CN217636852U - Condensing equipment of refrigeration cycle water - Google Patents
Condensing equipment of refrigeration cycle water Download PDFInfo
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- CN217636852U CN217636852U CN202221539492.8U CN202221539492U CN217636852U CN 217636852 U CN217636852 U CN 217636852U CN 202221539492 U CN202221539492 U CN 202221539492U CN 217636852 U CN217636852 U CN 217636852U
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Abstract
The utility model discloses a condensing equipment of refrigeration cycle water, including the cooling container, the inside circulating water that has installed of cooling container, the circulating water is carried to the cooling container top through the inlet tube, the shower nozzle that is used for carrying out the dispersion spraying with the circulating water is installed to the inlet tube end, the dispersion of circulating water flows to the cooling container bottom; the cooling container is internally provided with a heat exchange assembly for exchanging the heat of circulating water, the heat exchange assembly is internally filled with cooling liquid flowing circularly, the circulating water flows through the heat exchange assembly to exchange the heat of the circulating water into the cooling liquid, the cooling liquid absorbs the heat of the circulating water and cools the circulating water, and the bottom of the cooling container is also provided with a water outlet pipe for discharging the cooled circulating water; the utility model provides a condensing equipment can solve the circulating water temperature of intaking of the quartzy bell jar of chemical vapor deposition epitaxial equipment furnace and can not reach the problem of demarcation temperature because of there being the fluctuation.
Description
Technical Field
The utility model relates to a circulating water cooling technical field, in particular to condensation device of chemical vapor deposition epitaxial equipment furnace quartz bell jar refrigeration cycle water.
Background
The circulating water for cooling the hearth of the existing Chemical Vapor Deposition (CVD) epitaxial equipment generally exchanges heat with low-temperature process circulating water supplied from the outside of a machine table through a heat exchanger by using circulating water of a water tank inside the machine table, so that the aim of cooling the circulating water of a quartz bell jar of the hearth by feeding water is fulfilled.
The heat exchange efficiency of the cooling method is influenced by the power of the heat exchanger and the temperature of circulating water supplied from the outside, once the temperature of the circulating water rises, the heat exchange effect is seriously influenced, the inlet temperature of the circulating water of the quartz bell jar of the hearth cannot reach the calibration temperature, and the cooling effect of the quartz bell jar of the equipment hearth cannot meet the requirement. Under the condition that the temperature of externally supplied circulating water always fluctuates, the flow rate of the circulating water is properly increased, and the problem of insufficient heat exchange can be solved by increasing the water flow rate per unit time to take away more heat.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome the above-mentioned defect among the prior art, provide a cooling circulation water's condensing equipment, solve the circulating water temperature of intaking of chemical vapor deposition epitaxial equipment furnace quartz bell jar and can not reach the problem of demarcation temperature because of there being the fluctuation.
In order to achieve the purpose, the utility model provides a condensing device for cooling circulating water, which comprises a cooling container, wherein the cooling container is internally provided with the circulating water, the circulating water is conveyed to the top of the cooling container through a water inlet pipe, the tail end of the water inlet pipe is provided with a spray head for dispersing and spraying the circulating water, and the circulating water is dispersed and flows to the bottom of the cooling container; the cooling container is characterized in that a heat exchange assembly used for exchanging the heat of circulating water is further arranged in the cooling container, cooling liquid flowing in a circulating mode is filled in the heat exchange assembly, the heat of the circulating water is exchanged into the cooling liquid through the heat exchange assembly by the circulating water, the heat of the circulating water is absorbed by the cooling liquid and is cooled, and a water outlet pipe used for discharging the cooled circulating water is further arranged at the bottom of the cooling container.
Preferably, the heat exchange assembly comprises a plurality of transverse heat exchange tubes arranged transversely and longitudinal heat exchange tubes arranged longitudinally; the transverse heat exchange tubes and the longitudinal heat exchange tubes are horizontally paved and are uniformly arranged at intervals in the vertical direction; so set up and to install as many heat exchange pipes as possible in limited cooling container inside, increase condensing equipment's heat exchange capacity and efficiency for the temperature of circulating water can be stabilized in the target value within range, reduces the temperature fluctuation.
Preferably, the heat exchange assembly further comprises a plurality of vertical heat exchange tubes which are vertically arranged, the vertical heat exchange tubes are longitudinally and uniformly arranged at intervals, and further, the heat exchange assembly can comprise transverse heat exchange tubes, longitudinal heat exchange tubes and vertical heat exchange tubes, all the three heat exchange tubes play a role, the heat exchange assembly is comprehensively used, the space is fully utilized, and the heat exchange capacity and the efficiency of the condensing device are improved.
Preferably, the transverse heat exchange tubes, the longitudinal heat exchange tubes and the vertical heat exchange tubes are respectively bent along the same plane in a reciprocating manner and are U-shaped, the cooling liquid enters from one end of each heat exchange tube, the cooling liquid flows out from the other end of each heat exchange tube, and the cooling liquid can fully exchange heat with circulating water.
Preferably, the transverse heat exchange tubes, the longitudinal heat exchange tubes and the vertical heat exchange tubes are internally and circularly filled with cooling liquid with the temperature of 15-20 ℃, the cooling liquid is driven by a cooling liquid water pump, and when the temperature of the circulating water needs to be further reduced, the temperature of the outlet water of the circulating water after being cooled in the cooling container can be adjusted by adopting a method of increasing the flow rate of the cooling liquid, so that the temperature is ensured to be stabilized at a target value; specifically, the number of heat exchange tubes participating in heat exchange can be increased by increasing the power of the coolant water pump.
Preferably, the ends of the transverse heat exchange tubes, the longitudinal heat exchange tubes and the vertical heat exchange tubes are provided with separate liquid inlet control valves; the transverse heat exchange tubes, the longitudinal heat exchange tubes and the vertical heat exchange tubes are copper material members; when the number of the existing heat exchange tubes participating in heat exchange is not enough, the control valve is automatically or manually opened, so that the number of the heat exchange tubes participating in heat exchange is increased, and the heat exchange capacity of the condensing device is increased; the copper material is used as the manufacturing material of the heat exchange tube, so that the heat exchange efficiency of the condensing device can be further improved.
Preferably, the circulating water in the water inlet pipe is driven by a water inlet pump, the circulating water in the water outlet pipe is driven by a water outlet pump, the cooling container is cylindrical, and when the surface temperature of the quartz bell jar is too high, the power of the water inlet pump and the power of the water outlet pump can be increased, so that the flow of the circulating water is increased.
Preferably, the end part of the water outlet pipe is provided with a filter for filtering circulating water in the cooling container; the filter can filter impurities in the circulating water, so that the inside cleanness of the water inlet pipe and the water outlet pipe is ensured, the service life of the pipeline is prolonged, and the optimal effect of heat exchange is ensured.
Preferably, the end part of the water outlet pipe is also provided with a temperature sensor for detecting the temperature of the circulating water flowing out; the temperature sensor can ensure the control of the temperature of the circulating water, and meanwhile, the temperature sensor can be connected with a monitoring system and feeds the detected temperature back to the controller of the condensing device, so that the control valve can be automatically opened, and the cooling effect of the circulating water can be controlled by controlling the introduction amount of the cooling liquid; the heat exchange efficiency of the condensing device can be increased by increasing the inflow of the cooling liquid in a mode of controlling the power of the cooling liquid water pump.
As preferred, the inside level gauge sensor that is used for detecting the circulating water liquid level that still has installed of cooling container, the cooling container side is provided with the observation window, and is provided with the liquid level scale mark on the observation window, helps staff direct observation and knows the surplus of cooling container internal circulating water, verifies the detection numerical value of level gauge sensor, convenient understanding and control to condensing equipment.
Compared with the prior art, the beneficial effects of the utility model reside in that:
1. the utility model discloses an add one or a plurality of condensing equipment and guarantee that the circulating water temperature of intaking of furnace quartz bell jar is stable at the target value in chemical vapor deposition epitaxial equipment, reduce the influence of external factor to the temperature, guarantee its cooling effect to quartz bell jar, reduce the board trouble that leads to because of the temperature is too high.
2. The utility model is provided with the spray head at the end of the water inlet pipe, which can disperse the circulating water entering the cooling container, enlarge the heat exchange area of the circulating water and reduce the temperature of the circulating water by utilizing the sublimation of the circulating water; the circulating water is dispersed and flows to the bottom of the cooling container through the heat exchange assembly, at the moment, the heat exchange assembly is filled with the cooling liquid which flows in a circulating mode, the circulating water and the cooling liquid exchange heat, the heat of the circulating water is exchanged into the cooling liquid, the cooling liquid absorbs the heat of the circulating water and cools the circulating water, the heat exchange efficiency can be improved, the temperature of the circulating water is rapidly reduced to a target value, the cooled circulating water is conveyed into the quartz bell jar through the water outlet pipe at the bottom of the cooling container, meanwhile, the temperature of the outlet water of the circulating water cooled in the cooling container can be adjusted by controlling the flow of the cooling liquid which participates in heat exchange, and the temperature is guaranteed to be stabilized at the target value.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic cross-sectional view of a condensing device for cooling circulating water according to the present invention;
fig. 2 is a top view of the condensing device for cooling circulating water provided by the present invention.
The figure includes:
1. cooling the container; 2. a water inlet pipe; 3. a spray head; 4. a heat exchange assembly; 5. a water outlet pipe; 41. a transverse heat exchange tube; 42. a longitudinal heat exchange tube; 43. a vertical heat exchange tube; 6. and (3) a filter.
Detailed Description
The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings of the present embodiment, and it is obvious that the described embodiment is an embodiment of the present invention, not all embodiments. Based on this embodiment in the present invention, all other embodiments obtained by the ordinary skilled person in the art without creative work all belong to the protection scope of the present invention.
Referring to fig. 1 and 2, the present embodiment provides a condensation device for cooling circulating water.
The following describes the condensing device in detail with reference to the accompanying drawings, as shown in fig. 1, the condensing device includes a cooling container 1, in this embodiment, the cooling container 1 is cylindrical, and a certain amount of circulating water is installed inside the cooling container 1, the circulating water entering the cooling container 1 can be conveyed to the top of the cooling container 1 through a water inlet pipe 2, and the circulating water is dispersedly sprayed through a spray head 3 installed at the end of the water inlet pipe 2, so that the contact area between the circulating water and a heat exchange component 4 can be enlarged, and the temperature of the circulating water can be reduced by utilizing the sublimation of the circulating water.
As shown in fig. 1, a heat exchange assembly 4 for exchanging heat of circulating water is further installed inside the cooling container 1, the circulating water dispersedly flows to the bottom of the cooling container 1 through the heat exchange assembly 4, at this time, the inside of the heat exchange assembly 4 is filled with a cooling liquid which circularly flows, and the circulating water exchanges heat with the cooling liquid; the circulating water flows through the heat exchange assembly 4 to exchange the heat of the circulating water into the cooling liquid, the cooling liquid absorbs the heat of the circulating water, heats the circulating water and cools the circulating water, and the bottom of the cooling container 1 is also provided with a water outlet pipe 5 for discharging the cooled circulating water.
The working principle of the condensing device is as follows: firstly, circulating water cooled by a quartz bell jar is conveyed to the top of a cooling container 1 through a water inlet pipe 2; secondly, a spray head 3 arranged at the tail end of the water inlet pipe 2 carries out dispersed spraying on the circulating water; thirdly, dispersedly circulating water flows to the bottom of the cooling container 1 through the heat exchange assembly 4, and at the moment, the circulating water is fully contacted with the heat exchange assembly 4 and exchanges heat to cool the circulating water; finally, when the temperature of the circulating water is reduced to a target value, the cooled circulating water is conveyed to the quartz bell jar through a water outlet pipe 5 at the bottom of the cooling container 1.
As shown in fig. 2, the circumferential inner wall of the cooling container 1 is coiled with a heat exchange assembly 4, and the heat exchange assembly 4 comprises a plurality of transverse heat exchange tubes 41 arranged transversely and longitudinal heat exchange tubes 42 arranged longitudinally; as shown in fig. 1, the transverse heat exchange tubes 41 and the longitudinal heat exchange tubes 42 are horizontally laid and uniformly spaced in the vertical direction; so set up and to install as many heat-exchanging pipes as possible in limited cooling container 1 inside, increase condensing equipment's heat exchange capacity and efficiency for the temperature of circulating water can be stabilized in the target value scope, reduces the temperature and fluctuates.
Further, as shown in fig. 1, in other embodiments, the heat exchange assembly 4 may also be a plurality of vertical heat exchange tubes 43 arranged vertically, and the vertical heat exchange tubes 43 are arranged at equal intervals along the longitudinal direction.
Furthermore, the heat exchange assembly 4 can further comprise a transverse heat exchange tube 41, a longitudinal heat exchange tube 42 and a vertical heat exchange tube 43, all of the three heat exchange tubes play a role, are comprehensively used, fully utilize the space and increase the heat exchange capacity and efficiency of the condensing device.
As shown in fig. 1 and 2, the transverse heat exchange tubes 41, the longitudinal heat exchange tubes 42 and the vertical heat exchange tubes 43 are internally and circularly filled with cooling liquid with the temperature of 15-20 degrees, in the embodiment, the temperature of the cooling liquid is 18 degrees, and the cooling liquid is driven by a cooling liquid water pump; the transverse heat exchange tubes 41, the longitudinal heat exchange tubes 42 and the vertical heat exchange tubes 43 are respectively bent along the same plane in a reciprocating manner and are U-shaped, cooling liquid enters from one end of each heat exchange tube, the other end of each heat exchange tube flows out, and the cooling liquid can fully exchange heat with circulating water.
Further, when the temperature of the circulating water needs to be further reduced, the temperature of the outlet water of the circulating water after being cooled in the cooling container 1 can be adjusted by adopting a method of increasing the flow of the cooling liquid, so that the temperature is ensured to be stabilized at a target value; specifically, the power of the coolant water pump can be increased, and the number of heat exchange tubes involved in heat exchange can be increased.
Furthermore, the ends of the transverse heat exchange tube 41, the longitudinal heat exchange tube 42 and the vertical heat exchange tube 43 are provided with separate liquid inlet control valves; the control valve can be automatically controlled electrically or manually controlled, and when the number of the existing heat exchange tubes participating in heat exchange is not enough, the control valve is automatically or manually opened, so that the number of the heat exchange tubes participating in heat exchange is increased, and the heat exchange capacity of the condensing device is increased; meanwhile, in order to improve the heat exchange efficiency, the transverse heat exchange tubes 41, the longitudinal heat exchange tubes 42 and the vertical heat exchange tubes 43 may be made of metal material members with good thermal conductivity, in this embodiment, the transverse heat exchange tubes 41, the longitudinal heat exchange tubes 42 and the vertical heat exchange tubes 43 are made of copper material members; in other embodiments, the transverse heat exchange tubes 41, the longitudinal heat exchange tubes 42, and the vertical heat exchange tubes 43 may also be members of an iron material.
In order to further improve the heat exchange efficiency, the circulating water inside the water inlet pipe 2 is driven by a water inlet pump, the circulating water inside the water outlet pipe 5 is driven by a water outlet pump, and when the surface temperature of the quartz bell jar is too high, the power of the water inlet pump and the power of the water outlet pump can be increased so as to improve the flow of the circulating water.
As shown in fig. 1, a filter 6 for filtering the circulating water inside the cooling container 1 is arranged at the end of the water outlet pipe 5; the filter 6 is arranged to filter impurities in the circulating water, so that the inside of the water inlet pipe 2 and the inside of the water outlet pipe 5 are ensured to be clean, the service life of the pipeline is prolonged, and the heat exchange effect is ensured to be optimal; the filters 6 with different precisions can be selected according to different circulating water.
Furthermore, in order to ensure the control of the temperature of the circulating water, a temperature sensor can be arranged at the end part of the water outlet pipe 5, the temperature sensor is used for detecting the temperature of the circulating water flowing into the water outlet pipe 5, and meanwhile, the temperature sensor can also be connected with a monitoring system and feeds the detected temperature back to a controller of the condensing device, so that a control valve can be automatically opened, and the control of the cooling effect of the circulating water is realized by controlling the introduction amount of the cooling liquid; the heat exchange efficiency of the condensing device can be increased by increasing the inflow of the cooling liquid in a mode of controlling the power of the cooling liquid water pump.
Furthermore, a liquid level meter sensor for detecting the level of the circulating water is also arranged in the cooling container 1, and the liquid level meter sensor can upload the level of the circulating water in the cooling container 1 to the controller, so that the controller can coordinate the operation of the condensing device; also 1 side of cooling container is provided with the observation window, and is provided with the liquid level scale mark on the observation window, helps staff direct observation and knows the surplus of 1 internal circulating water of cooling container, verifies the detection numerical value of level gauge sensor, and the convenience is to condensing equipment's understanding and control.
The above embodiments are preferred embodiments of the present invention, but the embodiments of the present invention are not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be equivalent replacement modes, and all are included in the scope of the present invention.
Claims (10)
1. The utility model provides a condensing equipment of refrigeration cycle water which characterized in that: the device comprises a cooling container (1), circulating water is arranged in the cooling container (1), the circulating water is conveyed to the top of the cooling container (1) through a water inlet pipe (2), a spray head (3) for dispersing and spraying the circulating water is arranged at the tail end of the water inlet pipe (2), and the circulating water is dispersed and flows to the bottom of the cooling container (1); the cooling device is characterized in that a heat exchange assembly (4) used for exchanging the heat of circulating water is further arranged in the cooling container (1), cooling liquid flowing in a circulating mode is filled in the heat exchange assembly (4), the circulating water flows through the heat exchange assembly (4) to exchange the heat of the circulating water into the cooling liquid, the cooling liquid absorbs the heat of the circulating water and cools the circulating water, and a water outlet pipe (5) used for discharging the cooled circulating water is further arranged at the bottom of the cooling container (1).
2. A condenser for cooling circulating water as claimed in claim 1, wherein: the heat exchange assembly (4) comprises a plurality of transverse heat exchange tubes (41) arranged transversely and longitudinal heat exchange tubes (42) arranged longitudinally; the transverse heat exchange tubes (41) and the longitudinal heat exchange tubes (42) are horizontally tiled and are uniformly arranged at intervals along the vertical direction.
3. A condenser for cooling circulating water according to claim 2, wherein: the heat exchange assembly (4) further comprises a plurality of vertical heat exchange tubes (43) which are vertically arranged, and the vertical heat exchange tubes (43) are uniformly arranged at intervals along the longitudinal direction.
4. A condenser unit for cooling circulating water according to claim 3, wherein: the transverse heat exchange tubes (41), the longitudinal heat exchange tubes (42) and the vertical heat exchange tubes (43) are respectively bent along the same plane in a reciprocating mode and are U-shaped.
5. A condenser unit for cooling circulating water according to claim 3, wherein: the transverse heat exchange tubes (41), the longitudinal heat exchange tubes (42) and the vertical heat exchange tubes (43) are internally and circularly filled with cooling liquid with the temperature of 15-20 ℃, and the cooling liquid is driven by a cooling liquid water pump.
6. A condenser unit for cooling circulating water according to claim 3, wherein: the ends of the transverse heat exchange tube (41), the longitudinal heat exchange tube (42) and the vertical heat exchange tube (43) are provided with independent liquid inlet control valves; the transverse heat exchange tubes (41), the longitudinal heat exchange tubes (42) and the vertical heat exchange tubes (43) are copper material members.
7. A condenser for cooling circulating water according to claim 1, wherein: the inside circulating water of inlet tube (2) is by the intake pump drive, outlet pipe (5) inside circulating water is by the delivery pump drive, cooling container (1) is cylindricly.
8. A condenser unit for cooling circulating water according to claim 7, wherein: the end part of the water outlet pipe (5) is provided with a filter (6) for filtering the circulating water in the cooling container (1).
9. A condenser unit for cooling circulating water according to claim 7, wherein: the end part of the water outlet pipe (5) is also provided with a temperature sensor for detecting the temperature of the circulating water flowing out.
10. A condenser for cooling circulating water as claimed in claim 1, wherein: the cooling container (1) is internally provided with a liquid level meter sensor for detecting the liquid level of circulating water, the side surface of the cooling container (1) is provided with an observation window, and the observation window is provided with liquid level scale marks.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221539492.8U CN217636852U (en) | 2022-06-20 | 2022-06-20 | Condensing equipment of refrigeration cycle water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221539492.8U CN217636852U (en) | 2022-06-20 | 2022-06-20 | Condensing equipment of refrigeration cycle water |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217636852U true CN217636852U (en) | 2022-10-21 |
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ID=83626539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221539492.8U Active CN217636852U (en) | 2022-06-20 | 2022-06-20 | Condensing equipment of refrigeration cycle water |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217636852U (en) |
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2022
- 2022-06-20 CN CN202221539492.8U patent/CN217636852U/en active Active
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Address after: 523000 second floor office building, No.5, Gongye North 1st Road, Hubei Industrial City, Songshan, Dongguan City, Guangdong Province Patentee after: Guangdong Tianyu Semiconductor Co.,Ltd. Address before: 523000 second floor office building, No.5, Gongye North 1st Road, Hubei Industrial City, Songshan, Dongguan City, Guangdong Province Patentee before: DONGGUAN TIANYU SEMICONDUCTOR TECHNOLOGY Co.,Ltd. |