main raw material(s).Polysilicon is using silicon as raw material, through one
The HIGH-PURITY SILICON that the physics of series, chemical reaction purify.Due to improvement Siemens process can compatible electronic grade and solar level it is more
The production of crystal silicon with its technology maturation, is suitble to the features such as industrialization production, is the production work that current production of polysilicon generallys use
Skill, the production technology mainly use thyristor lamination phase-shift voltage regulating large power supply to be heated to 1100 DEG C of constant temperature.Once occurring non-
Orderly closedown, by polysilicon yield and quality and apparatus body cause serious influence, and ground fault is that reduction furnace goes out
The main reason for existing disorderly closedown.
Ground fault, which is mainly contacted by silicon rod with reduction furnace inner wall, occurs ground short circuit, or with reduction reaction in furnace
It carries out, ties silicon on the insulating trip at chassis of reducing furnace electrode and dust causes ground short circuit.Currently, the ground fault of reduction furnace is examined
Survey mode is, once earth current transfinites, soon to take shutdown measure by detecting whether earth current transfinites.But it is practical raw
During production, there is the case where silicon powder deposit at generally existing chassis of reducing furnace electrode, being easy to appear earth current transfinites, Bu Guoyou
It is compared greatly too much in the equivalent resistance of silicon powder deposit with silicon rod load resistance, the earth current generated by silicon powder deposit is to reduction
Furnace apparatus basically will not produce damage, it is not necessary to take shutdown measure immediately.Therefore, existing Earth Fault Detection mode often goes out
The case where now causing wrong report to be shut down by silicon powder deposit, the yield and quality of polysilicon is seriously affected, has been looked forward to production of polysilicon
Industry brings great economic loss.
Utility model content
The purpose of this utility model is that: a kind of current detection circuit for polycrystalline silicon reducing furnace is provided, is able to detect
The insulation situation of reduction furnace can be avoided the case where appearance is caused wrong report to be shut down by silicon powder deposit, guarantee the yield of polysilicon
And quality.
In order to realize above-mentioned purpose of utility model, the utility model provides following technical scheme:
A kind of current detection circuit comprising the first power switch, second source switch, switching group, current sensing device
And detection resistance；Wherein, it is the electrode power supply in reduction furnace that first power switch, which is used to control the first power supply,；Described second
It is the electrode power supply in reduction furnace that power switch, which is used to control second source,；One end of the detection resistance passes through described respectively
One power switch and second source switch are connect with the first power supply and second source, and the other end is connect with reduction furnace body；
Each switch in the switching group is separately connected the electrode in a reduction furnace, is corresponding for being individually controlled the first power supply
Electrode power supply；Moreover, the current sensing device is for detecting the electric current that the detection resistance passes through on the line；Pass through
The electric current that the current sensing device detects, to judge the insulation shape in reduction furnace between corresponding electrode and reduction furnace body
State, and judge that the electrode in reduction furnace is in silicon powder deposit state or silicon rod and reduction furnace inner wall contact condition.
According to a kind of specific embodiment, the current detection circuit of the utility model further includes for controlling described first
The control module of the switch state of power switch, second source switch and the switching group.
Further, the control module is connect with the current sensing device.
Further, the electric current that the control module is detected according to the current sensing device, calculates insulation resistance,
Further according to the size of the insulation resistance, the state of insulation in reduction furnace between corresponding electrode and reduction furnace body is determined.
Further, the control module by current signal before calculating current monitoring device detection with work as
Amplitude of variation between preceding current signal determines that the electrode in reduction furnace is in silicon powder deposit state or silicon rod and reduction furnace
Wall contact condition.
The utility model also provides a kind of polycrystalline silicon reducing furnace comprising the first power supply, second source and book are practical
The novel current detection circuit.
Further, the output characteristics of first power supply is in high voltage low current, the output characteristics of the second source
In low-voltage and high-current.
According to a kind of specific embodiment, the polycrystalline silicon reducing furnace of the utility model further includes alarm module, is used for root
According to the control of the control module, warning note is issued.
Compared with prior art, the utility model has the beneficial effects that
The current detection circuit of the utility model comprising the first power switch, second source switch, switching group, electric current
Detect device and detection resistance；It is the electrode power supply in reduction furnace that first power switch, which controls the first power supply,；Second source switch
Controlling second source is the electrode power supply in reduction furnace；One end of detection resistance leads to the first power switch respectively and second source is opened
Pass is connect with the first power supply and second source, and the other end is connect with reduction furnace body, and current sensing device detection passes through the detection
The electric current of resistance；Each switch in switching group is separately connected the electrode in a reduction furnace, to be individually controlled the first power supply
For the power supply of corresponding electrode.Therefore, the electric current that the utility model is detected by current sensing device, judges electrode for reduction furnace
Insulate situation, distinguishes the electrode in reduction furnace and is in silicon powder deposit state and silicon rod and reduction furnace inner wall contact condition, to keep away
Exempt from the case where causing wrong report to be shut down by silicon powder deposit occur, guarantees the yield and quality of polysilicon.
Detailed description of the invention:
Fig. 1 is the structural schematic diagram of the current detection circuit of the utility model；
Fig. 2 is current flow diagram when electrode insulation is good；
Fig. 3 is current flow diagram when there is electrode insulation destruction；
Fig. 4 is current flow diagram when reduction furnace works normally.
Fig. 5 is the current flow diagram occurred when silicon powder deposit state or silicon rod are contacted with reduction furnace inner wall；
Fig. 6 is the connection schematic diagram of the utility model control module.
Specific embodiment
The utility model is described in further detail below with reference to test example and specific embodiment.But it should not be by this
The range for being interpreted as the above-mentioned theme of the utility model is only limitted to embodiment below, all to be realized based on the content of the present invention
Technology belongs to the scope of the utility model.
As shown in Figure 1, the current detection circuit of the utility model comprising the first power switch K1, second source switch
K2, switching group Kn, current sensing device T0 and detection resistance R0.
Wherein, it is the electrode power supply in reduction furnace that the first power switch K1, which is used to control the first power supply,；The second source
It is the electrode power supply in reduction furnace that switch K2, which is used to control second source,.Specifically, as shown in Figure 2 and Figure 4, R1~Rn will be loaded
It is mounted on the electrode of reduction furnace, and makes to load R1~Rn series connection, the first power supply and second source are respectively entire series connection
Load supplying.
Moreover, one end of detection resistance R0 passes through the first power switch K1 and the second source switch K2 and first respectively
Power supply is connected with second source, and the other end is connect with reduction furnace body.Each switch in switching group Kn is separately connected one also
Electrode in former furnace, for being individually controlled the first power supply as the power supply of corresponding electrode.Specifically, as shown in figure 3, by the first electricity
It is closed the switch in source switch K1 and switching group with what the electrode of load one end R1 was connected, and the insulation of the electrode and reduction furnace body
It is destroyed, electric current after the electrode, reduction furnace body, detection resistance R0, returns to the cathode of the first power supply by the anode of the first power supply；
In the process, the electric current of detection resistance R0 is flowed through in current sensing device T0 detection.As shown in figure 5, in process of production, load
There is the phenomenon that silicon powder deposit in the electrode of the one end R1, and electric current is by the anode of second source through the electrode, reduction furnace body, detection resistance
After R0, the cathode of second source is returned to；In the process, the electric current of detection resistance R0 is flowed through in current sensing device T0 detection.
The electric current detected by current sensing device T0, to judge in reduction furnace between corresponding electrode and reduction furnace body
State of insulation, and the electrode that judges in reduction furnace is in silicon powder deposit state or silicon rod and reduction furnace inner wall contacts shape
State.
As shown in fig. 6, the current detection circuit of the utility model further includes for controlling the first power switch, second source
The control module of switch and the switch state of switching group.Control module can use single-chip microcontroller and PLC, the first power switch, the
Relay can be used in two power switches and switching group etc., and current sensing device is current transformer.
Moreover, control module is connect with current sensing device, the electric current that control module is detected according to current sensing device,
Insulation resistance is calculated, further according to the size of the insulation resistance, is determined in reduction furnace between corresponding electrode and reduction furnace body
State of insulation.Further, current signal and current flow before control module is detected by calculating current monitoring devices
Amplitude of variation between signal determines that the electrode in reduction furnace is in silicon powder deposit state or silicon rod is contacted with reduction furnace inner wall
State.
Due on the electrode in reduction furnace dust or knot silicon be that slow accumulation is formed, the electricity that current sensing device detects
Stream signal is slowly increased.Once the amplitude of variation of current signal is more than a certain range, then it represents that electrode and reduction furnace body
Insulation is seriously destroyed, in some instances it may even be possible to be that silicon rod and reduction furnace inner wall contact situation, therefore, control module passes through calculating current
The amplitude of variation of signal, can distinguish that the electrode in reduction furnace is in silicon powder deposit state or silicon rod is contacted with reduction furnace inner wall
State guarantees the yield and quality of polysilicon to avoid the occurrence of by silicon powder deposit and cause to report the case where shutting down by mistake.
In addition, the current detection circuit of the utility model is applied in polycrystalline silicon reducing furnace, a kind of new polysilicon is obtained
Reduction furnace.Polycrystalline silicon reducing furnace provided by the utility model includes in the first power supply, second source and the utility model
Current detection circuit.Specifically, the output characteristics of the first power supply is in high voltage low current, second source in the utility model
Output characteristics is in low-voltage and high-current.
Further, polycrystalline silicon reducing furnace provided by the utility model further includes alarm module, alarm module and control
Module connection issues warning note for the control according to control module.Specifically, alarm module is alarm lamp or buzzer
Etc. common alarm appliance, it is also possible to display, by showing corresponding warning message, realizes warning note.For example, utilizing
When first power supply detects the insulation status of electrode and reduction furnace body in electric reduction furnace, there is electrode and restore furnace body
Insulation is destroyed, then issues alarm, and staff is prompted to replace the insulating trip on corresponding electrode.Alternatively, in process of production,
When being powered by second source for electrode, the amplitude of variation for the current signal that current sensor part detects is more than a certain range, then sends out
It alarms out, and reminds staff to take shutdown measure to reduction furnace, or disconnected by control module control second source switch,
Realize autostop.
Claims (8)
1. a kind of current detection circuit, which is characterized in that including the first power switch, second source switch, switching group, electric current inspection
Survey device and detection resistance；Wherein, it is the electrode power supply in reduction furnace that first power switch, which is used to control the first power supply,；Institute
It is the electrode power supply in reduction furnace that second source switch, which is stated, for controlling second source；One end of the detection resistance passes through respectively
First power switch and second source switch are connect with the first power supply and second source, the other end and reduction furnace body
Connection；Each switch in the switching group is separately connected the electrode in a reduction furnace, for being individually controlled the first power supply
For the power supply of corresponding electrode；Moreover, the current sensing device is for detecting the electricity that the detection resistance passes through on the line
Stream；The electric current detected by the current sensing device, to judge in reduction furnace between corresponding electrode and reduction furnace body
State of insulation, and judge that the electrode in reduction furnace is in silicon powder deposit state or silicon rod and reduction furnace inner wall contact condition.
2. current detection circuit as described in claim 1, which is characterized in that further include being opened for controlling first power supply
It closes, the second source switchs and the control module of the switch state of the switching group.
3. current detection circuit as claimed in claim 2, which is characterized in that the control module and the current sensing device
Connection.
4. current detection circuit as claimed in claim 3, which is characterized in that the control module is according to the current detector
The electric current that part detects, calculates insulation resistance, further according to the size of the insulation resistance, determine in reduction furnace corresponding electrode with
Restore the state of insulation between furnace body.
5. current detection circuit as claimed in claim 3, which is characterized in that the control module is by calculating the electric current prison
The amplitude of variation between current signal and current flow signal before survey units test, determines that the electrode in reduction furnace is in
Silicon powder deposit state or silicon rod and reduction furnace inner wall contact condition.
6. a kind of polycrystalline silicon reducing furnace, which is characterized in that including the first power supply, second source and as claim 2~5 is any
Current detection circuit described in.
7. polycrystalline silicon reducing furnace as claimed in claim 6, which is characterized in that the output characteristics of first power supply is in high voltage
Low current, the output characteristics of the second source are in low-voltage and high-current.
8. polycrystalline silicon reducing furnace as claimed in claim 6, which is characterized in that further include alarm module, for according to the control
The control of molding block issues warning note.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201821614502.3U CN208805539U (en) | 2018-09-30 | 2018-09-30 | A kind of current detection circuit and polycrystalline silicon reducing furnace |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821614502.3U CN208805539U (en) | 2018-09-30 | 2018-09-30 | A kind of current detection circuit and polycrystalline silicon reducing furnace |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110702968A (en) * | 2019-11-15 | 2020-01-17 | 新疆东方希望新能源有限公司 | Grounding current grading detection method for power supply system of polycrystalline silicon reduction furnace |
| CN113133138A (en) * | 2019-12-31 | 2021-07-16 | 广东美的白色家电技术创新中心有限公司 | Heating circuit |
| CN113567747A (en) * | 2021-07-26 | 2021-10-29 | 四川英杰电气股份有限公司 | Silicon core resistance value detection circuit, method and system |
-
2018
- 2018-09-30 CN CN201821614502.3U patent/CN208805539U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110702968A (en) * | 2019-11-15 | 2020-01-17 | 新疆东方希望新能源有限公司 | Grounding current grading detection method for power supply system of polycrystalline silicon reduction furnace |
| CN110702968B (en) * | 2019-11-15 | 2022-07-19 | 新疆东方希望新能源有限公司 | Grounding current grading detection method for power supply system of polycrystalline silicon reduction furnace |
| CN113133138A (en) * | 2019-12-31 | 2021-07-16 | 广东美的白色家电技术创新中心有限公司 | Heating circuit |
| CN113133138B (en) * | 2019-12-31 | 2022-09-30 | 广东美的白色家电技术创新中心有限公司 | Heating circuit |
| CN113567747A (en) * | 2021-07-26 | 2021-10-29 | 四川英杰电气股份有限公司 | Silicon core resistance value detection circuit, method and system |
| CN113567747B (en) * | 2021-07-26 | 2023-11-17 | 四川英杰电气股份有限公司 | Silicon core resistance detection circuit, method and system |
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