CN217677747U

CN217677747U - Multistation formula continuous type vacuum coating equipment

Info

Publication number: CN217677747U
Application number: CN202221005986.8U
Authority: CN
Inventors: 黄介龙
Original assignee: Jiangyin Mudas Vacuum Equipment Co ltd
Current assignee: Jiangyin Mudas Vacuum Equipment Co ltd
Priority date: 2022-04-28
Filing date: 2022-04-28
Publication date: 2022-10-28
Anticipated expiration: 2032-04-28

Abstract

The utility model discloses a multistation formula continuous type vacuum coating equipment relates to vacuum coating equipment technical field, including the coating shell, first cavity has been seted up to the inner wall of coating shell, a plurality of dead levers of top fixedly connected with of first cavity inner wall, it is a plurality of the common fixedly connected with negative plate of lower extreme of dead lever, the fixed surface of coating shell is connected with a plurality of feeding shells, and is a plurality of the second cavity has all been seted up to the inside of feeding shell, and is a plurality of the equal fixedly connected with hydraulic stem in upper surface of second cavity, it is a plurality of the equal fixedly connected with open-close plate of lower extreme of hydraulic stem, it is a plurality of the below of second cavity inner wall all has the blowing board through slide mechanism sliding connection. The utility model discloses optimize and improve present coating equipment, no longer need be after the completion is to the coating film work of a work piece, take out the work piece in the vacuum and carry out the processing of next work piece again, very big improvement the machining efficiency of work piece.

Description

Multistation formula continuous type vacuum coating equipment

Technical Field

The utility model relates to a vacuum coating equipment technical field, in particular to multistation formula continuous type vacuum coating equipment.

Background

The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and the like. The main idea is to divide into evaporation and sputtering.

Due to the continuous development of the coating technology, the coating process is used in a large amount in the current common industrial production, but the current coating equipment still has some defects in the using process, and when the current coating equipment is used for coating, the workpiece in vacuum needs to be taken out and then processed by the next workpiece after the coating operation of one workpiece is finished, so that the processing efficiency of the workpiece is greatly influenced.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a multistation formula continuous type vacuum coating equipment to solve present coating equipment that proposes in the above-mentioned background art when carrying out the coating operation, often accomplish the coating film work back to a work piece, need take out the work piece in the vacuum and carry out the processing of next work piece again, very influence the machining efficiency's of work piece problem like this.

In order to achieve the above object, the utility model provides a following technical scheme: a multi-station continuous vacuum coating device comprises a coating shell, wherein a first cavity is formed in the inner wall of the coating shell, a plurality of fixing rods are fixedly connected above the inner wall of the first cavity, and the lower ends of the plurality of fixing rods are fixedly connected with a cathode plate together;

the surface fixed connection of coating film shell is connected with a plurality of feeding shells, and is a plurality of the second cavity has all been seted up to the inside of feeding shell, and is a plurality of the equal fixedly connected with hydraulic stem in upper surface of second cavity, it is a plurality of the equal fixedly connected with open-close plate of lower extreme of hydraulic stem is a plurality of there is the blowing board below the second cavity inner wall all through slide mechanism sliding connection.

Preferably, the sliding mechanism comprises a plurality of grooves, the grooves are formed in the lower portion of the inner wall of the second cavity, the electric sliding rails are fixedly connected to the inner walls of the grooves, the electric sliding blocks are connected to the inner walls of the electric sliding rails in a sliding mode, and the upper surfaces of the two corresponding electric sliding blocks are fixedly connected with one side of the lower surface of the corresponding material placing plate.

Preferably, the upper surfaces of the plurality of material placing plates are provided with material placing grooves.

Preferably, the centers above the inner walls of the plurality of second cavities are provided with fixing holes, and the inner walls of the plurality of fixing holes are fixedly connected with vacuum tubes.

Preferably, the surfaces of the split plates are fixedly connected with sealing gaskets, and the sealing gaskets are made of softened rubber materials.

Preferably, the lower surface of the coating shell is fixedly connected with a supporting plate, and a plurality of supporting legs are fixedly connected to the center of the lower surface of the feeding shell.

The utility model discloses a technological effect and advantage:

1. through setting up coating film shell, first cavity, dead lever, negative plate, feeding shell, second cavity, hydraulic stem, open-close board, blowing board, optimize and improve present coating film equipment, accomplish the transformation of coating film equipment continuous operation, make present coating film equipment when carrying out the coating film operation, no longer need accomplish the coating film work back to a work piece, take out the work piece in the vacuum and carry out the processing of next work piece again, very big improvement the machining efficiency of work piece.

2. Through setting up second cavity, electronic slide rail, electronic slider, blowing board, make the blowing board can remove through electronic slide rail and electronic slider, place flitch, blowing groove through setting up, can place the work piece that needs processing in the blowing groove.

3. Through setting up second cavity, fixed orifices, vacuum tube, make the vacuum pump can take away the inside air of second cavity through the vacuum tube, through setting up the open-close board, sealed the pad, improve the sealed effect of open-close board, prevent that outside air from overflowing into inside the second cavity, through setting up coating film shell, backup pad, feeding shell, supporting leg, carry out the outrigger to coating film equipment.

Drawings

Fig. 1 is a schematic view of the sectional structure of the coating shell of the present invention.

Fig. 2 is a schematic view of an enlarged view of a portion a of the present invention.

Fig. 3 is a schematic diagram of an enlarged view of the part B of the present invention.

Fig. 4 is a schematic view of the three-dimensional structure of the material placing plate of the present invention.

In the figure: 1. coating a film shell; 2. a first cavity; 3. fixing the rod; 4. a cathode plate; 5. a feed shell; 6. a second cavity; 7. a hydraulic rod; 8. opening and closing the plate; 9. an electric slide rail; 10. an electric slider; 11. a material placing plate; 12. a discharging groove; 13. a fixing hole; 14. a vacuum tube; 15. a gasket; 16. a support plate; 17. and (5) supporting legs.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The utility model provides a multi-station continuous vacuum coating device as shown in figures 1-4, which comprises a coating shell 1, wherein the inner wall of the coating shell 1 is provided with a first cavity 2, a plurality of fixing rods 3 are fixedly connected above the inner wall of the first cavity 2, and the lower ends of the fixing rods 3 are fixedly connected with a cathode plate 4;

the fixed surface of coating shell 1 is connected with a plurality of feeding shells 5, second cavity 6 has all been seted up to the inside of a plurality of feeding shells 5, the equal fixedly connected with hydraulic stem 7 of the upper surface of a plurality of second cavities 6, the equal fixedly connected with open-close plate 8 of lower extreme of a plurality of hydraulic stem 7, there is feeding plate 11 below a plurality of 6 inner walls of second cavity through slide mechanism sliding connection, optimize and improve present coating equipment, accomplish the transformation of coating equipment continuous operation, make present coating equipment when carrying out the coating operation, no longer need be after the coating work of completion to a work piece, take out the work piece in the vacuum and carry out the processing of next work piece again, very big improvement the machining efficiency of work piece.

As shown in fig. 1-3, the sliding mechanism includes a plurality of grooves, a groove is formed below the inner walls of the second cavities 6, an electric slide rail 9 is fixedly connected to the inner walls of the grooves, an electric slide block 10 is slidably connected to the inner walls of the electric slide rails 9, the upper surfaces of the two corresponding electric slide blocks 10 are fixedly connected to one side of the lower surface of the corresponding discharging plate 11, so that the discharging plate 11 can move with the electric slide block 10 through the electric slide rail 9, a fixing hole 13 is formed in the center of the upper portion of the inner walls of the second cavities 6, a vacuum tube 14 is fixedly connected to the inner walls of the fixing holes 13, so that the vacuum pump can pump away the air inside the second cavities 6 through the vacuum tube 14, a sealing pad 15 is fixedly connected to the surfaces of the opening plates 8, the sealing pads 15 are made of a soft rubber material, the sealing effect of the opening plates 8 is improved, and external air is prevented from overflowing into the second cavities 6, a supporting plate 16 is fixedly connected to the lower surface of the coating shell 1, a supporting leg 17 is fixedly connected to the center of the lower surfaces of the feeding shells 5.

As shown in fig. 4, the material discharge slots 12 are formed on the upper surfaces of the material discharge plates 11, and a workpiece to be processed can be placed in the material discharge slots 12.

The utility model discloses theory of operation: when a workpiece is coated by the coating shell 1, and then under the control of a rear-end management program, the hydraulic rod 7 of the residual feeding shell 5 far away from one side of the coating shell 1 is started, the rising of the hydraulic rod 7 can drive the corresponding open-close board 8 to rise, after the open-close board 8 rises, the workpiece to be processed is placed into the discharging groove 12 of the discharging board 11, then the hydraulic rod 7 is started again, the hydraulic rod 7 falls back to drive the open-close board 8 to fall back together, after the open-close board 8 is tightly closed, the vacuum pump is started to pump the interiors of the second cavities 6 into a vacuum environment through the vacuum pipe 14, after the workpiece inside the coating shell 1 is processed, the hydraulic rod 7 of the fed feeding shell 5 close to one side of the coating shell 1 is started, the rising of the hydraulic rod 7 can drive the corresponding open-close board 8 to rise, after the open-close board 8 rises, the two electric sliding blocks 10 drive the discharging board 11 to move in the two electric sliding rails 9 together until the discharging board 11 is fed into the coating shell 1, and uninterrupted processing of the coating equipment is realized.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.

Claims

1. The utility model provides a multistation formula continuous type vacuum coating equipment, includes coating film shell (1), its characterized in that: a first cavity (2) is formed in the inner wall of the film coating shell (1), a plurality of fixing rods (3) are fixedly connected above the inner wall of the first cavity (2), and the lower ends of the fixing rods (3) are fixedly connected with a cathode plate (4) together;

the fixed surface of coating film shell (1) is connected with a plurality of feeding shells (5), and is a plurality of second cavity (6) have all been seted up to the inside of feeding shell (5), and is a plurality of the equal fixedly connected with hydraulic stem (7) of upper surface of second cavity (6), it is a plurality of the equal fixedly connected with open-close plate (8) of lower extreme of hydraulic stem (7), it is a plurality of the below of second cavity (6) inner wall all has blowing board (11) through slide mechanism sliding connection.

2. The multi-station continuous vacuum coating apparatus of claim 1, wherein: the sliding mechanism comprises a plurality of grooves, a plurality of grooves are formed in the lower portion of the inner wall of the second cavity (6), a plurality of electric sliding rails (9) are fixedly connected to the inner wall of each groove, a plurality of electric sliding rails (9) are slidably connected to the inner wall of each electric sliding rail (10), and the upper surfaces of the two corresponding electric sliding blocks (10) are fixedly connected with one side of the lower surface of the corresponding material placing plate (11) together.

3. The multi-station continuous vacuum coating apparatus of claim 1, wherein: the upper surfaces of the plurality of material discharging plates (11) are provided with material discharging grooves (12).

4. The multi-station continuous vacuum coating apparatus of claim 1, wherein: the centers above the inner walls of the second cavities (6) are provided with fixing holes (13), and the inner walls of the fixing holes (13) are fixedly connected with vacuum tubes (14).

5. The multi-station continuous vacuum coating apparatus of claim 1, wherein: it is a plurality of the equal fixedly connected with in surface of open-close plate (8) fills up sealed pad (15), and is a plurality of sealed pad (15) are made by softening rubber material and are formed.

6. The multi-station continuous vacuum coating apparatus of claim 1, wherein: the lower surface of the coating shell (1) is fixedly connected with a supporting plate (16) and a plurality of supporting legs (17) are fixedly connected at the center of the lower surface of the feeding shell (5).