CN217639722U - Structured light illumination microscopic imaging system - Google Patents
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- CN217639722U CN217639722U CN202221923855.8U CN202221923855U CN217639722U CN 217639722 U CN217639722 U CN 217639722U CN 202221923855 U CN202221923855 U CN 202221923855U CN 217639722 U CN217639722 U CN 217639722U
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Abstract
The utility model provides a micro-imaging system of structured light illumination, include: the device comprises an illumination module, a super-surface modulator, an objective table and a receiving module; the lighting module is configured to emit light; the super-surface modulator is positioned on the light-emitting side of the illumination module, and is configured to modulate incident light into a periodic bright and dark interphase pattern and project the periodic bright and dark interphase pattern to the objective table; the relative angle between the periodic bright and dark alternating patterns and the objective table can be changed; the receiving module can receive a fluorescent signal generated by projecting the periodic bright-dark interphase pattern onto the sample. Through the embodiment of the utility model provides a micro-imaging system of structured light illumination can generate periodic and the changeable light and shade of relative angle phase-to-phase pattern based on super surface modulator, and its volume is less, and is more frivolous, can realize SIM system overall structure simplification, miniaturization, lightweight, and the removal of being convenient for is applicable to instant Measure more, does benefit to and popularizes and applies the SIM system better.
Description
Technical Field
The utility model relates to a super-resolution microscopic imaging technology field particularly, relates to a micro-imaging system of structured light illumination.
Background
The optical microscope is an important research tool in the fields of biomedicine and the like at present, and structured light illumination microscopy (SIM) is a common super-resolution microscopy imaging technology based on the optical microscope, which can break through the limit of diffraction limit of the traditional optical microscope and has higher imaging resolution.
The current SIM system usually needs to generate periodic structured Light to illuminate a sample by interference or projection, and the working process includes many links such as periodic modulation of a Light field, which needs to be completed based on a specific Light field modulation Device, for example, a Spatial Light Modulator (SLM), a Digital micro-mirror Device (DMD), etc. The existing light field modulation device has a complex structure, so that the SIM system is large in whole size, cannot be suitable for instant detection, is inconvenient to detect, and cannot be well popularized and applied.
SUMMERY OF THE UTILITY MODEL
In order to solve the above problem, an object of the embodiments of the present invention is to provide a structured light illumination microscopic imaging system.
The embodiment of the utility model provides a structured light illumination microscopic imaging system, include: the device comprises an illumination module, a super-surface modulator, an objective table and a receiving module;
the lighting module is configured to emit light;
the super-surface modulator is positioned on the light-emitting side of the illumination module, and is configured to modulate incident light into a periodic bright and dark interphase pattern and project the periodic bright and dark interphase pattern to the objective table; the relative angle between the periodic bright and dark interphase pattern and the object stage can be changed;
the stage is positioned on the light-emitting side of the super-surface modulator and is configured to place a sample;
the receiving module is positioned on the light-emitting side of the object stage and is configured to be capable of receiving the fluorescent signal generated by projecting the periodic light and dark interphase pattern onto the sample.
In one possible implementation, the super-surface modulator is a phase-tunable superlens;
the super-surface modulator is configured to be capable of performing different phase modulation on incident light, and the different modulated phases correspond to different spatial directions of the periodic bright-dark interphase pattern.
In one possible implementation, the super-surface modulator includes an excitation element and a modulation element;
the excitation element is configured to apply different excitations to the modulation element;
the modulation elements are configured to differently phase modulate incident light under different stimuli.
In one possible implementation, at least part of the structure of the modulation element is made of a phase change material, and the actuation element is configured to apply different optical or electrical actuations to the modulation element; alternatively, the first and second electrodes may be,
the modulating element comprises a flexible substrate made of a flexible material, and the actuating element is configured to apply an actuation to the modulating element for changing a stretch coefficient of the flexible substrate.
In one possible implementation, the modulating element includes a substrate, a nanostructure, and a phase change material layer; the stimulating element comprises a first electrode layer and a second electrode layer, and the stimulating element is configured to apply different electrical stimuli to the modulating element;
the nano structures and the first electrode layer are arranged on the same side of the substrate, the nano structures are arranged in a periodic array mode, and the first electrode layer is filled between the nano structures; the height of the first electrode layer is less than the height of the nanostructures;
the phase change material layer is positioned on one side of the first electrode layer, which is far away from the substrate, and is filled between the nano structures; the sum of the heights of the first electrode layer and the phase-change material layer is greater than the height of the nano structure;
the second electrode layer is positioned on one side of the phase change material layer far away from the first electrode layer; the first electrode layer and the second electrode layer are configured to be capable of applying voltages of different magnitudes.
In one possible implementation, the structured light illumination microscopic imaging system further includes: a nonlinear metasurface;
the nonlinear super-surface is positioned between the illumination module and the super-surface modulator and is configured to convert light rays emitted by the illumination module into nonlinear optical signals and emit the nonlinear optical signals to the super-surface modulator.
In one possible implementation, the nonlinear optical signal comprises a second harmonic nonlinear optical signal.
In one possible implementation, the stage is configured to be movable along a plane.
In one possible implementation, the lighting module includes: a light source and a collimating metalens;
the light source is configured to emit light;
the collimating metalens is located on a light emitting side of the light source and configured to collimate light emitted by the light source.
In one possible implementation, the lighting module further includes: a beam expanding lens;
the beam expanding lens is positioned on the light outlet side of the collimating metalens and is configured to expand the collimated light.
In one possible implementation, the receiving module comprises a single photon avalanche diode array.
In one possible implementation, the structured light illumination microscopy imaging system further includes: a processing device;
the processing device is connected with the receiving module and is configured to reconstruct a super-resolution image of the sample based on the fluorescence signals received by the receiving module.
The embodiment of the utility model provides an in the above-mentioned scheme that provides, super surface modulator based on super surface can generate periodic light and shade alternating pattern, and its volume is less, and is lighter, thin, can not need SLM and DMD etc. can realize that SIM system overall structure is simplified, miniaturized, lightweight, and the removal of being convenient for is applicable to instant detection more, is favorable to the SIM system to obtain better popularization and application. In addition, the super-surface modulator is simple in design and easy to process, and has the advantages of low cost and high productivity.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 shows a first structural schematic diagram of a structured light illumination microscopy imaging system provided by an embodiment of the present invention;
fig. 2 shows a second structural diagram of the structured light illumination microscopic imaging system provided by the embodiment of the present invention;
fig. 3 shows a schematic diagram of changing the spatial direction of a periodic alternating light and dark pattern in an embodiment of the present invention;
fig. 4 shows an isotropic spectrum diagram in an embodiment of the invention;
FIG. 5 is a schematic diagram of a super-surface modulator 20 according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of another super-surface modulator 20 according to an embodiment of the present invention;
fig. 7 is a schematic diagram illustrating a third structure of a structured light illumination microscopy imaging system according to an embodiment of the present invention;
fig. 8 shows a fourth structural diagram of the structured light illumination microscopic imaging system according to the embodiment of the present invention.
Icon:
10-lighting module, 20-super surface modulator, 30-object stage, 40-receiving module, 50-nonlinear super surface, 60-processing device, 101-light source, 102-collimating super lens, 103-beam expanding lens, 21-exciting element, 22-modulating element, 211-first electrode layer, 212-second electrode layer, 221-substrate, 222-nanostructure and 223-phase change material layer.
Detailed Description
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
The embodiment of the utility model provides a micro-imaging system of structured light illumination, it is shown with reference to figure 1 that this micro-imaging system includes: an illumination module 10, a super surface modulator 20, an object stage 30 and a receiving module 40. Wherein the lighting module 10 is configured to emit light; the super-surface modulator 20 is located on the light-emitting side of the illumination module 10, and configured to modulate incident light into a periodic bright-dark interphase pattern and project the periodic bright-dark interphase pattern to the stage 30; the relative angle between the periodic alternating bright and dark patterns and the stage 30 can be varied; the stage 30 is located at the light-emitting side of the super-surface modulator 20 and is configured to place a sample; the receiving module 40 is located on the light-emitting side of the stage 30 and configured to receive a fluorescent signal generated by projecting a periodic alternating bright and dark pattern onto the sample.
In the embodiment of the present invention, the lighting module 10 can emit light to provide light to the super-surface modulator 20 located at the light emitting side thereof; as shown in fig. 1, the illumination module 10 can emit light from top to bottom, that is, the light emitting side of the illumination module 10 is the lower side of fig. 1, and accordingly, the super surface modulator 20 is located on the lower side of the illumination module 10.
The super-surface modulator 20 is a modulator manufactured based on a super-surface technology, has the characteristics of small thickness and lightness, and can modulate light emitted by the illumination module 10, so as to generate a periodic bright-dark alternating pattern; the periodic alternating light and dark patterns may be periodic alternating light and dark stripes, such as sinusoidal stripes. The stage 30 is located on the light-emitting side of the super-surface modulator 20, and a periodic alternating bright and dark pattern can be projected onto the stage 30. As shown in fig. 1, the super-surface modulator 20 is a transmissive super-surface, and is capable of emitting a periodic alternating bright and dark pattern to a stage 30 located therebelow.
When the periodic light and dark alternating patterns and the sample are mutually overlapped, beat frequencies can be generated between the periodic light and dark alternating patterns and the sample, and therefore moire fringes are formed; the spatial frequency of moire fringes is low, but it contains a complex structure of the sample, i.e. a structure of high spatial frequency. That is, the moire fringes convert the high-frequency complex information of the sample into low-frequency information, so that the high-frequency information which cannot pass through the micro-imaging system originally can also pass through the micro-imaging system, and then is recorded by the subsequent receiving module 40. The use of moire fringes to break through the diffraction limit is a mature technique in the SIM system, and will not be described in detail here.
Specifically, the receiving module 40 is similar to an objective lens, and is located on the light-emitting side of the stage 30, so as to be capable of receiving a fluorescence signal generated by projecting a periodic bright-dark interphase pattern onto the sample. By adjusting the relative angle between the periodic bright and dark alternate pattern and the stage 30, the receiving module 40 can receive the fluorescence signals at different relative angles, and can reconstruct an image of the sample based on the plurality of fluorescence signals. The receiving module 40 may include a single photon avalanche diode array (SPAD).
Optionally, referring to fig. 2, the microscopic imaging system further comprises a processing device 60; the processing device 60 is connected to the receiving module 40 and is configured to reconstruct a super-resolved image of the sample based on the fluorescence signals received by the receiving module 40. In this embodiment, the micro-imaging system encodes high spatial frequency information that cannot be detected by the receiving module 40 to a detectable low-frequency image by using the modulated periodic bright-dark interphase pattern, and if the intensity distribution of the periodic bright-dark interphase pattern light field and the finally detected low-frequency encoded moire fringes superimposed with the high spatial frequency information of the sample are known, the original high-frequency information of the sample can be obtained by a calculation method, so as to reconstruct a super-resolution image of the sample; the process of reconstructing a super-resolution image of a sample based on multiple fluorescence signals is a mature technology in the existing SIM system, and is not described in detail here.
The embodiment of the utility model provides a micro-imaging system of structured light illumination can generate periodic light and shade alternate pattern based on super surface modulator 20 on super surface, and its volume is less, and is lighter, thin, can not need SLM and DMD etc. can realize SIM system overall structure simplification, miniaturization, lightweight, is convenient for remove, is applicable to instant detection more, is favorable to the SIM system to obtain better popularization and application. Moreover, the super-surface modulator 20 has the advantages of simple design, easy processing, low cost and high productivity.
Alternatively, the relative angle between the periodic bright-dark alternating pattern and the object stage 30 is changed in a rotating manner (for example, the object stage 30 is rotated, and the like), and the response speed is slow; the embodiment of the utility model provides an in, this super surface modulator 20 is the phase place adjustable super lens, through adjusting this phase place that super surface modulator 20 modulated, can change the relative angle between this periodic light and shade interphase pattern and objective table 30, and this moment, this objective table 30 can be fixed. Specifically, the super-surface modulator 20 is configured to perform different phase modulation on incident light, and the different modulated phases correspond to different spatial directions of the periodic bright-dark interphase pattern.
In the embodiment of the present invention, periodic light and dark alternate patterns in different spatial directions can be generated by performing different phase modulation on the adjustable super-surface modulator 20; wherein, the space direction refers to the direction in which the periodic bright and dark alternating patterns are periodically arranged; for example, if the periodic alternating bright and dark patterns are sinusoidal stripes, the spatial direction may be the arrangement direction of the sinusoidal stripes. By using the phase-adjustable super-surface modulator 20, the modulation effect of the super-surface modulator 20 can be changed, and further, periodic bright and dark alternate patterns in different spatial directions are generated. Generally, the spatial directions of a plurality of periodic bright and dark alternating patterns have periodicity and symmetry; for example, the degree of change of the spatial direction of the periodic bright-dark alternating pattern is the same every time, and the degree of change may be such that the spatial directions of the plurality of periodic bright-dark alternating patterns are symmetrically distributed. For example, each change by 90 °, 60 °, etc.
Referring to fig. 3, the spatial orientation of the periodic alternating bright and dark pattern is changed by 30 ° each time. Specifically, the solid line box in fig. 3 represents high-frequency information of the sample, the position of which is fixed; the dashed box represents a periodic alternating light and dark pattern that is rotatable with different rotation angles corresponding to different spatial directions. Initially, the sample is in the same spatial direction as the periodic alternating bright and dark pattern; as shown in fig. 3 (a), the periodic bright and dark interphase pattern was rotated counterclockwise by 30 °, and the included angle with the sample was 30 °; as shown in fig. 3 (b), the periodic alternating bright and dark pattern is again rotated counterclockwise by 30 ° with an angle of 60 ° to the sample; as shown in fig. 3 (c), the periodic alternating bright and dark pattern is again rotated counterclockwise by 30 °, which makes an angle of 90 ° with the sample; as shown in fig. 3 (d), the periodic alternating bright and dark pattern is again rotated counterclockwise by 30 °, which makes an angle of 120 ° with the sample; as shown in fig. 3 (e), the periodic alternating bright and dark pattern is rotated counterclockwise again by 30 ° and the included angle between it and the sample is 150 °; the periodic alternating light and dark pattern is again rotated counter clockwise by 30 deg., with an angle of 180 deg. (or 0) to the sample, i.e. the sample is again in the same spatial direction as the periodic alternating light and dark pattern, not shown in fig. 3. Also, the isotropic spectrum obtained by the periodic bright and dark alternating pattern in six spatial directions can be seen in fig. 4.
Further optionally, the stage 30 is configured to be movable along a plane. For example, stage 30 can be moved in a direction perpendicular to the main optical axis of super-surface modulator 20 so that periodic alternating bright and dark patterns can be applied to different positions of stage 30 to scan samples at different positions on stage 30.
Optionally, the present embodiment provides phase adjustability by applying different excitations to the super-surface modulator 20. Referring to FIG. 5, the super-surface modulator 20 includes an actuating element 21 and a modulating element 22. The excitation element 21 is configured to apply different excitations to the modulation element 22; the modulating element 22 is configured to differently phase modulate the incident light under different stimuli. Wherein the modulating element 22 comprises at least one nanostructure, fig. 5 illustrates that the modulating element 22 comprises a cylindrical nanostructure.
Optionally, at least part of the structure of the modulating element 22 is made of a phase change material, and the actuating element 21 is configured to apply different optical or electrical actuations to the modulating element 22. The phase-adjustable phase-change material is realized by applying different excitations to the phase-change material to change the phase-change state of the phase-change material.
Alternatively, the modulating element 22 comprises a flexible substrate made of a flexible material, and the actuating element 21 is configured to apply an actuation to the modulating element 22 for changing the stretch coefficient of the flexible substrate. For example, as the substrate 221 in fig. 5 is flexible, the distance between the nanostructures in the modulation unit 22 can be changed by stretching the substrate 221, thereby changing the phase modulation effect.
Optionally, in order to implement accurate regulation, the phase-adjustable mode is implemented by using a phase-change material in the embodiment. Referring to fig. 6, the modulating element 22 includes a substrate 221, nanostructures 222, and a phase change material layer 223; the actuating element 21 comprises a first electrode layer 211 and a second electrode layer 212, and the actuating element 21 is configured to apply different electrical excitations to the modulating element 22.
The nanostructures 222 and the first electrode layer 211 are both arranged on the same side of the substrate 221, the plurality of nanostructures 222 are arranged in a periodic array, and the first electrode layer 211 is filled between the nanostructures 222; the height of the first electrode layer 211 is less than the height of the nanostructures 222; the phase change material layer 223 is located on a side of the first electrode layer 211 away from the substrate 221 and is filled between the nanostructures 222; the sum of the heights of the first electrode layer 211 and the phase change material layer 223 is greater than the height of the nanostructure 222; the second electrode layer 212 is located on a side of the phase change material layer 223 far away from the first electrode layer 211; the first electrode layer 211 and the second electrode layer 212 are configured to be capable of applying voltages of different magnitudes.
In the embodiment of the present invention, the substrate 221 and the plurality of nanostructures 222 periodically arranged on one side thereof form a basic super surface, and the first electrode layer 211 and the second electrode layer 212 are disposed on both sides of the phase change material layer 223, and different voltages are applied to the first electrode layer 211 and the second electrode layer 212 to form a voltage difference, so that an electric excitation can be applied to the phase change material layer 223 made of the phase change material, and the phase change state of the phase change material layer 223 is changed. Optionally, the phase change material is a material capable of realizing crystalline state and amorphous state conversion; for example, the phase change material may be germanium antimony telluride (Ge) X SB Y TE Z ) Germanium telluride (Ge) X TE Y ) Antimony telluride (Sb) X TE Y ) Silver antimony telluride (Ag) X SB Y TE Z ) And the like. For example, the phase change material is GST (Ge) 2 SB 2 TE 5 ) By applying a voltage or the like, a phase change material can be realized
Fast switching of (2); also, partial crystallization may be achieved so that the phase change material can be in one state between the crystalline and amorphous states.
The first electrode layer 211 and the phase change material layer 223 are filled around the nano structure 222, and the equivalent refractive index at the position of the nano structure 222 can be changed by changing the phase change state of the phase change material layer 223, so as to change the modulation effect of the super surface modulator 20. The sum of the heights of the first electrode layer 211 and the phase change material layer 223 is greater than the height of the nano structure 222, so that the second electrode layer 212 is spaced from the nano structure 222 by a certain distance, and the nano structure 222 can be prevented from contacting the second electrode layer 212.
The embodiment of the utility model provides an in, provide the voltage of equidimension not to this phase change material layer 223, can change the phase place that surpass surface modulator 20 modulated, realize different modulation effects. As shown in FIG. 6, the light rays are at an incident angle θ i The light is incident on the super-surface modulator 20, the super-surface modulator 20 is a transmission-type super-surface, and the incident light is phase-modulated so that the emergent angle is θ o . When different voltages are applied to the phase change material layer 223 by the two electrode layers, the emergent angles of the light rays emitted by the super surface modulator 20 are different; as shown in fig. 6, a voltage V is applied to the phase change material layer 223 2 The emergent angle is larger than the voltage V applied to the phase change material layer 223 1 The time, thereby realizing different phase modulation.
In the embodiment of the present invention, the excitation element 21 (the first electrode layer 211 and the second electrode layer 212) can integrally apply a voltage that can be changed to the modulation element 22, so that the modulation effect of the super-surface modulator 20 can be integrally changed. Alternatively, the super-surface modulator 20 comprises a plurality of independently controlled structural units, each having an actuating element 21 and a modulating element 22; as shown in fig. 5, the plurality of different excitation elements 21 may independently excite the corresponding modulation elements 22, and the phase modulated by each of the constituent units may be independently controlled, so that the overall modulation effect of the super-surface modulator 20 may be changed, and the super-surface modulator 20 may emit periodic light and dark alternate patterns in different spatial directions.
Optionally, referring to fig. 7, the structured light illumination microscopy imaging system further comprises: a nonlinear metasurface 50; the nonlinear super-surface 50 is located between the illumination module 10 and the super-surface modulator 20, and is configured to convert light emitted from the illumination module 10 into a nonlinear optical signal and emit the nonlinear optical signal to the super-surface modulator 20. By providing the nonlinear super-surface 50, the wavelength requirement for the light emitted from the illumination module 10 can be reduced.
Optionally, the nonlinear optical signal comprises a second harmonic nonlinear optical signal. For example, the biological tissue detection needs 450nm of excitation light, that is, the illumination module 10 needs to emit 450nm of excitation light, but most of the laser bands emitted by the laser are located in the infrared spectrum region, and the wavelength of the laser is large; in the present embodiment, the linear signal emitted from the illumination module 10 is converted into the high-frequency second harmonic nonlinear optical signal, so that only 900nm of excitation light (infrared light) is required, that is, the illumination module 10 emits 900nm of excitation light, and the illumination module 10 can realize the required functions by using a common laser, and can be applied to biological tissue detection.
Alternatively, referring to fig. 8, the lighting module 10 includes: a light source 101 and a collimating superlens 102; the light source 101 is configured to emit light; the collimating metalens 102 is located at the light exit side of the light source 101 and is configured to collimate the light emitted by the light source 101.
The embodiment of the utility model provides an in, the super lens 102 of collimation can carry out the collimation to the light that light source 101 sent for the super surface modulator 20's of directive light is collimated, and the phase modulation effect of super surface modulator 20 is cooperated, conveniently generates clear periodic light and shade alternating pattern. The light source 101 may be a Light Emitting Diode (LED) or a laser, which is not limited in this embodiment.
Further optionally, as shown in fig. 8, the lighting module 10 further includes: a beam expanding lens 103; the beam expanding lens 103 is located on the light exit side of the collimating metalens 102 and is configured to expand the collimated light. The embodiment of the utility model provides an in, through the beam expanding effect of beam expanding lens 103, can expand light to wider, do benefit to and realize the wider illumination of field more on a large scale. The beam expanding lens 103 may be a superlens.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the technical solutions of the changes or replacements within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (12)
1. A structured light illuminated microscopy imaging system, comprising: an illumination module (10), a super-surface modulator (20), an objective table (30) and a receiving module (40);
the lighting module (10) is configured to emit light;
the super-surface modulator (20) is positioned on the light outlet side of the illumination module (10), and is configured to modulate incident light into a periodic bright and dark alternating pattern and project the periodic bright and dark alternating pattern to the object stage (30); the relative angle between the periodic alternating bright and dark pattern and the stage (30) can be varied;
the object stage (30) is positioned at the light outlet side of the super-surface modulator (20) and is configured to place a sample;
the receiving module (40) is located on the light-emitting side of the object stage (30) and is configured to be capable of receiving the fluorescence signal generated by projecting the periodic alternating bright and dark pattern onto the sample.
2. The structured light illuminated microscopy imaging system of claim 1, wherein the super surface modulator (20) is a phase tunable superlens;
the super-surface modulator (20) is configured to be capable of different phase modulation of incident light, with the different phases modulated corresponding to different spatial directions of the periodic alternating bright and dark patterns.
3. The structured light illuminated microscopy imaging system of claim 2, wherein the super surface modulator (20) comprises an excitation element (21) and a modulation element (22);
the excitation element (21) is configured to apply different excitations to the modulation element (22);
the modulating element (22) is configured to differently phase modulate incident light under different stimuli.
4. The structured light illuminated microscopy imaging system of claim 3,
at least part of the structure of the modulation element (22) is made of a phase change material, and the excitation element (21) is configured to apply different optical or electrical excitations to the modulation element (22); alternatively, the first and second electrodes may be,
the modulating element (22) comprises a flexible substrate (221) made of a flexible material, and the exciting element (21) is configured to apply an excitation to the modulating element (22) for changing a stretch coefficient of the flexible substrate (221).
5. The structured light illuminated microscopy imaging system according to claim 4, wherein the modulating element (22) comprises a substrate (221), a nanostructure (222) and a phase change material layer (223); the actuation element (21) comprises a first electrode layer (211) and a second electrode layer (212), and the actuation element (21) is configured to apply different electrical actuations to the modulation element (22);
the nano structures (222) and the first electrode layer (211) are arranged on the same side of the substrate (221), a plurality of the nano structures (222) are arranged in a periodic array, and the first electrode layer (211) is filled between the nano structures (222); the height of the first electrode layer (211) is less than the height of the nanostructures (222);
the phase change material layer (223) is positioned on one side, away from the substrate (221), of the first electrode layer (211) and is filled between the nano structures (222); the sum of the heights of the first electrode layer (211) and the phase change material layer (223) is greater than the height of the nanostructure (222);
the second electrode layer (212) is positioned on one side of the phase change material layer (223) far away from the first electrode layer (211); the first electrode layer (211) and the second electrode layer (212) are configured to be capable of applying voltages of different magnitudes.
6. The structured light illuminated microscopy imaging system of claim 1 further comprising: a nonlinear super-surface (50);
the nonlinear super-surface (50) is located between the illumination module (10) and the super-surface modulator (20), and is configured to convert light rays emitted by the illumination module (10) into a nonlinear optical signal and emit the nonlinear optical signal to the super-surface modulator (20).
7. The structured light illuminated microscopy imaging system of claim 6 wherein the nonlinear optical signal comprises a second harmonic nonlinear optical signal.
8. The structured light illuminated microscopy imaging system of claim 1, wherein the stage (30) is configured to be movable along a plane.
9. The structured light illuminated microscopy imaging system according to claim 1, wherein the illumination module (10) comprises: a light source (101) and a collimating metalens (102);
the light source (101) is configured to emit light;
the collimating metalens (102) is located at a light exit side of the light source (101) and is configured to collimate light emitted by the light source (101).
10. The structured light illuminated microscopy imaging system as defined in claim 9, wherein the illumination module (10) further comprises: a beam expanding lens (103);
the beam expanding lens (103) is located on the light outlet side of the collimating metalens (102) and is configured to expand collimated light.
11. The structured light illuminated microscopy imaging system as defined in claim 1 wherein the receiving module (40) comprises a single photon avalanche diode array.
12. The structured light illuminated microscopy imaging system of claim 1, further comprising: a processing device (60);
the processing device (60) is connected to the receiving module (40) and is configured to reconstruct a super-resolved image of the sample based on the fluorescence signals received by the receiving module (40).
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| US11927769B2 (en) | 2022-03-31 | 2024-03-12 | Metalenz, Inc. | Polarization sorting metasurface microlens array device |
| US11978752B2 (en) | 2019-07-26 | 2024-05-07 | Metalenz, Inc. | Aperture-metasurface and hybrid refractive-metasurface imaging systems |
| US11988844B2 (en) | 2017-08-31 | 2024-05-21 | Metalenz, Inc. | Transmissive metasurface lens integration |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US11988844B2 (en) | 2017-08-31 | 2024-05-21 | Metalenz, Inc. | Transmissive metasurface lens integration |
| US11978752B2 (en) | 2019-07-26 | 2024-05-07 | Metalenz, Inc. | Aperture-metasurface and hybrid refractive-metasurface imaging systems |
| US11927769B2 (en) | 2022-03-31 | 2024-03-12 | Metalenz, Inc. | Polarization sorting metasurface microlens array device |
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