CN217641217U - Automatic overtime-proof equipment for chip product corrosion ball inspection - Google Patents
Automatic overtime-proof equipment for chip product corrosion ball inspection Download PDFInfo
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- CN217641217U CN217641217U CN202220790997.5U CN202220790997U CN217641217U CN 217641217 U CN217641217 U CN 217641217U CN 202220790997 U CN202220790997 U CN 202220790997U CN 217641217 U CN217641217 U CN 217641217U
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Abstract
The utility model provides a rotten ball inspection of chip product is with automatic overtime equipment of preventing, include: the inspection tank is set to be cylindrical with the closed bottom, the object carrying plate level is arranged in the inspection tank and used for placing inspection samples, the lifting assembly is arranged below the object carrying plate and used for driving the object carrying plate to be lifted, the lifting assembly is electrically connected with the processor, and the timer is electrically connected with the processor. An object of the utility model is to provide a rotten ball of chip product inspection is with automatic overtime proof equipment for be difficult to the accuracy when solving manual operation influence the problem of inspection accuracy to accuse rotten ball time.
Description
Technical Field
The utility model relates to a semiconductor manufacturing and inspection technical field, in particular to rotten ball inspection of chip product is with automatic overtime equipment of preventing.
Background
In the process of manufacturing a semiconductor chip, after the chip welding is completed, a crater experiment needs to be carried out for detecting whether a chip bonding pad is combined with a bonding ball without damage, the crater experiment is also called corrosion ball detection, a product to be detected is placed in strong acid or strong base solution to be soaked, an aluminum layer between the chip bonding pad and the bonding ball is enabled to fully react with the solution, the aluminum layer is taken out after the aluminum layer is soaked for a certain time, the surface of the chip is detected after the aluminum layer is cleaned, and whether the chip is qualified or not is judged according to whether the surface of the chip has pits and the depth degree of the pits.
In the prior art, the required time is different when different types of chip products are subjected to ball corrosion inspection, the corresponding chip products cannot exceed the specified time length during inspection, otherwise, liquid medicine is easy to corrode a chip bonding pad, the bonding pad presents a processing damaged pattern in appearance, the inspection personnel are caused to have a judgment error, an error result is transmitted to production personnel, manpower is wasted, production cannot be carried out during the ball corrosion period, the equipment output is indirectly influenced, the production efficiency is reduced, in the actual operation process, multiple products are generally subjected to ball corrosion inspection at the same time, at the moment, if the inspection personnel have the problems of off duty, dining and the like, the handling of the ball corrosion time is easily ignored, the time cannot be accurately handled even if an alarm clock is used, a device capable of automatically controlling the ball corrosion time needs to be designed, and the problem that the accuracy of the handling of the ball corrosion time is difficult to accurately influence during manual operation is solved.
SUMMERY OF THE UTILITY MODEL
The utility model provides a rotten ball inspection of chip product is with automatic overtime equipment of preventing for be difficult to the accurate problem that influences the inspection accuracy of accuse rotten ball time when solving manual operation.
Therefore, the technical scheme who adopts is, the utility model discloses a rotten ball inspection of chip product is with automatic overtime proof equipment, include: the inspection tank is set to be cylindrical with the closed bottom, the object carrying plate level is arranged in the inspection tank and used for placing inspection samples, the lifting assembly is arranged below the object carrying plate and used for driving the object carrying plate to be lifted, the lifting assembly is electrically connected with the processor, and the timer is electrically connected with the processor.
Preferably, the lift assembly comprises:
the middle partition plate is horizontally arranged in the inspection tank to divide the inspection tank into an upper part and a lower part, the object carrying plate is positioned above the middle partition plate, a lifting main rod is arranged on the middle partition plate in a sliding mode, the lifting main rod is vertically arranged and penetrates through the middle partition plate, and the upper end of the lifting main rod is fixedly connected with the object carrying plate;
the lower end of the lifting main rod is inserted into the limiting sleeve and is in sliding connection with the limiting sleeve;
the lifting main rod is integrally provided with a driving rod, the driving rod is positioned below the middle partition plate, the driving rod is arranged in an inclined manner, a driving sliding groove is formed in the driving rod along the length direction, and a driving sliding block is arranged in the driving sliding groove in a sliding manner;
the lifting motor is arranged on the side wall of the inspection tank when fixed, an output shaft of the lifting motor is horizontally arranged, the lifting motor is electrically connected with the processor, a power shaft is coaxially and fixedly arranged on the output shaft of the lifting motor, and the power shaft is parallel to the plane of the driving rod;
the power shaft is connected with the linkage block through threads, the side wall of the linkage block is rotatably provided with a driving convex column, the driving convex column is horizontally arranged, and the driving convex column is fixedly connected with the driving sliding block.
Preferably, a water outlet is formed in the side wall of the inspection tank, and a sealing plug is arranged at the position of the water outlet.
Preferably, the carrier plate is provided with a grid-like structure.
Preferably, the middle partition plate above the middle partition plate is fixedly provided with a sealing ring at the joint of the lifting main rod, the sealing ring is connected with the lifting main rod in a sliding manner, and the sealing ring is made of rubber.
Preferably, a water-absorbing sponge is fixedly arranged at the joint of the middle partition plate below the middle partition plate and the lifting main rod, and the water-absorbing sponge is connected with the lifting main rod in a sliding manner.
Preferably, a reinforcing sleeve is further fixedly arranged on the inner wall of the inspection tank, the axis of the reinforcing sleeve is horizontally arranged, and one end, far away from the lifting motor, of the power shaft is inserted into the reinforcing sleeve and is rotatably connected with the reinforcing sleeve.
Preferably, the upper end of the inspection tank is provided with a sealing cover, and the sealing cover is in threaded connection with the outer wall of the upper end of the inspection tank.
Preferably, a touch screen is further fixedly arranged on the outer wall of the inspection tank and electrically connected with the processor.
This practical theory of operation and beneficial technological effect as follows: when carrying out rotten ball inspection, at first will treat the chip of inspection and place on carrying the thing board, the solution of placing in the inspection jar soaks the chip, presets the soak time through the time-recorder before soaking, and after reacing the soak time, the time-recorder passes through treater control lifting subassembly and drives to carry thing board lifting to more than the solution liquid level, accomplishes the inspection to soak time is difficult to the accuse when having avoided manual operation, influences the problem of inspection accuracy easily.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and drawings.
The technical solution of the present invention is further described in detail by the accompanying drawings and examples.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic structural view of an automatic anti-timeout device for inspecting a chip product rotting ball according to an embodiment of the present invention;
fig. 2 is a schematic structural view of a linkage block and a driving convex column in an automatic anti-timeout apparatus for inspecting a chip product rotting ball according to an embodiment of the present invention;
fig. 3 is a schematic view of a touch screen structure in an automatic anti-timeout device for inspecting a rotted ball of a chip product according to an embodiment of the present invention.
The reference numbers in the figures are as follows: 1. inspecting the tank; 11. a water outlet; 12. a closing plug; 2. a loading plate; 3. a lift assembly; 31. a middle partition plate; 311. a seal ring; 312. a water-absorbing sponge; 32. lifting the main rod; 33. a limiting sleeve; 34. a drive rod; 341. a drive chute; 342. Driving the slide block; 35. a lifting motor; 36. a power shaft; 37. a linkage block; 38. a driving boss; 39. reinforcing the sleeve; 4. a timer; 5. a processor; 6. a closure cap; 7. a touch screen.
Detailed Description
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are presented herein only to illustrate and explain the present invention, and not to limit the present invention.
The embodiment of the utility model provides a rotten ball inspection of chip product is with automatic overtime equipment of preventing, as shown in fig. 1 and fig. 2, include: inspection jar 1, year thing board 2, lifting subassembly 3, time-recorder 4 and treater 5, inspection jar 1 sets up to bottom confined cylindric, it is used for placing the inspection sample to carry 2 levels of thing board to set up in inspection jar 1, lifting subassembly 3 sets up it is used for driving to carry 2 belows of thing board carry 2 lifts of thing board, lifting subassembly 3 with treater 5 electricity is connected, time-recorder 4 with treater 5 electricity is connected.
The working principle and the beneficial technical effects of the technical scheme are as follows: when carrying out rotten ball inspection, at first will treat the chip of inspection and place on carrying thing board 2, the solution of placing soaks the chip in the inspection jar 1, set for soaking time in advance through time-recorder 4 before soaking, after reacing soaking time, time-recorder 4 drives through treater 5 control lifting subassembly 3 and carries thing board 2 lifting to more than the solution liquid level, accomplish the inspection, thereby soaking time is difficult to the accuse when having avoided manual operation, influence the problem of inspection accuracy easily.
In one embodiment, the lift assembly 3 comprises:
the inspection tank 1 is divided into an upper part and a lower part by the middle partition plate 31, the object carrying plate 2 is positioned above the middle partition plate 31, the middle partition plate 31 is provided with a lifting main rod 32 in a sliding manner, the lifting main rod 32 is vertically arranged and penetrates through the middle partition plate 31, and the upper end of the lifting main rod 32 is fixedly connected with the object carrying plate 2;
a limiting sleeve 33 is arranged below the lifting main rod 32, the limiting sleeve 33 is fixedly arranged on the bottom wall of the inspection tank 1, the axis of the limiting sleeve 33 is vertically arranged, and the lower end of the lifting main rod 32 is inserted into the limiting sleeve 33 and is in sliding connection with the limiting sleeve 33;
the driving rod 34 is integrally arranged on the lifting main rod 32, the driving rod 34 is positioned below the middle partition plate 31, the driving rod 34 is obliquely arranged, a driving sliding groove 341 is formed in the driving rod 34 along the length direction, and a driving sliding block 342 is slidably arranged in the driving sliding groove 341;
the inspection tank comprises a lifting motor 35, wherein the lifting motor 35 is arranged on the side wall of the inspection tank 1 when fixed, an output shaft of the lifting motor 35 is horizontally arranged, the lifting motor 35 is electrically connected with the processor 5, a power shaft 36 is coaxially and fixedly arranged on the output shaft of the lifting motor 35, and the power shaft 36 is parallel to the plane of the driving rod 34;
the power shaft 36 is connected with the linkage block 37 through threads, the side wall of the linkage block 37 is rotatably provided with a driving convex column 38, the driving convex column 38 is horizontally arranged, and the driving convex column 38 is fixedly connected with the driving sliding block 342.
The working principle and the beneficial technical effects of the technical scheme are as follows: when the inspection device is used, a solution is located on the middle partition plate 31, when a preset soaking time is reached, the timer 4 controls the lifting motor 35 to start through the processor 5, the lifting motor 35 drives the power shaft 36 to rotate after being started, the power shaft 36 is in threaded connection with the linkage block 37 due to the fact that the linkage block 37 cannot rotate due to the limitation of the driving convex column 38 and the driving slide block 342, the linkage block 37 moves horizontally along the power shaft 36, the linkage block 37 drives the driving slide block 342 to move together through the driving convex column 38 when moving horizontally, and the driving chute 341 and the driving rod 34 are obliquely arranged in the same direction, so that the driving rod 34 is driven to move vertically when the driving slide block 342 moves horizontally, the lifting main rod 32 is driven to move upwards, the loading plate 2 is driven to be lifted above the liquid level, inspection is completed, and the influence of the inspection accuracy caused by too long soaking time is avoided.
In one embodiment, a drain opening 11 is arranged on the side wall of the inspection tank 1, the drain opening 11 is positioned above the middle partition plate 31, and a closing plug 12 is arranged at the drain opening 11.
The working principle and the beneficial technical effects of the technical scheme are as follows: through setting up outlet 11, open the closure plug 12 after the inspection is accomplished and can discharge solution rapidly, pour into the clear water again and wash the chip, also can be convenient for change solution simultaneously and wash in the inspection tank 1, avoid solution to cause the damage to the human body, promoted the convenience and the security of device.
In one embodiment, the carrier plate 2 is provided as a grid-like structure.
The working principle and the beneficial technical effects of the technical scheme are as follows: set up to latticedly through carrying thing board 2, can make on the one hand each face of chip can both better and solution contact when soaking, on the other hand can reduce the resistance of solution when carrying thing board 2 in lifting or decline to make the lifting or the decline process more steady, promoted the practicality of device.
In one embodiment, a sealing ring 311 is fixedly disposed at a connection portion of the middle partition plate 31 and the lifting main rod 32 above the middle partition plate 31, the sealing ring 311 is slidably connected to the lifting main rod 32, and the sealing ring 311 is made of rubber.
The working principle and the beneficial technical effects of the technical scheme are as follows: through setting up sealing washer 311, the centering intermediate lamella 31 and lifting mobile jib 32 junction are sealed, can avoid solution to flow to intermediate bottom 31 below from the junction, because the solution that uses during the rotten ball inspection is mostly strong acid or strong alkaline solution, causes the damage to each part easily with lifting subassembly 3 contact to avoid the contact through sealed, promoted the security and the practicality of device.
In one embodiment, a water absorption sponge 312 is fixedly arranged at the connection position of the middle partition plate 31 and the lifting main rod 32 below the middle partition plate 31, and the water absorption sponge 312 is slidably connected with the lifting main rod 32.
The working principle and the beneficial technical effects of the technical scheme are as follows: through setting up sponge 312 that absorbs water, even a small amount of solution reveals also can adsorb solution on the one hand, also can adsorb the solution of lifting mobile jib 32 adhesion itself simultaneously, avoids causing the damage to each part to hoisting device's security.
In one embodiment, a reinforcing sleeve 39 is further fixedly arranged on the inner wall of the inspection tank 1, the axis of the reinforcing sleeve 39 is horizontally arranged, and one end of the power shaft 36, which is far away from the lifting motor 35, is inserted into the reinforcing sleeve 39 and is rotatably connected with the reinforcing sleeve 39.
The working principle and the beneficial technical effects of the technical scheme are as follows: through setting up reinforcing sleeve 39, support power shaft 36 from the other end, avoid long-term back power shaft 36 to lead to the skew downwards because of the atress, and then influence the lifting effect, make power shaft 36 more firm through setting up reinforcing sleeve 39, promoted the stability of device.
In one embodiment, the upper end of the inspection tank 1 is provided with a closing cover 6, and the closing cover 6 is in threaded connection with the outer wall of the upper end of the inspection tank 1.
The working principle and the beneficial technical effects of the technical scheme are as follows: through setting up closing cap 6, strong acid or the solution spill of alkali nature cause the damage to staff or other article when avoiding the inspection, reduce volatilizing of solution simultaneously, promoted the security and the practicality of device.
In one embodiment, as shown in fig. 3, a touch screen 7 is further fixedly arranged on the outer wall of the inspection tank 1, and the touch screen 7 is electrically connected with the processor 5.
The working principle and the beneficial technical effects of the technical scheme are as follows: through setting up touch-sensitive screen 7, can show the check-out time in real time on the one hand, the aspect staff in time handles, can conveniently adjust preset's time through touch-sensitive screen 7 simultaneously for the application of device is more extensive, has promoted the practicality of device.
It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (9)
1. An automatic overtime-proof device for chip product corrosion ball inspection is characterized by comprising: inspection jar (1), year thing board (2), lifting subassembly (3), time-recorder (4) and treater (5), inspection jar (1) sets up to bottom confined cylindric, it is used for placing the inspection sample to carry thing board (2) level setting in inspection jar (1), lifting subassembly (3) set up it is used for driving to carry thing board (2) below it carries the lifting of thing board (2), lifting subassembly (3) with treater (5) electricity is connected, time-recorder (4) with treater (5) electricity is connected.
2. The automated anti-timeout device for chip product ball-rot inspection according to claim 1, wherein the lifting assembly (3) comprises:
the inspection tank (1) is divided into an upper part and a lower part by the middle partition plate (31), the object carrying plate (2) is positioned above the middle partition plate (31), the middle partition plate (31) is provided with a lifting main rod (32) in a sliding manner, the lifting main rod (32) is vertically arranged and penetrates through the middle partition plate (31), and the upper end of the lifting main rod (32) is fixedly connected with the object carrying plate (2);
the limiting sleeve (33) is arranged below the lifting main rod (32), the limiting sleeve (33) is fixedly arranged on the bottom wall of the inspection tank (1), the axis of the limiting sleeve (33) is vertically arranged, and the lower end of the lifting main rod (32) is inserted into the limiting sleeve (33) and is in sliding connection with the limiting sleeve (33);
the lifting main rod (32) is integrally provided with a driving rod (34), the driving rod (34) is positioned below the middle partition plate (31), the driving rod (34) is obliquely arranged, a driving sliding groove (341) is formed in the driving rod (34) along the length direction, and a driving sliding block (342) is arranged in the driving sliding groove (341) in a sliding manner;
the inspection tank is characterized by comprising a lifting motor (35), wherein the lifting motor (35) is arranged on the side wall of the inspection tank (1) when fixed, an output shaft of the lifting motor (35) is horizontally arranged, the lifting motor (35) is electrically connected with the processor (5), a power shaft (36) is coaxially and fixedly arranged on the output shaft of the lifting motor (35), and the power shaft (36) is parallel to the plane where the driving rod (34) is located;
linkage block (37), threaded connection has linkage block (37) on power shaft (36), it is provided with drive projection (38) to rotate on linkage block (37) lateral wall, drive projection (38) level sets up, and drive projection (38) with drive slider (342) fixed connection.
3. The automatic anti-timeout device for chip product ball corrosion inspection according to claim 2, wherein a drain opening (11) is formed in a side wall of the inspection tank (1), the drain opening (11) is located above the middle partition plate (31), and a sealing plug (12) is arranged at the drain opening (11).
4. The automatic overtime-proof device for chip product ball-rot inspection according to claim 1, characterized in that the carrying plate (2) is arranged in a grid-like structure.
5. The automatic overtime-proof device for the chip product ball corrosion inspection according to claim 2, wherein a sealing ring (311) is fixedly arranged at the joint of the middle partition plate (31) above the middle partition plate (31) and the lifting main rod (32), the sealing ring (311) is slidably connected with the lifting main rod (32), and the sealing ring (311) is made of rubber.
6. The automatic overtime-proof device for the rotting ball inspection of the chip product as claimed in claim 2, wherein a water-absorbing sponge (312) is fixedly arranged at the joint of the middle partition plate (31) and the lifting main rod (32) below the middle partition plate (31), and the water-absorbing sponge (312) is slidably connected with the lifting main rod (32).
7. The automatic overtime-proof device for the chip product ball corrosion inspection according to claim 2, wherein a reinforcing sleeve (39) is further fixedly arranged on the inner wall of the inspection tank (1), the axis of the reinforcing sleeve (39) is horizontally arranged, and one end of the power shaft (36) far away from the lifting motor (35) is inserted into the reinforcing sleeve (39) and is rotatably connected with the reinforcing sleeve (39).
8. The automatic overtime-proof device for the rotting ball inspection of the chip product as claimed in claim 1, wherein a closing cover (6) is arranged at the upper end of the inspection tank (1), and the closing cover (6) is in threaded connection with the outer wall of the upper end of the inspection tank (1).
9. The automatic overtime-proof device for the chip product ball-rot inspection according to claim 1, characterized in that a touch screen (7) is fixedly arranged on the outer wall of the inspection tank (1), and the touch screen (7) is electrically connected with the processor (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220790997.5U CN217641217U (en) | 2022-04-07 | 2022-04-07 | Automatic overtime-proof equipment for chip product corrosion ball inspection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220790997.5U CN217641217U (en) | 2022-04-07 | 2022-04-07 | Automatic overtime-proof equipment for chip product corrosion ball inspection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217641217U true CN217641217U (en) | 2022-10-21 |
Family
ID=83646680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220790997.5U Active CN217641217U (en) | 2022-04-07 | 2022-04-07 | Automatic overtime-proof equipment for chip product corrosion ball inspection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217641217U (en) |
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2022
- 2022-04-07 CN CN202220790997.5U patent/CN217641217U/en active Active
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